JPH0229195B2 - - Google Patents

Info

Publication number
JPH0229195B2
JPH0229195B2 JP58126916A JP12691683A JPH0229195B2 JP H0229195 B2 JPH0229195 B2 JP H0229195B2 JP 58126916 A JP58126916 A JP 58126916A JP 12691683 A JP12691683 A JP 12691683A JP H0229195 B2 JPH0229195 B2 JP H0229195B2
Authority
JP
Japan
Prior art keywords
guide
moving
movable table
fluid supply
moving table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58126916A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6020513A (ja
Inventor
Junji Isohata
Mikio Nakasugi
Takao Yokomatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58126916A priority Critical patent/JPS6020513A/ja
Publication of JPS6020513A publication Critical patent/JPS6020513A/ja
Publication of JPH0229195B2 publication Critical patent/JPH0229195B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP58126916A 1983-07-14 1983-07-14 移動テーブルの姿勢制御方法 Granted JPS6020513A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58126916A JPS6020513A (ja) 1983-07-14 1983-07-14 移動テーブルの姿勢制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58126916A JPS6020513A (ja) 1983-07-14 1983-07-14 移動テーブルの姿勢制御方法

Publications (2)

Publication Number Publication Date
JPS6020513A JPS6020513A (ja) 1985-02-01
JPH0229195B2 true JPH0229195B2 (show.php) 1990-06-28

Family

ID=14947064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58126916A Granted JPS6020513A (ja) 1983-07-14 1983-07-14 移動テーブルの姿勢制御方法

Country Status (1)

Country Link
JP (1) JPS6020513A (show.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320848A (ja) * 1986-07-15 1988-01-28 Canon Inc 位置決め装置
JP2631396B2 (ja) * 1988-10-28 1997-07-16 キヤノン株式会社 静圧気体軸受ｘｙステージ
JP3809268B2 (ja) 1997-12-19 2006-08-16 キヤノン株式会社 デバイス製造方法

Also Published As

Publication number Publication date
JPS6020513A (ja) 1985-02-01

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