JP7039123B2 - Clean booth - Google Patents

Description

The present invention relates to a clean booth installed at a predetermined location inside a building.

It is provided with at least a frame framed by a frame material and a covering material that covers the entire circumference of the frame material, and the covering material is a ceiling covering material made of an airtight soft sheet and a peripheral side surface covering material. The ceiling covering material is formed from the canopy portion that covers the entire ceiling portion of the frame and the hanging portion that hangs downward from the periphery of the canopy portion and covers the upper side of the surrounding side surface portion. A clean booth is disclosed in which a peripheral side surface covering material is freely connected by a mechanical fastener (see Patent Document 1).

Further, a circulation utilization type safety cabinet formed from a safety cabinet main body and an exhaust recirculation unit and utilizing exhaust gas is disclosed (see Patent Document 2). The safety cabinet body uses a HEPA filter for air supply located at the bottom of the discharge plenum of the cabinet blower to supply clean air to the work space inside it, and the air in the work space is sucked and circulated again by the cabinet blower. By discharging a part of the air circulated from the work space to the outside through the exhaust HEPA filter located above the discharge plenum, the work space is maintained at a negative pressure, and the external introduction is supplied from the front shutter opening. Take in the air and make it a barrier air. The exhaust recirculation unit is arranged directly above the safety cabinet body, and has an exhaust intake port at the rear of the lower surface for taking in the air discharged from the safety cabinet body through the exhaust HEPA filter, and the air taken in from the exhaust intake port. The front part of the lower surface is equipped with an exhaust outlet that blows downward along the shutter on the front of the safety cabinet body. In this safety cabinet, the air falling along the shutter on the front of the safety cabinet body is sucked from the opening at the lower end of the shutter into the work space maintained at a negative pressure, so that the air in the work space is sucked from the opening. It is circulated as all or part of the barrier air that prevents it from leaking.

The exhaust / recirculation unit of the safety cabinet disclosed in Patent Document 2 includes four support legs that support the exhaust / recirculation unit by arranging them on the ceiling plate of the safety cabinet body, and between the support legs on the left front and rear and on the right front and rear. A partition along both support legs is installed between the support legs (see FIG. 5 of Patent Document 1). In the exhaust recirculation unit, the air blown out from the exhaust outlet is prevented from leaking into the clean room by a partition between the two. In this safety cabinet, the amount of barrier air that is sucked in and introduced into the work space of the safety cabinet body from the front of the safety cabinet body is the amount of air that passes through the HEPA filter for exhaust, and that air volume is from the exhaust outlet to the safety cabinet body. The airflow descends from the front and is supplied to the seating work area.

Japanese Unexamined Patent Publication No. 2004-360269 JP-A-2015-166646

The clean booth disclosed in Patent Document 1 manually connects the ceiling covering material and the peripheral side surface covering material by operating the mechanical fastener when the worker enters the room or leaves the room. At the same time as releasing, it is necessary to connect the ceiling covering material and the surrounding side surface covering material, which not only makes it complicated to enter and leave the room and requires time and effort to enter and leave the room, but also the ceiling covering material and the surrounding side surface when entering and leaving the room. When the body comes into contact with the dressing, there is a risk that impurities such as dust and germs will adhere to the dressing and the changing clothes of the worker.

An air conditioner (air conditioner) is installed in the clean room equipped with the exhaust / recirculation unit (safety cabinet main body) disclosed in Patent Document 2, and a door for entering / exiting is installed on the wall of the clean room. While workers can access the safety cabinet hands-free, when the air conditioner operates or the door is opened and closed, the airflow inside the clean room is turbulent, and the turbulence (disturbance) of the airflow is exhausted and recirculated. When acting on the opening area (doorway) of the unit, the air inside the clean room flows into the inside of the exhaust / recirculation unit from the opening area of the exhaust / recirculation unit (backflow). When the air inside the clean room flows into the inside of the exhaust / recirculation unit, the air inside the clean room mixes with the clean air inside the exhaust / recirculation unit, causing contamination, and the inside of the exhaust / recirculation unit (safety cabinet body) is in a clean state. May not be able to hold.

An object of the present invention is that the inside of the work booth can be easily entered without any trouble and without touching, and the inside of the work booth can be easily exited without any trouble and without touching. The purpose is to provide a clean booth that can prevent dust and germs from adhering to workers when entering and exiting the work booth. Another object of the present invention is to return the air that has passed through the experimental equipment to the clean booth, thereby preventing the design air volume shortage of the supply air in the clean booth, and the air inside the building is the clean booth. The purpose is to provide a clean booth that can maintain the clean state inside the work booth without flowing back from the doorway to the inside of the work booth that houses the predetermined experimental equipment. Another object of the present invention is that even if an airflow turbulence (disturbance) occurs inside the building due to a predetermined factor and the turbulence of the airflow generated inside the building acts, the air inside the building It is possible to prevent the inflow to the inside of the work booth, prevent the air inside the building from being mixed with the clean air inside the work booth, and maintain the clean state inside the work booth. It is to provide a clean booth that can be done.

The premise of the present invention for solving the above-mentioned problems is a clean booth installed at a predetermined place in a building.

A feature of the present invention in the above premise is that the clean booth can accommodate experimental equipment which is at least one of a safety cabinet, a clean bench, a glove box, an isolator, and a draft chamber, and has a predetermined work space. A volumetric work booth, a top panel that is detachably installed inside the building, and a first wall panel that is detachably installed between the floor and the top panel of the building and surrounds the work booth. It has a first entrance / exit where the air inside the work booth flows out, which is installed to enter and exit the work booth, and an external air air supply port installed on the top panel to supply external air to the work booth. A fan filter unit installed on the top panel to generate an air flow that flows in one direction from the external air air supply port to the first inlet / outlet , and a return air first air supply port installed at a predetermined location in the work booth. The clean booth is equipped with at least one of the return air means for returning the air that has passed through the experimental equipment to the work booth and the exhaust means for exhausting the air that has passed through the experimental equipment to the outside. , The external air supplied to the work booth from the external air supply port of the fan filter unit generates an air flow that flows in one direction from the external air air supply port toward the first inlet / outlet inside the work booth, and the first inlet / outlet The air inside the work booth flows out from the first entrance / exit without the air flowing back into the work booth. It should be noted that the return air means is used so that an air flow flowing in one direction from the external air air supply port to the first inlet / outlet is generated inside the work booth by the external air supplied to the work booth from the part air air supply port. The amount of air supplied from the air supply means may be adjusted in correspondence with at least one of the amount of return air and the amount of exhaust air from the exhaust means.

As an example of the present invention, the return air first air supply port of the air returned to the work booth by the return air means is the external air generated inside the work booth by the air supplied from the external air air supply port. It is installed at a predetermined location in the work booth where the airflow flowing in one direction from the air supply port to the first entrance / exit does not flow back.

As another example of the present invention, the return air first air supply port is directed from the external air air supply port generated inside the work booth by the air supplied from the external air air supply port toward the first inlet / outlet. From the specified location on the top panel that does not allow the airflow flowing in the direction to flow backward, and from the external air supply port generated inside the work booth by the air supplied from the external air supply port toward the first inlet / outlet. It is installed at least one of a predetermined location on the first wall panel that does not allow the airflow flowing in one direction to flow backward.

As another example of the present invention, a clean booth is installed in a buffer space having a predetermined volume in which air flowing out of the work booth is connected to the first entrance and exit, and inside the buffer space. In the clean booth, including the second inlet / outlet where air flows out, the airflow flowing in one direction from the external air air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air air supply port works. In addition to being generated inside the booth, airflow that flows in one direction from the first doorway to the second doorway is generated in the buffer space, and the air that passes through the buffer space flows back from the first doorway to the inside of the work booth. Instead, the air inside the work booth flows out from the first doorway to the buffer space. The external air supplied to the work booth from the external air air supply port generates an air flow that flows in one direction from the external air air supply port toward the first inlet / outlet inside the work booth, and also from the first inlet / outlet to the first inlet / outlet. 2 Air supplied from the air supply means corresponding to at least one of the return air volume by the return air means and the exhaust air volume by the exhaust means so that the air flow flowing in one direction toward the inlet / outlet is generated in the buffer space. May adjust the amount of air supply.

As another example of the present invention, the return air second air supply port of the air returned to the buffer space by the return air means flows through the buffer space in one direction from the first inlet / outlet to the second inlet / outlet. It is installed in a predetermined place in a buffer space that does not allow the air flow to flow back.

Another example of the present invention includes a second wall panel in which a clean booth is detachably installed between the floor of the building and the top panel and is connected to the first wall panel to surround the buffer space. , A predetermined return air supply port of the first wall panel facing the buffer space in which the air flow of air passing through the buffer space in one direction from the first inlet / outlet to the second inlet / outlet does not flow back. A predetermined location on the top panel of the buffer space that does not cause the air flow that flows in one direction through the buffer space from the first entrance to the second entrance, and a predetermined location on the top panel of the buffer space, and the first entrance to the second entrance. It is installed at least one of a predetermined location on the second wall panel that does not reverse the airflow of air that flows in one direction through the buffer space toward.

As another example of the present invention, the buffer space extends from the first inlet / outlet in the air outflow direction and extends in the direction intersecting the air outflow direction between the first inlet / outlet and the second inlet / outlet, and returns. A predetermined part of the first wall panel facing the buffer space where the air second air supply port extends in the direction intersecting the air outflow direction, and the top panel of the buffer space extending in the direction intersecting the air outflow direction. It is installed at least one of a predetermined location and a predetermined location of the second wall panel surrounding the buffer space extending in the direction intersecting the air outflow direction.

As another example of the present invention, the second entrance / exit faces the first entrance / exit, and is installed in a line with respect to the first entrance / exit with a buffer space in between, and the return air second air supply port is provided. A predetermined location on the first wall panel facing the buffer space, a predetermined location on the remaining top panel excluding the top panel located directly above the first and second doorways, and a second wall surrounding the buffer space. It is installed in at least one of the predetermined locations on the panel.

As another example of the present invention, the second entrance / exit is installed at a position inclined at a predetermined angle with respect to the first entrance / exit across the buffer space without facing the first entrance / exit, and the return air second air supply port is provided. However, a predetermined portion of the first wall panel facing the cushioning space, a predetermined portion of the remaining top panel excluding the top panel located directly above the first and second entrances and exits, and a predetermined portion surrounding the cushioning space. It is installed at least one of the two wall panels at a predetermined location.

As another example of the present invention, the second entrance / exit is installed at a position substantially orthogonal to the first entrance / exit without facing the first entrance / exit, and the return air second air supply port is provided. , A predetermined location on the first wall panel facing the cushioning space, a predetermined location on the remaining top panel excluding the top panel located directly above the first and second doorways, and a second surrounding the cushioning space. Clean booths installed in at least one of the designated locations on the wall panel

As another example of the present invention, in the clean booth, when the turbulence (turbulence) of the airflow inside the building outside the clean booth acts on the second entrance / exit, the influence of the turbulence of the airflow acting on the second entrance / exit is buffered. It is relaxed by the space, and the air inside the work booth flows out from the first entrance to the buffer space.

As another example of the present invention, the building is provided with an air-conditioned air air supply port that is installed outside the clean booth and supplies air-conditioned air generated by the air-conditioning equipment to the inside of the building. When the turbulence (disturbance) of the air-conditioning air supplied from the conditioned air supply port acts on the second inlet / outlet, the influence of the turbulence of the airflow acting on the second inlet / outlet is mitigated by the buffer space, and the inside of the work booth. Air flows out from the first doorway to the buffer space.

As another example of the present invention, in the clean booth, an air flow flowing in one direction from the external air air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air air supply port of the fan filter unit. In addition to being generated inside the work booth, airflow flowing in one direction from the first doorway to the second doorway is generated in the buffer space. In addition, the external air supplied to the work booth from the external air air supply port of the fan filter unit generates an air flow that flows in one direction from the external air air supply port toward the first inlet / outlet inside the work booth, and at the same time, the first air flow is generated inside the work booth. The fan filter unit has a fan filter unit that corresponds to at least one of the return air volume by the return air means and the exhaust air volume by the exhaust means so that the airflow flowing in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space. The air supply air volume may be adjusted.

As another example of the present invention, in the clean booth, an air flow flowing in one direction from the external air air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air air supply port flows into the work booth. Return air volume and exhaust air volume of operating safety cabinets, clean benches, glove boxes, isolators, and fume hoods so that airflow that is generated and flows in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space. The air supply air volume of the fan filter unit is adjusted so as to correspond to at least one of the above.

As another example of the present invention, the clean booth includes a static elimination air generator that supplies the ionized air generated while generating ionized air to at least one of the work booth and the buffer space, and the static elimination air is included. The ionized air air supply port of the ionized air supplied by the generator is the top panel located directly above the worker working in the safety cabinet, clean bench, glove box, isolator, draft chamber, and the first doorway. 2 It is installed on at least one of the top panel of the buffer space that does not reverse the air flow that flows in one direction through the buffer space toward the doorway.

As another example of the present invention, in the clean booth, the airflow flowing in one direction from the external air air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air air supply port is inside the work booth. At least the return air volume of the return air volume by the return air means and the exhaust air volume by the exhaust means so that the airflow flowing in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space. The air supply air volume of the fan filter unit is adjusted according to the air supply air volume of the ionized air supplied from the static elimination air generator.

According to the clean booth according to the present invention, since the first doorway is created in the clean booth and the first doorway is not shielded by the door or the curtain, the work booth can be easily passed through the first doorway without touching the work booth. You can easily enter and leave the work booth without touching it, and you can easily enter and leave the work booth without touching it. The clean booth does not allow workers to come into contact with the clean booth when entering and exiting the booth, and can prevent dust and germs from adhering to the work booth when entering and exiting the inside of the work booth. The state can be maintained, and dust and germs can be prevented from adhering to the worker when entering and exiting the work booth. The clean booth has a work booth of a predetermined volume that can accommodate various experimental equipment and has a predetermined work space, and a first entrance / exit that is installed to enter and exit the work booth and the air inside the work booth flows out. The work booth has an external air air supply port that supplies external air, and has passed through an air supply means that generates an air flow that flows in one direction from the external air air supply port toward the first inlet / outlet, and experimental equipment. It is equipped with at least a return air means for returning air to the work booth and an exhaust means for exhausting the air that has passed through the experimental equipment to the outside, and the air is supplied to the work booth from the external air supply port. External air creates an air flow inside the work booth that flows in one direction from the external air air supply port to the first inlet / outlet (or external air is supplied by the external air supplied to the work booth from the external air air supply port. Air is supplied in correspondence with at least one of the return air volume by the return air means and the exhaust air volume by the exhaust means so that the air flow flowing in one direction from the air port to the first inlet / outlet is generated inside the work booth. The amount of air supplied from the means is adjusted), and the air that has passed through the experimental equipment is returned to the work booth to prevent the design air volume in the work booth from being insufficient and the air speed from the first entrance / exit from dropping. At the same time, the air inside the work booth does not flow back from the first doorway to the inside of the work booth, and the air inside the work booth flows out from the first doorway. And can keep the inside of the work booth clean.

