JP4531246B2 - Air shower equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an air shower apparatus that is disposed at an entrance of a clean room or the like and removes foreign matter adhering to a human body, dust-proof clothing, or the like.
[0002]
[Prior art]
For example, in the fields of semiconductor manufacturing and biotechnology that produce integrated circuits and the like, clean rooms are used to maintain a clean atmosphere and sterility. Also, in a clean room, not only keeps the interior normal, but also installs an air shower device at the entrance of the clean room. By removing it, it prevents foreign objects from entering the clean room.
[0003]
In general, an air shower device removes foreign matter by discharging clean air filtered by a filter from a nozzle and blowing away foreign matter adhering to a human body or dust-proof clothing.
[0004]
On the other hand, when a clean room is renovated, dust may be generated in a clean space due to the work. In such a case, the work place is enclosed by a temporary partition or the like so that dust generated at the work place is not leaked into the clean room. When workers leave the partition, dust must not be brought into the clean room. In other words, when a clean room is interposed on the way to or from the work place, it is necessary to install an air shower so as not to bring dust from the work place into the clean room.
In addition, from the viewpoint of efficiency of construction work and production process, it may be necessary to avoid the use of existing air showers by construction personnel and to temporarily install air showers along the construction flow line. The height of the clean room (from the floor surface such as the grating to the ceiling surface such as the filter frame) is generally about 3 to 3.5 m, but the installation height of the air shower is also limited thereto. Furthermore, if the height of the corridor or the like for carrying in is low, the carrying in will not be continued, and the air shower carrying method and route must be devised. In addition, work such as renovation work may be carried out continuously in a limited space unit divided into work zones, and mobility of air shower relocation is also required.
[0005]
However, it was difficult to install a well-known air shower device in the entrance / exit passage of construction personnel involved in clean room renovation work due to the installation height, loading space, and weight. For this reason, it has been necessary to impose special rules on construction personnel entering and leaving the clean room, or to devise an entrance route to minimize the entry of foreign objects into the clean room. However, in addition to sacrificing the progress of the work, these measures also required caution not to reduce the production activity of the operating clean room.
[0006]
An object of the present invention is to provide an air shower device that can be easily installed in an access passage for construction personnel involved in renovation work and can be easily removed.
[0007]
[Means for Solving the Problems]
According to the present invention, an inlet and an outlet through which a human can pass are formed in a movable box, and an air supply chamber and an exhaust duct are formed inside the side of the box, and clean toward the inside of the box. A nozzle that discharges air is provided on the inner surface of the side of the box in communication with the air supply chamber, and includes a fan that blows air to the nozzle and a filter that filters the air blown to the nozzle by the fan The fan and / or the filter is disposed inside the blower unit that is detachably mounted on the box body, and an exhaust port for exhausting air from the inside of the box body communicates with the exhaust duct so that the side surface of the box body is disposed. There is provided an air shower device which is provided on the inner surface of the slab near the outlet and configured to return air from the exhaust port to the fan .
[0008]
For example, this air shower device is installed in an entrance / exit of a construction person or the like in a clean room where renovation work is performed. If a part of the work space faces an unclean space such as a corridor, the exit formed in the box is in contact with the clean room, and the entrance is placed outside the clean room (unclean space). Good. The doorway formed in the box may be configured to be openable / closable by, for example, a door, but may be configured to be openable / closable by simple means such as a vinyl curtain.
[0009]
When a person involved in the repair work or the like is going to enter the clean room, the person concerned in the work enters the box from the entrance of the air shower device installed in the access passage.
[0010]
On the other hand, in an air shower device, a fan is operated, and clean air filtered by a filter is blown to a nozzle. As a result, clean air discharged from the nozzle is blown against construction personnel and the like who have entered the box. In this way, the foreign matter adhering to the human body, the dust-proof clothing, etc. is blown away by the clean air current, and the foreign matter is removed.
