JP2008221035A - Dust collector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dust collector which has a simple structure and which does not necessitate an exhaust mechanism. <P>SOLUTION: To provide the dust collector 1 installed at a clean room is characterized by storing a set case 4 to set an object T to be dedusted, a blow nozzle 32 to blow air towards the object T to dedusted, a blower 6 to supply air to the blow nozzle 32, an air supply passage 7 communicating with the discharge side 46 of the blower 6 and the blow nozzle 32, an air circulation passage 8 communicating with the set case 4 and the air suction side 45 of the blower 6, and a dust removing filter 5 that is annexed to at least one of the air supplying passage 7 and the air circulation passage 8 into a cabinet 3 composed in air-tightness. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a dust removal apparatus that is installed in a clean room and removes dust attached to a dust removal target.

2. Description of the Related Art Conventionally, in a production line for semiconductors or the like, a clean room with a high cleanliness is used. In this clean room, circulating air is supplied to the ceiling room, and clean air is supplied from the ceiling room to the dust removal object through a high-performance filter in a down flow to remove dust from the dust removal object. And the air after dust removal is discharged | emitted to an underfloor room, and air is circulated from an underfloor room to a ceiling room via a machine room. Thereby, clean air is always circulated and the processing chamber is kept clean. (For example, refer to Patent Document 1.)
Japanese Patent Laid-Open No. 11-141938

  By the way, when carrying parts or tools other than the parts to be processed and assembled into the clean room, it is necessary to remove dust adhering to each part before carrying in. In this case, it can be considered that dust is blown away by an air gun using compressed air. However, in order to prevent the scattering and diffusion of dust, an exhaust / compressed air facility provided in a clean room is necessary, so that there is a problem that the cost of ancillary facilities is increased and the installation location is limited. In addition, although it is conceivable to remove dust with a draft chamber or the like, it is necessary to attach an exhaust duct or the like.

  The present invention provides a dust removing device that has a simple configuration and does not require an exhaust mechanism.

  The dust removing device of the present invention is a dust removing device installed in a clean room, a set case for setting a dust removal target, a blow nozzle for blowing air toward the dust removal target, and a blow nozzle At least one of a blower that supplies air, an air supply passage that communicates the discharge side of the blower and the blow nozzle, a return air passage that communicates the set case and the suction side of the blower, and an air supply passage and a return air passage The interposing dust removing filter is housed in an airtight cabinet.

  According to this configuration, the supply air flow path and the return air flow path are configured in the cabinet, and the dust filter is disposed in at least one of the both flow paths, thereby circulating clean air in the cabinet and Dust can be removed. In addition, since dust is removed by circulating air, the air after dust removal is not discharged outside the dust remover. For this reason, a large incidental facility such as an exhaust mechanism becomes unnecessary, and the restriction of the installation location can be relaxed. Further, the cabinet is configured to be airtight, so that dust is prevented from being scattered and diffused outside the dust removing device during dust removing work. Thereby, dust removal work can be performed even in a special place such as a clean room. For example, the operation efficiency of the production line can be improved by being directly connected to the production line or the like in the clean room. The dust removal referred to here is to remove dust attached to the object.

  In this case, it is preferable that the blow nozzle is composed of a plurality of nozzles that are spaced apart from each other.

  According to this configuration, air can be effectively blown from a plurality of directions to the dust removal object. Thereby, while improving the precision of dust removal, the time concerning dust removal can be shortened.

  In these cases, it is preferable that the set case has a net-like mounting stage for setting the dust removal object.

  According to this configuration, by making the mounting stage net, air from the blower does not blow through the mounting stage, and air after dust removal does not stop on the mounting stage. Thereby, air can be circulated efficiently and the efficiency of dust removal of an object can be improved. Further, since no dust remains on the mounting stage, the dust removal operation can always be performed in a clean state.

  In these cases, it is preferable to further include a static elimination means that is provided in the set case and ionizes the air in the set case.

  According to this configuration, the static elimination work can be performed in parallel with the dust removal work of the object. Thereby, dust removal of an object can be performed efficiently and work efficiency can be improved. In addition, since it is not necessary to install a static eliminating device separately, the cost for installing the device can be reduced.