The return air first air supply port of the air returned to the work booth by the return air means is from the external air air supply port generated inside the work booth by the air supplied from the external air air supply port to the first inlet / outlet. The clean booth, which is installed at a predetermined location in the work booth where the airflow flowing in one direction does not flow backward, returns the air that has passed through various experimental facilities to the work booth. Insufficient air volume and a decrease in air speed at the first inlet / outlet can be prevented, and the first return air supply port flows in one direction from the external air supply port generated inside the work booth toward the first inlet / outlet. By installing it in a predetermined place in the work booth, it does not cause the air flow to flow backward (it does not disturb the air flowing in one direction of the air supplied to the inside of the work booth by the air supply means). The air flowing in one direction generated inside is not disturbed or backflowed by the air returned from the return air means, and the air from the first entrance / exit to the inside of the work booth caused by the turbulence of the air flow inside the work booth. It is possible to prevent the backflow of air and maintain the clean state inside the work booth.

It is formed from a top panel that is detachably installed inside the building and a first wall panel that is detachably installed between the floor and the top panel of the building and surrounds the work booth. An external air air supply port for air supplied to the work booth by means is installed on the top panel, and the first return air supply port is generated inside the work booth by the air supplied from the external air air supply port. Inside the work booth by the specified location on the top panel that does not allow the airflow flowing in one direction from the external air supply port to the first inlet / outlet, and the air supplied from the external air supply port. There are various types of clean booths installed at least one of the predetermined locations on the first wall panel that do not allow the airflow that flows in one direction from the generated external air supply port to the first inlet / outlet to flow backward. By returning the air that has passed through the experimental equipment to the work booth, it is possible to prevent the design air volume shortage in the work booth and the decrease in the wind speed at the first entrance / exit, and the return air first air supply port is the work booth. The air that flows in one direction from the external air supply port generated inside the unit to the first inlet / outlet does not flow backward (the air that flows in one direction to the inside of the work booth by the air supply means). By installing it at a predetermined location on the top panel or the first wall panel (which does not disturb), the air flowing in one direction generated inside the work booth can be disturbed by the air returned from the return air means. There is no backflow, it is possible to prevent backflow of air from the first entrance / exit caused by the turbulence of the air flow inside the work booth to the inside of the work booth, and it is possible to maintain the clean state inside the work booth. As for the clean booth, by installing the top panel and the first wall panel inside the building so that they can be attached and detached, it is possible to create a clean booth with a work booth of a predetermined volume that can accommodate various experimental equipment. A clean booth equipped with a work booth that can maintain the outflow of air from the first inlet / outlet inside the booth and can maintain a clean state is a building without any hassle and time. It can be easily installed inside. When the clean booth is no longer needed, the clean booth can be easily dismantled by removing the top panel and the first wall panel from the building, so the building can be dismantled without any hassle or time. The clean booth can be quickly removed from the inside.

External air includes a predetermined volume of buffer space connected to the first inlet / outlet and into which the air flowing out from the work booth flows in, and a second inlet / outlet in which the air inside the buffer space is installed to enter and exit the buffer space. The external air supplied to the work booth from the air supply port generates an air flow that flows in one direction from the external air air supply port toward the first inlet / outlet inside the work booth, and at the same time, from the first inlet / outlet to the second inlet / outlet. An air flow that flows in one direction is generated in the buffer space (or an air flow that flows in one direction from the external air air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air air supply port works. At least one of the return air volume by the return air means and the exhaust air volume by the exhaust means so that the air flow generated inside the booth and flowing in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space. The amount of air supplied from the air supply means is adjusted accordingly), and the air inside the work booth does not flow back from the first inlet / outlet to the inside of the work booth. The clean booth, which flows out from the first inlet / outlet to the buffer space, flows out from the first inlet / outlet to the buffer space by the external air supplied to the work booth from the external air air supply port, passes through the buffer space, and flows from the second inlet / outlet. It is possible to create a flow of outflowing air (air flow), prevent backflow of air from the first entrance to the inside of the work booth, and prevent backflow of air inside the building to the inside of the work booth. Can be done. In the clean booth, even if the airflow inside the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow inside the building acts on the second entrance / exit, the influence of the disturbance is the buffer space. It is relaxed and extinguished by the air layer, and the flow of air flowing out from the first inlet / outlet of the air inside the work booth is maintained. It is possible to maintain the clean state inside the work booth without causing contamination in which the air inside the building is mixed with the clean air inside the work booth. The clean booth has a first doorway and a second doorway, and these doorways are not blocked by doors or curtains, so it is easy to enter through the second doorway without touching the buffer space. You can easily get out of the buffer space without touching it, and you can easily enter the work booth without touching it through the first doorway or leave the work booth without touching it. You can easily enter and leave the buffer space and work booth without any hassle and without touching your hands. In the clean booth, workers do not come into contact with the clean booth when entering and exiting the booth, and it is possible to prevent dust and germs from adhering to the buffer space and the work booth when entering and exiting the buffer space and the work booth. It is possible to maintain the clean state of the clean booth, and it is possible to prevent dust and germs from adhering to the worker when entering and exiting the buffer space and the inside of the work booth.

The return air of the air returned to the buffer space by the return air means. The second air supply port is a buffer that does not reverse the air flow that flows in one direction through the buffer space from the first inlet / outlet to the second inlet / outlet. The clean booth installed in a predetermined place in the space returns the air that has passed through various experimental facilities to the work booth or buffer space, resulting in insufficient air volume in the work booth or buffer space and the first. In addition to being able to prevent a decrease in wind speed at the second inlet / outlet, the return air second air supply port creates an air flow in one direction through the buffer space from the first inlet / outlet to the second inlet / outlet. It is generated in the buffer space by being installed in a predetermined place in the buffer space that does not cause backflow (does not disturb the air flow in one direction of the air supplied to the inside of the work booth by the air supply means). The airflow flowing in one direction is not disturbed or backflowed by the air returned from the return air means, and the backflow of air from the first entrance / exit caused by the turbulence of the airflow in the buffer space to the inside of the work booth can be prevented. It is possible to keep the inside of the work booth clean. In the clean booth, even if the airflow inside the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow inside the building acts on the second entrance / exit, the influence of the disturbance is the buffer space. It is relaxed and extinguished by the air layer, and the flow of air flowing out from the first inlet / outlet of the air inside the work booth is maintained. It is possible to maintain the clean state inside the work booth without causing contamination in which the air inside the building is mixed with the clean air inside the work booth.

Detachable between the floor of the building and the top panel, including a second wall panel that is connected to the first wall panel and surrounds the buffer space, with a second return air inlet from the first doorway. A predetermined location on the first wall panel facing the buffer space that does not reverse the air flow that flows in one direction through the buffer space toward the second inlet / outlet, and buffering from the first inlet / outlet toward the second inlet / outlet. A predetermined location on the top panel of the buffer space that does not reverse the air flow that flows through the space in one direction, and the air that flows through the buffer space in one direction from the first inlet / outlet to the second inlet / outlet. A clean booth installed at least one of the predetermined locations on the second wall panel that does not allow airflow to flow back will return the air that has passed through various experimental facilities to the work booth or buffer space. As a result, it is possible to prevent insufficient air volume in the design air volume in the work booth and buffer space and decrease in air velocity at the first and second inlets and outlets, and the return air second air supply port buffers from the first inlet / outlet toward the second inlet / outlet. No backflow of air flow through the space in one direction (does not disturb the one-way flow of air supplied to the inside of the work booth by the air supply means) facing the buffer space. By installing it at a predetermined location on the 1st wall panel, the top panel of the cushioning space, and the 2nd wall panel, the airflow generated in the buffering space in one direction can be disturbed by the air returned from the returning means. There is no backflow, it is possible to prevent backflow of air from the first entrance / exit caused by the turbulence of the air flow in the buffer space to the inside of the work booth, and it is possible to maintain the clean state inside the work booth. In the clean booth, even if the airflow inside the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow inside the building acts on the second entrance / exit, the influence of the disturbance is the buffer space. It is relaxed and extinguished by the air layer, and the flow of air flowing out from the first inlet / outlet of the air inside the work booth is maintained. It is possible to maintain the clean state inside the work booth without causing contamination in which the air inside the building is mixed with the clean air inside the work booth. The clean booth has a work booth with a predetermined capacity and a buffer space that can accommodate various experimental equipment by detachably installing the top panel, the first wall panel, and the second wall panel inside the building. A clean booth can be created, the outflow of air inside the work booth from the first inlet / outlet can be maintained, and the work booth that can maintain a clean state and disturbances can be mitigated / extinguished. A clean booth with a possible buffer space can be easily installed inside the building without any hassle or time. When the clean booth is no longer needed, the clean booth can be easily dismantled by removing the top panel, the first wall panel, and the second wall panel from the building, so it does not take time and effort. The clean booth can be quickly removed from the building.

A buffer space extends from the first inlet / outlet in the direction of air outflow between the first inlet / outlet and the second inlet / outlet, and extends in a direction intersecting the air outflow direction, and the return air second air supply port extends out of air. A predetermined location on the first wall panel facing the buffer space extending in the direction intersecting the direction, a predetermined location on the top panel of the buffer space extending in the direction intersecting the air outflow direction, and the air outflow direction intersect. A clean booth installed in at least one of the predetermined locations on the second wall panel surrounding the buffer space extending in the direction of air has a buffer space between the first entrance and the second entrance. By extending from the air in the outflow direction and extending in the direction intersecting the air outflow direction, the buffer space has a predetermined volume in the direction in which the air outflow direction and the outflow direction intersect, and is buffered toward the second inlet / outlet. The air layer flowing through the space acts as a resistance to the air flowing back from the second inlet / outlet toward the buffer space, and the air inside the work booth flows out from the first inlet / outlet to the buffer space and also flows through the buffer space from the second inlet / outlet. It is possible to create a flow of outflowing air (air flow), prevent backflow of air from the first entrance to the inside of the work booth, and prevent backflow of air inside the building to the inside of the work booth. be able to. The clean booth returns the air that has passed through various experimental facilities to the work booth and buffer space to prevent the design air volume shortage in the work booth and buffer space and the decrease in wind speed at the first and second entrances and exits. The first wall panel facing the buffer space where the return air second air supply port extends in the direction intersecting the air outflow direction, the top panel of the buffer space, and the second wall panel surrounding the buffer space are specified. By installing it in the above location, the airflow generated in the buffer space in one direction will not be disturbed or backflowed by the air returned from the return air means, and the first entrance / exit created by the turbulence of the airflow in the buffer space. It is possible to prevent backflow of air to the inside of the work booth and maintain the clean state inside the work booth. In the clean booth, even if the airflow inside the building where it is installed is turbulent due to a predetermined cause and the turbulence (disturbance) of the airflow inside the building acts on the second doorway, the first doorway and the second doorway The effect of the disturbance is mitigated and extinguished by the air layer of the buffer space that extends from the first inlet / outlet in the direction of the outflow of air and extends in the direction intersecting the outflow direction of the air, and the first inlet / outlet of the air inside the work booth. Since the flow that flows out from is maintained, it is possible to prevent the backflow (inflow) of the air inside the building due to disturbance to the inside of the work booth, and the air inside the building is inside the work booth. It does not cause contamination mixed in the clean air and can maintain the clean state inside the work booth.

A predetermined first wall panel in which the second entrance / exit faces the first entrance / exit, is installed in a line with respect to the first entrance / exit with the buffer space in between, and the return air second air supply port faces the buffer space. , At least one of the predetermined locations of the remaining top panel excluding the top panel located directly above the first and second doorways, and the predetermined location of the second wall panel surrounding the buffer space. In the clean booth installed at the location, the air layer of the buffer space located between the first doorway and the second doorway facing the first doorway becomes the resistance of the air flowing back from the second doorway toward the buffer space. , It is possible to create an air flow (air flow) that flows out from the first entrance / exit to the buffer space and also flows through the buffer space to flow out from the second entrance / exit, preventing the backflow of air from the first entrance / exit to the inside of the work booth. At the same time, it is possible to prevent the backflow of air inside the building into the work booth. The clean booth returns the air that has passed through various experimental facilities to the work booth and buffer space to prevent the design air volume shortage in the work booth and buffer space and the decrease in wind speed at the first and second entrances and exits. The remaining top panel and cushion space are surrounded by the first wall panel where the return air second air supply port faces the buffer space and the top panel located directly above the first and second entrances and exits. By installing it at a predetermined location on the two-wall panel, the airflow generated in the buffer space in one direction will not be disturbed or backflowed by the air returned from the return air means, and the airflow in the buffer space will be turbulent. It is possible to prevent the backflow of air from the first entrance / exit caused by the above to the inside of the work booth, and it is possible to maintain the clean state inside the work booth. In the clean booth, even if the airflow inside the building where it is installed is turbulent due to a predetermined cause and the turbulence (disturbance) of the airflow inside the building acts on the second entrance / exit, the influence of the disturbance is the buffer space. It is relaxed and extinguished by the air layer, and the flow of air flowing out from the first inlet / outlet of the air inside the work booth is maintained. It is possible to maintain the clean state inside the work booth without causing contamination in which the air inside the building is mixed with the clean air inside the work booth.

A first wall panel in which the second entrance / exit does not face the first entrance / exit, but is installed at a position inclined at a predetermined angle with respect to the first entrance / exit across the buffer space, and the return air second air supply port faces the buffer space. Of the predetermined locations of the above, the predetermined locations of the remaining top panel excluding the top panels located directly above the first and second entrances, and the predetermined locations of the second wall panel surrounding the buffer space. In the clean booth installed in at least one place, the air layer of the buffer space located between the first entrance and the second entrance inclined by a predetermined angle with respect to the first entrance is directed from the second entrance toward the buffer space. It becomes a resistance of the backflowing air, and it is possible to create a flow (air flow) of air flowing out from the first inlet / outlet to the buffer space and flowing out from the second inlet / outlet through the buffer space, and from the first inlet / outlet to the inside of the work booth. It is possible to prevent the backflow of air from the inside of the building and the backflow of air inside the work booth. The clean booth returns the air that has passed through various experimental facilities to the work booth and buffer space to prevent the design air volume shortage in the work booth and buffer space and the decrease in wind speed at the first and second entrances and exits. The remaining top panel and cushion space are surrounded by the first wall panel where the return air second air supply port faces the buffer space and the top panel located directly above the first and second entrances and exits. By installing it at a predetermined location on the two-wall panel, the airflow generated in the buffer space in one direction will not be disturbed or backflowed by the air returned from the return air means, and the airflow in the buffer space will be turbulent. It is possible to prevent the backflow of air from the first entrance / exit caused by the above to the inside of the work booth, and it is possible to maintain the clean state inside the work booth. In the clean booth, even if the airflow inside the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow inside the building acts on the second doorway, the first doorway and the first doorway On the other hand, the air layer of the buffer space located between the second entrance and the entrance that inclines by a predetermined angle alleviates and eliminates the influence of the disturbance, and the flow of air flowing out from the first entrance and exit inside the work booth is maintained. Furthermore, since the second entrance / exit is positioned at a predetermined angle with respect to the first entrance / exit, the air flowing back from the second entrance / exit cannot directly go to the first entrance / exit. It is possible to reliably prevent the backflow (inflow) of the air inside the work booth, and the air inside the building does not cause contamination that mixes with the clean air inside the work booth. The clean state of the inside can be maintained. In the clean booth, the position of the first and second doorways can be freely determined according to the arrangement of various equipment to be placed in the buffer space by locating the second doorway at a predetermined angle with respect to the first doorway. It is possible to improve the convenience of the buffer space.

The second entrance / exit does not face the first entrance / exit, but is installed at a position substantially orthogonal to the first entrance / exit with the intervention of the buffer space, and the return air second air supply port faces the buffer space. At least a predetermined location, a predetermined location on the remaining top panel excluding the top panel located directly above the first and second doorways, and a predetermined location on the second wall panel surrounding the buffer space. In the clean booth installed in one place, the air layer of the buffer space located between the first entrance and the second entrance that is substantially orthogonal to the first entrance flows back from the second entrance toward the buffer space. It becomes an air resistance and can flow out from the first inlet / outlet to the buffer space and pass through the buffer space to create an air flow (air flow) flowing out from the second inlet / outlet, and the air from the first inlet / outlet to the inside of the work booth. It is possible to prevent the backflow of air inside the building and to prevent the backflow of air inside the work booth. The clean booth returns the air that has passed through various experimental facilities to the work booth and buffer space to prevent the design air volume shortage in the work booth and buffer space and the decrease in wind speed at the first and second entrances and exits. The remaining top panel and cushion space are surrounded by the first wall panel where the return air second air supply port faces the buffer space and the top panel located directly above the first and second entrances and exits. By installing it at a predetermined location on the two-wall panel, the airflow generated in the buffer space in one direction will not be disturbed or backflowed by the air returned from the return air means, and the airflow in the buffer space will be turbulent. It is possible to prevent the backflow of air from the first entrance / exit caused by the above to the inside of the work booth, and it is possible to maintain the clean state inside the work booth. In the clean booth, even if the airflow inside the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow inside the building acts on the second doorway, the first doorway and the first doorway On the other hand, the air layer of the buffer space located between the second inlet and outlet, which is substantially orthogonal to each other, alleviates and eliminates the influence of the disturbance, and the flow of air flowing out from the first inlet and outlet inside the work booth is maintained. Furthermore, since the second entrance / exit is substantially orthogonal to the first entrance / exit, the air flowing back from the second entrance / exit cannot directly go to the first entrance / exit. Backflow (inflow) to the inside of the booth can be reliably prevented, and the air inside the building does not mix with the clean air inside the work booth, causing contamination, and keeping the inside of the work booth clean. Can be retained. In the clean booth, by making the second doorway substantially orthogonal to the first doorway, the positions of the first and second doorways can be freely determined according to the arrangement of various equipment to be placed in the buffer space. , The convenience of the buffer space can be improved.

When the airflow turbulence (turbulence) inside the building outside the clean booth acts on the second doorway, the effect of the airflow turbulence acting on the second doorway is mitigated by the buffer space, and the air inside the work booth is released. In the clean booth that flows out from the first doorway to the buffer space, even if the airflow inside the building where it is installed is turbulent due to a predetermined factor and the turbulence (disturbance) of the airflow inside the building acts on the second doorway. , The influence of the disturbance acting on the second entrance is mitigated and extinguished by the air layer of the buffer space, and the flow of air flowing out from the first entrance inside the work booth is maintained. It is possible to prevent backflow (inflow) of the air inside the work booth, and the air inside the building does not mix with the clean air inside the work booth without causing contamination, and inside the work booth. It can maintain a clean state.

The building is installed outside the clean booth and is equipped with an air-conditioned air air supply port that supplies the air-conditioned air generated by the air-conditioning equipment to the inside of the building. When the turbulence (disturbance) of the work booth acts on the second entrance / exit, the influence of the turbulence of the airflow acting on the second entrance / exit is mitigated by the buffer space, and the air inside the work booth flows out from the first entrance / exit to the buffer space. Even if the airflow inside the building where it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air supply port and the disturbance caused by the air supply of the air-conditioned air acts on the second entrance / exit, it acts on the second entrance / exit. The effect of the disturbance is mitigated and extinguished by the air layer of the buffer space, and the flow of air flowing out from the first inlet / outlet of the air inside the work booth is maintained. It is possible to prevent backflow (inflow) to the inside of the work booth, and the air inside the building does not cause contamination that mixes with the clean air inside the work booth, and the clean state inside the work booth should be maintained. Can be done.

The air supply means is a fan filter unit installed on the top panel, and the air flow in one direction from the external air air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air air supply port. Is generated inside the work booth, and an air flow flowing in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space (or is supplied to the work booth from the external air supply port of the fan filter unit). The external air generates an air flow that flows in one direction from the external air supply port toward the first inlet / outlet inside the work booth, and the air flow that flows in one direction from the first inlet / outlet toward the second inlet / outlet becomes a buffer space. The air supply air volume of the fan filter unit is adjusted according to at least one of the return air volume by the return air means and the exhaust air volume by the exhaust means so as to be generated.) The clean booth has an external air supply port. The fan filter unit is supplied so that air flowing in one direction from the first entrance to the first entrance is generated inside the work booth, and air flowing in one direction from the first entrance to the second entrance is generated in the buffer space. By adjusting the air volume, an air flow that flows in one direction from the external air supply port toward the first inlet / outlet and one direction from the first inlet / outlet to the second inlet / outlet is generated inside the work booth by the external air. However, since the influence of the disturbance acting on the second inlet / outlet is mitigated / extinguished by the air layer of the buffer space, the flow of air flowing out from the first inlet / outlet inside the work booth is maintained, and the work of the air inside the building is maintained. It is possible to prevent backflow (inflow) to the inside of the booth, and the air inside the building does not cause contamination that mixes with the clean air inside the work booth, and the clean state inside the work booth is maintained. be able to.

The experimental equipment is at least one of a safety cabinet, a clean bench, a glove box, an isolator, and a draft chamber, and the first inlet / outlet from the external air air supply port by the external air supplied to the work booth from the external air air supply port. Safety cabinets, clean benches, and gloves that have been operated so that air flowing in one direction toward the air is generated in the work booth and air flowing in one direction from the first doorway to the second doorway is generated in the buffer space. The clean booth, in which the air supply air volume of the fan filter unit is adjusted according to at least one of the return air volume and the exhaust air volume of the box, isolator, and draft chamber, returns the air that has passed through the safety cabinet to the work booth. When the air that has passed through the clean bench, glove box, isolator, or draft chamber is exhausted to the outside, the airflow that flows in one direction from the external air supply port toward the first inlet / outlet is inside the work booth. The air supply air volume of the fan filter unit is adjusted according to the return air volume and exhaust air volume of these experimental facilities so that the air flow that is generated and flows in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space. By adjusting, the outside air causes the outside air to flow in one direction from the external air supply port toward the first inlet / outlet, and the outside air flows in one direction from the first inlet / outlet to the second inlet / outlet inside the work booth. However, since the influence of the disturbance acting on the second inlet / outlet is mitigated / extinguished by the air layer of the buffer space, the flow of air flowing out from the first inlet / outlet inside the work booth is maintained, and the work of the air inside the building is maintained. It is possible to prevent backflow (inflow) to the inside of the booth, and the air inside the building does not cause contamination that mixes with the clean air inside the work booth, and the clean state inside the work booth is maintained. be able to.

Ionized air supply of ionized air supplied by the static elimination air generator, including a static elimination air generator that supplies the generated ionized air while generating ionized air to at least one of the work booth and the buffer space. Air vents unidirectionally flow through the top panel located directly above workers working in safety cabinets, clean benches, glove boxes, isolators, draft chambers, and buffer space from the first doorway to the second doorway. The clean booth installed on at least one of the top panel of the buffer space that does not reverse the air flow is the ionized air generated by the static elimination air generator in the work booth or the top of the buffer space. Since the air is supplied from the surface panel toward the worker, the charge charged on the worker's clothes can be eliminated (neutralized) by the ionized air, and the generation of static electricity in the worker can be prevented and the work can be performed. It is possible to prevent dust from adhering to a person's clothes due to static electricity. The clean booth can prevent the clothes and equipment from being charged during work by supplying ionized air, and the ionized air does not charge the worker's clothes and equipment, so it can be used for clothes and equipment. Even if dust adheres, the dust can be easily removed. The clean booth will be installed on the top panel of the buffer space where the ionized air supply port does not reverse the air flow that flows in one direction through the buffer space from the first inlet / outlet to the second inlet / outlet. , The unidirectional airflow generated in the buffer space is not disturbed or backflowed by the ionized air supplied from the static elimination air generator, and the inside of the work booth is from the first entrance / exit caused by the turbulence of the airflow in the buffer space. It is possible to prevent the backflow of air to the work booth and keep the inside of the work booth clean.

The external air supplied to the work booth from the external air air supply port generates an air flow that flows in one direction from the external air air supply port toward the first inlet / outlet inside the work booth, and also from the first inlet / outlet to the second inlet / outlet. At least the return air volume of the return air volume by the return air means and the exhaust air volume by the exhaust means and the ionization supplied from the static elimination air generator so that the air flow flowing in one direction toward the air flow is generated in the buffer space. In a clean booth where the air supply air volume of the fan filter unit is adjusted according to the air supply air volume, an air flow that flows in one direction from the external air air supply port to the first inlet / outlet is generated inside the work booth. At the same time, the air supply air volume of the fan filter unit corresponds to the return air volume, exhaust air volume, and ionized air supply air volume so that the air flow flowing in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space. By adjusting, the external air flows in one direction from the external air supply port toward the first inlet / outlet, and the air flow in one direction from the first inlet / outlet toward the second inlet / outlet flows inside the work booth by the external air. Since the influence of the disturbance that occurred and acted on the second inlet / outlet is mitigated / extinguished by the air layer of the buffer space, the flow of the air inside the work booth that flows out from the first inlet / outlet is maintained, and the air inside the building is maintained. It is possible to prevent backflow (inflow) to the inside of the work booth, and the air inside the building does not cause contamination that mixes with the clean air inside the work booth, and the clean state inside the work booth is maintained. can do.

A front perspective view of a clean booth shown as an example. Top view of the clean booth in FIG. A side view of the safety cabinet shown as an example. The top view which shows an example of the air flow in the clean booth of FIG. The side view which shows an example of the air flow in the clean booth of FIG. A front perspective view of a clean booth shown as another example. Top view of the clean booth of FIG. The top view which shows an example of the air flow in the clean booth of FIG. The side view which shows an example of the air flow in the clean booth of FIG. Top view showing another example of air flow in the clean booth of FIG. Top view showing an example of air flow in a clean booth shown as another example. The side view which shows an example of the air flow in the clean booth of FIG. Top view of the clean booth shown as another example. The top view which shows an example of the air flow in the clean booth of FIG. Top view of the clean booth shown as another example. Top view showing an example of the air flow in the clean booth of FIG. Top view of the clean booth shown as another example. Schematic block diagram of an air generation system for static elimination. The top view which shows an example of the air flow in the clean booth of FIG. The side view which shows an example of the air flow in the clean booth of FIG.

The details of the clean booth according to the present invention will be described below with reference to the attached drawings such as FIG. 1, which is a front perspective view of the clean booth 10A shown as an example. 2 is a top view of the clean booth 10A, and FIG. 3 is a side view of the safety cabinet shown as an example. FIG. 4 is a top view showing an example of the air flow in the clean booth 10A, and FIG. 5 is a side view showing an example of the air flow in the clean booth 10A.

In FIG. 1, the illustration of the return air first air supply port 39 attached to the first wall panel 20 (first side wall 25) is omitted. In FIGS. 2, 4, and 5, the fan filter unit 14 (air supply means), the safety cabinet 26, the external air air supply port 28, and the air-conditioned air air supply port 17 of the air conditioning equipment (air-conditioned air air supply port of the air conditioner). , The return air first air supply port 39 is schematically shown. In FIGS. 2, 4, and 5, the front-back direction is indicated by an arrow A, the lateral direction is indicated by an arrow B, and the vertical direction is indicated by an arrow C.

The clean booth 10A (including the clean booths 10B to 10F) is installed in a predetermined place inside the building 11 (work room) such as a research building, an experimental building, a medical building, and a manufacturing factory, and various experiments and researches are performed. Used for development, culture, etc. The inside of the clean booth 10A (work booth 12) is held under a slight positive pressure. The clean booth 10A has a work booth 12, a first entrance / exit 13, a fan filter unit 14 (air supply means), and a return air return means 15.

The building 11 is equipped with an air-conditioning facility (not shown) for supplying air-conditioned air to the inside (indoor) thereof. Air-conditioned air generated by an air conditioner (air conditioner) is supplied to the inside of the building 11 on the ceiling 16 (ceiling surface) outside (common part) of the clean booth 10A inside the building 11 (indoor). An air-conditioned air supply port 17 (outlet) is installed. A predetermined amount of air-conditioned air is supplied from the air-conditioned air supply port 17 toward the inside of the building 11, and the inside of the building 11 is maintained at the set temperature and the set humidity (the same applies to the clean booths 10B to 10F). ).

The clean booth 10A has a plurality of ceiling panels 18 installed inside (indoors) of the building 11 and a plurality of first wall panels 20 installed between the floor 19 and the ceiling panel 18 of the building 11. It is made from. For the ceiling panel 18, an aluminum panel or a steel panel having a quadrangular plane shape is used. The ceiling panel 18 is formed of a plurality of side panel 18a and a plurality of top panels 18b.

In the ceiling panel 18, a ceiling enclosure is made by connecting the side panels 18a in the horizontal direction and the front-rear direction, and a ceiling is made by connecting the top panel 18b in the horizontal direction and the front-back direction. .. In the ceiling panel 19, the upper end edge of the side panel 18a is airtightly connected to the ceiling 16 of the building 11, and the outer peripheral edge of the ceiling made from the top panel 18b is airtightly connected to the lower end edge of the side panel 18a. .. A ceiling space 21 surrounded by the side panel 18a is formed between the ceiling 16 of the building 11 and the top panel 18b (ceiling).

An air intake louver 22 for supplying air to the work booth 12 is attached to the side panel 18a. Ceiling lighting fixtures (LEDs and fluorescent lamps) are installed on the top panel 18b. The ceiling panels 18 (side panels 18a and top panels 18b) are removable inside the building 11 (indoors), and a plurality of them can be easily attached to the inside of the building 11 according to a predetermined manual (procedure). It can be quickly attached, easily and quickly removed from the interior of the building 11, and easily disassembled into a plurality of panels 18a, 18b.

The first wall panel 20 is made of an aluminum frame or a steel frame and a transparent plastic plate (acrylic board, polycarbonate board, vinyl chloride board, etc.) or a transparent glass plate fitted in the aluminum frame or the steel frame, and the flat surface thereof. The shape is shaped into a quadrangle. The first wall panels 20 are laterally connected to form the first front wall 23 and the back wall 24 of the clean booth 10A, and are connected in the front-rear direction to form the first side wall 25 of the clean booth 10A. ing.

The upper end edge of the first wall panel 20 is airtightly connected to the outer peripheral edge of the ceiling (top panel 18b), and the lower end edge thereof is airtightly connected to the floor 19 (floor surface) of the building 11. The first wall panel 20 is removable inside the building 11 (indoor), and a plurality of them can be easily and quickly attached to the inside of the building 11 according to a predetermined manual (procedure). It can be easily and quickly removed from the inside of the object 11 and can be easily disassembled into a plurality of panels 20. In the clean booth 10A, a work booth 12 having a predetermined volume and a predetermined floor area surrounded by a ceiling panel 18 and a first wall panel 20 (first front wall 23, first side wall 25, back wall 24) is drawn. It is made.

The work booth 12 has a work space having a predetermined volume and can accommodate various experimental equipment. A safety cabinet 26 is housed inside the illustrated work booth 12. In addition to the safety cabinet 26, the work booth 12 can accommodate a clean bench, a glove box, an isolator, and a fume hood, and various experimental devices such as cell culture devices, centrifuges, and refrigerators, desks, and shelves. , Computers (servers), etc. can be accommodated.

The volume and floor area of the work booth 12 are not particularly limited, and the volume and floor area are determined by the contents of work performed in the work booth 12, the size of the experimental equipment to be accommodated, the number of experimental equipment, and the like. The first doorway 13 is a facility for entering and exiting the work booth 12, and is open between the first front wall 22 formed by the first wall panel 20 (center of the first front wall 22). The first entrance / exit 13 has a rectangular shape whose planar shape is long in the vertical direction, and has an opening area through which an operator can pass. The air inside the work booth 12 flows out from the first entrance / exit 13.

Two fan filter units 14 (air supply means) arranged in the front-rear direction are installed in the ceiling space 21. A HEPA filter 27 (see FIG. 5) is installed in the fan filter unit 14. The fan filter unit 14 has an external air supply port 28 (outside air air outlet) for supplying external air (clean air) to the work booth 12. The external air supply ports 28 of the fan filter units 14 are installed on the ceiling panel 18 (top panel 18b) in the substantially central portion of the work booth 12, and are arranged in the front-rear direction. The air intake port 29 of the fan filter unit 14 is located in the ceiling space 21.

The fan filter unit 14 takes in the external air inside the building 11 from the ceiling space 21, filters the external air with the HEPA filter 27, and then passes through the external air supply port 28 (ceiling) to the floor surface inside the work booth 12. A predetermined amount of outside air (clean air) is supplied toward the air. By supplying outside air (clean air) with a predetermined supply air volume (for example, 0.3 to 0.4 m / s) from the fan filter unit 14, the internal air pressure of the work booth 12 is maintained at a slightly positive pressure. At the same time, an air flow flowing in one direction (front-back direction) is generated from the external air supply port 28 toward the first inlet / outlet 13.

In the clean booth 10A, the internal air pressure of the work booth 12 can be maintained at a slightly positive pressure while corresponding to the volume of the work booth 12 and the amount of air returned from the safety cabinet 26 to the work booth 12. The amount of air supplied to the fan filter unit 14 so that an air flow flowing in one direction (front-back direction) from the external air air supply port 27 toward the first inlet / outlet 13 is generated inside the work booth 12 by the external air to be supplied. (For example, 0.3 to 0.4 m / s) or the air supply direction may be adjusted. Specifically, when adjusting the air supply air volume, the air supply air volume of the fan filter unit 14 = the exhaust air volume of the air exhausted from the clean booth 10A (first inlet / outlet 13) -returning air from the safety cabinet 26 to the work booth 12. The amount of return air that is (returned) to the air.

For the adjustment of the air supply air volume of the fan filter unit 14 in the clean booth 10A (including the clean booths 10B to 10F), a slight positive pressure is maintained by the design air volume at the time of the facility of the clean booth 10A (including the clean booths 10B to 10F). When the operator adjusts with the remote control switch on the outside of the work booth 12 at the start of operation of the clean booth 10A, or after the facility of the clean booth 10A (including the clean booths 10B, 10C, 10D, 10E). It may be adjusted by automatic adjustment (feedback control, etc.) using a computer (control device), room pressure sensor, or the like.

The safety cabinet 26 is installed on the other side of the work booth 12, and includes a work chamber 30 and a gantry 31 on which the work chamber 30 is mounted, as shown in FIG. In the safety cabinet 26, an air inflow opening 32 and an air flow path 33 are formed, and a blower 34 (air supply and exhaust fan) and first and second HEPA filters 35 and 36 are installed. The working chamber 30 is a hexahedral box formed of a top plate, a bottom plate, a front plate, a back plate, and a side plate. As the front plate, a transparent plastic plate (acrylic board, polycarbonate board, vinyl chloride board, etc.) or a transparent glass plate is used. A front shutter that can be opened and closed is attached to the front plate. A front opening 37 is formed below the front plate, and the front opening 37 is opened and closed by the front shutter.

The air inflow opening 32 is located below the working chamber 30 and in the vicinity of the front opening 37. The air flow path 33 is connected to the air inflow opening 32, and the air flowing in from the air inflow opening 32 flows through the air flow path 33. A return air duct 38 (see FIG. 5) is connected to the air flow path 33 extending directly above the chamber 30. In the clean booth 10A, the blower 34 and the return air duct 38 (return air first air supply port 39) form the return air means 15.

The return air duct 38 enters the ceiling space 21 from the safety cabinet 26, is connected to the return air first air supply port 39 attached to the ceiling panel 18 (top panel 18b) of the work booth 12, and is connected to the return air first air supply port 39. It is connected to the return air first air supply port 39 attached to the first wall panel 20. The air that has passed through the safety cabinet 26 is returned (returned) to the inside of the work booth 12 from the return air first air supply port 39.

The return air first air supply port 39 attached to the ceiling panel 18 (top panel 18b) is an air flow of air supplied from the ceiling panel 18 (external air air supply port 28) on the other side of the work booth 12. It is installed at a predetermined location on the ceiling panel 18 that does not disturb the air supply port 28), and is arranged on the opposite side of the safety cabinet 26 with the external air supply port 28 interposed therebetween. The return air first air supply port 39 attached to the first wall panel 20 is the lower part of the first wall panel 20 (external air air supply port 28) that is on the side of the first inlet / outlet 13 and forms the first side wall 25. It is installed at a predetermined location on the first wall panel 20 that does not disturb the air flow of the air supplied from the wall.

The return air first air supply port 39 is a predetermined ceiling panel 18 (a ceiling panel 18 that does not disturb the air flow of air supplied from the external air air supply port 28) on the other side of the work booth 12. And the lower part of the first wall panel 20 that is on the side of the first inlet / outlet 13 and forms the first side wall 25 (the first that does not disturb the air flow of the air supplied from the external air supply port 28). It may be installed in either one of the wall panel 20 (predetermined location).

The blower 34 is installed in the air flow path 33 extending directly above the work chamber 30, and the air flowing into the air flow path 33 is made to flow from the upper side to the lower side of the work chamber 30, and the air is made to flow in the air flow path 33. Inflows into the return air duct 38. The first HEPA filter 35 is installed directly above the working chamber 30 (top plate). The second HEPA filter 36 is installed above the air flow path 33 extending directly above the working chamber 30.

As shown by the arrow L1 in FIG. 3, the safety cabinet 26 takes in the air inside the work booth 12 when the blower 34 is activated, filters a part of the air with the first HEPA filter 35, and cleans the air. Air is supplied to the work chamber 30 to create a clean air space in the work chamber 30. Further, while filtering the residual air with the second HEPA filter 36, the residual air is returned to the inside of the work booth 12 (clean booth 10A).

When performing various operations using the safety cabinet 26, the work booth 12 is entered through the first entrance / exit 13, and the fan filter unit 14 and the safety cabinet 26 (blower 34) are started. The ON / OFF switch of the fan filter unit 14 and the safety cabinet 26 (blower 34) is installed inside the clean booth 10A. Further, the air conditioning equipment of the building 11 is in operation, and air conditioning air having a predetermined air volume is supplied to the inside of the building 11 from the air conditioning air supply port 17. Experimenters, researchers, developers, and other workers who perform various experiments, research, development, and culture using the clean booth 10A turn on the ON / OFF switch of the fan filter unit 14 and the safety cabinet 26. The fan filter unit 14 and the safety cabinet 26 (blower 34) are activated, and the work booth 12 is entered while wearing dust-free clothing.

When the fan filter unit 14 is activated, as shown by arrows L2 in FIGS. 4 and 5, the air inside the building 11 (outside air) flows into the ceiling space 21 from the air intake louver 22 and from the ceiling space 21. It flows into the air intake port 29 of the fan filter unit 14. The external air passes through the HEPA filter 27 of the fan filter unit 14 to become clean air, and is supplied from the external air air supply port 28 toward the floor surface inside the work booth 12. Since the air volume of the clean air supplied from the fan filter unit 14 is adjusted to hold the internal air pressure of the work booth 12 at a slightly positive pressure, the work is performed by starting the fan filter unit 14 and the safety cabinet 26 (blower 34). As the inside of the booth 12 becomes slightly positive pressure, an air flow flowing in one direction (front-back direction) from the external air supply port 28 of the fan filter unit 14 toward the first inlet / outlet 13 is generated.

A part of the clean air supplied to the inside of the work booth 12 flows into the air flow path 33 from the air inflow opening 32 of the safety cabinet 26, and after passing through the air flow path 33 and the first HEPA filter 35. After flowing into the work chamber 30 and passing through the second HEPA filter 36, the air is returned to the inside of the work booth 12 from the return air first air supply port 39 through the return air duct 38 (FIG. 4). , 5). Therefore, a part of the air supplied from the fan filter unit 14 is returned (returned) from the safety cabinet 26 to the inside of the work booth 12 (clean booth 10A).

Of the clean air supplied to the inside of the work booth 12, the remaining air excluding the air flowing into the front opening 37 of the safety cabinet 26 has the first entrance / exit 13 as shown by the arrow L3 in FIGS. It flows out to the outside of the clean booth 10A (the inside of the building 11 (work room)). The air flowing out to the inside of the building 11 (external air inside the building 11) is again supplied to the inside of the work booth 12 by the fan filter unit 14.

In the clean booth 10A, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 17 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. It may occur and the disturbance may act on the first doorway 13 that opens in the center of the first front wall 23. Further, the design air volume inside the work booth 12 (inside the clean booth 10A) is insufficient by the amount of air sucked in the safety cabinet 26, and the wind speed of the air passing through the first inlet / outlet 13 of the clean booth 10A decreases. do. When the wind speed of the air passing through the first inlet / outlet 13 of the clean booth 10A decreases and the turbulence (disturbance) of the airflow caused by the supply of air-conditioned air acts on the first inlet / outlet 13, arrows L4 in FIGS. As shown by, a part of the outside air inside the building 11 (indoor) may flow into the inside of the work booth 12 from the first entrance / exit 13 (backflow).

However, in the clean booth 10A, by returning the air that has passed through the safety cabinet 26 (experimental equipment) to the work booth 12, the lack of air design air volume in the work booth 12 is compensated for, and the wind speed drops at the first entrance / exit 13. Even if the airflow turbulence (internal disturbance of the building 11) caused by the supply of air-conditioned air acts on the first entrance / exit 13, the work booth is shown by the arrow L3 in FIGS. 4 and 5. The flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the 12 is maintained.

In the clean booth 10A, the airflow flowing in one direction (front-back direction) from the external air air supply port 28 toward the first inlet / outlet 13 by the external air supplied from the external air air supply port 28 to the work booth 12 flows into the work booth 12. The airflow generated inside the air supply port 28 (or the external air supplied from the external air air supply port 28 to the work booth 12 flows in one direction (front-rear direction) from the external air air supply port 28 toward the first inlet / outlet 13. The air supply amount of the air supplied from the fan filter unit 14 (air supply means) is adjusted according to the return air amount by the return air means 15 so as to be generated inside the work booth 12), and the safety cabinet 26 ( By returning the air that has passed through the experimental equipment) to the work booth 12, it is possible to prevent the design air volume in the work booth 12 from being insufficient and the air speed from the first entrance / exit 13 from decreasing, and the air inside the work booth 12 to be reduced. Can be discharged from the first doorway 13.

In the clean booth 10A, the return air first air supply port 39 may cause the air flow flowing in one direction (front-back direction) from the external air air supply port 28 generated inside the work booth 12 toward the first inlet / outlet 13. By installing it at a predetermined location on the ceiling panel 18 or the first wall panel 20 (which does not disturb the air flow in one direction of the air supplied to the inside of the work booth 12 by the fan filter unit 14). The airflow generated inside the air work booth 12 in one direction (front-back direction) is not disturbed or backflowed by the air returned from the return air means 15, and enters the work booth 12 from the first entrance / exit 13. Since the air inside the work booth 12 flows out from the first inlet / outlet 13 without the air flowing back, the backflow of air from the first inlet / outlet 13 caused by the turbulence of the air flow inside the work booth 12 to the inside of the work booth 12 is caused. It can be prevented and the clean state inside the work booth 12 can be maintained.

The clean booth 10A has a first doorway 13 formed therein, and since the first doorway 13 is not shielded by a door or a curtain, the clean booth 10A can be easily entered through the first doorway 13 without touching the work booth 12. You can easily get out of the work booth 12 without touching it, and you can easily enter and leave the inside of the work booth 12 without touching it. The clean booth 10A does not allow workers to come into contact with the clean booth 10A when entering and exiting the clean booth 10, and can prevent dust and germs from adhering to the work booth 12 when entering and exiting the inside of the work booth 12. The clean state of the clean booth 10A can be maintained, and dust and germs can be prevented from adhering to the worker when entering and exiting the inside of the work booth 12.

The clean booth 10A is a clean booth having a work booth 12 having a predetermined volume capable of accommodating a safety cabinet 26 (experimental equipment) by detachably installing a ceiling panel 18 and a first wall panel 20 inside the building 11. A clean booth 10A equipped with a work booth 12 capable of making 10A, maintaining an outflow of air from the first inlet / outlet 13 inside the work booth 12, and maintaining a clean state. Can be easily installed inside the building 11 without any trouble and time. When the clean booth 10A is no longer needed, the clean booth 10A can be easily disassembled by removing the ceiling panel 18 and the first wall panel 20 from the building 11, so that no time and effort is required. The clean booth 10A can be quickly removed from the inside of the building 11.

FIG. 6 is a front perspective view of the clean booth 10B shown as another example, and FIG. 7 is a top view of the clean booth 10B. FIG. 8 is a top view showing an example of the air flow in the clean booth 10B of FIG. 6, and FIG. 9 is a side view showing an example of the air flow in the clean booth 10B of FIG. In FIG. 6, the return air first air supply port 39 attached to the first wall panel 20 (first side wall 25) is not shown. In FIGS. 8 to 9, the front-back direction is indicated by an arrow A, the lateral direction is indicated by an arrow B, and the vertical direction is indicated by an arrow C.

The inside of the clean booth 10B (work booth 12, buffer space 41) is held under a slight positive pressure. The clean booth 10B has a work booth 12, a first entrance / exit 13, a second entrance / exit 40, a buffer space 41 (buffer space), a fan filter unit 14 (air supply means), and a return air return means 15. The clean booth 10B has a plurality of ceiling panels 18 installed inside (indoors) of the building 11 and a plurality of first wall panels 20 installed between the floor 19 and the ceiling panel 18 of the building 11. And a plurality of second wall panels 42 installed between the floor 19 and the ceiling panel 18 of the building 11 adjacent to the first wall panel 20.

The ceiling panel 18 is the same as that of the clean booth 10A of FIG. 1, but forms not only the ceiling enclosure and ceiling of the work booth 12, but also the ceiling enclosure and ceiling of the buffer space 41. A ceiling space 21 surrounded by the side panel 18a is formed between the ceiling 16 of the building 11 and the top panel 18b (ceiling). The first wall panel 20 is the same as that of the clean booth 10A in FIG. 1, and is laterally connected to form the first front wall 23 and the back wall 24 of the clean booth 10B, and is connected in the front-rear direction for cleanliness. The first side wall 25 of the booth 10B is formed.

Similar to the first wall panel 20 of the clean booth 10A of FIG. 1, the second wall panel 42 has an aluminum frame or a steel frame and a transparent plastic plate (acrylic board or polycarbonate board, which is fitted into the aluminum frame or the steel frame. It is made of (polycarbonate board, etc.) or a transparent glass plate, and its planar shape is formed into a square shape. The second wall panels 42 are laterally connected to form the second front wall 43 of the clean booth 10B, and are connected in the front-rear direction to form the second side wall 44 of the clean booth 10B.

The upper end edge of the second wall panel 42 is airtightly connected to the outer peripheral edge of the ceiling (top panel 18b), and the side edge thereof is airtightly connected to the side edge of the first wall panel 20. The lower end edge is airtightly connected to the floor 19 (floor surface) of the building 11. The second wall panel 42 is removable inside the building 11, and a plurality of them can be easily and quickly attached to the inside of the building 11 according to a predetermined manual (procedure). It can be easily removed from the inside and quickly, and can be easily disassembled into a plurality of panels 42.

In the clean booth 10B, a work booth 12 having a predetermined volume and a predetermined floor area surrounded by a ceiling panel 18 and a first wall panel 20 (first front wall 23, back wall 24, first side wall 25) is provided. A predetermined volume and a predetermined floor area surrounded by the ceiling panel 18 and the first and second wall panels 20, 42 (first front wall 23, second front wall 43, second side wall 44). The buffer space 41 is defined. The work booth 12 is the same as that of the clean booth 10A of FIG. 1, and the safety cabinet 26 is housed therein. In addition to the safety cabinet 26, the work booth 12 can accommodate various experimental equipment described above. The first doorway 13 is the same as that of the clean booth 10A of FIG. 1, is a facility for entering and exiting the work booth 12, and is between the first front wall 23 formed by the first wall panel 20 (first front wall). It opens in the center of 23). The air inside the work booth 12 flows out from the first entrance / exit 13.

The second doorway 40 is provided to enter and exit the buffer space 41 and opens between the second front wall 43 formed by the second wall panel 42 (center of the second front wall 43). The second entrance / exit 40 has a rectangular shape whose planar shape is long in the vertical direction, and has an opening area through which an operator can pass. The air in the buffer space 41 flows out from the second entrance / exit 40. The first entrance / exit 13 and the second entrance / exit 40 have the same shape and the same size, the second entrance / exit 40 faces the first entrance / exit 13, and the first entrance / exit 13 and the second entrance / exit 40 are in front of and behind each other with the buffer space 41 interposed therebetween. The facilities are lined up in a row.

The buffer space 41 is located between the first doorway 13 and the second doorway 40, and is connected to the first doorway 13 and the second doorway 40. The buffer space 41 extends in the front-rear direction (air outflow direction) from the first entrance / exit 13 toward the second entrance / exit 40, and laterally (air outflow) between the first entrance / exit 13 and the second entrance / exit 40. It extends in the direction that intersects the direction). The air flowing out from the work booth 12 flows into the buffer space 41, and an air layer is formed by the air flowing through the space 41 from the first inlet / outlet 13 toward the second inlet / outlet 40.

A desk, a shelf, a computer (server), or the like can be installed in the buffer space 41, and the space can be used as a place for changing clothes of an operator. The volume and floor area of the buffer space 41 are not particularly limited, and the volume and floor area are determined by the volume and floor area of the work booth 12. Although not shown, the buffer space 41 does not extend in the lateral direction (direction intersecting the air outflow direction), and is in the front-rear direction (air outflow) from the first inlet / outlet 13 toward the second inlet / outlet 40. It may extend only in the direction).

The fan filter unit 14 (air supply means) is the same as that of the clean booth 10A in FIG. 1, and two of them arranged in the front-rear direction are installed in the ceiling space 21. The external air supply port 28 (outlet port) and the air intake port 29 of the fan filter unit 14 are the same as those of the fan filter unit of FIG. By supplying outside air (clean air) with a predetermined supply air volume (for example, 0.3 to 0.4 m / s) from the fan filter unit 14, the internal air pressure of the work booth 12 is maintained at a slightly positive pressure. At the same time, it flows from the external air supply port 28 toward the first entrance / exit 13 and from the first entrance / exit 13 toward the second entrance / exit 40 in one direction (front-rear direction), and from the first entrance / exit 13 toward the second entrance / exit 40. Generates an air flow that flows in one direction (front-back direction).

In the clean booth 10B, the internal air pressure of the work booth 12 is slightly reduced while corresponding to the volume of the work booth 12 and the amount of air returned from the safety cabinet 26 to the work booth 12 and the buffer space 41. The airflow that can be maintained at a positive pressure and flows from the external air supply port 28 toward the first inlet / outlet 13 and from the first inlet / outlet 13 toward the second inlet / outlet 41 in one direction (front-rear direction) due to the external air supplied. The air supply air volume (for example, 0.3 to 0.4 m / s) and the air supply direction of the fan filter unit 14 may be adjusted so as to be generated inside the work booth 12. Specifically, when adjusting the air supply air volume, the air supply air volume of the fan filter unit 14 = the exhaust air volume of the air exhausted from the clean booth 10B (second inlet / outlet 40) -from the safety cabinet 26 to the work booth 12 and the buffer space. It is the amount of air returned to (returned) to 41.

The safety cabinet 26 is identical to that of the clean booth 10A of FIG. 1 (see FIG. 3). In the clean booth 10B, the blower 34 of the safety cabinet 26 and the return air duct 38 (return air first air supply port 39, return air second air supply port 45) form the return air means 15. The return air duct 38 is installed in the ceiling space 21, is connected to the return air first air supply port 39 attached to the ceiling panel 18 (top panel 18b) of the work booth 12, and is connected to the first wall panel 20 (first wall panel 20). 1 It is connected to the return air first air supply port 39 attached to the side wall 25). It is connected to the return air second air supply port 45 attached to the ceiling panel 18 (top panel 18b) of the buffer space 41. The installation positions of the ceiling panel 18 (top panel 18b) and the first wall panel 20 of the return air first air supply port 39 are the same as those of the clean booth 10A of FIG.

The return air second air supply port 45 is a ceiling panel 18 of a buffer space 41 extending in the lateral direction (direction intersecting the air outflow direction (front-rear direction)), and is directly above the first and second entrances 13 and 40. Remaining ceiling panel 18 excluding the ceiling panel 18 located (predetermined ceiling panel 18 of the cushioning space 41 that does not disturb the air flow of air flowing through the cushioning space 41 from the first entrance / exit 13 to the second entrance / exit 40). It is installed in the place). The air that has passed through the safety cabinet 26 is returned (as soon as it is returned) from the return air first air supply port 39 to the inside of the work booth 12, and from the return air second air supply port 45 to the buffer space 41. Be repatriated (returned).

The return air second air supply port 45 is a predetermined position (first entrance / exit 13) of the first wall panel 20 facing the buffer space 41 extending in the lateral direction (the direction intersecting the air outflow direction (front-back direction)). A predetermined location of the first wall panel 20 facing the buffer space 41 that does not disturb the air flow through the buffer space 41 from the second inlet / outlet 40, and the lateral direction (air outflow direction (front and back)). A buffer space that does not disturb the air flow through the buffer space 41 from the first inlet / outlet 13 to the second inlet / outlet 40 at a predetermined location of the ceiling panel 18 of the buffer space 41 extending in the direction (direction) intersecting with the direction). A predetermined location (first entrance / exit 13) of the second wall panel 42 surrounding the buffer space 41 extending in the lateral direction (the direction intersecting the air outflow direction (front-rear direction)) with the predetermined location of the ceiling panel 18 of the 41. It may be installed at least one of (a predetermined place of the second wall panel 42) which does not disturb the air flow of the air flowing through the buffer space 41 from the second doorway 40 to the second doorway 40.

When performing various operations using the safety cabinet 26, the work booth 12 is entered from the second entrance / exit 40 through the first entrance / exit 13, and the fan filter unit 14 and the safety cabinet 26 (blower 34) are started. The air-conditioning equipment of the building 11 is in operation, and a predetermined amount of air-conditioned air is supplied to the inside of the building 11 from the air-conditioned air supply port 17. Experimenters, researchers, developers, and other workers who perform various experiments, research, development, and culture using the clean booth 10B turn on the ON / OFF switch of the fan filter unit 14 and the safety cabinet 26. The fan filter unit 14 and the safety cabinet 26 (blower 34) are activated, and the work booth 12 is entered while wearing dust-free clothing.

When the fan filter unit 14 is activated, the air inside the building 11 (external air) flows into the ceiling space 21 from the air intake louver 22 and flows into the air intake port 29 of the fan filter unit 14 from the ceiling space 21. .. The external air passes through the HEPA filter 27 of the fan filter unit 14 to become clean air, and is supplied from the external air air supply port 28 toward the floor surface inside the work booth 12. Since the air volume of the clean air supplied from the fan filter unit 14 is adjusted to hold the internal air pressure of the work booth 12 at a slightly positive pressure, the work is performed by starting the fan filter unit 14 and the safety cabinet 26 (blower 34). As the inside of the booth 12 becomes slightly positive pressure, the external air supply port 28 of the fan filter unit 14 heads toward the first inlet / outlet 13, and the first inlet / outlet 13 toward the second inlet / outlet 40 in one direction (front-rear direction). A flowing air flow is generated.

A part of the clean air supplied to the inside of the work booth 12 flows into the air flow path 33 from the air inflow opening 32 of the safety cabinet 26, and after passing through the air flow path 33 and the first HEPA filter 35. After flowing into the work chamber 30 and passing through the second HEPA filter 36, the air is returned to the inside of the work booth 12 from the return air first air supply port 39 through the return air duct 38, and is used for return air. The air is returned to the buffer space 41 from the return air second air supply port 45 through the duct 39 (see FIGS. 8 and 9). Therefore, a part of the clean air supplied from the fan filter unit 14 is returned (returned) from the safety cabinet 26 to the inside of the work booth 12 and the buffer space 41 (clean booth 10A).

Of the clean air supplied to the inside of the work booth 12, the remaining air excluding the air flowing into the front opening 37 of the safety cabinet 26 has the first entrance / exit 13 as shown by the arrow L3 in FIGS. 8 and 9. It flows into the buffer space 41 through the buffer space 41, and flows out to the outside of the clean booth 10B (inside the building 11 (work room)) through the second entrance / exit 40. The air flowing out to the inside of the building 11 (external air inside the building 11) is again supplied to the inside of the work booth 12 by the fan filter unit 14.

In the clean booth 10B, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 17 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. It may occur and the disturbance may act on the second doorway 40 that opens in the center of the second front wall 43. Further, the design air volume inside the work booth 12 (inside the clean booth 10B) is insufficient by the amount of air sucked in the safety cabinet 26, and the air passing through the first inlet / outlet 13 and the second inlet / outlet 40 of the clean booth 10B is insufficient. The wind speed drops. When the wind speed of the air passing through the first entrance / exit 13 and the second entrance / exit 40 of the clean booth 10B decreases and the turbulence (disturbance) of the airflow caused by the supply of air-conditioned air acts on the second entrance / exit 40, the building A part of the outside air inside (indoor) 11 may flow into the buffer space 41 from the second inlet / outlet 40 (backflow).

However, in the clean booth 10B, by returning the air that has passed through the safety cabinet 26 (experimental equipment) to the work booth 12 and the buffer space 41, the lack of air design air volume in the work booth 12 is supplemented, and the first and the first The decrease in wind speed at the second entrances 13 and 40 is prevented, and the turbulence of the airflow (internal disturbance inside the building 11) caused by the supply of air conditioning air is introduced to the second entrance 40 that opens in the center of the second front wall 43. Even if it works, a buffer space extending from the first inlet / outlet 13 in the front-rear direction (air outflow direction) and laterally (direction intersecting with the air outflow direction) between the first inlet / outlet 13 and the second inlet / outlet 40. The air layer of 41 (the airflow supplied from the fan filter unit 14) becomes the resistance of the backflowing air, and the influence of the disturbance is mitigated or extinguished by the air layer of the buffer space 41, which is indicated by the arrow L3 in FIGS. As described above, the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained.

In the clean booth 10B, the airflow inside the building 11 (working room) in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 17 of the air-conditioning equipment, and the airflow caused by the air supply of the air-conditioned air is a factor. Even if the disturbance (disturbance) of the air acts on the second entrance / exit 40, the buffer space 41 extends in the front-rear direction (air outflow direction) from the first entrance / exit 13 between the first entrance / exit 13 and the second entrance / exit 40 and laterally. By extending in the direction (direction intersecting the outflow direction of air), the buffer space 41 has a predetermined volume in the front-rear direction and the lateral direction of the air, and is supplied to the work booth 12 from the external air supply port 28. It is possible to create a flow (air flow) of air flowing out from the first inlet / outlet 13 to the buffer space 41 by the outside air, passing through the buffer space 41 and flowing out from the second inlet / outlet 40, and from the first inlet / outlet 13 to the second inlet / outlet 40. The air layer (air flowing out from the work booth 12) flowing through the buffer space 41 becomes resistance to the air flowing back from the second inlet / outlet 40 toward the buffer space 41, and becomes a resistance from the second inlet / outlet 40 toward the buffer space 41. The backflowing air is pushed back by the air layer flowing through the buffer space 41.

The clean booth 10B can create a flow (air flow) of air flowing out from the first entrance / exit 13 to the buffer space 41 and flowing out from the second entrance / exit 40 through the buffer space 41. Even if the airflow inside the object 11 is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 17 (predetermined cause) and the airflow inside the building 11 is disturbed (disturbance) acts on the second entrance / exit 40. The influence of the disturbance is mitigated and extinguished by the air layer of the buffer space 41, and the flow flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained. It is possible to prevent the backflow (inflow) of the air inside the building 11 into the work booth 12, and it is possible to prevent the air inside the building 11 from flowing into the work booth 12 and to build the building. The air inside the object 11 does not cause contamination mixed with the clean air inside the work booth 12, and the clean state inside the work booth 12 can be maintained.

The clean booth 10B is directed from the external air air supply port 28 toward the first inlet / outlet 13 and from the first inlet / outlet 13 toward the second inlet / outlet 40 by the external air supplied from the external air air supply port 28 to the work booth 12. An air flow flowing in the direction (front-back direction) is generated inside the work booth 12 (or from the external air air supply port 28 to the first inlet / outlet 13 by the external air supplied to the work booth 12 from the external air air supply port 28). A fan filter unit corresponding to the amount of return air by the return means 15 so that an air flow flowing in one direction (front-back direction) from the first entrance 13 to the second entrance 40 is generated inside the work booth 12 as it heads. The amount of air supplied from 14 (air supply means) is adjusted), and the air that has passed through the safety cabinet 26 (experimental equipment) is returned to the work booth 12 and the buffer space 41 to make the work booth 12 In addition to preventing insufficient air volume in the design air volume in the buffer space 41 and a decrease in air speed at the first and second inlets and outlets 13, 40, the air inside the work booth 12 can be discharged from the first inlet and outlet 13 to buffer the air. The air in the space 41 can be discharged from the second entrance / exit 40.

In the clean booth 10B, the return air first air supply port 39 does not reverse the air flow that flows through the work booth 12 in one direction (front-back direction) toward the first inlet / outlet 13 generated in the work booth 12. (Does not disturb the air flow in one direction of the air supplied to the inside of the work booth 12) It is installed at a predetermined position on the ceiling panel 18 and the first wall panel 20, and the return air second air supply port 45 is provided. There is no backflow of air flowing through the buffer space 41 in one direction (front-back direction) from the first inlet / outlet 13 generated in the buffer space 41 toward the second inlet / outlet 40 (one direction of the air in the buffer space 41). By installing it at a predetermined location on the ceiling panel (which does not disturb the airflow flowing to), the airflow that flows in one direction (front-back direction) generated inside the work booth 12 or in the buffer space 41 returns from the return air means 15. The air inside the work booth 12 is not disturbed or backflowed by the air, and the air inside the work booth 12 flows out from the first doorway 13. Therefore, the first doorway 13 caused by the turbulence of the air flow inside the work booth 12 and the buffer space 41. It is possible to prevent backflow of air to the inside of the work booth 12 from the above, and it is possible to maintain a clean state inside the work booth 12.

In the clean booth 10B, a first doorway 13 and a second doorway 40 are formed therein, and since these doorways 13 and 40 are not shielded by doors or curtains, a hand is reached through the second doorway 40 to the buffer space 41. You can easily enter without touching or exit from the buffer space 41 without touching, and you can easily enter without touching the work booth 12 through the first doorway 13 or from the work booth 12. You can easily get out without touching it, and you can easily enter and leave without touching the inside of the buffer space 41 and the work booth 12 (same for clean booths 10C to 10F). The clean booth 10B does not allow workers to come into contact with the clean booth 10B when entering and exiting the clean booth 10B, and dust and germs on the buffer space 41 and the work booth 12 when entering and exiting the inside and exit of the buffer space 41 and the work booth 12. It is possible to prevent the adhesion of dust and bacteria to the worker when entering and exiting the buffer space 41 and the work booth 12 while maintaining the clean state of the clean booth 10B. Yes (same for clean booths 10C-10F).

In the clean booth 10B, the ceiling panel 18, the first wall panel 20, and the second wall panel 42 are detachably installed inside the building 11, so that the safety cabinet 26 (experimental equipment) can be accommodated in a predetermined volume of work. A clean booth 10B having a booth 12 and a buffer space 41 can be made to maintain the outflow of air inside the work booth 12 from the first inlet / outlet 13 and the outflow of air in the buffer space 41 from the second inlet / outlet 40. A clean booth 10B equipped with a work booth 12 capable of maintaining a clean state and a buffer space 41 capable of mitigating / eliminating the influence of disturbance can be installed without any trouble and time. It can be easily installed inside the building 11. When the clean booth 10B is no longer needed, the clean booth 10B can be easily dismantled by removing the ceiling panel 18, the first wall panel 20, and the second wall panel 41 from the building 11. The clean booth 10B can be quickly removed from the inside of the building 11 in a short time.

FIG. 10 is a top view showing another example of the air flow in the clean booth 10B. In FIG. 10, the front-back direction is indicated by an arrow A, and the lateral direction is indicated by an arrow B. The difference of the clean booth 10B shown in FIG. 10 from that of FIG. 8 is that in addition to the turbulence (disturbance) of the airflow generated by the conditioned air supplied from the conditioned air air supply port 17 of the air conditioning equipment, the door 46 (door) of the building. The point is that the turbulence (disturbance) of the airflow caused by the opening and closing of) is generated.

In the clean booth 10B, a predetermined amount of air-conditioned air is supplied to the inside (work room) of the building 11 from the air-conditioned air supply port 17 of the air-conditioning equipment, and the door 46 (door) of the building 11 is opened and closed. As a result, air turbulence (disturbance) may occur inside the building 11 and the turbulence may act on the second entrance / exit 40 that opens in the center of the second front wall 43 (built only by opening and closing the door 46). A turbulence (disturbance) of the air flow occurs inside the object 11, and the turbulence may act on the second entrance / exit 40). Further, the design air volume inside the work booth 12 (inside the clean booth 10B) is insufficient by the amount of air sucked in the safety cabinet 26, and the air passing through the first inlet / outlet 13 and the second inlet / outlet 40 of the clean booth 10B is insufficient. The wind speed drops. The wind speed of the air passing through the first entrance / exit 13 and the second entrance / exit 40 of the clean booth 10B decreases, and the disturbance of the airflow caused by the supply of air-conditioned air and the disturbance of the airflow caused by the opening and closing of the door 46 cause disturbance. Acts on the second entrance / exit 40, and a part of the external air inside (indoors) of the building 11 may flow into the buffer space 41 from the second entrance / exit 40 (backflow).

However, in the clean booth 10B, the air that has passed through the safety cabinet 26 (experimental equipment) is returned to the work booth 12 and the buffer space 41 to compensate for the lack of air volume in the work booth 12 and the buffer space 41. , The decrease in wind speed at the first and second entrances 13 and 40 is prevented, and the turbulence of the airflow (disturbance inside the building 11) caused by the supply of air-conditioned air and the opening and closing of the door 46 is caused by the second front wall 43. Even if it acts on the second entrance / exit 40 that opens in the center, it extends from the first entrance / exit 13 in the front-rear direction (air outflow direction) and laterally (air outflow direction) between the first entrance / exit 13 and the second entrance / exit 40. The air layer of the buffer space 41 (the airflow supplied from the fan filter unit 14) extending in the direction of crossing with the buffer space 41 becomes the resistance of the backflowing air, and the air layer of the buffer space 41 alleviates and eliminates the influence of the disturbance. As shown by the arrow L3 in FIG. 10, the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained.

In the clean booth 10B, the airflow inside (indoors) of the building 11 in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 17 of the air-conditioning equipment and the opening and closing of the door 46, and the air-conditioned air is supplied. Even if the airflow turbulence (disturbance) caused by the opening and closing of the door 46 acts on the second entrance / exit 40, the buffer space 41 is located between the first entrance / exit 13 and the second entrance / exit 40 in the front-rear direction (from the first entrance / exit 13). By extending in the lateral direction (direction intersecting the air outflow direction) as well as in the air outflow direction), the buffer space 41 has a predetermined volume in the front-rear direction and the lateral direction, and works from the external air supply port 28. The external air supplied to the booth 12 can create an air flow (air flow) that flows out from the first inlet / outlet 13 to the buffer space 41, passes through the buffer space 41, and flows out from the second inlet / outlet 40. The air layer (air flowing out from the work booth 12) flowing through the buffer space 41 from the doorway 13 to the second doorway 40 becomes resistance to the air flowing back from the second doorway 40 toward the buffer space 41, and the second doorway 40. The air flowing back toward the buffer space 41 is pushed back by the air layer flowing through the buffer space 41.

The clean booth 10B can create a flow (air flow) of air flowing out from the first entrance / exit 13 to the buffer space 41 and flowing out from the second entrance / exit 40 through the buffer space 41. The airflow inside the object 11 is turbulent due to the conditioned air supplied from the air-conditioned air supply port 17 and the opening and closing of the door 46 (predetermined factor), and the turbulence (disturbance) of the airflow inside the building 11 is the second entrance / exit 40. Even if it acts on the air, the influence of the disturbance is mitigated and extinguished by the air layer of the buffer space 41, and the flow flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained. It is possible to prevent backflow (inflow) of air inside the building 11 due to disturbance caused by opening and closing the door 46 into the work booth 12, and to the inside of the work booth 12 for air inside the building 11. The inflow of air can be prevented, and the air inside the building 11 does not mix with the clean air inside the work booth 12, and the clean state inside the work booth 12 can be maintained. ..

FIG. 11 is a top view showing an example of the air flow in the clean booth 10C shown as another example, and FIG. 12 is a side view showing an example of the air flow in the clean booth 10C of FIG. In FIGS. 11 and 12, the front-back direction is indicated by an arrow A, the lateral direction is indicated by an arrow B, and the vertical direction is indicated by an arrow C. The difference between the clean booth 10C shown in FIG. 11 and that of FIG. 6 is that a part of the air passing through the safety cabinet 26 is outside the clean booth 10C (the work room of the building 11 or the outside (outdoor) of the building 11). The point is that the exhaust means 47 for exhausting to the air is provided. Since the other configurations of the clean booth 10C are the same as those of the clean booth 10B of FIG. 1, the description of the clean booth 10B of FIG. 6 is incorporated and the same reference numerals as those of FIG. 6 are used to indicate this clean booth. Detailed description of other configurations of 10C will be omitted.

The clean booth 10C has a work booth 12, a first entrance / exit 13, a second entrance / exit 40, a buffer space 41 (buffer space), a fan filter unit 14 (air supply means), a return air return means 15, and an exhaust means 47. The work booth 12, the buffer space 41, the first and second entrances 13 and 14, the fan filter unit 14 (air supply means), the air conditioning equipment installed in the building 11, and the return air return means 15 are the clean booth 10B in FIG. Is the same as those of. The installation positions of the return air first air supply port 39 on the ceiling panel 18 (top panel 18b) and the first wall panel 20 are the same as those of the clean booth 10A of FIG. The installation positions of the ceiling panel 18 (top panel 18b) and the second wall panel 42 are the same as those of the clean booth 10B of FIG.

The exhaust means 47 is composed of a blower 34 of the safety cabinet 26, an exhaust duct 48 (exhaust port) branching from the return air duct 38, and a damper device 49a attached to the exhaust duct 48. The exhaust duct 48 is installed in the ceiling space 21, branches from the return air duct 38, and is connected to an exhaust port 50 installed in the side panel 18a. The damper device 49a fully opens or closes the air flow path of the exhaust duct 48. A damper device 49b is installed in the return air duct 38. The damper device 49b fully opens or closes the air flow path of the return air duct 38.

When the safety cabinet 26 (see FIG. 3) is housed in the work booth 12, the damper device 49a is fully closed and the damper device 49b is fully opened. When the draft chamber 58 is housed in the work booth 12, the damper device 49a is fully opened and the damper device 49b is fully closed. In the clean booth 10C, the air return means 15 and the exhaust means 47 can be switched depending on the characteristics of the experimental equipment housed in the work booth 12.

When the safety cabinet 26 is housed in the work booth 12, in the clean booth 10C, as shown by arrows L1 in FIGS. 11 and 12, the air flowing through the safety cabinet 26 is returned to the work booth 12 and the buffer space by the return air means 15. Returned to 41. By supplying outside air (clean air) with a predetermined supply air volume (for example, 0.3 to 0.4 m / s) from the fan filter unit 14, the internal air pressure of the work booth 12 is maintained at a slightly positive pressure. At the same time, an air flow is generated from the external air supply port 28 toward the first inlet / outlet 13 in one direction (front-rear direction) and from the first inlet / outlet 13 toward the second inlet / outlet 40 in one direction (front-rear direction). ..

In the clean booth 10C, the internal air pressure of the work booth 12 is slightly reduced while corresponding to the volume of the work booth 12 and the amount of air returned from the safety cabinet 26 to the work booth 12 and the buffer space 41. The airflow that can be maintained at a positive pressure and flows from the external air supply port 28 toward the first inlet / outlet 13 and from the first inlet / outlet 13 toward the second inlet / outlet 41 in one direction (front-back direction) due to the external air supplied. The air supply air volume (for example, 0.3 to 0.4 m / s) and the air supply direction of the fan filter unit 14 may be adjusted so as to be generated inside the work booth 12. Specifically, when adjusting the air supply air volume, the air supply air volume of the fan filter unit 14 = the exhaust air volume of the air exhausted from the clean booth 10C (second inlet / outlet 40) -from the safety cabinet 26 to the work booth 12 and the buffer space. It is the amount of air returned to (returned) to 41.

When the draft chamber 58 is housed in the work booth 12, in the clean booth 10C, as shown by arrows L5 in FIGS. 11 and 12, the air passing through the draft chamber 58 is exhausted to the outside of the clean booth 10C (construction). It is exhausted to the work room of the object 11 or the outside (outdoor) of the building 11. By supplying outside air (clean air) with a predetermined supply air volume (for example, 0.3 to 0.4 m / s) from the fan filter unit 14, the internal air pressure of the work booth 12 is maintained at a slightly positive pressure. At the same time, it flows from the external air supply port 28 toward the first entrance / exit 13 and from the first entrance / exit 13 toward the second entrance / exit 40 in one direction (front-rear direction), and from the first entrance / exit 13 toward the second entrance / exit 40. Generates an air flow that flows in one direction (front-back direction).

In the clean booth 10C, the internal air pressure of the work booth 12 can be maintained at a slightly positive pressure while corresponding to the exhaust air volume of the air exhausted from the draft chamber 58 to the outside of the clean booth 10C, and the external air to be supplied is supplied. A fan filter so that an air flow flowing in one direction (front-back direction) from the external air supply port 28 toward the first inlet / outlet 13 and from the first inlet / outlet 13 toward the second inlet / outlet 41 is generated inside the work booth 12. The air supply air volume (for example, 0.3 to 0.4 m / s) and the air supply direction of the unit 14 may be adjusted. Specifically, when adjusting the air supply air volume, the air supply air volume of the fan filter unit 14 = the exhaust air volume of the air exhausted from the clean booth 10B (second inlet / outlet 40) + the exhaust air exhausted from the draft chamber 58. The air volume.

In the clean booth 10C, a predetermined amount of air-conditioned air is supplied to the inside of the building 11 (work room) from the air-conditioned air supply port 17 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. May occur and the disturbance may act on the second doorway 40 that opens in the center of the second front wall 43. Further, the amount of air inside the work booth 12 (inside the clean booth 10C) is insufficient by the amount of air sucked in the safety cabinet 26 or the amount of exhaust air from the draft chamber 58, and the first inlet / outlet 13 and the second inlet / outlet 40 are insufficient. The wind speed of the passing air decreases. When the wind speed of the air passing through the first entrance / exit 13 and the second entrance / exit 40 decreases and the turbulence (disturbance) of the airflow caused by the supply of air-conditioned air acts on the second entrance / exit 40, the inside of the building 11 A part of the outside air may flow into the buffer space 41 from the second inlet / outlet 40 (backflow).

However, in the clean booth 10C, the air that has passed through the safety cabinet 26 (experimental equipment) corresponds to the amount of return air that returns to the work booth 12 and the buffer space 41, or the air that has passed through the draft chamber 58 is cleaned. By adjusting the air supply air volume of the fan filter unit 14 according to the exhaust air volume exhausted to the outside of the booth 10C, the shortage of the design air volume of the air in the work booth 12 is complemented, and the first and second entrances 13 and 40 Even if the airflow turbulence (internal disturbance inside the building 11) caused by the supply of air-conditioned air acts on the second entrance / exit 40 that opens in the center of the second front wall 43, the decrease in wind speed is prevented. The air layer (fan) of the buffer space 41 extending from the first inlet / outlet 13 in the front-rear direction (air outflow direction) and laterally (intersectioning with the air outflow direction) between the first inlet / outlet 13 and the second inlet / outlet 40. The air flow supplied from the filter unit 14) becomes the resistance of the backflowing air, and the influence of the disturbance is mitigated and extinguished by the air layer of the buffer space 41, and the work booth 12 is shown by the arrow L3 in FIGS. The flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the is maintained.

The clean booth 10C can create a flow (air flow) of air flowing out from the first entrance / exit 13 to the buffer space 41 and flowing out from the second entrance / exit 40 through the buffer space 41. Even if the airflow inside the object 11 is disturbed by the air-conditioned air supplied from the air-conditioned air supply port 17 (predetermined factor), and the airflow inside the building 11 is disturbed (disturbance) acts on the second entrance / exit 40. The influence of the disturbance is mitigated and extinguished by the air layer of the buffer space 41, and the flow flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained. It is possible to prevent the backflow (inflow) of the air inside the building 11 into the work booth 12, and it is possible to prevent the air inside the building 11 from flowing into the work booth 12 and to build the building. The air inside the object 11 does not cause contamination mixed with the clean air inside the work booth 12, and the clean state inside the work booth 12 can be maintained.

FIG. 13 is a top view of the clean booth 10D shown as another example, and FIG. 14 is a top view showing an example of the air flow in the clean booth 10D of FIG. In FIG. 14, the front-back direction is indicated by an arrow A, and the lateral direction is indicated by an arrow B. The difference between the clean booth 10C shown in FIG. 13 and that of FIG. 6 is that the second entrance / exit does not face the first entrance / exit in a straight line in the front-rear direction, and the second entrance / exit sandwiches the buffer space (with the intervention of the buffer space). The point is that the doorway is installed at a position inclined at a predetermined angle with respect to the first doorway. Since the other configurations of the clean booth 1DC are the same as those of the clean booth 10B of FIG. 1, the description of the clean booth 10B of FIG. 6 is incorporated and the same reference numerals as those of FIG. 6 are used to indicate this clean booth. Detailed description of other configurations of 10D will be omitted.

The clean booth 10D has a work booth 12, a first entrance / exit 13, a second entrance / exit 40, a buffer space 41 (buffer space), a fan filter unit 14 (air supply means), and a return air return means 15. The work booth 12, the fan filter unit 14 (air supply means), the air conditioning equipment installed in the building 11, and the return air return means 15 are the same as those in the clean booth 10B of FIG. The work booth 12 houses a safety cabinet 26 (see FIG. 3). The installation positions of the return air first air supply port 39 on the ceiling panel 18 (top panel 18b) and the first wall panel 20 are the same as those of the clean booth 10A of FIG. The installation positions of the ceiling panel 18 (top panel 18b) and the second wall panel 42 are the same as those of the clean booth 10B of FIG.

The return air second air supply port 45 is a predetermined location of the first wall panel 20 facing the buffer space 41 (air flow passing through the buffer space 41 from the first inlet / outlet 13 toward the second inlet / outlet 40). (Predetermined location of the first wall panel 20 facing the cushioning space 41 that does not disturb) and the remaining ceiling panel 18 excluding the ceiling panel 18 located directly above the first and second entrances 13 and 40. A location (a predetermined location on the ceiling panel 18 of the buffer space 41 that does not disturb the air flow passing through the buffer space 41 from the first inlet / outlet 13 to the second inlet / outlet 40) and a first portion surrounding the buffer space 41. Of the predetermined locations of the two wall panels 42 (predetermined locations of the second wall panel 42 that do not disturb the air flow of the air flowing through the buffer space 41 from the first entrance / exit 13 to the second entrance / exit 40). It may be installed in at least one place (the same applies to the clean booth 10E).

The first entrance / exit 13 opens between the first front walls 23 formed by the first wall panel 20 (center of the first front wall 23), and the air inside the work booth 12 flows out. The second entrance / exit 40 opens at the left end (left side with respect to the center) of the second front wall 43 formed by the second wall panel 42, and the air in the buffer space 41 flows out. The first entrance / exit 13 and the second entrance / exit 40 have the same shape and the same size, and the planar shape thereof exhibits a long quadrangle in the vertical direction. The second entrance / exit 40 does not face the first entrance / exit 13 in a straight line in the front-rear direction, but opens diagonally to the right and front of the first entrance / exit 13 with the buffer space 41 interposed therebetween (under the intervention of the buffer space 41). , It is installed at a position inclined at a predetermined angle with respect to the first entrance / exit 13.

The first entrance / exit 13 is not in the center of the first front wall 23, but is opened at the right end (right side with respect to the center) or the left end (left side with respect to the center) of the first front wall 23, and the second entrance / exit 40 is the second. The center of the second front wall 43, the right end of the second front wall 43 (right side with respect to the center), and the left end of the second front wall 43 (right side with respect to the center) so as to be positioned at a predetermined angle diagonally forward with respect to the entrance / exit 13. It may be open on the left side with respect to the center). The buffer space 41 is located between the first entrance / exit 13 and the second entrance / exit 40, and is connected to the second entrance / exit 40 located diagonally forward from the first entrance / exit 13. The air flowing out from the work booth 12 flows into the buffer space 41, and an air layer is formed by the air flowing through the space 41 from the first inlet / outlet 13 toward the second inlet / outlet 40.

In the clean booth 10D, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 17 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. The disturbance may occur and act on the second doorway 40 that opens at the left end of the second front wall 43 (a position inclined diagonally forward by a predetermined angle with respect to the first doorway 13). Further, the air volume inside the work booth 12 (inside the clean booth 10D) is insufficient by the amount of air sucked in the safety cabinet 26, and the wind speed of the air passing through the first inlet / outlet 13 and the second inlet / outlet 40 decreases. .. When the wind speed of the air passing through the first entrance / exit 13 and the second entrance / exit 40 decreases and the turbulence (disturbance) of the airflow caused by the supply of air-conditioned air acts on the second entrance / exit 40, the inside of the building 11 ( A part of the outside air (inside the room) may flow into (backflow) from the second inlet / outlet 40 into the buffer space 41.

However, in the clean booth 10D, the air that has passed through the safety cabinet 26 (experimental equipment) is returned to the work booth 12 and the buffer space 41 to compensate for the lack of air volume in the work booth 12 and the buffer space 41. , The decrease in wind speed at the first and second entrances 13 and 40 is prevented, and the turbulence of the airflow (internal disturbance of the building 11) caused by the supply of air conditioning air opens at the left end of the second front wall 43. 2 Even if it acts on the entrance / exit 40, it extends in the front-rear direction (air outflow direction) and laterally (in the air outflow direction) between the first entrance / exit 13 and the second entrance / exit 40 which is inclined diagonally forward by a predetermined angle with respect to the first entrance / exit 13. The air layer of the buffer space 41 extending in the direction intersecting the outflow direction of the air becomes the resistance of the backflowing air, and the influence of the disturbance is mitigated or extinguished by the air layer of the buffer space 41, as shown by the arrow L3 in FIG. In addition, the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained.

In the clean booth 10D, the airflow turbulence caused by the supply of air-conditioned air and the opening and closing of the door 46 (disturbance inside the building 11) or the turbulence of the airflow caused only by the opening and closing of the door 46 (building 11). Even if the disturbance inside the buffer space 41 acts on the second inlet / outlet 40 that is inclined forward at a predetermined angle with respect to the first inlet / outlet 13, the air layer of the buffer space 41 acts as a resistance to the backflow of air, and the air layer of the buffer space 41 becomes an air layer. The influence of the disturbance is mitigated and extinguished, and the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained (see FIG. 10).

In the clean booth 10D, the airflow inside (indoors) of the building 11 in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air air supply port 17 of the air-conditioning equipment (and / or the opening and closing of the door 46), and the air-conditioned air. Air turbulence (disturbance) caused by the air supply (and / or opening / closing of the door 46) opens at the left end of the second front wall 43 (at a position inclined diagonally forward by a predetermined angle with respect to the first entrance / exit 13). Even if it acts on the second entrance / exit 40, the buffer space 41 extends in the front-rear direction (air outflow direction) between the first entrance / exit 13 and the second entrance / exit and in the lateral direction (direction intersecting the air outflow direction). By extending, the buffer space 41 has a predetermined volume in the front-rear direction and the lateral direction, and flows out from the work booth 12 to the buffer space 41 through the first doorway 13 and flows through the buffer space 41 to the second doorway 40. It is possible to create a flow (air flow) of air flowing out from the air layer, and the air layer flowing through the buffer space 41 from the first inlet / outlet 13 toward the second inlet / outlet 40 flows back from the second inlet / outlet 40 toward the buffer space 41. The air flowing back from the second inlet / outlet 40 toward the buffer space 41 is pushed back by the air layer flowing through the buffer space 41.

The clean booth 10D flows out from the first entrance / exit 13 to the buffer space 41 and passes through the buffer space 41 to open at the left end of the second front wall 43 (a position inclined diagonally forward by a predetermined angle with respect to the first entrance / exit 13). It is possible to create a flow (air flow) of air flowing out from the second inlet / outlet 40, and the air flow inside the building 11 in which the clean booth 10D is installed is air-conditioned air (and / /) supplied from the air-conditioned air supply port 17. Or even if the turbulence (predetermined cause) of the door 46 (opening and closing) (predetermined cause) causes the turbulence (disturbance) of the airflow inside the building 11 to act on the second entrance / exit 40, the influence of the disturbance is mitigated by the air layer of the buffer space 41. -It disappears and the flow of air flowing out from the first entrance / exit 13 inside the work booth 12 is maintained, and the second entrance / exit is positioned at a predetermined angle with respect to the first entrance / exit, so that the second entrance / exit is positioned. Since the backflow air cannot go directly to the first inlet / outlet, the air inside the building 11 due to the disturbance caused by the air supply of the air-conditioned air (and / or the opening / closing of the door 46) to the inside of the work booth 12. Backflow (inflow) can be reliably prevented, air inside the building 11 can be prevented from flowing into the work booth 12, and air inside the building 11 can be cleaned inside the work booth 12. It is possible to maintain the clean state inside the work booth 12 without causing contamination mixed in the air.

In the clean booth 10D, the second entrance / exit 40 is tilted at a predetermined angle with respect to the first entrance / exit 13, so that the first and second entrance / exit 13, depending on the arrangement of various equipment to be placed in the buffer space 41, The position of the 40 can be freely determined, and the convenience of the buffer space 15 can be improved.

FIG. 15 is a top view of the clean booth 10E shown as another example, and FIG. 16 is a top view showing an example of the air flow in the clean booth 10E of FIG. In FIG. 15, the front-back direction is indicated by an arrow A, and the lateral direction is indicated by an arrow B. The difference between the clean booth 10E shown in FIG. 15 and that of FIG. 6 is that the second entrance / exit 40 does not face the first entrance / exit 13 in a straight line in the front-rear direction, and the second entrance / exit 13 is located under the intervention of the buffer space 41. 1 It is located at a position substantially orthogonal to the doorway 40. Since the other configurations of the clean booth 10E are the same as those of the clean booth 10B of FIG. 6, by referring to the explanation of FIG. 6 and assigning the same reference numerals as those of FIG. A detailed description of the configuration will be omitted.

The clean booth 10D has a work booth 12, a first entrance / exit 13, a second entrance / exit 40, a buffer space 41 (buffer space), a fan filter unit 14 (air supply means), and a return air return means 15. The work booth 12, the fan filter unit 14 (air supply means), the air conditioning equipment installed in the building 11, and the return air return means 15 are the same as those in the clean booth 10B of FIG. The work booth 12 houses a safety cabinet 26 (see FIG. 3). The installation positions of the return air first air supply port 39 on the ceiling panel 18 (top panel 18b) and the first wall panel 20 are the same as those of the clean booth 10A of FIG. The installation positions of the ceiling panel 18 (top panel 18b) and the second wall panel 42 are the same as those of the clean booth 10B of FIG.