[0011]
In addition, by providing an exhaust port for exhausting air from the inside of the box body, the air inside the box body may be returned from the exhaust port to the fan while discharging clean air from the nozzle as described above. Then, the air discharged from the nozzle blows away foreign matter adhering to the human body and dust proof clothing, and then returned to the fan from the exhaust port, filtered through a filter to become clean air, and discharged from the nozzle again. Will be.
[0012]
In the air shower apparatus according to the present invention, the air shower apparatus can be easily installed in the entrance / exit passage of construction personnel, etc. by moving the box, and the clean room renovation work has been completed. In this case, it is possible to remove the air shower device easily. In particular, if the entrance formed in the box as described above can be opened and closed with a simple structure such as a vinyl curtain, the entire air shower device can be reduced in weight, and installation and removal of the air shower device can be performed. It will be easy. If a vinyl curtain is attached to the entrance, it will be possible to prevent the vinyl curtain from turning up if a weight is attached to the lower part of the vinyl curtain.
[0013]
In this air shower device, wheels for enabling the box to move may be mounted. In this case, it is not necessary to use a carry-in tool such as a cart or a jack roller, the air shower device can be easily moved, and installation and removal can be performed smoothly. In this case, it is preferable to use a non-directional caster as a wheel so that the box can be moved in any direction. Moreover, you may provide further the stopper etc. which stop driving | running | working of a wheel. Then, the installed air shower device can be fixed by the stopper, and there is no fear of the air shower device moving carelessly.
[0014]
In this air shower device, the fan and / or the filter may be provided so as to be removable from the box. Then, for example, when moving an air shower device, the fan and filter can be removed from the box and divided so that the box and fan and filter can be moved separately. Get away.
[0015]
In this case, for example, another unit may be detachably provided on the top of the box, and a fan or a filter may be mounted on this unit. Then, the fan and the filter can be attached / detached by attaching / detaching the unit to / from the box.
[0016]
In the air shower device of the present invention, it is preferable to use a single-phase 100V power supply for the fan. Generally, three-phase 200V is used as the power supply for the fan. However, if the power supply is three-phase 200V, the installation location of the air shower device is limited. It is preferable to facilitate power supply at an unexpected work place when newly established.
[0017]
In the air shower device of the present invention, a high performance filter such as a HEPA filter or a ULPA filter is used as a filter for filtering the air discharged from the nozzle. In this case, the area of the filter should be as large as possible in order to reduce the static pressure. In addition, for example, an enlargement plate may be disposed immediately after the discharge side of the fan so that air can be blown over the entire surface of the filter as much as possible.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of an air shower device 1 according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a perspective view of the side surface 25 of the air shower apparatus main body 10. FIG. 4 is a perspective view showing the internal structure of the blower unit 11, and FIG. 5 is a plan view of the blower unit 11.
[0019]
This air shower apparatus 1 has a configuration in which a blower unit 11 is detachably mounted on an air shower apparatus main body 10 that forms a rectangular parallelepiped box. In FIG. 1, an inlet 15 is formed on the front surface of the air shower apparatus main body 10 so as to allow a human to pass through. The person can enter the air shower apparatus main body 10 through the inlet 15. Yes. Further, in FIG. 1, an outlet 16 is formed on the back surface of the air shower apparatus main body 10 so that a human can pass through. It is possible to go outside the shower apparatus body 10.
[0020]
A vinyl curtain 20 is attached to the entrance 15, and as shown by a one-dot chain line 20 ′ in FIG. 1, a person enters the air shower apparatus body 10 by turning the vinyl curtain 20 upward. Can do. A weight 21 is attached to the lower end of the vinyl curtain 20, and the weight 21 prevents the vinyl curtain 21 from being turned up. As will be described later, clean air (high-speed air flow) blown from the nozzle 36 is blown to construction personnel and the like. During this time, the air in the air shower main body 10 is prevented from leaking outside.
[0021]
A door 23 is attached to the outlet 16, and as shown by a one-dot chain line 23 ′ in FIG. 1, by opening the door 23, a person can go out of the air shower apparatus main body 10.