  In these cases, it is preferable that the air supply passage and the circulation passage are formed by partitioning the inside of the cabinet with a partition wall.

  According to this configuration, by forming the supply air flow channel and the return air flow channel using the partition walls in the cabinet, the number of parts can be reduced and the cost can be reduced.

  In these cases, it is preferable to further include a foot switch and a timer for controlling the drive of the blower.

  According to this configuration, by performing the drive control of the blower with the foot switch, the operator can perform the ON / OFF operation of the switch with the foot in addition to the operation of the hand for supplying the material to be removed and the material to be removed. The operator can easily work and work efficiency can be improved. In addition, by managing the dust removal time with a timer, it is possible to prevent the object from being removed from dust and to keep the cleanliness constant.

  In these cases, it is preferable to further include a plurality of casters attached to the lower end of the cabinet.

  According to this configuration, the dust remover can be easily transported by attaching the casters. Further, since the dust removing device can be easily moved, the installation location of the dust removing device can be easily changed according to the work situation.

  In these cases, it is preferable that the cleanliness specification is the same as that of the clean room.

  According to this configuration, by setting the cleanliness level to be the same as that of the clean room, the dust in the dust removal device can be removed without affecting the environment of the clean room when taking in and out the dust removal object. Can do.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. The dust removing apparatus according to the present embodiment is installed in a place where the temperature, humidity, cleanliness, etc. of a clean room are managed, and removes dust, static electricity, etc. of members used under the management. For example, a clean room Used to remove dust, static electricity, etc. adhering to auxiliary members and tools when using auxiliary parts and tools necessary for assembly work in a clean room in a semiconductor production line installed in It is what is done.

  With reference to FIG. 1 and FIG. 2, the dust removal apparatus 1 which concerns on this embodiment is demonstrated. FIG. 1 is an external perspective view of the dust removing apparatus 1 according to this embodiment as viewed from the front side. FIG. 2 is a cross-sectional view (side view) of the dust removing apparatus 1 shown in FIG. As shown in FIG. 1, a dust removing device 1 includes a cabinet 3 that constitutes an outer shell of the device body 2, a set case 4 that is housed in the cabinet 3 and in which a dust removal target T is installed, and a dust removing device that collects dust. A filter 5, a blower 6 that generates air for dust removal, an air supply passage 7 that supplies air from the blower 6 to the set case 4, a return air passage 8 that circulates air from the set case 4 to the blower 6, It consists of

  The cabinet 3 is provided with a filter inspection lid 11 for managing the exchange of the dust removal filter 5 on the front surface, and an opening / closing door 12 for carrying in / out the dust removal object T is disposed on the upper back surface. ing. A blower inspection lid 13 for inspecting the blower 6 and the like is attached to the lower left side of the rear surface, and a control panel 14 for controlling the operation of the dust removing device 1 is attached to the lower right side of the rear surface. . Then, four casters 15 for moving the dust removing device 1 are attached to the lower surface of the cabinet 3. Further, the cabinet 3 main body is airtight using an air tight material or the like so that internal air is not leaked to the outside when the door 12 is closed, and thus dust ( Prevent scattering and diffusion of air containing dust).

  The control panel 14 includes a power display lamp 21 that displays power ON / OFF of the dust removing device 1, an abnormality display lamp 22 that indicates that an abnormality has occurred in the dust removing device 1, and a timer (for the dust removing device 1 (blower 6)). A timer display lamp 23 for displaying a setting state (not shown), a foot switch 24 for switching ON / OFF of driving of the blower 6, and a control unit (not shown) for controlling them. The power display lamp 21 displays the power state of the dust removing apparatus 1 body by turning on / off the lamp. The abnormality display lamp 22 notifies the operator of the abnormality by turning on the lamp when an abnormality occurs in the device or the like. The timer display lamp 23 displays whether the timer of the blower 6 is operating by turning on / off the lamp and notifies the operator. The timer is controlled by the control unit, and by setting and managing the timer so that the operation time (dust removal time) of the blower 6 becomes a predetermined time (time when dust is completely removed), the dust removal target T is controlled. Dust proofing can be performed reliably.

