JPH0614837U - Air shower - Google Patents

Abstract

(57) [Summary] [Purpose] To provide an air shower capable of efficiently removing dust by evenly spraying an air stream onto the body, clothes, etc. of an operator. An air shower having a turntable disposed on a floor and a plurality of air outlets disposed on an upper portion and a side portion, wherein an air flow is blown out from the plurality of air outlets, and An air shower that allows the turntable to rotate.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an air shower, and more particularly to an air shower capable of efficiently removing dust by uniformly blowing an air stream on clothes of workers.

[0002]

[Prior art]

 Dust in a clean room has a great influence on the quality and yield of manufactured semiconductor devices. Particularly, in recent years, with the progress of integration and miniaturization of semiconductor devices, the size and number of particles allowed in a clean room tend to decrease more and more. Therefore, in order to prevent dust from adhering to clothes from being brought into the clean room, when entering the clean room, the worker brushes off the dust adhering to the clothes, etc. Therefore, dust is removed by blowing an air flow on clothes and the like.

[0003]

[Problems to be solved by the device]

 However, in the above-mentioned conventional air shower, since the air flow spraying point is fixed, there is a problem that the air flow is not evenly hit and dust is not sufficiently removed. In addition, it was difficult for the worker to rotate the body so that the airflow would hit the whole body evenly.

Therefore, an object of the present invention is to provide an air shower capable of efficiently removing dust by uniformly spraying an air stream onto the body, clothes, etc. of an operator.

[0005]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the present invention is an air shower having a turntable disposed on a floor and a plurality of air outlets disposed on an upper portion and a side surface, the plurality of air outlets being provided. The present invention provides an air shower in which an air flow is blown from the rotary table and the rotary table is rotated.

Hereinafter, the air shower of the present invention will be described in detail based on the embodiment shown in FIG. In the explanation below, in Fig. 1, the entrance door is provided on the front side of the paper, and the entrance door to the clean room etc. is provided on the back side of the paper. When entering the clean room, etc. The present invention will be described with reference to an example in which the entrance door on the front side of the paper surface enters the air shower, dust and the like are blown off by the air shower, and then the entrance door on the back surface of the paper surface enters the clean room.

The air shower shown in FIG. 1 includes a turntable 1 installed on the floor and an air outlet 2 installed on the upper part.₁And 2₂, And the air outlets 2 arranged on the sides₃Two_FourTwo _Five Two₆Two₇And 2₈And have.

In this air shower, the rotary base 1 is rotationally driven by the drive unit 4 via the rotary shaft 3. This turntable is normally rotated at an integer speed of 2 to 4 times at a rotation speed of 0.2 to 0.4 times / sec.

Further, the rotary table may be formed such that its upper surface 5 is flush with the floor surface 6, or may be formed so as to have a constant height above the floor surface 6. If the upper surface is formed so as to be at the same height as the floor surface 6, there will be no step difference that will obstruct walking when passing, and it will be effective for the safety of the passage during evacuation.

In addition, in the air shower of the present invention, a plurality of air outlets 2 ₁ , 2 ₂ , 2 ₃ , 2 ₄ , 2 ₅ , 2 ₆ , 2 ₇ and 2 ₈ are provided on the upper and side portions. Has been done. Among these plural air outlets 2 ₁ , 2 ₂ , 2 ₃ , 2 ₄ , 2 ₅ , 2 ₆ , 2 ₇ and 2 ₈ , each of the air outlets 2 ₁ and 2 ₂ has a pedestal 7 It is located inside the upper part of the. Each of the air outlets 2 ₁ and 2 ₂ is in communication with a filter 8 mounted on the upper part of the pedestal 7, and is shaped so that purified air is blown out through the filter 8. ing. In addition, each of the air outlets 2 ₃ , 2 ₄ , 2 ₅ , 2 ₆ , 2 ₇ and 2 ₈ is arranged on the inner side surface of the gantry 7. Each of the air outlets 2 ₃ , 2 ₄ and 2 ₅ is connected to a filter 9 attached to the side of the pedestal 7 and shaped so that purified air is blown out through the filter 9. Has been done. Further, each of the air outlets 2 ₆ , 2 ₇ and 2 ₈ is communicated with a filter 10 attached to a side portion of the gantry 7 so that purified air is blown out through the filter 10. It is shaped.