[0022]
Then, by closing the vinyl curtain 20 and the door 23, the inlet 15 and the outlet 16 are closed, and the interior of the air shower device main body 10 can be isolated from the outside.
[0023]
The side surfaces (both side surfaces orthogonal to the inlet 15 and the outlet 16) 25 and 25 of the air shower device main body 10 are configured to discharge clean air toward the inside of the air shower device main body 10. As shown in FIG. 2, a partition plate 26 is provided inside the side surface 25 (inside of the air shower device main body 10) so as to stand up and down (in the bottom inner side and the top surface of the air shower device main body 10). Thus, an air supply chamber 27 and an exhaust duct 28 are formed. Inside the side surface 25, an exhaust duct 28 is formed on the side close to the outlet 16 over the top and bottom of the side surface 25. As shown in FIG. 3, an air supply opening 30 (FIG. 3) for sending clean air into the air supply chamber 27 and an exhaust opening for exhausting air from the exhaust duct 28 are formed on the upper surface of the side surface 25. A part 31 is provided. The top of the air supply chamber 27 is closed with a metal plate except for the air supply opening 30.
[0024]
A plurality of nozzles 36 are provided on the inner surface 35 of the side surface 25 (the surface facing the inside of the air shower apparatus main body 10) 35. The clean air supplied to the air supply chamber 27 inside the side surface 25 through the air supply opening 30 formed on the upper surface of the side surface 25 is discharged from the nozzles 36 toward the inside of the air shower apparatus main body 10. It has become. The nozzles 36 are arranged uniformly over the entire inner surface 35 of the side surface 25, so that clean air can be discharged toward the entire interior of the air shower apparatus main body 10.
[0025]
An exhaust port 37 is provided on the lower side of the inner surface of the side surface 25 (near the inner surface foot of the side surface 25) on the side closer to the outlet 16. The exhaust port 37 communicates with the exhaust duct 28, and the air inside the air shower apparatus main body 10 passes through the exhaust duct 28 from the exhaust port 37 and exhausts from an exhaust opening 31 formed on the upper surface of the side surface 25. It has come to be. The air supply opening 30 and the exhaust opening 31 are in a symmetrical positional relationship.
[0026]
Non-directional casters 38 are attached to the lower four corners of the outer surface of the air shower apparatus main body 10. Thereby, the air shower apparatus main body 10 can be easily moved on a floor surface in arbitrary directions. Although not shown, the omnidirectional caster 38 includes a stopper that prohibits movement.
[0027]
As shown in FIG. 4, the blower unit 11 has a configuration in which a fan 41 and an enlargement plate 42 and a filter 43 are arranged in a downstream side of a rectangular parallelepiped casing 40 placed on the air shower apparatus main body 10. is there. Unit-side air supply openings 46 and 46 and unit-side exhaust openings 47 and 47 are provided at four corners of the bottom surface 45 of the casing 40. When the air blower unit 11 is placed on the air shower device main body 10, the unit-side air supply openings 46, 46 are respectively provided in the air supply opening 30 provided on the upper surface of the side surface 25 of the air shower device main body 10. The unit side exhaust openings 47 and 47 coincide with the exhaust opening 31 respectively.
[0028]
The fan 41 is an axial fan, the intake port 41a is directed to the unit side exhaust openings 47 and 47 (exhaust opening 31), and the discharge port 41b is directed to the unit side supply openings 46 and 46 (air supply opening 30). It is arranged in parallel with the side surface of the casing 40. The enlarged plate 42 is an iron plate having a large number of openings. The filter 43 is fixed so as to partition the inside of the casing 40 with a stopper, and a blocking plate or the like is provided so that airflow does not flow from the gap around the filter 43 . Thus, the fan 41 blows air from the unit side exhaust openings 47 and 47 in a direction toward the unit side air supply openings 46 and 46 through a wide filtration space with a low static pressure. As shown in FIG. 5, a shielding plate 50 is attached around the fan 41 so as to partition the intake port 41 a and the discharge port 41 b of the fan 41 in an atmospheric manner.
[0029]
As the filter 43, for example, a high performance filter such as a HEPA filter or a ULPA filter is used. The filter 43 is arranged so as to partition the inside of the blower unit 11 back and forth. The filter frame is in contact with the top surface and the bottom surface of the casing 40, and the casing 40 is cut off except for a space necessary for fixing with a fastener. Arranged to fill the area. All the air discharged from the discharge port 41b of the fan 41 passes through the filter 43 and is filtered, and then flows into the unit-side air supply openings 46, 46.
[0030]
The magnifying plate 42 is made of punching metal or the like, is spaced immediately after the discharge port 41b of the fan 41, and is arranged so that the center of the magnifying plate 42 coincides with the center line of the fan 41 (the center line of the discharge airflow). Has been. The air discharged from the discharge port 41b of the fan 41 collides with the expansion plate 42 and diffuses, so that the air is blown over the entire surface of the filter 43 as much as possible. The expansion plate 42 functions to suppress an increase in local static pressure due to a sudden expansion of the airflow.
[0031]
Now, the air shower device 1 according to the embodiment of the present invention configured as described above is installed in an entrance / exit passage for construction personnel or the like in, for example, a clean room for repair work. Thus, when installing the air shower apparatus 1, if the ventilation unit 11 is removed from the air shower apparatus main body 10, and both are divided | segmented, it will be easy to carry in to the spot etc. In this case, the air shower apparatus main body 10 can be easily moved on the floor surface in an arbitrary direction by using the non-directional caster 38, and the movement is easy. Moreover, by removing the air blower unit 11 and moving it, the air shower apparatus main body 10 can be carried in at a low height, and it is difficult to obstruct the movement. In addition, in order to make carrying in of the ventilation unit 11 easy, it is good to comprise the weight of the ventilation unit 11 in the weight which can carry a person.
[0032]
Thus, the air shower apparatus main body 10 and the air blowing unit 11 are divided and carried in, and the air shower apparatus 1 is installed on the entrance / exit passage of the clean room by mounting the air blowing unit 11 on the air shower apparatus main body 10 in the field. . When the air blower unit 11 is mounted on the air shower device main body 10 in this way, the air blower unit 11 is fixed on the air shower device main body 10 by refurbishing all-round packing and screwing a flange portion (not shown). Or, for example, it is preferable that the airtight unit is secured by a simple method such as providing a receiving groove in the main body 10 to fit the blower unit 11 and fastening it with a tape.
When the air blower unit 11 is placed on the air shower device main body 10, the unit-side air supply openings 46, 46 are aligned with the air supply openings 30 provided on the upper surface of the air shower device main body 10. The unit-side exhaust openings 47 and 47 are aligned with the exhaust openings 31.
[0033]
Further, when the air shower apparatus 1 is installed in the entrance / exit of the clean room, the outlet 16 formed in the air shower apparatus body 10 is brought into contact with the clean room, and the inlet 15 is installed facing the outside of the clean room. After installation, a stopper (not shown) is used to prohibit the movement of the omnidirectional caster 38, and the air shower device 1 is fixed so as not to move carelessly.
[0034]
In this way, the air shower apparatus 1 is installed at a desired position, and the fan 41 provided in the blower unit 11 is operated. In this case, if the power of the fan 41 is taken from a single-phase 100V outlet, the power supply becomes easy and the installation location of the air shower device 1 is not limited.
[0035]
When a person involved in the construction work, etc. who is involved in the renovation work is going to enter the clean room, the person concerned in the work enters the air shower device main body 10 from the outlet 15 of the air shower device 1 thus installed in the entrance / exit. enter.
