JPH0230798B2 - - Google Patents
Info
- Publication number
- JPH0230798B2 JPH0230798B2 JP62161213A JP16121387A JPH0230798B2 JP H0230798 B2 JPH0230798 B2 JP H0230798B2 JP 62161213 A JP62161213 A JP 62161213A JP 16121387 A JP16121387 A JP 16121387A JP H0230798 B2 JPH0230798 B2 JP H0230798B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- sample
- processing
- speed camera
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005286 illumination Methods 0.000 claims description 15
- 238000005224 laser annealing Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 229910052736 halogen Inorganic materials 0.000 description 5
- 150000002367 halogens Chemical class 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229920000159 gelatin Polymers 0.000 description 2
- 239000008273 gelatin Substances 0.000 description 2
- 235000019322 gelatine Nutrition 0.000 description 2
- 235000011852 gelatine desserts Nutrition 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 238000005314 correlation function Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62161213A JPS647612A (en) | 1987-06-30 | 1987-06-30 | Laser annealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62161213A JPS647612A (en) | 1987-06-30 | 1987-06-30 | Laser annealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS647612A JPS647612A (en) | 1989-01-11 |
| JPH0230798B2 true JPH0230798B2 (forum.php) | 1990-07-09 |
Family
ID=15730760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62161213A Granted JPS647612A (en) | 1987-06-30 | 1987-06-30 | Laser annealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS647612A (forum.php) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5105903B2 (ja) * | 2007-02-28 | 2012-12-26 | 住友重機械工業株式会社 | レーザアニール装置及びアニール方法 |
| JP2012216733A (ja) * | 2011-04-01 | 2012-11-08 | Japan Steel Works Ltd:The | レーザ処理プロセスの温度測定装置および温度測定方法 |
| US11964431B2 (en) * | 2020-11-20 | 2024-04-23 | The Boeing Company | Laser-based manufacturing with optical correction |
-
1987
- 1987-06-30 JP JP62161213A patent/JPS647612A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS647612A (en) | 1989-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |