JPH0228351Y2 - - Google Patents

Description

[Detailed Description of the Invention] Technical Field of the Invention The present invention relates to a cleaning air injection device, that is, an air shower, installed at the entrance and exit of a clean room.

Prior Art Semiconductor products and the like are manufactured in a clean space, that is, a clean room.

Workers in the clean room perform necessary work while wearing clean wear.

When a worker enters the cleanroom, dust and dirt from the cleanware are removed by a jet of air inside the air shower to prevent dirt from being brought into the room.

With conventional air showers of this type, the airflow only flows from one direction, making it difficult to thoroughly clean the entire clothing. It is difficult to scrape off the dust completely.

Purpose of the invention Accordingly, the purpose of the present invention is to make it possible to uniformly spray the jet air flow within the range of the height of the worker, and to completely remove the adhesion of dust and the like from the cleanware.

Summary of the Invention Therefore, in the present invention, a turntable is provided in a sealable shower chamber, a plurality of air nozzles are arranged around the turntable, and these air nozzles can be moved in the vertical direction. Therefore, as the worker rotates on the turntable, the air nozzle moves up and down, so that the entire area of the worker's body is exposed to a uniform jet of air.

Therefore, dirt and the like in the clean room are completely removed by the jetted air flow and discharged to the outside.

Configuration of the invention The figure shows a rotary air shower 1 of the invention. This rotary air shower 1 includes a turntable 3 and a plurality of air nozzles 4 inside a shower chamber 2 that can be sealed.

The turntable 3 is provided horizontally at the bottom of the shower chamber 2, and is rotatably supported by a bearing 6 at a vertical rotating shaft 5 with respect to a machine base 7. In this embodiment, the rotating shaft 5 is a hollow body, and the hollow portion forms a suction port 8, which is connected to a blower 12 through a duct or the like. The rotary shaft 5 is engaged with a worm 11 of a motor 10 by a worm gear 9 at its lower end, and is driven by the motor 10.

On the other hand, the air nozzle 4 is fixed at a predetermined interval to a portion of a chain 14 that is wound around a pair of chain wheels 13 provided vertically at the outer periphery of the turntable 3. When the motor 15 with a speed reducer rotates, the chain 14 moves vertically and is supported so as to be freely raised and lowered. Here, chain wheel 13, chain 14
The motor 15 with a speed reducer constitutes means for moving the air nozzle 4 up and down. In addition, air nozzle 4
are each connected to a compressed air source 16 by a flexible tube or the like.

Effect of the invention The shower room 2 can be sealed with a door (not shown), and the worker enters the shower room 2 from that part and takes a shower while riding on the turntable 3. Room 2 is sealed. In this state, the motor 10 and the motor 15 with a reduction gear are operated by an operation switch (not shown).
At the same time as starting the blower 12,
It also opens the passage for the nozzle 4. As a result, the turntable 3 rotates, so that the worker simply stands on the turntable 3 and the turntable 3 rotates at an appropriate speed.

On the other hand, the motor 15 with a speed reducer rotates the chain wheel 13, thereby controlling the air nozzle 4.
from the upper position to the lower position. At this time, the air nozzle 4 takes in cleaning air from the compressed air source 16 and injects it toward the worker, thereby blowing away dirt and the like attached to the worker's clean wear. During this time, blower 1
2 sucks the air inside the shower chamber 2 through its suction port 8 and discharges it to the outside, so the dust and other particles blown away by the air nozzle 4 flow downward with the airflow and are absorbed by the suction port 8. It passes through the inside and is discharged to the outside.

In this way, the worker receives a uniform blast of air over his entire body as the turntable 3 rotates and the air nozzle 4 flows from top to bottom. . Therefore, dust and the like adhering to the cleanware are reliably removed by the airflow and discharged to the outside.

Note that the air nozzle 4 completes one operation when it moves from top to bottom. However, this operation can be repeated several times if necessary. Further, the air nozzles 4 may be provided at equal intervals in the chain 14, and may be moved sequentially from above to below by continuous rotation of the motor 15 with a reduction gear in a certain direction. Furthermore, if the air nozzle 4 is oriented slightly downward and in the tangential direction of the rotation circle, the air flow becomes a vortex flow and flows to the suction port 8, so that dust and the like are not scattered to the outside in the process.

Effects of the invention In this invention, the rotation of the turntable and the jets of air from multiple air nozzles apply the jet of air to the entire cleanware, ensuring that dust and the like are removed, and that workers can also take a shower. There is no need to go around the room yourself. In addition, a plurality of air nozzles are provided to move from the top to the bottom by means of vertical movement means, and the jetted air stream is sequentially applied to the cleanware from the top to the bottom, so that blown away dust etc. The dust is reliably sucked into the lower suction port and does not remain inside the shower chamber, making it possible to reliably dispose of dust and the like.

[Brief explanation of the drawing]

The figure is a vertical cross-sectional view of the rotary air shower of the present invention. 1...Rotary air shower, 2...Shower room,
3... Turntable, 4... Air nozzle, 5... Rotating shaft, 6... Bearing, 7... Machine stand, 8... Suction port, 9...
Worm gear, 10...motor, 11...worm,
12... Blower, 13... Chain wheel, 14... Chain, 15... Motor with reduction gear, 16... Compressed air source.

Claims (1)

[Scope of utility model registration request] A turntable is provided at the bottom of the sealable shower chamber, a suction port is formed in the turntable, the suction port is connected to a suction air source, and an air nozzle is arranged outside the turntable in the shower chamber. A rotary air shower characterized in that the air nozzle is connected to a compressed air source, and a plurality of the air nozzles are provided so as to be movable up and down by a vertical movement means.