JPH0231103B2 - - Google Patents

Info

Publication number
JPH0231103B2
JPH0231103B2 JP59181567A JP18156784A JPH0231103B2 JP H0231103 B2 JPH0231103 B2 JP H0231103B2 JP 59181567 A JP59181567 A JP 59181567A JP 18156784 A JP18156784 A JP 18156784A JP H0231103 B2 JPH0231103 B2 JP H0231103B2
Authority
JP
Japan
Prior art keywords
polyimide
aromatic
general formula
mol
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59181567A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157620A (ja
Inventor
Kohei Nakajima
Itsusho Nishio
Tosha Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP18156784A priority Critical patent/JPS6157620A/ja
Publication of JPS6157620A publication Critical patent/JPS6157620A/ja
Publication of JPH0231103B2 publication Critical patent/JPH0231103B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP18156784A 1984-08-30 1984-08-30 有機溶媒可溶性の感光性ポリイミド Granted JPS6157620A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18156784A JPS6157620A (ja) 1984-08-30 1984-08-30 有機溶媒可溶性の感光性ポリイミド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18156784A JPS6157620A (ja) 1984-08-30 1984-08-30 有機溶媒可溶性の感光性ポリイミド

Publications (2)

Publication Number Publication Date
JPS6157620A JPS6157620A (ja) 1986-03-24
JPH0231103B2 true JPH0231103B2 (enExample) 1990-07-11

Family

ID=16103057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18156784A Granted JPS6157620A (ja) 1984-08-30 1984-08-30 有機溶媒可溶性の感光性ポリイミド

Country Status (1)

Country Link
JP (1) JPS6157620A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0644154B2 (ja) * 1986-07-03 1994-06-08 宇部興産株式会社 有機溶媒可溶性のポジ型感光性ポリイミド組成物
US5851736A (en) * 1991-03-05 1998-12-22 Nitto Denko Corporation Heat-resistant photoresist composition, photosensitive substrate, and process for forming heat-resistant positive or negative pattern
JP3709997B2 (ja) * 1994-03-29 2005-10-26 日東電工株式会社 耐熱性ネガ型フォトレジスト組成物および感光性基材、ならびにネガ型パターン形成方法
JP3942063B2 (ja) 1999-06-28 2007-07-11 株式会社カネカ 新規ポリイミド組成物およびこれに使用される新規酸二無水物
EP1070590A3 (en) * 1999-07-23 2001-06-13 Konica Corporation Ink jet head and production method of the same
JP4529252B2 (ja) 1999-09-28 2010-08-25 日立化成デュポンマイクロシステムズ株式会社 ポジ型感光性樹脂組成物、パターンの製造法及び電子部品
KR100774672B1 (ko) 2004-05-07 2007-11-08 히다치 가세이듀퐁 마이쿠로시스데무즈 가부시키가이샤 포지티브형 감광성 수지 조성물, 패턴의 제조방법 및전자부품
US7638254B2 (en) 2004-05-07 2009-12-29 Hitachi Chemical Dupont Microsystems Ltd Positive photosensitive resin composition, method for forming pattern, and electronic part
TWI407255B (zh) 2005-09-22 2013-09-01 Hitachi Chem Dupont Microsys 負片型感光性樹脂組成物、圖案形成方法以及電子零件
EP2133743B1 (en) 2007-03-12 2018-01-24 Hitachi Chemical DuPont Microsystems, Ltd. Photosensitive resin composition, process for producing patterned hardened film with use thereof and electronic part
JP5176872B2 (ja) 2007-10-29 2013-04-03 日立化成デュポンマイクロシステムズ株式会社 ポジ型感光性樹脂組成物、パタ−ンの製造方法及び電子部品

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57131227A (en) * 1981-02-09 1982-08-14 Nippon Telegr & Teleph Corp <Ntt> Photopolymer and its production

Also Published As

Publication number Publication date
JPS6157620A (ja) 1986-03-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term