  The foot switch 24 controls the drive of the blower 6, and switches on / off the drive of the blower 6 every time the foot switch 24 is stepped on. Thereby, since the drive control of the blower 6 can be performed with the foot in accordance with the movement of the material supply and the material removal hand of the dust removal target T, the operator can easily work and work efficiency can be improved. . Further, when the foot switch 24 is stepped on, the blower 6 is turned on (starts driving), and can be turned off (stop driving) after the timer control.

  The opening / closing door 12 is attached to the cabinet 3 by a pair of hinges 25, 25 provided on the upper portion, and a handle 26 for opening / closing is fixed to the back of the opening / closing door 12. And it opens behind the dust removal apparatus 1 via the hinges 25 and 25, and the dust removal target T can be carried in in the cabinet 3, or can be carried out out of the cabinet 3. FIG.

  The casters 15 are rotatably attached to the four corners of the bottom surface of the cabinet 3, and stoppers (not shown) are attached to the respective casters 15. As a result, the installation location can be easily changed by moving the dust removing device 1 according to the work situation, and can be reliably fixed to a predetermined location by the stopper.

  Next, the internal configuration of the cabinet 3 will be described with reference to FIGS. FIG. 3 is a cross-sectional view (back view) of the cabinet 3 shown in FIG. As described above, the set case 4, the dust filter 5, and the blower 6 are installed in the cabinet 3, and the supply air flow path 7 and the return air flow path 8 are provided in communication with these.

  The set case 4 is installed on the bottom surface of the set case 4 and is placed on the placement table 31 on which the dust removal target T is placed and the outer peripheral surface of the set case 4, and the air from the blower 6 is supplied into the set case 4. A plurality of (three) blow nozzles 32 to be blown out, an ionizer 33 (static removal means) for removing static electricity attached to the dust removal object T, and an opening at the lower rear of the set case 4. And an exhaust opening 34 for discharging air from the blow nozzle 32 to the outside of the set case 4, and a case opening / closing door 35 formed at a position above the rear portion of the set case 4 and corresponding to the opening / closing door 12 of the cabinet 3. is doing.

  The mounting table 31 includes a mounting stage 41 for mounting the dust removal target T and four support columns 42 that support the mounting stage 41. The mounting stage 41 has a mesh shape (net or punching). The air from the blow nozzle 32 and the dust from the dust removal target T are blown out below the placement table 31 (see FIG. 4). Thereby, dust removal is performed efficiently, and air after dust removal does not stop on the mounting stage 41. Further, the dust that has risen can be efficiently fed into the return air flow path 8.

  A total of three blow nozzles 32 are attached to the center of the upper part of the set case 4 and to the left and right slopes, respectively, and each blow nozzle 32 has its nozzle surface directed toward the mounting stage 41. Installed. Then, dust is removed by vigorously blowing compressed air from the upper three directions of the dust removal target T placed on the placement stage 41 (front of the dust removal target T, left diagonal direction, right diagonal direction). While removing the dust adhering to the object T, the air containing the dust is sent out toward the exhaust opening 34. In this way, by blowing air compressed from a plurality of directions at the same time, it is possible to obtain effects such as improving the accuracy of dust removal and reducing the time required for dust removal. In the present embodiment, the location and quantity of the blow nozzle 32 are configured as described above, but the present invention is not limited to this. Moreover, each blow nozzle 32 is preferably one that can change the suction angle.

  The ionizer 33 is installed at a position facing the placement stage 41 from above, and removes static electricity from the dust removal target T. In this case, the air in the set case 4 is ionized by corona discharge, and the static electricity charged on the surface of the dust removal object T is neutralized to remove static electricity from the dust removal object T. When the dust removal target T is charged, it is difficult to remove the dust adhering to the dust removal target T. Therefore, by removing the charge with the ionizer 33, the dust on the dust removal target T can be efficiently removed. Efficiency can be improved. Moreover, since it is not necessary to provide a static elimination apparatus etc. separately, the cost concerning this can be reduced.

  The exhaust opening 34 is formed by punching the rear lower side of the set case 4, and discharges air containing dust after dust removal to the outside of the set case 4. The discharged air flows below the cabinet 3 via a return air flow path 8 described later.

  The case opening / closing door 35 is formed so as to cut out a part of the set case 4, and is attached to be freely opened and closed by a pair of case hinges 43. Opening / closing via the case hinge 43 in the same direction as the opening / closing door 12 formed in the cabinet 3 (rear side of the cabinet 3), and opening the opening / closing door 12 and the case opening / closing door 35, dust is removed on the mounting stage 41. The object T is placed.

  The blower 6 is disposed below the set case 4 and is opened on the side of the blower case 44, the side of the blower case 44 and toward the rear of the cabinet 3, and on the upper surface of the blower case 44. A suction port 45 is provided in the blower case 44, which is provided in the blower case 44, and is provided in the blower case 44. The suction port 45 extends through the partition wall 53 partitioning the cabinet 3 in the horizontal direction and discharges the air sucked in from the suction port 45 upward. An impeller 47 that sucks air from the air and discharges the air from the outlet 46, and a motor 48 (geared motor or the like) that is attached to the side of the blower case 44 so as to face the inlet 45 and drives the impeller 47. And have.

  In addition, although the blower 6 of this embodiment assumes the multiblade air blower (sirocco fan), you may use not only this but air blowers, such as an airfoil blower and an axial flow fan.

  The dust removal filter 5 is formed of a high-performance filter (for example, a HEPA filter or a ULPA filter), and is disposed at the approximate center in the cabinet 3 so as to be positioned below the set case 4 and above the blower 6. By passing air containing impurities (dust etc.) sent from the discharge port 46 of the blower 6 through the dust removal filter 5, impurities in the air are collected by the dust removal filter 5. As a result, the air from the blower 6 becomes clean air and is blown into the set case 4 from the blow nozzle 32 via the air supply passage 7 described later.

  In the present embodiment, the dust removal filter 5 is attached to the air supply passage 7, but the dust removal filter 5 may be attached to the return air passage 8 described later, or both passages. Moreover, it is preferable that the dust removal filter 5 is selected so that the air flowing through the air supply channel 7 has the same cleanliness level as the clean room.

  The supply air flow path 7 and the return air flow path 8 are formed by dividing the inside of the cabinet 3 by a plurality of partition walls 51, 52, 53 into two isolated regions. Thereby, the number of parts of the dust remover 1 can be reduced.

  The air supply flow path 7 is a flow path for supplying air discharged from the discharge port 46 of the blower 6 to the blow nozzle 32 through the dust filter 5. Clean air from which dust has been removed by the dust filter 5 is supplied. Supply into set case 4. On the other hand, the return air flow path 8 is a flow path communicating from the exhaust opening 34 of the set case 4 to the suction port 45 of the blower 6 through the opening 54 of the partition wall 53, and air containing dust from the exhaust opening 34. Is sucked from the suction port 45 of the blower 6 through the return air flow path 8 and discharged from the discharge port 46 to the air supply flow path 7. By circulating the air in the cabinet 3 through the air supply flow path 7 and the return air flow path 8, the air in the cabinet 3 is purified without being exhausted, and clean air is always blown onto the dust removal target T. To remove dust.

  The air supply flow path 7 and the return air flow path 8 are formed by partitioning with partition walls 51, 52, 53, but the flow path from the exhaust opening 34 to the suction port 45 of the blower 6 and the discharge port of the blower 6 You may form the flow path from 46 to the blow nozzle 32 through the dust removal filter 5 by inserting a duct etc., respectively.

  Here, with reference to FIG. 5, the flow of air in the cabinet 3 and the dust removal procedure will be described. In addition, the arrow in a figure has shown the flow of air. First, the opening / closing door 12 of the cabinet 3 and the case opening / closing door 35 of the set case 4 are opened, and the dust removal target T is set on the mounting stage 41.

  Next, the blower 6 is driven. Thereby, the air in the return air flow path 8 is strongly sucked from the suction port 45 of the blower 6 and discharged from the discharge port 46 to the air supply flow path 7a ((a) in the figure).

  The air blown out from the discharge port 46 of the blower 6 passes through the dust removal filter 5 so that impurities such as dust contained in the air are removed (collected) and flows as clean air to the air supply passage 7b. ((B) in the figure). The air cleaned by the dust removal filter 5 is compressed by the blow nozzle 32 provided in the set case 4 via the air supply flow path 7b, and increases the momentum to 3 with respect to the dust removal target T on the mounting stage 41. Sprayed from the direction. At the same time, static removal of the dust removal object T is performed by the ionizer 33 ((c) in the figure).

  Air containing dust after dust removal is discharged from the exhaust opening 34 to the outside of the set case 4, and is sucked again from the suction port 45 of the blower 6 through the return air flow path 8. In this way, air is circulated in the cabinet 3 to purify the air containing dust into clean air through the dust filter 5 and the dust is removed by blowing clean air onto the dust removal object T. Can do.

  As described above, according to the present embodiment, the air supply flow path 7 and the return air flow path 8 formed as regions independent from each other are configured in the cabinet 3, and are arranged in at least one of the both flow paths. By circulating air through the dust removal filter 5, impurities such as dust contained in the air are removed, and clean air is circulated in the cabinet 3 to remove dust attached to the dust removal target T. . In addition, since air is circulated in the cabinet 3 to remove dust, it is not necessary to discharge air outside the dust remover 1, and there are restrictions on the installation location of the dust remover 1 due to the attachment of a large incidental facility such as an exhaust mechanism. Can be relaxed. Furthermore, by making the cabinet 3 airtight, it is possible to prevent dust from being scattered and diffused outside the dust removing device 1 during the dust removing operation, and the dust removing operation can be performed in a special place such as a clean room.

  In addition, by making the cleanliness of the above-mentioned dust removal apparatus 1 the same as the cleanliness of the clean room in which the dust removal apparatus 1 is installed, when the dust removal target T is carried in / out, the air inside the apparatus, etc. The dust removal operation can be performed without affecting the operation.

It is an external appearance perspective view of the dust removal apparatus which concerns on this embodiment. It is sectional drawing (side view) which cut | disconnected the dust removal apparatus by AA. It is sectional drawing (rear view) which cut | disconnected the dust removal apparatus by BB. It is a perspective view of a set case and a mounting table. It is a figure explaining the flow of the air in a cabinet, and the procedure of dust removal.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Dust removal device 3 ... Cabinet 4 ... Set case 5 ... Dust filter 6 ... Blower 7 ... Air supply flow path 8 ... Return air flow path 15 ... Caster 24 ... Foot switch 32 ... Blow nozzle 33 ... Ionizer 41 ... Mounting stage 45 ... Suction Port 46: Discharge port 51, 52, 53 ... Partition T: Dust removal target

Claims (8)

A dust remover installed in a clean room,
A set case for setting the dust removal object;
A blow nozzle that is provided in the set case and blows air toward a dust removal object;
A blower for supplying air to the blow nozzle;
An air supply passage communicating the discharge side of the blower and the blow nozzle;
A return air flow path communicating the set case and the suction side of the blower;
A dust removing device, wherein a dust removing filter interposed in at least one of the air supply passage and the return air passage is housed in an airtight cabinet.   2. The dust removing device according to claim 1, wherein the blow nozzle is composed of a plurality of nozzles spaced apart from each other.   The dust removal apparatus according to claim 1 or 2, wherein the set case has a net-like placement stage on which a dust removal object is set.   The dust removing apparatus according to any one of claims 1 to 3, further comprising a charge removing unit that is provided in the set case and ionizes air in the set case.   The dust removal device according to any one of claims 1 to 4, wherein the air supply passage and the air circulation passage are formed by partitioning the inside of the cabinet with a partition wall.   The dust removing device according to claim 1, further comprising a foot switch and a timer for controlling driving of the blower.   The dust removing device according to claim 1, further comprising a plurality of casters attached to a lower end of the cabinet.   The dust removing device according to any one of claims 1 to 7, which has the same cleanliness specification as that of the clean room.

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