JP6978291B2 - Clean booth - Google Patents

Description

The present invention relates to a clean booth installed at a predetermined location inside a building.

It is provided with at least a frame framed by a frame material and a covering material that covers the entire circumference of the frame material, and the covering material is a ceiling covering material and a peripheral side surface covering material made of an airtight soft sheet. The ceiling covering material is formed from the canopy portion that covers the entire ceiling portion of the frame and the hanging portion that hangs downward from the periphery of the canopy portion and covers the upper side of the peripheral side surface portion. A clean booth is disclosed in which a peripheral side surface covering material is freely connected by a mechanical fastener (see Patent Document 1).

Further, a circulation utilization type safety cabinet formed from a safety cabinet main body and an exhaust recirculation unit and utilizing exhaust gas is disclosed (see Patent Document 2). The safety cabinet body uses a HEPA filter for air supply located at the bottom of the discharge plenum of the cabinet blower to supply clean air to the work space inside it, and the air in the work space is sucked and circulated again by the cabinet blower. By discharging a part of the air circulated from the work space to the outside through the exhaust HEPA filter located above the discharge plenum, the work space is maintained at a negative pressure, and the external introduction is supplied from the front shutter opening. Take in the air and make it a barrier air. The exhaust recirculation unit is arranged directly above the safety cabinet body, and has an exhaust intake port at the rear of the lower surface for taking in the air discharged from the safety cabinet body through the exhaust HEPA filter, and the air taken in from the exhaust intake port. The front part of the lower surface is equipped with an exhaust outlet that blows downward along the shutter on the front of the safety cabinet body. In this safety cabinet, the air falling along the shutter on the front of the safety cabinet body is sucked from the opening at the lower end of the shutter into the work space maintained at a negative pressure, so that the air in the work space is sucked from the opening. It is circulated as all or part of the barrier air that prevents it from leaking.

Japanese Unexamined Patent Publication No. 2004-360269 JP-A-2015-166646

The clean booth disclosed in Patent Document 1 manually connects the ceiling covering material and the peripheral side surface covering material by operating the mechanical fastener when the worker enters the room or leaves the room. At the same time as releasing, it is necessary to connect the ceiling covering material and the surrounding side surface covering material, which not only makes it complicated to enter and leave the room and requires time and effort to enter and leave the room, but also the ceiling covering material and the surrounding side surface when entering and leaving the room. When the body comes into contact with the covering material, there is a risk that impurities such as dust and germs adhere to the covering material and the changing clothes of the worker.

The exhaust / recirculation unit of the safety cabinet disclosed in Patent Document 2 includes four support legs that support the exhaust / recirculation unit by arranging them on the ceiling plate of the safety cabinet body, and between the front and rear support legs on the left side and front and rear on the right side. A partition along both support legs is installed between the support legs (see FIG. 5 of Patent Document 1). In the exhaust recirculation unit, the air blown out from the exhaust outlet is prevented from leaking into the clean room by a partition between the two. In this safety cabinet, the amount of barrier air that is sucked in and introduced into the work space of the safety cabinet body from the front of the safety cabinet body is the amount of air that passes through the HEPA filter for exhaust, and that air volume is from the exhaust outlet to the safety cabinet body. The airflow descends from the front and is supplied to the seating work area.

An air conditioner (air conditioner) is installed in the clean room equipped with the exhaust / return unit (safety cabinet body), and a door for entering and exiting is installed on the wall of the clean room. Workers can access the safety cabinet hands-free, but when the air conditioner operates or the door is opened and closed, the airflow in the clean room is turbulent (disturbance), and the turbulence in the airflow is the exhaust / return unit. When acting on the opening area (doorway) of the clean room, the air in the clean room flows into the inside of the exhaust / recirculation unit from the opening area of the exhaust / recirculation unit (backflow). When the air in the clean room flows into the inside of the exhaust / recirculation unit, the air in the clean room causes contamination to be mixed with the clean air inside the exhaust / recirculation unit, and the inside of the exhaust / recirculation unit (safety cabinet body) is maintained in a clean state. You may not be able to do it.

An object of the present invention is that the inside of the work booth can be easily entered without any trouble and without touching, and the inside of the work booth can be easily exited without any trouble and without touching. The purpose is to provide a clean booth that can prevent dust and germs from adhering to workers when entering and exiting the work booth. Another object of the present invention is to provide a clean booth capable of preventing the inflow of air into a work booth in a building. Another object of the present invention is that even if airflow turbulence (disturbance) occurs in the building due to a predetermined factor and the turbulence of the airflow generated in the building acts, the air in the building is inside the work booth. The purpose is to provide a clean booth that can maintain the clean state in the work booth without causing contamination mixed in the clean air.

The premise of the present invention for solving the above-mentioned problems is a clean booth installed at a predetermined place in a building.

The feature of the present invention in the above premise is that a clean booth is equipped with a work booth having a predetermined volume capable of accommodating various experimental facilities and having a predetermined work space, and a worker who is installed to enter and exit the work booth. It has an opening area that allows passage, and has a first entrance where the air inside the work booth flows out, and an external air air supply port that supplies external air to the work booth. and air supply means for generating an air flow flowing in one direction toward the doorway, and a buffer space of a predetermined volume of air flowing out from the work booth connected to the first doorway flows, work is the facility to and from the buffer space It has an opening area that allows a person to pass through, and has a second entrance / exit for the air in the buffer space to flow out. The amount of air supplied by the air supply means is adjusted so that air flowing in one direction from the external air supply port to the first entrance / exit is generated inside the work booth, and the air flow inside the building outside the clean booth is turbulent. When (disturbance) acts on the second entrance / exit, the influence of the disturbance acting on the second entrance / exit is mitigated by the buffer space, and the air flowing through the buffer space from the first entrance / exit to the second entrance / exit is from the first entrance / exit. The air in the work booth flows out from the first entrance / exit to the buffer space without flowing back into the work booth.

As an example of the present invention, the planar shape of the first entrance / exit exhibits a vertically long quadrangle, the planar shape of the second entrance / exit exhibits a vertically long quadrangle, and a buffer space is provided from the work booth through the first entrance / exit. After passing through the buffer space, the air that has flowed into the room flows into the inside of the building from the buffer space through the second entrance / exit .

As another example of the present invention, a buffer space extends from the first entrance / exit in the direction of air outflow between the first entrance / exit and the second entrance / exit.

As another example of the present invention, the buffer space extends from the first entrance / exit in the direction of air outflow between the first entrance / exit and the second entrance / exit, and extends in a direction intersecting the outflow direction of air. ..

As another example of the present invention, the second entrance / exit is installed facing the first entrance / exit and arranged in a line with respect to the first entrance / exit with a buffer space in between.

As another example of the present invention, the second entrance / exit is installed at a position inclined at a predetermined angle with respect to the first entrance / exit with the buffer space interposed therebetween, without facing the first entrance / exit.

As another example of the present invention, the second entrance / exit is installed at a position substantially orthogonal to the first entrance / exit without facing the first entrance / exit and with the intervention of the buffer space.

As another example of the present invention, the building is provided with an air-conditioned air air supply port that is installed outside the clean booth and supplies air-conditioned air generated by the air-conditioning equipment into the building, and the clean booth is air-conditioned. When the turbulence (disturbance) of the air conditioning air supplied from the air supply port acts on the second entrance / exit, the influence of the disturbance acting on the second entrance / exit is mitigated by the buffer space, and the air in the work booth becomes the first. 1 It flows out from the entrance / exit to the buffer space.

As another example of the present invention, a clean booth is detachably installed between the ceiling panel in the building and the floor and the ceiling panel of the building to surround the work booth. It includes a first wall panel and a second wall panel that is detachably installed between the floor and ceiling panels of the building and is connected to the first wall panel to surround the buffer space, with the first entrance being the first wall. It opens between the panels and the second doorway opens between the second wall panels.

As another example of the present invention, the air supply means is a fan filter unit installed on the ceiling panel, and in the clean booth, the external air air supply port is supplied from the external air air supply port to the work booth. The air supply air volume of the fan filter unit is adjusted so that an air flow flowing in one direction from the first entrance / exit to the first entrance / exit is generated in the work booth.

As another example of the present invention, the experimental equipment is at least one of a safety cabinet, a clean bench, a glove box, an isolator, and a fume hood, and in the clean booth, air is supplied to the work booth from an external air air supply port. For the exhaust air volume of operating safety cabinets, clean benches, glove boxes, isolators, and fume hoods so that the external air creates an air flow in the work booth that flows in one direction from the external air supply port to the first inlet / outlet. Correspondingly, the air supply air volume of the fan filter unit is adjusted.

As another example of the present invention, the clean booth includes a static elimination air generator that supplies the ionized air generated while generating ionized air to at least one of the work booth and the buffer space, and the static elimination air is included. The ionized air air supply port of the ionized air supplied by the generator is the ceiling panel located directly above the worker working in the safety cabinet, clean bench, glove box, isolator, draft chamber, and the second from the first entrance / exit. It is installed on at least one of the ceiling panels of the cushioning space that does not reverse the air flow that passes through the buffering space in one direction toward the entrance / exit.

As another example of the present invention, in the clean booth, an air flow flowing in one direction from the external air air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air air supply port flows into the work booth. The air supply air volume of the fan filter unit is adjusted according to the exhaust air volume of the experimental equipment and the air supply air volume of the ionized air supplied from the static elimination air generator so as to be generated.

According to the clean booth according to the present invention, a first doorway and a second doorway are created therein, and these doorways are not blocked by doors or curtains, so that the buffer space is not touched through the second doorway. It is easy to enter and exit from the buffer space without touching it, and it is easy to enter without touching the work booth through the first entrance and exit without touching it from the work booth. You can easily enter and leave the buffer space and work booth without touching your hands. The clean booth does not allow workers to come into contact with the clean booth when entering and exiting the booth, and prevents dust and germs from adhering to the buffer space and work booth when entering and exiting the buffer space and work booth. It is possible to maintain the clean state of the clean booth, and it is possible to prevent dust and germs from adhering to the worker when entering and exiting the buffer space and the inside of the work booth. The clean booth has a work booth of a predetermined volume that can accommodate various experimental equipment and has a predetermined work space, and a first entrance / exit that is installed to enter and exit the work booth and the air in the work booth flows out. The work booth is equipped with an external air air supply port that supplies external air, and is connected to the work booth with an air supply means that generates an air flow that flows in one direction from the external air air supply port toward the first inlet / outlet. It has a buffer space of a predetermined volume into which the air flowing out from the air flows out, and a second inlet / outlet where the air in the buffer space flows out, which is installed to enter and exit the buffer space, and supplies the work booth from the external air supply port. The air supply air volume of the air supply means is adjusted so that the airflow that flows in one direction from the external air supply port to the first inlet / outlet is generated in the work booth by the external air to be aerated, and the air supply air volume of the air supply means is adjusted from the first inlet / outlet to the second inlet / outlet. Since the air in the work booth flows out from the first doorway to the buffer space without the air flowing through the buffer space toward the doorway flowing back from the first doorway into the work booth, the air in the work booth is the first. It is possible to create an air flow (air flow) that flows out from the doorway to the buffer space and also flows through the buffer space to flow out from the second doorway, and it is possible to prevent backflow of air from the first doorway into the work booth. , It is possible to prevent the backflow of air in the building into the work booth. In the clean booth, even if the airflow in the building where it is installed is disturbed by a predetermined factor and the airflow turbulence (disturbance) in the building acts on the second entrance / exit, the influence of the disturbance affects the air layer of the buffer space. It is alleviated and extinguished, and the flow of air flowing out from the first entrance / exit of the air in the work booth is maintained, so it is possible to prevent backflow (inflow) of air in the building due to disturbance into the work booth. , The air in the building does not cause contamination mixed with the clean air in the work booth, and the clean state in the work booth can be maintained.

In a clean booth where the buffer space extends from the first doorway in the direction of air outflow between the first doorway and the second doorway, the buffer space is between the first doorway and the second doorway for air from the first doorway. By extending in the outflow direction, the buffer space has a predetermined volume in the outflow direction of the air, and the air layer flowing through the buffer space toward the second entrance / exit resists the air flowing back from the second entrance / exit toward the buffer space. As a result, the air in the work booth can flow out from the first entrance / exit to the buffer space and pass through the buffer space to create an air flow (air flow) that flows out from the second entrance / exit, and from the first entrance / exit to the work booth. It is possible to prevent the backflow of air in the building and also to prevent the backflow of air in the building into the work booth. In the clean booth, even if the airflow in the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow in the building acts on the second entrance / exit, it is between the first entrance / exit and the second entrance / exit. The effect of the disturbance is mitigated and extinguished by the air layer of the buffer space extending from the first entrance / exit in the air outflow direction, and the flow of air flowing out from the first entrance / exit in the work booth is maintained. It is possible to prevent the backflow (inflow) of the air in the building into the work booth, and the air in the building does not mix with the clean air in the work booth, and the cleanliness in the work booth does not occur. The state can be maintained.

In a clean booth where the buffer space extends from the first entrance / exit in the direction of air outflow between the first entrance / exit and the second entrance / exit, and the buffer space extends in the direction intersecting the air outflow direction, the buffer space is the first entrance / exit. A predetermined volume of the buffer space in the direction in which the buffer space intersects the air outflow direction and the outflow direction by extending from the first entrance / exit in the air outflow direction and in the direction intersecting the air outflow direction between the and the second entrance / exit. The air layer flowing through the buffer space toward the second entrance / exit becomes the resistance of the air flowing back from the second entrance / exit toward the buffer space, and the air in the work booth flows out from the first entrance / exit to the buffer space. It is possible to create an air flow (air flow) that flows through the buffer space and flows out from the second entrance / exit, prevent the backflow of air from the first entrance / exit to the work booth, and work on the air inside the building. It is possible to prevent backflow into the booth. In the clean booth, even if the airflow in the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow in the building acts on the second entrance / exit, it is between the first entrance / exit and the second entrance / exit. The effect of the disturbance is mitigated and extinguished by the air layer of the buffer space that extends from the first entrance / exit in the direction of air outflow and extends in the direction intersecting the outflow direction of air, and flows out from the first entrance / exit of air in the work booth. Since the flow is maintained, it is possible to prevent the backflow (inflow) of the air inside the building due to disturbance into the work booth, and the air inside the building is mixed with the clean air inside the work booth. Can be maintained in a clean state in the work booth without causing any problems.

The clean booth, where the second entrance is facing the first entrance and is lined up in a row with respect to the first entrance with a buffer space in between, is the first entrance and the second entrance facing the first entrance. The air layer of the buffer space located between the two becomes a resistance of the air flowing back from the second entrance / exit toward the buffer space, and the air flows out from the first entrance / exit to the buffer space and also flows through the buffer space and flows out from the second entrance / exit. It is possible to create a flow (air flow) of the air, prevent the backflow of air from the first entrance / exit into the work booth, and prevent the backflow of air in the building into the work booth. The clean booth faces the first entrance and the first entrance even if the air flow in the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the air in the building acts on the second entrance. The air layer of the buffer space located between the second entrance and the air layer alleviates and eliminates the influence of the disturbance, and the flow of air flowing out from the first entrance and exit in the work booth is maintained. It is possible to prevent the backflow (inflow) of the air inside the work booth, and the air inside the building does not mix with the clean air in the work booth without causing contamination, and the clean state inside the work booth is maintained. Can be retained.

The clean booth, which is installed at a position where the second entrance / exit does not face the first entrance / exit and is inclined at a predetermined angle with respect to the first entrance / exit across the buffer space, has a predetermined angle with respect to the first entrance / exit and the first entrance / exit. The air layer of the buffer space located between the inclined second entrance and exit becomes the resistance of the air flowing back from the second entrance and exit toward the buffer space, and flows out from the first entrance and exit to the buffer space and flows through the buffer space. 2 It is possible to create a flow of air (air flow) that flows out from the entrance / exit, prevent the backflow of air from the first entrance / exit to the work booth, and prevent the backflow of air inside the building into the work booth. be able to. In the clean booth, even if the airflow in the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow in the building acts on the second entrance / exit, the first entrance / exit and the first entrance / exit The air layer of the buffer space located between the second entrance and the entrance that inclines by a predetermined angle alleviates and eliminates the influence of the disturbance, maintains the flow of air flowing out from the first entrance and exit in the work booth, and further. Since the second entrance is positioned at a predetermined angle with respect to the first entrance, the air flowing back from the second entrance cannot directly go to the first entrance, so that the air inside the building caused by the disturbance cannot be directly directed. Backflow (inflow) into the work booth can be reliably prevented, air inside the building does not mix with the clean air inside the work booth, and the clean state inside the work booth should be maintained. Can be done. In the clean booth, the second entrance is tilted at a predetermined angle with respect to the first entrance, so that the positions of the first and second entrances can be freely determined according to the arrangement of various equipment to be placed in the buffer space. And the convenience of the buffer space can be improved.

A clean booth where the second entrance does not face the first entrance and is installed at a position substantially orthogonal to the first entrance under the intervention of a buffer space is approximately orthogonal to the first entrance and the first entrance. The air layer of the buffer space located between the second entrance and the entrance becomes resistance of the air flowing back from the second entrance to the buffer space, and flows out from the first entrance to the buffer space and flows through the buffer space to the second entrance. It is possible to create a flow of air (air flow) flowing out from, prevent the backflow of air from the first entrance / exit into the work booth, and prevent the backflow of air in the building into the work booth. can. In the clean booth, even if the airflow in the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow in the building acts on the second entrance / exit, the first entrance / exit and the first entrance / exit The air layer of the buffer space located between the second entrance and exit, which are substantially orthogonal to each other, alleviates and eliminates the influence of the disturbance, maintains the flow of air flowing out from the first entrance and exit in the work booth, and further, the second. Since the 2 entrances and exits are substantially orthogonal to the 1st entrance and exit, the air flowing back from the 2nd entrance and exit cannot directly go to the 1st entrance and exit, so that the air inside the building caused by the disturbance can enter the work booth. Backflow (inflow) can be reliably prevented, air in the building does not mix with the clean air in the work booth, and the clean state in the work booth can be maintained. In the clean booth, by making the second entrance / exit substantially orthogonal to the first entrance / exit, the positions of the first and second entrances / exits can be freely determined according to the arrangement of various equipment to be placed in the buffer space. , The convenience of the buffer space can be improved.

When the turbulence (disturbance) of the air flow inside the building outside the clean booth acts on the second entrance, the influence of the disturbance acting on the second entrance is mitigated by the buffer space, and the air inside the work booth is released from the first entrance. The clean booth that flows out to the buffer space acts on the second entrance / exit even if the airflow in the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow in the building acts on the second entrance / exit. The influence of the disturbance is mitigated and extinguished by the air layer of the buffer space, and the flow of air flowing out from the first entrance / exit of the air in the work booth is maintained. The backflow (inflow) of the air can be prevented, the air in the building does not mix with the clean air in the work booth, and the clean state in the work booth can be maintained.

The building is installed outside the clean booth and is equipped with an air-conditioned air air supply port that supplies air-conditioned air generated by the air-conditioning equipment inside the building. When a turbulence (disturbance) acts on the second doorway, the effect of the disturbance acting on the second doorway is mitigated by the buffer space, and the clean booth where the air in the work booth flows out from the first doorway to the buffer space will do so. Even if the airflow inside the facility is turbulent by the conditioned air supplied from the conditioned air air supply port and the turbulence of the airflow (disturbance) caused by the conditioned air acts on the second inlet / outlet, it is caused by the disturbance acting on the second inlet / outlet. The effect is mitigated and extinguished by the air layer of the buffer space, and the flow of air flowing out from the first inlet / outlet of the air in the work booth is maintained. Inflow) can be prevented, air in the building does not mix with the clean air in the work booth, and the clean state in the work booth can be maintained.

A ceiling panel that is detachably installed in the building, a first wall panel that is detachably installed between the floor and the ceiling panel of the building and surrounds the work booth, and a floor and ceiling panel of the building. The first doorway opens between the first wall panels and the second doorway is the second, including a second wall panel that is detachably installed between the first wall panels and is connected to the first wall panel to surround the buffer space. The clean booth, which is open between the wall panels, has a ceiling panel, a first wall panel, and a second wall panel that can be detachably installed in the building to accommodate various experimental equipment. A clean booth with a booth and a buffer space can be created, the outflow of air in the work booth from the first inlet / outlet can be maintained, and the clean state in the work booth can be maintained. A clean booth can be easily installed in a building without any hassle or time. When the clean booth is no longer needed, the clean booth can be easily dismantled by removing the ceiling panel, the first wall panel, and the second wall panel from the building, so it does not take time and effort. The clean booth can be quickly removed from the building.

The air supply means is a fan filter unit installed on the ceiling panel, and the external air supplied to the work booth from the external air air supply port causes the airflow that flows in one direction from the external air air supply port to the first inlet / outlet. In the clean booth where the air supply air volume of the fan filter unit is adjusted so that it is generated in the work booth, the air flow that flows in one direction from the external air air supply port to the first inlet / outlet is generated in the work booth. By adjusting the air supply air volume of the fan filter unit, an air flow that flows in one direction from the external air air supply port to the first inlet / outlet is generated in the work booth by the external air, and the influence of the disturbance acting on the second inlet / outlet is generated. Is relaxed and extinguished by the air layer of the buffer space, so that the flow of air flowing out from the first inlet / outlet of the air in the work booth is maintained, and the backflow (inflow) of the air in the building into the work booth can be prevented. , The air in the building does not cause contamination mixed with the clean air in the work booth, and the clean state in the work booth can be maintained.

The experimental equipment is at least one of a safety cabinet, a clean bench, a glove box, an isolator, and a draft chamber, and the first inlet / outlet from the external air air supply port by the external air supplied to the work booth from the external air air supply port. The air supply air volume of the fan filter unit is adjusted according to the exhaust air volume of the operating safety cabinet, clean bench, glove box, isolator, and draft chamber so that the air flow flowing in one direction toward is generated in the work booth. When the air that has passed through the safety cabinet, clean bench, glove box, isolator, and draft chamber is exhausted to the outside, it is necessary to replenish the air volume of the air that has been exhausted to the outside. The air supply of the fan filter unit corresponds to the exhaust air volume of the operating safety cabinet, clean bench, glove box, isolator, and draft chamber so that the air flow in one direction from the first inlet / outlet is generated in the work booth. By adjusting the air volume, an air flow that flows in one direction from the external air supply port to the first inlet / outlet is generated in the work booth by the external air, and the influence of the disturbance acting on the second inlet / outlet is the air layer of the buffer space. Because it is relaxed and extinguished, the flow of air in the work booth flowing out from the first entrance is maintained, the backflow (inflow) of the air in the building into the work booth can be prevented, and the air in the building can be prevented. Does not cause contamination mixed in the clean air in the work booth, and the clean state in the work booth can be maintained.

Ionized air supply of ionized air supplied by the static elimination air generator, including a static elimination air generator that supplies the generated ionized air while generating ionized air to at least one of the work booth and the buffer space. The air vents are located directly above workers working in safety cabinets, clean benches, glove boxes, isolators, draft chambers, and air flowing unidirectionally through the buffer space from the first doorway to the second doorway. In the clean booth installed on at least one of the ceiling panel of the buffer space that does not allow the air flow to flow back, the ionized air generated by the static elimination air generator works from the work booth or the ceiling panel of the buffer space. Since the air is supplied to the worker's clothes, the charged charge on the worker's clothes can be eliminated (neutralized) by the ionized air, the generation of static electricity in the worker can be prevented, and the worker's clothes can be treated. It is possible to prevent the adhesion of dust due to the electric charge. The clean booth can prevent the clothes and equipment from being charged by static electricity generated during work by supplying ionized air, and the ionized air does not charge the worker's clothes and equipment. Even if dust adheres to the equipment, the dust can be easily removed. The clean booth is installed on the ceiling panel of the buffer space where the ionized air supply port does not reverse the air flow that flows in one direction through the buffer space from the first inlet / outlet to the second inlet / outlet. The unidirectional airflow generated in the buffer space is not disturbed or backflowed by the ionized air supplied from the static elimination air generator, and from the first entrance / exit created by the airflow turbulence in the buffer space to the inside of the work booth. It is possible to prevent the backflow of air and keep the inside of the work booth clean.

Exhaust air volume and static elimination of experimental equipment so that the external air supplied to the work booth from the external air air supply port generates an air flow in one direction from the external air air supply port toward the first inlet / outlet in the work booth. The clean booth, in which the air supply air volume of the fan filter unit is adjusted according to the air supply air volume of the ionized air supplied from the air supply device, is unidirectional from the external air air supply port toward the first inlet / outlet. Adjust the air supply air volume of the fan filter unit according to the exhaust air volume of the operating experimental equipment and the air supply air volume of the ionized air of the static elimination air generator that has been operated so that the flowing air flow is generated in the work booth. Then, an air flow flowing in one direction from the external air supply port toward the first inlet / outlet is generated in the work booth, and the influence of the disturbance acting on the second inlet / outlet is mitigated / extinguished by the air layer of the buffer space. The flow of air flowing out from the first inlet / outlet of the air in the work booth is maintained, the backflow (inflow) of the air in the building into the work booth can be prevented, and the air in the building is the clean air in the work booth. It is possible to maintain the clean state in the work booth without causing contamination mixed in the air.

A front perspective view of a clean booth shown as an example. Top view of the clean booth. A side view of the safety cabinet shown as an example. Top view showing an example of air flow in a clean booth. A side view showing an example of air flow in a clean booth. Top view showing another example of air flow in a clean booth. Top view of the clean booth shown as another example. Top view showing an example of the air flow in the clean booth of FIG. 7. Top view of the clean booth shown as another example. The top view which shows an example of the air flow in the clean booth of FIG. Top view of the clean booth shown as another example. Schematic block diagram of an air generation system for static elimination. The top view which shows an example of the air flow in the clean booth of FIG. The side view which shows an example of the air flow in the clean booth of FIG.

The details of the clean booth according to the present invention will be described below with reference to the attached drawings such as FIG. 1, which is a front perspective view of the clean booth 10A shown as an example. 2 is a top view of the clean booth 10A, and FIG. 3 is a side view of the safety cabinet 31 shown as an example. FIG. 4 is a top view showing an example of the air flow in the clean booth 10A, and FIG. 5 is a side view showing an example of the air flow in the clean booth 10A. 2, FIG. 4, and FIG. 5 schematically show a fan filter unit 16 (air supply means), a safety cabinet 31, and an air-conditioned air air supply port 18 (air-conditioned air air supply port of an air conditioner) of an air conditioner. In FIGS. 2, 4, and 5, the front-back direction is indicated by an arrow A, the lateral direction is indicated by an arrow B, and the vertical direction is indicated by an arrow C.

The clean booth 10A (including the clean booths 10B, 10C, and 10D) is installed in a predetermined place inside the building 11 (work room) such as a research building, an experimental building, a medical building, and a manufacturing factory, and various experiments can be performed. Used for research, development, culture, etc. The inside of the clean booth 10A (including the clean booths 10B, 10C, and 10D) (work booth 12, buffer space 15) is held under a slight positive pressure. The clean booth 10A has a work booth 12, a first entrance / exit 13, a second entrance / exit 14, a buffer space 15 (buffer space), and a fan filter unit 16 (air supply means).

The building 11 is equipped with an air-conditioning facility (not shown) that supplies air-conditioned air to the inside (indoor) of the building 11. Air-conditioned air supply that supplies air-conditioned air generated by air-conditioning equipment (air conditioner) to the inside of the building 11 on the ceiling 17 (ceiling surface) outside (common part) of the clean booth 10A inside the building 11. An air conditioner 18 (outlet) is installed. A predetermined amount of air-conditioned air is supplied from the air-conditioned air supply port 18 toward the inside of the building 11, and the inside of the building 11 is maintained at the set temperature and the set humidity (clean booths 10B, 10C, 10D). The same applies).

The clean booth 10A has a plurality of ceiling panels 19 installed inside (indoors) of the building 11 and a plurality of first wall panels 21 installed between the floor 20 and the ceiling panel 19 of the building 11. And a plurality of second wall panels 22 installed between the floor 20 and the ceiling panel 19 of the building 11 adjacent to the first wall panel 21. For the ceiling panel 19, an aluminum panel or a steel panel having a quadrangular plane shape is used. The ceiling panel 19 is formed of a plurality of side panel 19a and a plurality of top panels 19b.

In the ceiling panel 19, a ceiling enclosure is made by connecting the side panels 19a in the horizontal direction and the front-rear direction, and a ceiling is made by connecting the top panel 19b in the horizontal direction and the front-back direction. .. In the ceiling panel 19, the upper end edge of the side panel 19a is airtightly connected to the ceiling 17 of the building 11, and the outer peripheral edge of the ceiling made from the top panel 19b is airtightly connected to the lower end edge of the side panel 19a. .. A ceiling space 23 surrounded by the side panel 19a is formed between the ceiling 17 of the building 11 and the top panel 19b (temporary ceiling).

An air intake gallery 24 for supplying air to the work booth 12 is attached to the side panel 19a, and an air exhaust gallery 25 for exhausting from the work booth 12 is attached to the side panel 19a. Ceiling lighting fixtures (LEDs and fluorescent lamps) are installed on the top panel 19b. The ceiling panels 19 (side panels 19a and top panels 19b) are removable inside the building 11 (indoors), and a plurality of them can be easily attached to the inside of the building 11 according to a predetermined manual (procedure). It can be quickly attached, easily and quickly removed from the interior of the building 11, and easily disassembled into a plurality of panels 19a, 19b.

The first wall panel 21 and the second wall panel 22 are an aluminum frame or a steel frame, and a transparent plastic plate (acrylic board, polycarbonate board, vinyl chloride board, etc.) or a transparent glass plate fitted in the aluminum frame or the steel frame. It is made from, and its planar shape is shaped into a quadrangle. The first wall panels 21 are laterally connected to form the first front wall 26 and the back wall 27 of the clean booth 10A, and are connected in the front-rear direction to form the first side wall 28 of the clean booth 10A. ing.

The upper end edge of the first wall panel 21 is airtightly connected to the outer peripheral edge of the ceiling (top panel 19b), and the lower end edge thereof is airtightly connected to the floor 20 (floor surface) of the building 11. The first wall panel 21 is removable inside the building 11 (indoor), and a plurality of them can be easily and quickly attached to the inside of the building 11 according to a predetermined manual (procedure). It can be easily and quickly removed from the inside of the object 11 and can be easily disassembled into a plurality of panels 21.

The second wall panels 22 are laterally connected to form the second front wall 29 of the clean booth 10A, and are connected in the front-rear direction to form the second side wall 30 of the clean booth 10A. The upper end edge of the second wall panel 22 is airtightly connected to the outer peripheral edge of the ceiling (top panel 19b), and the side edge thereof is airtightly connected to the side edge of the first wall panel 21. The lower end edge is airtightly connected to the floor 20 (floor surface) of the building 11. The second wall panel 22 is removable inside the building 11, and a plurality of them can be easily and quickly attached to the inside of the building 11 according to a predetermined manual (procedure). It can be easily removed from the inside and quickly, and can be easily disassembled into a plurality of panels 22.

In the clean booth 10A, a work booth 12 having a predetermined volume and a predetermined floor area surrounded by a ceiling panel 19 and a first wall panel 21 (first front wall 26, first side wall 28, back wall 27) is drawn. A cushioning of a predetermined volume and a predetermined floor area formed and surrounded by the ceiling panel 19 and the first and second wall panels 21 and 22 (first front wall 26, second front wall 29, second side wall 30). Space 15 is defined.

The work booth 12 has a work space having a predetermined volume and can accommodate various experimental equipment. A safety cabinet 31 is housed inside the illustrated work booth 12. In addition to the safety cabinet 31, the work booth 12 can accommodate a clean bench, a glove box, an isolator, and a fume hood, and various experimental devices such as a cell culture device, a centrifuge, and a refrigerator, a desk, and a shelf. , Computers (servers), etc. can be accommodated. The volume and floor area of the work booth 12 are not particularly limited, and the volume and floor area are determined by the contents of work performed in the work booth 12, the size of the experimental equipment to be accommodated, the number of experimental equipment, and the like.

The first doorway 13 is a facility for entering and exiting the work booth 12, and is open between the first front wall 26 formed by the first wall panel 21 (center of the first front wall 26). The first entrance / exit 13 has a rectangular shape whose planar shape is long in the vertical direction, and has an opening area through which an operator can pass. The air inside the work booth 12 flows out from the first entrance / exit 13.

The second entrance 14 is provided to enter and exit the buffer space 15 and opens between the second front walls 29 formed by the second wall panel 22 (center of the second front wall 29). The second entrance / exit 14 has a rectangular shape whose planar shape is long in the vertical direction, and has an opening area through which an operator can pass. The air in the buffer space 15 flows out from the second entrance / exit 14. The first entrance / exit 13 and the second entrance / exit 14 have the same shape and the same size, the second entrance / exit 14 faces the first entrance / exit 13, and the first entrance / exit 13 and the second entrance / exit 14 are front and back with the buffer space 15 interposed therebetween. The facilities are lined up in a row in the direction.

The buffer space 15 is located between the first entrance / exit 13 and the second entrance / exit 14, and is connected to the first entrance / exit 13 and the second entrance / exit 14. The buffer space 15 extends from the first entrance / exit 13 toward the second entrance / exit 14 in the front-rear direction (air outflow direction), and laterally (air outflow) between the first entrance / exit 13 and the second entrance / exit 14. It extends in the direction that intersects the direction). The air flowing out of the work booth 12 flows into the buffer space 15, and an air layer is formed by the air flowing through the space 15 from the first entrance / exit 13 toward the second entrance / exit 14.

A desk, a shelf, a computer (server), or the like can be installed in the buffer space 15, and the buffer space 15 can be used as a place for changing clothes of an operator. The volume and floor area of the buffer space 15 are not particularly limited, and the volume and floor area are determined by the volume and floor area of the work booth 12. Although not shown, the buffer space 15 does not extend in the lateral direction (direction intersecting the air outflow direction), and is in the front-rear direction (air outflow) from the first entrance / exit 13 toward the second entrance / exit 14. It may extend only in the direction).

Two fan filter units 16 (air supply means) arranged in the front-rear direction are installed in the ceiling space 23. A HEPA filter 32 (see FIG. 5) is installed in the fan filter unit 16. The fan filter unit 16 has an external air supply port 33 (outside air air outlet) for supplying external air (clean air) to the work booth 12. The external air supply port 33 for the external air of the fan filter unit 16 is installed on the ceiling panel 19 (top panel 19b) in the substantially central portion of the work booth 12, and is arranged in the front-rear direction. The air intake port 34 of the fan filter unit 16 is located in the ceiling space 23.

The fan filter unit 16 takes in the outside air inside the building 11 from the ceiling space 23, filters the outside air with the HEPA filter 32, and then passes through the outside air supply port 33 (temporary ceiling) to the floor inside the work booth 12. A predetermined amount of outside air (clean air) is supplied toward the surface. The fan filter unit 16 maintains the internal air pressure of the work booth 12 at a slightly positive pressure, and the air flow (external air air supply port) flowing in one direction (front-back direction) from the external air air supply port 33 toward the first entrance / exit 13. An air flow flowing in one direction from the first entrance / exit 13 toward the first entrance / exit 13 and from the first entrance / exit 13 to the second entrance / exit 14) is generated.

In the fan filter unit 16, the internal air pressure of the work booth 12 can be maintained at a slightly positive pressure while corresponding to the volume of the work booth 12 and the exhaust air volume of the air exhausted from the safety cabinet 31, and the external air to be supplied (air supply) ( Clean air) so that an air flow flowing in one direction (front-back direction) from the external air supply port 33 toward the first inlet / outlet 13 is generated inside the work booth 12 so that the air supply air volume (for example, 0.3 to 0.3) is generated. 0.4m / s) and the air supply direction are adjusted. Specifically, the air supply air volume of the fan filter unit 16 = the exhaust air volume of the air exhausted from the safety cabinet 31 + the exhaust air volume of the air exhausted from the clean booth 10A (second entrance / exit 14).

The adjustment of the air supply air volume of the fan filter unit 16 in the clean booth 10A (including the clean booths 10B, 10C, 10D) is slightly positive depending on the design air volume at the facility of the clean booth 10A (including the clean booths 10B, 10C, 10D). When the operator adjusts with the remote control switch on the outside of the work booth 12 at the start of operation of the clean booth 10A under the condition that the pressure is maintained, or the clean booth 10A (including the clean booths 10B, 10C, 10D). ) May be adjusted by automatic adjustment (feedback control, etc.) using a computer (control device), room pressure sensor, etc. after the facility.

As shown in FIG. 3, the safety cabinet 31 includes a work chamber 35 and a gantry 36 on which the work chamber 35 is mounted. An air inflow opening 37 and an air flow path 38 are formed in the safety cabinet 31, and a blower 39 (air supply and exhaust fan) and first and second HEPA filters 40 and 41 are installed. The working chamber 35 is a hexahedral box formed of a top plate, a bottom plate, a front plate, a back plate, and a side plate. As the front plate, a transparent plastic plate (acrylic board, polycarbonate board, vinyl chloride board, etc.) or a transparent glass plate is used. A front shutter that can be opened and closed is attached to the front plate. A front opening 42 is formed below the front plate, and the front opening 42 is opened and closed by the front shutter.

The air inflow opening 37 is located below the working chamber 35 and near the front opening 42. The air flow path 38 is connected to the air inflow opening 37, and the air flowing in from the air inflow opening 37 flows through the air flow path 38. An exhaust duct 43 (see FIG. 5) is connected to an air flow path 38 extending directly above the chamber 35. The exhaust duct 43 enters the ceiling space 23 from the safety cabinet 31 and is connected to the air exhaust gallery 25 attached to the ceiling panel 19 (side panel 19a).

The blower 39 is installed in the air flow path 38 extending directly above the work chamber 35, and the air flowing into the air flow path 38 is made to flow from the upper side to the lower side of the work chamber 35, and the air is flown to the air flow path 35. Inflows into the exhaust duct 43. The first HEPA filter 40 is installed directly above the working chamber 35 (top plate). The second HEPA filter 41 is installed above the air flow path 38 extending directly above the working chamber 38.

As shown by the arrow L1 in FIG. 3, the safety cabinet 31 takes in the air inside the work booth 12 when the blower 39 is activated, filters a part of the air with the first HEPA filter 40, and cleans the air. Air is supplied to the work chamber 35 to create a clean air space in the work chamber 35. Further, while filtering the residual air with the second HEPA filter 41, the residual air is exhausted to the outside (inside the building 11).

When performing various operations using the safety cabinet 31, an operator enters the work booth 12 through the second entrance 14 and the first entrance 13, and activates the fan filter unit 16 and the safety cabinet 31 (blower 39). Let me. The ON / OFF switch of the fan filter unit 16 and the safety cabinet 31 (blower 39) is installed inside the clean booth 10A. Further, the air conditioning equipment of the building 11 is in operation, and air conditioning air having a predetermined air volume is supplied to the inside of the building 11 from the air conditioning air supply port 18.

Experimenters, researchers, developers, and other workers who perform various experiments, research, development, and culture using the clean booth 10A (including clean booths 10B and 10C) are the fan filter unit 16 and the safety cabinet 31. Turn on the ON / OFF switch to activate the fan filter unit 16 and the safety cabinet 31 (blower 39), and enter the work booth 12 while wearing dust-free clothing.

When the fan filter unit 16 is activated, as shown by arrows L2 in FIGS. 4 and 5, the air inside the building 11 (external air) flows into the ceiling space 23 from the air intake gallery 24 and enters the ceiling space 23. It flows into the fan filter unit 16 from the located air intake port 34. The external air passes through the HEPA filter 32 of the fan filter unit 16 to become clean air, and is supplied from the external air air supply port 33 toward the floor surface inside the work booth 12.

Since the air volume of the clean air supplied from the fan filter unit 16 is adjusted to hold the internal air pressure of the work booth 12 at a slightly positive pressure, the work is performed by starting the fan filter unit 16 and the safety cabinet 31 (blower 39). The inside of the booth 12 becomes slightly positive pressure, and the air flow that flows in one direction (front-back direction) from the external air air supply port 33 of the fan filter unit 16 toward the first entrance / exit 13 (the first from the external air air supply port 33). An air flow flowing in one direction from the first entrance / exit 13 toward the second entrance / exit 14 while heading toward the entrance / exit 13) is generated.

A part of the clean air supplied to the inside of the work booth 12 flows into the air flow path 38 from the air inflow opening 37 of the safety cabinet 31, and after passing through the air flow path 38 and the first HEPA filter 40. After flowing into the working chamber 35 and passing through the second HEPA filter 41, the air is exhausted from the air exhaust gallery 25 to the inside (indoor) of the building 11 through the exhaust duct 43. Therefore, a part of the air supplied from the fan filter unit 16 is exhausted to the outside of the clean booth 10A (work booth 12) (inside the building 11).

Of the clean air supplied to the inside of the work booth 12, the remaining air excluding the air flowing into the front opening 42 of the safety cabinet 31 has the first entrance / exit 13 as shown by the arrow L3 in FIGS. It flows into the buffer space 15 through the buffer space 15, passes through the buffer space 15, and then flows into the inside (indoor) of the building 11 from the buffer space 15 through the second entrance / exit 14. The air that has flowed out to the inside of the building 11 (the outside air inside the building 11 (work room)) is again supplied to the inside of the work booth 12 by the fan filter unit 16.

In the clean booth 10A, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 18 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. It may occur and the disturbance may act on the second entrance 14 opening in the center of the second front wall 29. When the turbulence (disturbance) of the airflow generated by the supply of air-conditioned air acts on the second entrance / exit 14, a part of the outside air inside the building 11 (indoor) is generated as shown by arrows L4 in FIGS. It may flow into the buffer space 15 from the second entrance 14 (backflow).

However, in the clean booth 10A, even if the turbulence of the air flow caused by the supply of air-conditioned air (disturbance inside the building 11) acts on the second entrance / exit 14, it is between the first entrance / exit 13 and the second entrance / exit 14. The air layer (air flow supplied from the fan filter unit 16) of the buffer space 15 extending from the first entrance / exit 13 in the front-rear direction (air outflow direction) and laterally (direction intersecting with the air outflow direction) It becomes a resistance of the backflowing air, and the influence of the disturbance is mitigated and extinguished by the air layer of the buffer space 15, and as shown by arrows L2 in FIGS. The flow (air flow) is maintained.

In the clean booth 10A, the airflow inside the building 11 (working room) in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 18 of the air-conditioned equipment, and the air-conditioned air is caused by the air-conditioned air. Even if the disturbance (disturbance inside the building 11) acts on the second entrance / exit 14, the buffer space 15 is in the front-rear direction (air outflow) from the first entrance / exit 13 between the first entrance / exit 13 and the second entrance / exit 14. By extending in the lateral direction (direction) and laterally (direction intersecting the air outflow direction), the buffer space 15 has a predetermined volume in the front-rear direction and the lateral direction, and passes from the work booth 12 through the first entrance / exit 13. Air that flows out to the buffer space 15 and flows through the buffer space 15 to create an air flow (air flow) that flows out from the second entrance / exit 14 and flows through the buffer space 15 from the first entrance / exit 13 to the second entrance / exit 14. The layer (air flowing out of the work booth 12) acts as a resistance to the air flowing back from the second entrance 14 toward the buffer space 15, and the air flowing back from the second entrance 14 toward the buffer space 15 flows through the buffer space 14. Pushed back by the air layer. Therefore, the clean booth 10A can prevent the backflow of air from the first entrance / exit 13 to the inside of the work booth 12 even if the inside of the building 11 is disturbed by the supply of air-conditioned air, and the building. It is possible to prevent the air inside the 11 from flowing into the work booth 12.

In the clean booth 10A, even if the turbulence (disturbance) of the air flow caused by the supply of air-conditioned air acts on the second entrance 14 opening in the center of the second front wall 29, it is caused by the disturbance acting on the second entrance 14. The effect is mitigated and extinguished by the air layer of the buffer space 15 extending from the first entrance / exit 13 in the front-rear direction (air outflow direction) and laterally (intersectioning with the air outflow direction), and inside the work booth 12. Since the flow (air flow) through which the air flows out from the first entrance / exit 13 is maintained, it is possible to prevent the inflow (backflow) of the air inside the building 11 (indoor) due to the disturbance into the inside of the work booth 12. It is possible to maintain the clean state inside the work booth 12 without causing contamination in which the air inside the building 11 is mixed with the clean air inside the work booth 12.

In the clean booth 10A, a first entrance 13 and a second entrance 14 are formed therein, and since these entrances 13 and 14 are not shielded by doors or curtains, a hand is reached through the second entrance 14 to the buffer space 15. You can easily enter without touching or exit from the buffer space 15 without touching, and you can easily enter without touching the work booth 12 through the first entrance 13 or from the work booth 12. You can easily get out without touching it, and you can easily enter and leave the buffer space 15 and work booth 12 without touching it (same for clean booths 10B, 10C, 10D). The clean booth 10A does not allow workers to come into contact with the clean booth 10A when entering and exiting the clean booth 10A, and dust and germs on the buffer space 15 and the work booth 12 when entering and exiting the inside and exit of the buffer space 15 and the work booth 12. It is possible to prevent the adhesion of dust and bacteria, and it is possible to maintain the clean state of the clean booth 10A and prevent the adhesion of dust and germs to the worker when entering and exiting the buffer space 15 and the work booth 12. Yes (same for clean booths 10B, 10C, 10D).

FIG. 6 is a top view showing another example of the air flow in the clean booth 10A. In FIG. 6, the front-back direction is indicated by an arrow A, and the lateral direction is indicated by an arrow B. The difference of the clean booth 10A shown in FIG. 6 from that of FIG. 4 is that in addition to the turbulence (disturbance) of the airflow generated by the conditioned air supplied from the conditioned air supply port 18 of the conditioned equipment, the door 44 of the building 11 (disturbance). The point is that airflow turbulence (disturbance) occurs due to the opening and closing of the door).

In the clean booth 10A, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 18 of the air-conditioning equipment, and the door 44 (door) of the building 11 is opened and closed. Then, as shown by the arrow L5 in FIG. 6, the turbulence of the air flow (disturbance) occurs inside the building 11, and the turbulence of the air flow may act on the second entrance 14 opening in the center of the second front wall 29. be. It should be noted that the turbulence of the airflow (disturbance) may occur inside the building 11 only by opening and closing the door 44, and the turbulence of the airflow may act on the second entrance / exit 14. When the turbulence of the airflow generated by the conditioned air and the turbulence of the airflow caused by the opening and closing of the door 44 act on the second entrance / exit 14, a part of the outside air inside the building 11 (indoor) is buffered from the second entrance / exit 14. It may flow into 15 (backflow).

However, in the clean booth 10A, even if the turbulence (disturbance) of the air flow caused by the supply of air-conditioned air or the opening and closing of the door 44 acts on the second entrance / exit 14, it is between the first entrance / exit 13 and the second entrance / exit 14. The air layer (air flow supplied from the fan filter unit 16) of the buffer space 15 extending in the front-rear direction (air outflow direction) and laterally (intersecting the air outflow direction) from the first entrance / exit 13 flows backward. The air layer of the buffer space 15 alleviates and eliminates the influence of the disturbance, and as shown by the arrow L3 in FIG. 6, the flow of air flowing out from the first entrance / exit 13 of the air inside the work booth 12 ( Airflow) is maintained.

In the clean booth 10A, the airflow inside (indoors) of the building 11 in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 18 of the air-conditioning equipment and the opening and closing of the door 44, and the air-conditioned air is supplied. Even if the turbulence (disturbance) of the air flow caused by opening and closing the door 44 acts on the second entrance / exit 14, the buffer space 15 is located between the first entrance / exit 13 and the second entrance / exit 14 in the front-rear direction (air) from the first entrance / exit 13. The buffer space 15 has a predetermined volume in the front-rear direction and the lateral direction by extending in the lateral direction (direction intersecting with the outflow direction of air) as well as extending in the outflow direction of the work booth 12, and the first entrance / exit 13 is provided from the work booth 12. An air flow (air flow) that flows out through the buffer space 13 and flows out through the buffer space 15 and flows out from the second entrance / exit 14 is created, and the buffer space 15 flows from the first entrance / exit 13 toward the second entrance / exit 14. The air layer (air flowing out from the work booth 12) acts as a resistance to the air flowing back from the second entrance 14 toward the buffer space 15, and the air flowing back from the second entrance 14 toward the buffer space 15 forms the buffer space 15. It is pushed back by the circulating air layer. Therefore, the clean booth 10A can prevent backflow of air from the first entrance / exit 13 to the inside of the work booth 12 even if a disturbance occurs inside the building 11 due to the supply of air-conditioned air or the opening / closing of the door 44. At the same time, it is possible to prevent the inflow of air inside the building 11 into the work booth 12.

In the clean booth 10A, it is assumed that the turbulence of the air flow (disturbance inside the building 11) caused by the supply of air-conditioned air and the opening and closing of the door 44 acts on the second entrance 14 which opens in the center of the second front wall 29. However, the influence of the disturbance acting on the second entrance / exit 14 extends from the first entrance / exit 13 in the front-rear direction (air outflow direction) and laterally (direction intersecting with the air outflow direction) due to the air layer of the buffer space 15. Since the flow (air flow) that is relaxed and extinguished and flows out from the first entrance / exit 13 of the air inside the work booth 12 is maintained, the air inside the work booth 12 (indoor) due to the disturbance is maintained. The inflow (backflow) to the inside can be prevented, the air inside the building 11 does not mix with the clean air inside the work booth 12, and the clean state inside the work booth 12 is maintained. can do.

FIG. 7 is a top view of the clean booth 10B shown as another example, and FIG. 8 is a top view showing an example of the air flow in the clean booth 10B of FIG. 7. In FIG. 7, the front-back direction is indicated by an arrow A, and the lateral direction is indicated by an arrow B.

The difference between the clean booth 10B shown in FIG. 7 and that of FIG. 1 is that the second entrance / exit 14 does not face the first entrance / exit 13 in a straight line in the front-rear direction, and sandwiches the buffer space 15 (under the intervention of the buffer space 15). (2) The second entrance / exit 14 is installed at a position inclined at a predetermined angle with respect to the first entrance / exit 13. Since the other configurations of the clean booth 10B are the same as those of the clean booth 10A of FIG. 1, the description of the clean booth 10A of FIG. 1 is incorporated and the same reference numerals as those of FIG. 1 are used to indicate this clean booth. A detailed description of the other configurations of 10B will be omitted.

The clean booth 10B has a work booth 12, a first entrance / exit 13, a second entrance / exit 14, a buffer space 15 (buffer space), and a fan filter unit 16 (air supply means). The air-conditioning equipment installed in the work booth 12, the fan filter unit 16 (air supply means), and the building 11 are the same as those in the clean booth 10A of FIG. The work booth 12 houses a safety cabinet 31 (see FIG. 3).

The first entrance / exit 13 opens between the first front walls 26 formed by the first wall panel 21 (center of the first front wall 26), and the air inside the work booth 12 flows out. The second entrance 14 opens at the left end (left side with respect to the center) of the second front wall 29 formed by the second wall panel 22, and the air in the buffer space 15 flows out. The first entrance / exit 13 and the second entrance / exit 14 have the same shape and the same size, and their planar shapes are long in the vertical direction. The second entrance / exit 14 does not face the first entrance / exit 13 in a row, but opens diagonally to the right and forward with respect to the first entrance / exit 13 (under the intervention of the buffer space 15) with the buffer space 15 interposed therebetween. It is installed at a position inclined at a predetermined angle with respect to the entrance / exit 13.

The first entrance / exit 13 is not in the center of the first front wall 26, but is opened at the right end (right side with respect to the center) or the left end (left side with respect to the center) of the first front wall 26, and the second entrance / exit 14 is the second. The center of the second front wall 29, the right end of the second front wall 29 (right side with respect to the center), and the left end of the second front wall 29 (right side with respect to the center) so as to be positioned diagonally forward with respect to the entrance / exit 13. It may be open on the left side with respect to the center).

The buffer space 15 is located between the first entrance / exit 13 and the second entrance / exit 14, and is connected to the second entrance / exit 14 located diagonally forward from the first entrance / exit 13. The buffer space 15 extends from the first entrance / exit 13 toward the second entrance / exit 14 in the front-rear direction (air outflow direction), and laterally (air outflow) between the first entrance / exit 13 and the second entrance / exit 14. It extends in the direction that intersects the direction). The air flowing out of the work booth 12 flows into the buffer space 15, and an air layer is formed by the air flowing through the space 15 from the first entrance / exit 13 toward the second entrance / exit 14.

In the clean booth 10B, a predetermined amount of air-conditioned air is supplied to the inside of the building 11 (work room) from the air-conditioned air supply port 18 of the air-conditioning equipment, so that the air flow is turbulent inside the building 11. Airflow turbulence (disturbance) may act on the second entrance 14 that opens at the left end of the second front wall 29 (at a position inclined diagonally forward by a predetermined angle with respect to the first entrance 13). When the turbulence (disturbance) of the air flow generated by the supply of air-conditioned air acts on the second entrance / exit 14, a part of the external air inside the building 11 flows into the buffer space 15 from the second entrance / exit 14 (backflow). There is.

However, in the clean booth 10B, even if the turbulence of the air flow caused by the supply of air-conditioned air (disturbance inside the building 11) acts on the second entrance / exit 14, the first entrance / exit 13 and the first entrance / exit 13 are affected. A buffer space 15 extending in the front-rear direction (air outflow direction) and laterally (intersecting the air outflow direction) from the first entrance / exit 13 with the second entrance / exit 14 inclined diagonally forward by a predetermined angle. The air layer (air flow supplied from the fan filter unit 16) becomes the resistance of the backflowing air, and the disturbance is alleviated and extinguished by the air layer of the buffer space 15, and as shown by the arrow L3 in FIG. 8, the work booth 12 The flow (air flow) flowing out from the first entrance / exit 13 of the air inside the is maintained.

In the clean booth 10B, the airflow turbulence caused by the supply of air-conditioned air and the opening and closing of the door 44 (disturbance inside the building 11) or the turbulence of the airflow caused only by the opening and closing of the door 44 (building 11). Even if the disturbance inside the buffer space 15 acts on the second entrance / exit 14 which is tilted diagonally forward with respect to the first inlet / outlet 13 by a predetermined angle, the air layer of the buffer space 15 acts as a resistance to the backflow of air, and the air layer of the buffer space 15 becomes an air layer. The influence of the disturbance is mitigated and extinguished, and the flow (air flow) flowing out from the first entrance / exit 13 of the air inside the work booth 12 is maintained (see FIG. 6).

In the clean booth 10B, the airflow inside (indoors) of the building 11 in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 18 of the air-conditioned equipment (and / or the opening and closing of the door 44), and the air-conditioned air. Even if the air turbulence (disturbance) caused by the air supply (and / or opening / closing of the door 44) acts on the second entrance / exit 14, the entrance / exit 13 and the first entrance / exit 13 are inclined forward at a predetermined angle. The buffer space 15 extends from the first entrance / exit 13 in the front-rear direction (air outflow direction) and in the lateral direction (direction intersecting the air outflow direction) with the second entrance / exit 14. It has a predetermined volume in the front-rear direction (air outflow direction) and lateral direction (direction intersecting the air outflow direction), and flows out from the work booth 15 through the first entrance / exit 13 to the buffer space 15 and the buffer space 15. An air layer (air flowing out from the work booth 12) through which an air flow (air flow) is created and flows out from the second entrance / exit 14 and flows through the buffer space 15 from the first entrance / exit 13 to the second entrance / exit 14. Becomes a resistance of the air flowing back from the second entrance 14 toward the buffer space 15, and the air flowing back from the second entrance 14 toward the buffer space 15 is pushed back by the air layer flowing through the buffer space 15. Therefore, in the clean booth 10B, even if the inside of the building 11 is disturbed by the supply of air-conditioned air (and / or the opening and closing of the door 44), the backflow of air from the first entrance / exit 13 to the inside of the work booth 12 It is possible to prevent the air from flowing into the work booth 12 inside the building 11.

The clean booth 10B has a second entrance / exit 14 in which airflow turbulence (internal disturbance of the building 11) caused by air supply of air-conditioned air (and / or opening / closing of the door 44) opens at the left end of the second front wall 29. Even if it acts on, the influence of the disturbance acting on the second entrance / exit 14 extends from the first entrance / exit 13 in the front-rear direction (air outflow direction) and laterally (direction intersecting with the air outflow direction). The air layer in the work booth 12 relaxes and disappears, and the flow (air flow) in which the air inside the work booth 12 flows out from the first entrance / exit 13 is maintained, and the second entrance / exit 14 has a predetermined angle with respect to the first entrance / exit 13. Due to the inclined position, the air flowing back from the second entrance 14 cannot go directly to the first entrance 13, so that the inside of the air work booth 12 inside the building 11 (indoor) caused by the disturbance is caused. It is possible to prevent the inflow (backflow) to the inside of the work booth 12, and the air inside the building 11 does not cause contamination mixed with the clean air inside the work booth 12, and the clean state inside the work booth 12 is maintained. be able to. In the clean booth 10B, the second entrance / exit 14 is tilted at a predetermined angle with respect to the first entrance / exit 13, so that the first and second entrance / exit 13, depending on the arrangement of various equipment to be placed in the buffer space 15. The position of 14 can be freely determined, and the convenience of the buffer space 15 can be improved.

FIG. 9 is a top view of the clean booth 10C shown as another example, and FIG. 10 is a top view showing an example of the air flow in the clean booth 10C of FIG. In FIG. 9, the front-back direction is indicated by an arrow A, and the lateral direction is indicated by an arrow B.

The difference between the clean booth 10C shown in FIG. 9 and that of FIG. 1 is that the second entrance / exit 14 does not face the first entrance / exit 13 in a straight line, but sandwiches the buffer space 15 (under the intervention of the buffer space 15). 2 The entrance / exit 14 is located at a position substantially orthogonal to the first entrance / exit 13. Since the other configurations of the clean booth 10C are the same as those of the clean booth 10A of FIG. 1, the description of FIG. 1 is incorporated and the same reference numerals as those of FIG. A detailed description of the configuration will be omitted.

The clean booth 10C has a work booth 12, a first entrance / exit 13, a second entrance / exit 14, a buffer space 15 (buffer space), and a fan filter unit 16 (air supply means). The air-conditioning equipment installed in the work booth 12, the fan filter unit 16 (air supply means), and the building 11 are the same as those in the clean booth 10A of FIG. The work booth 12 houses a safety cabinet 31 (see FIG. 3).

The first entrance / exit 13 opens between the first front walls 26 formed by the first wall panel 21 (center of the first front wall 26), and the air inside the work booth 12 flows out. The second entrance / exit 14 opens into the second side wall 30 (the second side wall 30 located on the right side of the first front wall 26) formed by the second wall panel 22, and the air inside the buffer space 15 flows out. do. The first entrance / exit 13 and the second entrance / exit 14 have the same shape and the same size, and their planar shapes are long in the vertical direction. The second entrance / exit 14 does not face the first entrance / exit 13 in a straight line in the front-rear direction, and is located substantially orthogonal to the first entrance / exit 13 with the buffer space 15 interposed therebetween (under the intervention of the buffer space 15). It opens at a position bent by 90 °) and is installed on a second side wall 30 orthogonal to the first entrance 13 (first front wall 26). The first entrance / exit 13 is not in the center of the first front wall 26, but is opened at the right end (right side with respect to the center) or the left end (left side with respect to the center) of the first front wall 26, and the second entrance / exit 14 is the second. It may be open to the second side wall 30 located on the right or left side of the first front wall 26 so as to be located substantially orthogonal to the entrance / exit 13.

The buffer space 16 is located between the first entrance / exit 13 and the second entrance / exit 14, and is connected to the second entrance / exit 14 which is located substantially orthogonal to the first entrance / exit 13. The buffer space 15 extends from the first entrance / exit 13 toward the second entrance / exit 14 in the front-rear direction (air outflow direction), and laterally (air outflow) between the first entrance / exit 13 and the second entrance / exit 14. It extends in the direction that intersects the direction). The air flowing out of the work booth 12 flows into the buffer space 15, and an air layer is formed by the air flowing through the space 15 from the first entrance / exit 13 toward the second entrance / exit 14.

In the clean booth 10C, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 18 of the air-conditioning equipment, so that the airflow is turbulent inside the building 11 and the airflow is generated. The turbulence (disturbance) may act on the second entrance / exit 14 that opens at the second side wall 30 (position substantially orthogonal to the first entrance / exit 13.). When the turbulence (disturbance) of the air flow generated by the conditioned air acts on the second entrance / exit 14, a part of the outside air inside the building 11 (working room) flows into the buffer space 15 from the second entrance / exit 14 (backflow). In some cases.

However, in the clean booth 10C, even if the turbulence of the air flow caused by the supply of air-conditioned air (disturbance inside the building 11) acts on the second entrance / exit 14, the first entrance / exit 13 and the first entrance / exit 13 are affected. Air in the buffer space 15 extending in the front-rear direction (air outflow direction) and laterally (intersecting the air outflow direction) from the first entrance / exit 13 with the second entrance / exit 14 located substantially orthogonal to each other. The layer (air flow supplied from the fan filter unit 16) becomes the resistance of the backflowing air, and the disturbance is mitigated and extinguished by the air layer of the buffer space 15, and as shown by the arrow L3 in FIG. 10, the work booth 12 The flow (air flow) flowing out from the first entrance / exit 13 of the internal air is maintained.

In the clean booth 10C, the airflow turbulence caused by the supply of air-conditioned air and the opening and closing of the door 44 (disturbance inside the building 11) or the turbulence of the airflow caused only by the opening and closing of the door 44 (building 11). Even if the disturbance inside the buffer space 15 acts on the second entrance / exit 14 located substantially orthogonal to the first inlet / outlet 13, the air layer of the buffer space 15 becomes a resistance of the backflowing air, and the air layer of the buffer space 15 causes the air layer. The influence of the disturbance is mitigated and extinguished, and the flow (air flow) flowing out from the first entrance / exit 13 of the air inside the work booth 12 is maintained (see FIG. 6).

In the clean booth 10C, the airflow inside (indoors) of the building 11 in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 18 of the air-conditioned equipment (and / or the opening and closing of the door 44), and the air-conditioned air. Even if the disturbance caused by the turbulence of the air flow caused by the air supply (and / or the opening and closing of the door 44) acts on the second entrance / exit 14, the first entrance / exit 13 and the first entrance / exit 13 are located substantially orthogonal to each other. The buffer space 15 extends in the front-rear direction (air outflow direction) and laterally (intersections with the air outflow direction) from the first entrance / exit 13 between the two entrances and exits 14, so that the buffer space 15 extends in the front-rear direction. It has a predetermined volume in the (air outflow direction) and lateral direction (direction intersecting the air outflow direction), flows out from the work booth 15 through the first entrance / exit 13 to the buffer space 15, and passes through the buffer space 15. An air flow (air flow) that flows and flows out from the second entrance / exit 14 is created, and an air layer (air that flows out from the work booth 12) that flows through the buffer space 15 from the first entrance / exit 13 to the second entrance / exit 14 is the first. 2 It becomes a resistance of the air flowing back from the entrance 14 toward the buffer space 15, and the air flowing back from the second entrance 14 toward the buffer space 15 is pushed back by the air layer flowing through the buffer space 15. Therefore, in the clean booth 10C, even if the inside of the building 11 is disturbed by the supply of air-conditioned air (and / or the opening and closing of the door 44), the backflow of air from the first entrance / exit 13 to the inside of the work booth 12 It is possible to prevent the air from flowing into the work booth 12 inside the building 11.

In the clean booth 10C, airflow turbulence (internal disturbance of the building 11) caused by air supply of air conditioning air (and / or opening / closing of the door 44) acts on the second entrance 14 which opens to the second side wall 30. Even if this is the case, the effect of the disturbance acting on the second entrance / exit 14 is the air layer of the buffer space 15 that extends from the first entrance / exit 13 in the front-rear direction (air outflow direction) and in the lateral direction (direction intersecting the air outflow direction). The flow (air flow) that flows out from the first entrance / exit 13 of the air inside the work booth 12 is maintained, and the second entrance / exit 14 is located substantially orthogonal to the first entrance / exit 13. As a result, the air flowing back from the second entrance 14 cannot go directly to the first entrance 13, so that the air inside the building 11 (indoor) due to the disturbance flows into the work booth 12 (inside the work booth 12). Backflow) can be prevented, the air inside the building 11 does not cause contamination mixed with the clean air inside the work booth 12, and the clean state inside the work booth 12 can be maintained. In the clean booth 10C, the second entrance / exit 14 is positioned substantially orthogonal to the first entrance / exit 13, so that the first and second entrances 13 and 14 are arranged according to the arrangement of various equipment to be mounted in the buffer space 15. The position of the buffer space 15 can be freely determined, and the convenience of the buffer space 15 can be improved.

FIG. 11 is a top view of the clean booth 10D shown as another example, and FIG. 12 is a schematic configuration diagram of the static elimination air generation system 45. 13 is a top view showing an example of the air flow in the clean booth 10D of FIG. 11, and FIG. 14 is a side view showing an example of the air flow in the clean booth 10D of FIG. In FIGS. 11, 13, and 14, the front-back direction is indicated by an arrow A, the lateral direction is indicated by an arrow B, and the vertical direction is indicated by an arrow C.

The clean booth 10D shown in FIG. 11 differs from that of FIG. 1 in that it includes a static elimination air generator 48 that supplies the generated ionized air to the work booth 12 while generating ionized air, and the static elimination air generator 48. The ionized air air supply port 49 of the ionized air supplied to the work booth 12 is installed on the ceiling panel 19 (top panel 19b) located directly above the worker working in the safety cabinet 31. Since the other configurations of the clean booth 10D are the same as those of the clean booth 10A of FIG. 1, the description of FIG. 1 is incorporated and the same reference numerals as those of FIG. A detailed description of the configuration will be omitted.

The clean booth 10D includes a work booth 12, a first entrance / exit 13, a second entrance / exit 14, a buffer space 15 (buffer space), a fan filter unit 16 (air supply means), and an air elimination system 45 for static elimination. The air conditioning equipment installed in the work booth 12, the first entrance / exit 13, the second entrance / exit 14, the buffer space 15, the fan filter unit 16 (air supply means), and the building 11 are the same as those in the clean booth 10A of FIG. be. The work booth 12 houses a safety cabinet 31 (see FIG. 3).

As shown in FIG. 12, the static elimination air generation system 45 is formed of a blower 47 (blower fan), a HEPA filter 46, a static elimination air generator 48, an ionized air air supply port 49, and an ionized air air supply duct 50. There is. The blower 47 is installed in the ionized air supply duct 50 and sends the clean air filtered by the HEPA filter 46 to the static elimination air generator 48. The HEPA filter 46 is installed in an ionized air air supply duct 50 extending to the wake side of the blower 47, and filters the outside air to create clean air.

The static elimination air generator 48 is installed in an ionized air air supply duct 50 extending to the wake side of the HEPA filter 46. The static elimination air generator 48 ionizes the air with a high voltage to generate ionized air having positive and negative ions from the clean air. The charge of the charged material is neutralized (statically eliminated) by the ionized air generated from the static elimination air generator 48. As the static elimination air generator 48, any one of an ion engine type, a DC type, an AC type, a phased array type, a high frequency type, a pulse DC type, a pulse AC type, a plasma type, and a plasma DC pulse type can be used. ..

The ionized air air supply port 49 is connected to the ionized air air supply duct 50 and is installed on the ceiling panel 19 (top panel 19b) of the work booth 12 located directly above the worker working in the safety cabinet 31. The ionized air air supply duct 50 is installed in the ceiling space 23 and is connected to an air intake gallery 51 attached to the ceiling panel 19 (side panel 19a). When any of a clean bench, a glove box, an isolator, and a fume hood is housed in the work booth 12, the ionized air air supply port 49 is located directly above the worker working in those experimental facilities on the ceiling panel 19 (heaven). It is installed on the surface panel 19b).

In the clean booth 10D, the ionized air air supply port 49 is installed on the ceiling panel 19 of the work booth 12, but the ionized air air supply port 49 of the work booth 12 is located directly above the worker working in the safety cabinet 31. It may be installed on at least one of the ceiling panel 19 (top panel 19b) and the ceiling panel 19 (top panel 19b) of the cushioning space 15. When the ionized air air supply port 49 is installed on the ceiling panel 19 of the buffer space 15, an air flow of air passing through the buffer space 15 in one direction (front-back direction) from the first entrance / exit 13 toward the second entrance / exit 14. Is installed at a predetermined position on the ceiling panel 19 of the cushioning space 15 that does not cause backflow.

When the static elimination air generation system 45 is activated, the external air inside (indoors) of the building 11 flows into the ionized air supply duct 50 from the air intake gallery 51 by the blower 47, and the external air flows through the HEPA filter 46. After flowing into the static elimination air generator 48 and ionized air is generated by the static elimination air generator 48, a predetermined amount of ionized air flows from the ionized air air supply port 49 toward the floor surface inside the work booth 12. Is supplied with air. The ON / OFF switch of the static elimination air generation system 45 is installed inside the clean booth 10D.

In the clean booth 10D, the inside of the work booth 12 corresponds to the volume of the work booth 12, the amount of air exhausted from the safety cabinet 31, and the amount of ionized air supplied from the static elimination air generator 48. The air pressure can be maintained at a slightly positive pressure, and an air flow flowing in one direction (front-back direction) from the external air air supply port 33 toward the first inlet / outlet 13 is generated inside the work booth 12 by the external air to be supplied. In addition, the air supply air volume and the air supply direction of the fan filter unit 16 are adjusted. Specifically, the supply air volume of the fan filter unit 16 = (the exhaust air volume of the air exhausted from the safety cabinet 31 + the exhaust air volume of the air exhausted from the clean booth 10D (second entrance / exit 14))-the generation of static elimination air. It is the amount of air supplied from the ionized air supplied from the device 48.

Workers who perform various experiments, research, development, culture, etc. using the clean booth 10D turn on the ON / OFF switch of the fan filter unit 16, the safety cabinet 31 (blower 39), and the static elimination air generation system 45. The fan filter unit 16, the safety cabinet 31, and the static elimination air generation system 45 are activated, and the work booth 12 is entered while wearing dust-free clothing.

When the fan filter unit 16, the safety cabinet 31 (blower 39), and the static elimination air generation system 45 are activated, the air inside the building 11 (external air) changes from the air intake gallery 24, 51 to the ceiling space 23 and ionized air. It flows into the air supply duct 50, flows into the fan filter unit 16 from the ceiling space 23, passes through the HEPA filter 46 from the ionized air air supply duct 50, and flows into the static elimination air generator 48. External air passes through the HEPA filter 32 of the fan filter unit 16 and is supplied from the external air air supply port 33 toward the floor inside the work booth 12, and the ionized air is supplied from the ionized air air supply port 49 to the work booth 12. Air is supplied toward the floor inside the building.

Since the air volume of the external air (clean air) supplied from the fan filter unit 16 is adjusted to hold the internal air pressure of the work booth 12 at a slightly positive pressure, the fan filter unit 16 and the safety cabinet 31 (blower 39) When the static elimination air generation system 45 is activated, the inside of the work booth 12 becomes slightly positive pressure and flows in one direction (front-back direction) from the external air supply port 33 of the fan filter unit 16 toward the first inlet / outlet 13. Airflow is generated.

The ionized air supplied to the inside of the work booth 12 is supplied toward the worker from above the worker working in the safety cabinet 31 as shown by arrows L6 in FIGS. 14 and 15. When the dust-free garment worn by the worker is charged, the charge of the dust-free garment (charged material) is neutralized (statically eliminated) by the ionized air. A part of the external air (clean air) and ionized air supplied to the inside of the work booth 12 flows into the air flow path 38 from the air inflow opening 37 of the safety cabinet 31, and passes through the air flow path 38 to the first HEPA. After passing through the filter 40, it flows into the work chamber 35, and after passing through the second HEPA filter 41, it is exhausted from the air exhaust gallery 25 to the inside (indoor) of the building 11 through the exhaust duct 43. (See FIG. 3). Therefore, a part of the external air supplied from the fan filter unit 16 and the ionized air supplied from the static elimination air generator 48 is outside the clean booth 10D (work booth 12) (inside the building 11). Is exhausted to.

The remaining air (clean air and ionized air) excluding the clean air supplied to the inside of the work booth 12 and the air flowing into the safety cabinet 31 among the ionized air is shown by arrows L3 in FIGS. 13 and 14. , Flows into the buffer space 14 through the first doorway 13, flows through the buffer space 15, and then passes through the second doorway 14 from the buffer space 15 to the outside of the clean booth 10D (inside the building 11). Leaked into. The air that has flowed out to the inside of the building 11 (external air inside the building 11) is again supplied to the inside of the work booth 12 by the fan filter unit 16 and the static elimination air generation system 45.

In the clean booth 10D, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 18 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. It may occur and airflow turbulence may act on the second entrance 14 opening in the center of the second front wall 26. When the turbulence (disturbance) of the air flow generated by the conditioned air acts on the second entrance / exit 14, a part of the outside air inside the building 11 (indoor) flows into the buffer space 15 from the second entrance / exit 14 (backflow). There is.

However, in the clean booth 10D, even if the turbulence of the air flow caused by the supply of air-conditioned air (disturbance inside the building 11) acts on the second entrance / exit 14, it is between the first entrance / exit 13 and the second entrance / exit 14. From the air layer (fan filter unit 16 and static elimination air generation system 45) of the buffer space 15 extending from the first entrance / exit 13 in the front-rear direction (air outflow direction) and laterally (direction intersecting with the air outflow direction). (Supplied airflow) becomes the resistance of the backflowing air, the influence of the disturbance is mitigated and extinguished by the air layer of the buffer space 15, and the flow (airflow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12. Is maintained.

In the clean booth 10D, the turbulence of the airflow caused by the supply of air-conditioned air and the opening and closing of the door 44 (disturbance inside the building 11) or the turbulence of the airflow caused only by the opening and closing of the door 44 (building 11). Even if the internal disturbance (internal disturbance) acts on the second entrance 14 that opens in the center of the second front wall 26, the air layer of the buffer space 15 becomes a resistance of the backflowing air, and the air layer of the buffer space 15 causes the disturbance. The influence is mitigated and extinguished, and the flow (air flow) flowing out from the first entrance / exit 13 of the air inside the work booth 12 is maintained (see FIG. 6).

In the clean booth 10D, the airflow inside the building 11 (working room) in which it is installed is disturbed by the air-conditioned air (and / or the opening and closing of the door 44) supplied from the air-conditioned air supply port 18 of the air-conditioning equipment. Even if the turbulence of the air flow (disturbance inside the building 11) caused by the supply of air-conditioned air (and / or the opening and closing of the door 44) acts on the second entrance / exit 14, the buffer space 15 becomes the first entrance / exit 13. The buffer space 15 extends in the front-rear direction (air outflow direction) and laterally (intersections with the air outflow direction) from the first entrance / exit 13 to and from the second entrance 14 in the front-rear direction (air outflow direction). It has a predetermined volume in the outflow direction) and the lateral direction (the direction intersecting the outflow direction of air), flows out from the work booth 12 through the first entrance / exit 13 to the buffer space 15, and flows through the buffer space 15. 2 An air flow (air flow) flowing out from the entrance 14 is created, and an air layer (air flowing out from the work booth 12) flowing through the buffer space 15 from the first entrance 13 to the second entrance 14 is the second entrance 14. It becomes a resistance of the air flowing back toward the buffer space 15, and the air flowing back from the second entrance 14 toward the buffer space 15 is pushed back by the air layer flowing through the buffer space 15. Therefore, in the clean booth 10D, even if the inside of the building 11 is disturbed by the supply of air-conditioned air (and / or the opening and closing of the door 44), the backflow of air from the first entrance / exit 13 to the inside of the work booth 12 It is possible to prevent the air from flowing into the work booth 12 inside the building 11.

In the clean booth 10D, even if the turbulence (disturbance) of the air flow caused by the supply of air-conditioned air (and / or the opening and closing of the door 44) acts on the second entrance 14 opening in the center of the second front wall 26, The influence of the disturbance acting on the second entrance / exit 14 is mitigated by the air layer of the buffer space 15 extending from the first entrance / exit 13 in the front-rear direction (air outflow direction) and laterally (direction intersecting with the air outflow direction). Since it disappears and the flow (air flow) flowing out from the first entrance / exit 13 of the air inside the work booth 12 is maintained, the air inside the building 11 (indoor) due to the disturbance goes into the work booth 12. The inflow (backflow) of the air can be prevented, the air inside the building 11 does not mix with the clean air inside the work booth 12, and the clean state inside the work booth 12 is maintained. Can be done.

In the clean booth 10D, the ionized air generated by the static eliminator air generator 48 (static eliminator air generation system 45) is supplied to the worker from the ceiling panel 19 of the work booth 12, so that the worker's clothes ( It is possible to eliminate (neutralize) the electric charge charged in the dust-free clothing by ionized air, prevent the generation of static electricity in the worker, and prevent the adhesion of dust to the worker's clothing due to static electricity. can. The clean booth 10D can prevent the clothes and equipment from being charged by static electricity generated during work by supplying ionized air, and the worker's clothes and equipment are not charged by the ionized air. Even if dust adheres to the equipment or equipment, the dust can be easily removed.

In the clean booth 10D, the ionized air supply port 49 does not reverse the air flow of the air flowing through the buffer space 15 in one direction (front-back direction) from the first entrance 13 to the second entrance 14. When installed on the ceiling panel 19, the airflow generated in the buffer space 15 in one direction is not disturbed or backflowed by the ionized air supplied from the static elimination air generator 48, and the airflow in the buffer space 15 is not disturbed or backflowed. It is possible to prevent the backflow of air from the first entrance / exit 13 to the inside of the work booth 12 caused by the turbulence of the work booth 12, and it is possible to maintain the clean state inside the work booth 12.

Other factors that cause disturbance inside the building 11 include the traffic of people and objects in the vicinity of the second entrance / exit 14, the operation of the local air supply device and the local exhaust device inside the building 11, and the building. There is a sudden temperature difference between the inside of 11 and the inside of clean booths 10A to 10D. In the clean booths 10A to 10D, even if those disturbances occur, the presence of the buffer space 15 causes the inflow (backflow) of air inside the building 11 (indoor) into the work booth 12 due to the disturbances. It is possible to maintain the clean state inside the work booth 12 without causing contamination in which the air inside the building 11 is mixed with the clean air inside the work booth 12.

10A Clean booth 10B Clean booth 10C Clean booth 10D Clean booth 11 Building 12 Work booth 13 1st entrance 14 2nd entrance 15 Buffer space 16 Fan filter unit (air supply means)
17 Ceiling 18 Air conditioning air supply port 19 Ceiling panel 19a Side panel 19b Top panel 20 Floor 21 First wall panel 22 Second wall panel 23 Ceiling space 24 Air intake gallery 25 Air exhaust gallery 26 First front wall 27 Back Wall 28 1st side wall 29 2nd front wall 30 2nd side wall 31 Safety cabinet 32 HEPA filter 33 External air air supply port 39 Blower 40 1st HEPA filter 41 2nd HEPA filter 42 Front opening 43 Exhaust duct 44 Door 45 For static elimination Air generation system 46 HEPA filter 47 Blower 48 Static elimination air generator 49 Ionized air air supply port 50 Ionized air air supply duct 51 Air intake gallery

Claims (13)

At the clean booth installed in the designated place of the building
The clean booth has a work booth of a predetermined volume capable of accommodating various experimental facilities and having a predetermined work space, and an opening area that is installed for entering and exiting the work booth and is accessible to workers. The work booth is provided with a first inlet / outlet for opening and outflowing air in the work booth, and an external air air supply port for supplying external air to the work booth, from the external air supply port toward the first inlet / outlet. and air supply means for generating an air flow flowing in one direction, and a buffer space of a predetermined volume of air flows flowing out of the work booth connected to the first doorway, the work is the facility to and from the said buffer space It has an opening area that allows a person to pass through, and has a second entrance / exit through which air in the buffer space flows out.
In the clean booth, an air flow flowing in one direction from the external air supply port toward the first inlet / outlet is generated in the work booth by the external air supplied from the external air supply port to the work booth. As described above, when the air supply air volume of the air supply means is adjusted and the turbulence (disturbance) of the airflow in the building outside the clean booth acts on the second entrance / exit, the disturbance acting on the second entrance / exit. The effect of the above is mitigated by the buffer space, and the air flowing through the buffer space from the first entrance / exit toward the second entrance / exit does not flow back into the work booth from the first entrance / exit. A clean booth characterized in that air flows out from the first entrance / exit to the buffer space. The planar shape of the first entrance / exit exhibits a vertically long quadrangle, and the planar shape of the second entrance / exit exhibits a vertically long quadrangle, and flows from the work booth through the first entrance / exit into the buffer space. The clean booth according to claim 1, wherein the air that has flowed through the buffer space flows from the buffer space into the inside of the building through the second entrance / exit. The clean booth according to claim 1 or 2, wherein the buffer space extends from the first entrance / exit in the direction of air outflow between the first entrance / exit and the second entrance / exit. The buffer space, wherein with and extends from the first entrance to the outflow direction of the air between the first doorway and the second doorway, claim extends in a direction intersecting the direction of flow of the air 1 or The clean booth according to claim 2. The clean according to any one of claims 1 to 4 , wherein the second entrance / exit faces the first entrance / exit and is installed in a line with respect to the first entrance / exit with the buffer space in between. booth. The second doorway, wherein not facing the first doorway according to any one of claims 1 to 4 are facilities at a position inclined by a prescribed angle with respect to the first doorway across the buffer space Clean booth. The invention according to any one of claims 1 to 4 , wherein the second entrance / exit does not face the first entrance / exit and is installed at a position substantially orthogonal to the first entrance / exit under the intervention of the buffer space. Clean booth. The building is provided with an air-conditioned air air supply port that is installed outside the clean booth and supplies air-conditioned air generated by the air-conditioning equipment into the building. In the clean booth, the air-conditioned air air supply port is provided. When the turbulence (disturbance) of the air-conditioning air supplied from the air-conditioned air acts on the second entrance / exit, the influence of the disturbance acting on the second entrance / exit is mitigated by the buffer space, and the air in the work booth becomes the same. clean booth according to any one of claims 7 to claims 1 and flows out to the buffer space from the first doorway. A ceiling panel in which the clean booth is detachably installed in the building, and a first wall panel in which the clean booth is detachably installed between the floor of the building and the ceiling panel and surrounds the work booth. A second wall panel that is detachably installed between the floor of the building and the ceiling panel and is connected to the first wall panel and surrounds the buffer space, the first entrance / exit is said to be said. The clean booth according to any one of claims 1 to 8, which is open between the first wall panels and the second entrance is open between the second wall panels. The air supply means is a fan filter unit installed on the ceiling panel, and in the clean booth, the external air supplied from the external air supply port to the work booth from the external air supply port. The clean booth according to claim 9, wherein the air supply air volume of the fan filter unit is adjusted so that an air flow flowing in one direction toward the first entrance / exit is generated in the work booth. The experimental facility is at least one of a safety cabinet, a clean bench, a glove box, an isolator, and a fume hood, and in the clean booth, the external air supplied from the external air supply port to the work booth. The safety cabinet, the clean bench, the glove box, the isolator, and the fume hood that have been operated so that an air flow flowing in one direction from the external air supply port toward the first inlet / outlet is generated in the work booth. The clean booth according to claim 9 or 10, wherein the supply air volume of the fan filter unit is adjusted according to the exhaust air volume of the fan filter unit. The clean booth includes a static elimination air generator that supplies ionized air generated while generating ionized air to at least one of the work booth and the buffer space, and is supplied by the static elimination air generator. The ionized air air supply port of the ionized air to be formed is from the ceiling panel located directly above the safety cabinet, the clean bench, the glove box, the isolator, the worker working in the draft chamber, and the first entrance / exit. 11. The clean according to claim 11, which is installed on at least one of the ceiling panels of the buffer space, which does not reverse the air flow that flows in one direction through the buffer space toward the second entrance / exit. booth. In the clean booth, an air flow flowing in one direction from the external air supply port toward the first inlet / outlet is generated in the work booth by the external air supplied from the external air supply port to the work booth. As described in claim 12, the amount of air supplied to the fan filter unit is adjusted in accordance with the amount of air exhausted from the experimental equipment and the amount of air supplied from the ionized air supplied from the static elimination air generator. Clean booth.

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