In the air shower of the present invention, the installation location, installation interval, and installation number of the air outlets are not limited to those shown in FIG. 1, but the size of the space volume in the air shower, the required cleanliness, It is appropriately selected according to the number of people used at one time. In addition, the shape of the air outlet is preferably a nozzle shape in which the air outlet direction can be changed separately and independently.

The air blowing time from this air outlet is usually about 10 to 30 seconds. The amount of air blown out, the speed of air blown out, etc. are appropriately selected according to the size of the space volume in the air shower chamber, the required cleanliness and the like. Normally, blowing amount in the range of 4~10m ³ / m in, preferably 7m ³ / min approximately, blowing speed of 20 m / s or more, preferably from 20 to 30 m / s.

Air outlets 2 arranged on the top of the gantry 7.₁And 2₂From the blower fan 11 ₁ And 11₂The air that has been pressure-fed through the air flow passage 12 is blown out into the air shower chamber 13 after dust and the like are removed by the filter 8. Furthermore, the air outlet 2 arranged inside the pedestal 7₃Two_FourTwo_FiveTwo₆Two₇And 2₈From the blower fan 11₁And 11₂The air that has been pumped through the air flow passage 12 by the filter 9 or 10 has dust and the like removed, and then is blown into the air shower chamber 13.

The air blown out from these air outlets 2 ₁ , 2 ₂ , 2 ₃ , 2 ₄ , 2 ₅ , 2 ₆ , 2 ₇ and 2 ₈ is the same as the air of the worker who is on the turntable 1. The dust that is attached to your body and clothes is blown off. The air containing dust blown off is circulated from the air circulation port 14 to the air flow passage 12 by the blower fan 11 ₁ or 11 ₂ .

In the air shower of the present invention, a sensor is provided on the turntable or the entrance door of the air shower room, and when an operator rides on the turntable, the turntable rotates and air is blown out from the air outlet. By starting the procedure, the operator does not have to manually press the switch, and the washed hands and gloves do not get dirty, which is effective in maintaining cleanliness.

In the air shower of the present invention, when a worker enters the air shower through the entrance door provided on the front side of the paper in FIG. 1 and the operator rides on the rotary table 1, the rotary table 1 drives the drive unit 4 Is rotated by. At this time, the worker is rotated together with the turntable 1 and the air outlet 2₁~ 2₈From this, the air is blown onto the worker's clothes and the like, and the dust and the like adhering to the worker's clothes are blown off. The air containing dust and the like blown off is blown by the blower fan 11₁And 11₂Is circulated through the air circulation port 14 through the air circulation passage 12 to the filter 8, 9 or 10 and is cleaned by these filters 8, 9 or 10₁Two₂Two₃Two_FourTwo _Five Two₆Two₇And 2₈Blown out from. After rotating a predetermined number of times, the turntable 1 is stopped, and an operator can enter a clean room or the like connected to the air shower through an exit door provided on the back side of the paper.

[0017]

[Effect of device]

 INDUSTRIAL APPLICABILITY The air shower of the present invention can efficiently remove dust by uniformly blowing an air flow on the clothes of workers when entering a clean room. Therefore, it is effective in cleaning the atmosphere in the clean room, and is also effective in improving product quality and yield.

[Brief description of drawings]

FIG. 1 is a diagram illustrating an embodiment of an air shower of the present invention.

[Explanation of symbols]

1 rotary base 2 ₁ , 2 ₂ , 2 ₃ , 2 ₄ , 2 ₅ , 2 ₆ , 2 ₇ , 2 ₈ air outlet 3 rotary shaft 4 drive unit 5 upper surface 6 floor 7 frame 8 filter 9 filter 10 filter 11 _{1 1} , 11 ₂ Blower fan 12 Air flow passage 13 Air shower room 14 Air circulation port

Claims (1)

[Scope of utility model registration request] 1. An air shower having a turntable arranged on a floor and a plurality of air outlets arranged on an upper portion and a side portion, the air shower blowing out an air flow from the plurality of air outlets. An air shower in which the turntable is rotated.