JPH02302396A - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH02302396A
JPH02302396A JP12377589A JP12377589A JPH02302396A JP H02302396 A JPH02302396 A JP H02302396A JP 12377589 A JP12377589 A JP 12377589A JP 12377589 A JP12377589 A JP 12377589A JP H02302396 A JPH02302396 A JP H02302396A
Authority
JP
Japan
Prior art keywords
substrate
plasma
gas
diamond
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12377589A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525837B2 (enrdf_load_stackoverflow
Inventor
Junichi Suzuki
準一 鈴木
Hiroshi Kawarada
洋 川原田
Akio Hiraki
昭夫 平木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP12377589A priority Critical patent/JPH02302396A/ja
Publication of JPH02302396A publication Critical patent/JPH02302396A/ja
Publication of JPH0525837B2 publication Critical patent/JPH0525837B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP12377589A 1989-05-16 1989-05-16 プラズマ処理装置 Granted JPH02302396A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12377589A JPH02302396A (ja) 1989-05-16 1989-05-16 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12377589A JPH02302396A (ja) 1989-05-16 1989-05-16 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH02302396A true JPH02302396A (ja) 1990-12-14
JPH0525837B2 JPH0525837B2 (enrdf_load_stackoverflow) 1993-04-14

Family

ID=14868976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12377589A Granted JPH02302396A (ja) 1989-05-16 1989-05-16 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH02302396A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0525837B2 (enrdf_load_stackoverflow) 1993-04-14

Similar Documents

Publication Publication Date Title
JPH0672306B2 (ja) プラズマ処理装置およびプラズマ処理方法
JPH01191780A (ja) 薄膜形成装置
JPS5963732A (ja) 薄膜形成装置
JP2965935B2 (ja) プラズマｃｖｄ方法
JP2564895B2 (ja) プラズマ処理装置
JPS61213377A (ja) プラズマデポジシヨン法及びその装置
JPH0420984B2 (enrdf_load_stackoverflow)
JPH02302396A (ja) プラズマ処理装置
JP2808922B2 (ja) ダイヤモンド状カーボン膜形成方法
JP2743514B2 (ja) 多結晶ダイヤモンド薄膜の製造方法
JPS63145782A (ja) 薄膜形成方法
JPH0686663B2 (ja) マイクロ波プラズマによる膜形成装置
JP2000164563A (ja) プラズマ処理装置
JPH03215392A (ja) 単結晶ダイヤモンドの製造方法
JP2595640B2 (ja) プラズマ処理装置
JP2892347B2 (ja) 薄膜形成方法
JPH02225671A (ja) 硬質カーボン膜製造方法
JP2715277B2 (ja) 薄膜形成装置
JPH02133573A (ja) 硬質カーボン膜生成装置
JP2001354491A (ja) ダイヤモンド成長方法及びダイヤモンド成長装置
JPH08264519A (ja) プラズマ発生装置及びプラズマ処理装置
JPH03278428A (ja) プラズマ処理装置
JP2650326B2 (ja) プラズマ処理装置
JPH0543792B2 (enrdf_load_stackoverflow)
JPH01298096A (ja) ダイヤモンド状炭素膜の製造方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees