JPH10180208A - Air shower device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To effectively remove dust stuck onto workers and static electricity with which workers are charged by providing a jet stream blowing port for clean air on both the inner sidewalls of an air shower chamber and also providing a turntable and a static electricity removing device on the floor surface of the air shower chamber and on the ceiling thereof respectively. SOLUTION: Doorways 2A, 2B of an air shower chamber 2 each are provided with doors and both inner sidewalls 3 are provided with plural jet streams blowing ports 4, and also an adhesive sheet 6 is laid on a floor 5. Also plural turntables 8 are installed on the floor 5, and plural static electricity removing devices 9 are fitted to the ceiling. Furthermore, dust counters 10 are installed in the four corners of the inner sidewalls 3 up and down, right and left. In order to indicate the number of pieces of dust measured by the dust counters 10, a dust level indicator 11 as well as a switch 7 is fitted on the inner sidewall 3 of the doorway 2A. As the static electricity removing device 9, that which is energized to generate plasma ions to remove static electricity of workers negatively charged is used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air shower device for a clean room installed in a research and development department of a semiconductor integrated circuit device or the like, a manufacturing factory, etc., and more particularly to an air shower device having an improved dust removing capability.

[0002]

2. Description of the Related Art First, a conventional air shower apparatus will be described with reference to the drawings. FIG. 3 is a side view of a conventional air shower device, and FIG. 4 is a front view of the air shower device of FIG. 3 as viewed from a clean room side.

In FIGS. 3 and 4, reference numeral 1 indicates a conventional air shower device. The air shower device 1 is installed in a passage communicating with the inside and outside of a clean room.
B has an entrance door (not shown), both inner side walls 3 are provided with a plurality of jet air outlets 4, and a floor 5 is covered with an adhesive sheet 16. In addition, the air shower device 1 is provided with an exhaust port (not shown).

[0004] An operator who enters a clean room enters the air shower apparatus 1 while wearing a predetermined clean suit and wearing predetermined clean shoes before entering the clean room. Enter the air shower device 1,
When the entrance door is closed, jet air is blown out of the jet airflow outlet 4 all at once, and the dust adhering to the clean suit and the human body is blown off and removed by the jet airflow. Dust adhered to the back of the clean shoes worn by the worker adheres to the adhesive sheet 6 side by walking on the adhesive sheet 6 and is removed.

[0005]

However, in such an air shower device 1, since the dust adhering to the human body or the clean suit cannot be completely removed unless the jet air hits the worker uniformly, the air shower Floor 5 of device 1
An air shower device has been proposed in which a plurality of turntables are installed, and an operator riding on them is rotated to blow jet air to a human body and a clean suit, thereby removing dust adhering to them. (Japanese Unexamined Patent Publication No.
35269 and JP-A-61-220778).

However, the clean suit and clean shoes worn by the worker's body and body are easily charged with static electricity.
Dust attached by the static electricity is difficult to remove easily and completely. Nevertheless, in the air shower device of the prior art, the door on the entrance / exit 2A side (clean room side) is opened by switching the open / close switch 7, and the worker enters the clean room with the dust attached and also charged with static electricity. You can enter the room. Touching the semiconductor wafer itself, the storage box for the semiconductor wafer, or the board of the manufacturing equipment, etc. while charged with static electricity may cause dust to adhere to them, causing damage to the semiconductor wafer or work. When the operator operates the manufacturing equipment, static electricity causes
It damages C and causes malfunction.

SUMMARY OF THE INVENTION The present invention is intended to solve these problems, and an air shower device which removes static electricity charged to an operator and allows the operator to enter a clean room only after dust has been completely removed is obtained. The purpose is to do so.

[0008]

Therefore, in the air shower apparatus of the present invention, the jet air outlets of the clean air are rotated on both inner side walls of the air shower chamber, and a person is put on the floor of the air shower chamber and rotated. The problem is solved by providing a turntable, a static electricity removing device on the ceiling of the air shower room, and a dust counter in the air shower room.

Therefore, according to the air shower device of the present invention, the dust adhering to the back surface of the clean shoes worn by the person entering the air shower room can be removed by the adhesive sheet, and the user is rotated. Then, take an air shower while removing static electricity generated in the human body, clean suit, clean shoes, etc. of the occupant, and start the occupant in the clean room only when the number of dust drops below the specified number with the dust counter. Since the room is allowed to enter, the inside of the clean room can be maintained at a specified dust level, and the product and the like are not damaged by static electricity.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an air shower device according to the present invention will be described with reference to FIGS. FIG. 1 is a side view of the air shower device of the present invention, and FIG. 2 is a front view of the air shower device shown in FIG. 1 as viewed from a clean room side. The same components as those of the air shower device 1 of the related art will be described with the same reference numerals.

In FIGS. 1 and 2, reference numeral 1A indicates an air shower device of the present invention. This air shower device 1A
In the same manner as the air shower device 11 of the prior art, entrance and exit doors (not shown) are provided at entrances 2A and 2B at both ends of the air shower chamber 2, and a plurality of jet air outlets 4 Is provided, and an adhesive sheet 6 is laid on the floor 5. In addition, the air shower device 1
1 is provided with an exhaust port (not shown). An opening / closing switch 7 for opening and closing the entrance door is attached to the entrance 2A on the clean room side.

In the air shower device 1A of the present invention, a plurality of turntables 8 are installed on the floor 5 at stride intervals in the longitudinal direction, and a plurality of static electricity removing devices 9 are mounted on the ceiling. A dust counter 10 is installed on the inner side wall 3 at the four corners of the air shower room 2 at the top, bottom, left and right. In order to display the number of dusts measured by the dust counter 10, a dust level indicator 11 is attached to the inner wall 3 of the entrance 2A on the clean room side in addition to the open / close switch 7.

The turntable 8 is rotated by being driven by a motor M embedded in the floor 5 or installed below the floor 5. The surface of the turntable 8 is on the same plane as the floor 5 or at a slightly protruding level, and the adhesive sheet 6 is also spread on those surfaces. The plurality of dust counters 10 are connected to a dust level indicator 11 by a cable C. As the static eliminator 9, for example, an air gun / top gun II (Simco static eliminator) for static elimination / dust removal manufactured by Simco Japan Co., Ltd. can be used. When the static electricity removing device 9 is energized, positive ions are generated, and the static electricity of the negatively charged worker is removed.

Next, the operation of the air shower device 1A having the above-described configuration will be described. A worker who tries to enter the clean room from the general room, for example, wears a clean suit and wears clean shoes, first enters the air shower device 1A from the entrance 2B. When the entrance door is closed, for example, the static electricity removing device 9 is also automatically started, and the minus static electricity charged to the worker by the positive ions generated from the static electricity removing device 9 is removed. Simultaneously with entering the room, a jet stream of clean air blows out from the jet stream outlet 4, and the turntable 8 also starts rotating. The operator on the turntable 8, from which the charged static electricity has been removed, takes a jet stream from front, rear, left and right while being rotated. Since the static electricity has been removed, dust adhering to the worker is easily blown off and discharged from the air shower chamber 2 to the outside through the exhaust port. The dust adhering to the clean shoes is removed by walking on the adhesive sheet 6 spread on the floor 5 and the turntable 8. In this way, the dust adhering to the worker and charged is completely removed.

The dust in the air shower room 2 is detected by the dust counter 10 and the value is displayed on a dust level indicator 11. The operator switches the open / close switch 7 after confirming that the dust level displayed on the dust level indicator 11 is a predetermined value. By this switching, the entrance door opens, and it is possible to enter the clean room for the first time.

[0016]

As described above, according to the air shower apparatus of the present invention, a worker who tries to enter a clean room from a general room removes dust by passing through the air shower apparatus, and also reduces static electricity. Thus, it is possible to prevent damage to products and manufacturing equipment due to static electricity, which has conventionally occurred when working in a clean room, and to prevent product defects due to dust.

[Brief description of the drawings]

FIG. 1 is a side view of an air shower device of the present invention.

FIG. 2 is a front view of the air shower device shown in FIG. 1 as viewed from a clean room side.

FIG. 3 is a side view of a conventional air shower device.

FIG. 4 is a front view of the air shower device shown in FIG. 3 as viewed from a clean room side.

[Explanation of symbols]

1A: Air shower device of the present invention, 2: Air shower chamber, 2A, 2B: Doorway, 3 ... Inner side wall, 4 ... Jet airflow outlet, 5 ... Floor, 6 ... Adhesive sheet, 7 ... Open / close switch, 8 ... Turntable, 9: Static electricity removal device, 10: Dust counter, 11: Dust level display

Claims (1)

[Claims] 1. A jet air outlet for clean air on both inner side walls of an air shower room, a turntable for rotating a person on a floor of the air shower room, a static eliminator on a ceiling, and an air shower room. An air shower device, further comprising a dust counter.