[0036]
On the other hand, in the air shower device 1, the operation of the fan 41 starts air blowing in the casing 40 in the direction from the unit side exhaust openings 47, 47 toward the unit side air supply openings 46, 46. The air discharged from the discharge port 41b of the fan 41 collides with the expansion plate 42 and diffuses, and then is supplied to the entire surface of the filter 43, filtered through the filter 43, and then the unit side air supply opening 46. , 46. Then, clean air filtered by the filter 43 is supplied into the air supply chamber 27 through the air supply opening 30. Thus, the inside of the air supply chamber 27 becomes a positive pressure, and clean air is uniformly discharged from the plurality of nozzles 36 disposed on the inner surface 35 of the side surface 25 toward the entire interior of the air shower apparatus main body 10.
[0037]
As a result, clean air discharged from the nozzle 36 is blown from both sides to the construction personnel and the like who have entered the air shower apparatus main body 10. In this way, the foreign matter adhering to the human body, the dust-proof clothing, etc. is blown away by the clean air stream, and the foreign matter is removed.
[0038]
In addition, the air inside the air shower device main body 10 flows into the exhaust duct 28 from the exhaust port 37 disposed at the lower inner surface of the side surface 25 and is exhausted. Thus, the air exhausted from the air shower apparatus main body 10 flows in the exhaust duct 28 and passes through the unit-side exhaust openings 47 and 47 from the exhaust opening 31 formed on the upper surface of the air shower apparatus main body 10. Into the air inlet 41a of the fan 41. The air thus returned to the fan 41 is blown by the fan 41, is filtered by the filter 43, becomes clean air, and is discharged from the nozzle 36 again.
[0039]
In the air shower apparatus 1 according to this embodiment, the air shower apparatus 1 can be easily installed in an entrance / exit passage for construction personnel, etc. by moving it using an omnidirectional caster 38. When the clean room renovation work is completed, the air shower device 1 can be easily removed. In particular, the air shower device 1 according to this embodiment can be separately conveyed in a small and light state by dividing the air shower device main body 10 and the air blowing unit 11, and thus is easy to carry in and remove. Further, if the vinyl curtain 20 is attached to the entrance 15, the air shower device main body 10 can be reduced in weight, and the movement becomes easier.
[0040]
As mentioned above, although an example of the preferred embodiment of this invention was demonstrated, this invention is not limited to the form shown here. For example, the inlet 15 may be configured to be closed with a door or the like as with the outlet 16. A vinyl curtain may be attached to the outlet 16.
[0041]
【The invention's effect】
According to the present invention, an air shower device that can be extremely easily installed and removed is provided. The air shower apparatus according to the present invention can be easily installed in an access passage for construction personnel involved in repair work or the like, and can be easily removed.
[Brief description of the drawings]
FIG. 1 is a perspective view of an air shower device according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view taken along the line AA of FIG.
FIG. 3 is a perspective view of a side surface of the air shower device main body.
FIG. 4 is a perspective view showing an internal structure of the blower unit.
FIG. 5 is a plan view of the blower unit.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Air shower apparatus 10 Air shower apparatus main body 11 Blower unit 15 Inlet 16 Outlet 20 Vinyl curtain 21 Weight 23 Door 26 Partition plate 27 Air supply chamber 28 Exhaust duct 30 Inlet opening 31 Exhaust opening 36 Nozzle 37 Exhaust outlet 38 Non-directional Caster 40 Casing 41 Fan 42 Enlargement plate 43 Filter 46 Unit side air supply opening 47 Unit side exhaust opening

Claims (2)

An inlet and outlet through which a human can pass is formed in a movable box, and an air supply chamber and an exhaust duct are formed inside the side of the box to discharge clean air toward the inside of the box Is provided in communication with the air supply chamber on the inner surface of the side surface of the box, and includes a fan for blowing air to the nozzle and a filter for filtering the air blown to the nozzle by the fan. Alternatively, a filter is placed inside the blower unit that is detachably mounted on the box ,
An air shower device configured to connect an exhaust port for exhausting from the inside of the box body to the exhaust duct so as to be close to the outlet on the inner surface of the side surface of the box body, and to return air to the fan from the exhaust port .   The air shower device according to claim 1, wherein the air shower device is provided with wheels that make the box movable.

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