JPH0228351Y2 - - Google Patents

Info

Publication number
JPH0228351Y2
JPH0228351Y2 JP1985176035U JP17603585U JPH0228351Y2 JP H0228351 Y2 JPH0228351 Y2 JP H0228351Y2 JP 1985176035 U JP1985176035 U JP 1985176035U JP 17603585 U JP17603585 U JP 17603585U JP H0228351 Y2 JPH0228351 Y2 JP H0228351Y2
Authority
JP
Japan
Prior art keywords
air
turntable
shower
suction port
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985176035U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6283128U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985176035U priority Critical patent/JPH0228351Y2/ja
Publication of JPS6283128U publication Critical patent/JPS6283128U/ja
Application granted granted Critical
Publication of JPH0228351Y2 publication Critical patent/JPH0228351Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1985176035U 1985-11-15 1985-11-15 Expired JPH0228351Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985176035U JPH0228351Y2 (enrdf_load_stackoverflow) 1985-11-15 1985-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985176035U JPH0228351Y2 (enrdf_load_stackoverflow) 1985-11-15 1985-11-15

Publications (2)

Publication Number Publication Date
JPS6283128U JPS6283128U (enrdf_load_stackoverflow) 1987-05-27
JPH0228351Y2 true JPH0228351Y2 (enrdf_load_stackoverflow) 1990-07-30

Family

ID=31115905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985176035U Expired JPH0228351Y2 (enrdf_load_stackoverflow) 1985-11-15 1985-11-15

Country Status (1)

Country Link
JP (1) JPH0228351Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5302567B2 (ja) * 2007-04-13 2013-10-02 株式会社半導体エネルギー研究所 エアシャワー装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187587U (enrdf_load_stackoverflow) * 1984-11-16 1986-06-07

Also Published As

Publication number Publication date
JPS6283128U (enrdf_load_stackoverflow) 1987-05-27

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