The first entrance / exit 13 opens between the first front walls 23 formed by the first wall panel 20 (center of the first front wall 23), and the air inside the work booth 12 flows out. The second entrance / exit 40 opens into the second side wall 44 formed by the second wall panel 43, and the air in the buffer space 41 flows out. The first entrance / exit 13 and the second entrance / exit 40 have the same shape and the same size, and the planar shape thereof exhibits a long quadrangle in the vertical direction. The second entrance / exit 40 does not face the first entrance / exit 13 in a straight line in the front-rear direction, and opens at a position substantially orthogonal to the first entrance / exit 13 (a position bent by approximately 90 °) under the intervention of the buffer space 41. However, it is installed at a position substantially orthogonal to the first entrance / exit 13 (second side wall 44 orthogonal to the first front wall 23).

The first doorway 13 is not in the center of the first front wall 23, but is opened at the right end (right side with respect to the center) or the left end (left side with respect to the center) of the first front wall 23, and the second doorway 40 is the second. The second side wall 44 may be opened so as to be located substantially orthogonal to the entrance / exit 13. The buffer space 41 is located between the first doorway 13 and the second doorway 40, and is connected to the second doorway 40 located substantially orthogonal to the first doorway 13. The air flowing out from the work booth 12 flows into the buffer space 41, and an air layer is formed by the air flowing through the space 41 from the first inlet / outlet 13 toward the second inlet / outlet 40.

In the clean booth 10E, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 17 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. The disturbance may occur and act on the second doorway 40 that opens to the second side wall 44 (position substantially orthogonal to the first doorway 13). Further, the air volume inside the work booth 12 (inside the clean booth 10E) is insufficient by the amount of air sucked in the safety cabinet 26, and the wind speed of the air passing through the first inlet / outlet 13 and the second inlet / outlet 40 decreases. .. When the wind speed of the air passing through the first entrance / exit 13 and the second entrance / exit 40 decreases and the turbulence (disturbance) of the airflow caused by the air-conditioned air supply acts on the second entrance / exit 40, the inside of the building 11 (indoor). ) May flow in (backflow) from the second inlet / outlet 40 into the buffer space 41.

However, in the clean booth 10E, the air that has passed through the safety cabinet 26 (experimental equipment) is returned to the work booth 12 and the buffer space 41 to compensate for the lack of air volume in the work booth 12 and the buffer space 41. , The second entrance / exit where the decrease in wind speed at the first and second entrances 13 and 40 is prevented and the turbulence of the airflow (internal disturbance inside the building 11) caused by the supply of air-conditioned air opens to the second side wall 44. Even if it acts on 40, it extends in the front-rear direction (air outflow direction) and laterally (air outflow direction) between the first entrance / exit 13 and the second entrance / exit 40 located substantially orthogonal to the first entrance / exit 13. The air layer of the buffer space 41 extending in the direction intersecting the direction becomes the resistance of the backflowing air, and the influence of the disturbance is mitigated or extinguished by the air layer of the buffer space 41. The flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the booth 12 is maintained.

In the clean booth 10E, the airflow turbulence caused by the supply of air-conditioned air and the opening and closing of the door 46 (disturbance inside the building 11) or the turbulence of the airflow caused only by the opening and closing of the door 46 (building 11). Even if the disturbance inside the buffer space 41 acts on the second inlet / outlet 40 located substantially orthogonal to the first inlet / outlet 13 outlets, the air layer of the buffer space 41 becomes a resistance of the backflowing air, and the air layer of the buffer space 41 becomes an air layer. The influence of the disturbance is mitigated and extinguished, and the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained (see FIG. 10).

In the clean booth 10E, the airflow inside (indoors) of the building 11 in which it is installed is disturbed by the air-conditioned air supplied from the air-conditioned air air supply port 17 of the air-conditioning equipment (and / or the opening and closing of the door 46), and the air-conditioned air. Airflow turbulence (disturbance) caused by air supply (and / or opening and closing of the door 46) acts on the second entrance 40 that opens to the second side wall 44 (position substantially orthogonal to the first entrance 13). Even so, the buffer space 41 extends in the front-rear direction (air outflow direction) and laterally (air flow direction) between the first entrance / exit 13 and the second entrance / exit 40 located substantially orthogonal to the first entrance / exit 13. By extending in the direction intersecting the outflow direction), the buffer space 41 has a predetermined volume in the front-rear direction and the lateral direction, and flows out from the work booth 12 through the first entrance / exit 13 to the buffer space 41 and the buffer space 41. An air flow (air flow) that can pass through and flow out from the second inlet / outlet 40 can be created, and an air layer that flows through the buffer space 41 from the first inlet / outlet 13 to the second inlet / outlet 40 is buffered from the second inlet / outlet 40. It becomes a resistance of the air flowing back toward the space 41, and the air flowing back from the second inlet / outlet 40 toward the buffer space 41 is pushed back by the air layer flowing through the buffer space 41.

The clean booth 10E flows out from the first entrance / exit 13 to the buffer space 41, passes through the buffer space 41, and opens to the second side wall 44 (position substantially orthogonal to the first entrance / exit 13) from the second entrance / exit 40. It is possible to create a flow of outflowing air (air flow), and the air flow inside the building 11 in which the clean booth 10E is installed is air-conditioned air supplied from the air-conditioned air supply port 17 (and / or opening / closing of the door 46). Even if the air turbulence (disturbance) inside the building 11 acts on the second entrance / exit 40 due to turbulence due to (predetermined cause), the influence of the turbulence is mitigated / extinguished by the air layer of the buffer space 41, and the work booth. The flow of air flowing out from the first inlet / outlet 13 inside the 12 is maintained, and the second inlet / outlet 40 is substantially orthogonal to the first inlet / outlet 13, so that the air flowing back from the second inlet / outlet 40 is the first inlet / outlet. Since it cannot go directly to 13, it prevents the backflow (inflow) of the air inside the building 11 into the work booth 12 due to the disturbance caused by the supply of air conditioning air (and / or the opening and closing of the door 46). This can prevent the air inside the building 11 from flowing into the work booth 12, and also cause contamination in which the air inside the building 11 mixes with the clean air inside the work booth 12. The inside of the work booth 12 can be kept clean.

The clean booth 10E makes the second entrance / exit 40 substantially orthogonal to the first entrance / exit 13, so that the positions of the first and second entrances 13 and 40 can be determined according to the arrangement of various equipment to be placed in the buffer space 41. It can be freely determined, and the convenience of the buffer space 41 can be improved.

FIG. 17 is a top view of the clean booth 10F shown as another example, and FIG. 18 is a schematic configuration diagram of the static elimination air generation system 51. 19 is a top view showing an example of the air flow in the clean booth 10F of FIG. 17, and FIG. 20 is a side view showing an example of the air flow in the clean booth 10F of FIG. In FIGS. 17 and 20, the front-back direction is indicated by an arrow A, the lateral direction is indicated by an arrow B, and the vertical direction is indicated by an arrow C.

The clean booth 10F shown in FIG. 17 differs from that of FIG. 6 in that it includes a static elimination air generator 54 that supplies the generated ionized air to the work booth 12 while generating ionized air, and the static elimination air generator 54. The ionized air air supply port 55 for the ionized air supplied to the work booth 12 is installed on the ceiling panel 18 located directly above the worker working in the safety cabinet 26. Since the other configurations of the clean booth 10F are the same as those of the clean booth 10B of FIG. 6, by referring to the explanation of FIG. 6 and assigning the same reference numerals as those of FIG. A detailed description of the configuration will be omitted.

The clean booth 10F has a work booth 12, a first entrance / exit 13, a second entrance / exit 40, a buffer space 41 (buffer space), a fan filter unit 14 (air supply means), a return air return means 15, and an air elimination system 51 for static elimination. .. The work booth 12, the first entrance / exit 13, the second entrance / exit 40, the buffer space 41, the fan filter unit 14 (air supply means), the air conditioning equipment installed in the building 11, and the return air return means 15 are the clean booth 10B in FIG. Is the same as those of. The work booth 12 houses a safety cabinet 26 (see FIG. 3). The installation positions of the return air first air supply port 39 on the ceiling panel 18 (top panel 18b) and the first wall panel 20 are the same as those of the clean booth 10A of FIG. The installation positions of the ceiling panel 18 (top panel 18b) and the second wall panel 42 are the same as those of the clean booth 10B of FIG.

As shown in FIG. 18, the static elimination air generation system 51 includes a blower 53 (blower fan), a HEPA filter 52, an static elimination air generator 54, an ionized air air supply port 54, an ionized air air supply port 55, and an ionized air supply port. It is formed from an air duct 56. The blower 53 is installed in the ionized air supply duct 56, and sends the clean air filtered by the HEPA filter 52 to the static elimination air generator 54. The HEPA filter 52 is installed in an ionized air air supply duct 56 extending to the wake side of the blower 53, and filters the outside air to create clean air.

The static elimination air generator 54 is installed in an ionized air air supply duct 56 extending to the wake side of the HEPA filter 52. The static elimination air generator 54 ionizes the air with a high voltage to generate ionized air having positive and negative ions from the clean air. The charge of the charged material is neutralized (statically eliminated) by the ionized air generated from the static elimination air generator 54. As the static elimination air generator 54, any one of an ion engine type, a DC type, an AC type, a phased array type, a high frequency type, a pulse DC type, a pulse AC type, a plasma type, and a plasma DC pulse type can be used. ..

The ionized air air supply port 55 is connected to the ionized air air supply duct 56 and is installed on the ceiling panel 18 (top panel 18b) of the work booth 12 located directly above the worker working in the safety cabinet 26. The ionized air air supply duct 56 is installed in the ceiling space 21 and is connected to an air intake louver 57 attached to the ceiling panel 18 (side panel 18a). When any of the clean bench, glove box, isolator, and fume hood is housed in the work booth 12, the ceiling panel 18 (heaven) where the ionized air air supply port 55 is located directly above the workers working in those experimental facilities. It is installed on the surface panel 18b).

In the clean booth 10F, the ionized air air supply port 55 is installed on the ceiling panel 18 of the work booth 12, but the ionized air air supply port 55 of the work booth 12 is located directly above the worker working in the safety cabinet 12. It may be installed on at least one of the ceiling panel 18 (top panel 18b) and the ceiling panel 18 (top panel 18b) of the cushioning space 41. When the ionized air air supply port 55 is installed on the ceiling panel 18 of the buffer space 41, an air flow of air passing through the buffer space 41 in one direction (front-back direction) from the first inlet / outlet 13 toward the second inlet / outlet 40. Is installed at a predetermined position on the ceiling panel 18 of the cushioning space 41 that does not cause backflow.

When the static elimination air generation system 51 is activated, the external air inside (indoors) of the building 11 flows into the ionized air supply duct 56 from the air intake gallery 57 by the blower 53, and the external air flows through the HEPA filter 52. After flowing into the static elimination air generator 54 and ionized air is generated by the static elimination air generator 54, a predetermined amount of ionized air flows from the ionized air air supply port 55 toward the floor surface inside the work booth 12. Is supplied with air. The ON / OFF switch of the static elimination air generation system 51 is installed inside the clean booth 10F.

The internal air pressure of the work booth 12 is obtained by supplying outside air (clean air) having a predetermined supply air volume from the fan filter unit 14 and supplying ionized air having a predetermined supply air volume from the static elimination air generator 54. From the external air supply port 28 toward the first inlet / outlet 13, and from the first inlet / outlet 13 toward the second inlet / outlet 40 in one direction (front-rear direction), and from the first inlet / outlet 13. An air flow flowing in one direction (front-back direction) toward the second entrance / exit 40 is generated.

In the clean booth 10F, the volume of the work booth 12, the amount of returned air returned from the safety cabinet 26 to the work booth 12 and the buffer space 41, and the supply of ionized air supplied from the static elimination air generator 54. The internal air pressure of the work booth 12 can be maintained at a slightly positive pressure while responding to the air volume, and the external air supplied from the external air supply port 28 toward the first inlet / outlet 13 and the first inlet / outlet 13 to the second inlet / outlet 13. The air supply air volume and air supply direction of the fan filter unit 14 may be adjusted so that an air flow flowing in one direction (front-back direction) toward the entrance / exit 40 is generated inside the work booth 12. Specifically, when adjusting the air supply air volume, the air supply air volume of the fan filter unit 14 = the exhaust air volume of the air exhausted from the clean booth 10F (second inlet / outlet 40)-(from the safety cabinet 26 to the work booth 12 and the buffer). The return air amount of the air returned (returned) to the space 41 + the supply air amount of the ionized air supplied from the static elimination air generator 54).

Workers who conduct various experiments, research, development, culture, etc. using the clean booth 10F turn on the ON / OFF switch of the fan filter unit 14, the safety cabinet 26 (blower 34), and the static elimination air generation system 51. The fan filter unit 14, the safety cabinet 26, and the static elimination air generation system 51 are activated, and the work booth 12 is entered while wearing dust-free clothing.

When the fan filter unit 14, the safety cabinet 26 (blower 34), and the static elimination air generation system 51 are activated, the air inside the building 11 (external air) changes from the air intake gallery 22 and 57 to the ceiling space 21 and ionized air. It flows into the air supply duct 56, flows into the fan filter unit 14 from the ceiling space 21, passes through the HEPA filter 52 from the ionized air air supply duct 56, and flows into the static elimination air generator 54. External air passes through the HEPA filter 27 of the fan filter unit 14 and is supplied from the external air air supply port 28 toward the floor inside the work booth 12, and the ionized air is supplied from the ionized air air supply port 55 to the work booth 12. Air is supplied toward the floor inside the building.

Since the air volume of the clean air supplied from the fan filter unit 14 is adjusted to hold the internal air pressure of the work booth 12 at a slightly positive pressure, the fan filter unit 14, the safety cabinet 26 (blower 34), and the static elimination air are adjusted. When the generation system 51 is activated, the inside of the work booth 12 becomes slightly positive pressure, and the external air supply port 28 of the fan filter unit 14 is directed toward the first inlet / outlet 13, and the first inlet / outlet 13 is directed toward the second inlet / outlet 40. An air flow that flows in one direction (front-back direction) is generated.

The ionized air supplied to the inside of the work booth 12 is supplied toward the worker from above the worker working in the safety cabinet 26, as shown by arrows L6 in FIGS. 19 and 20. When the dust-free garment worn by the worker is charged, the charge of the dust-free garment (charged material) is neutralized (statically eliminated) by the ionized air. A part of the clean air and ionized air supplied to the inside of the work booth 12 flows into the air flow path 33 from the air inflow opening 32 of the safety cabinet 26, passes through the air flow path 33, and passes through the first HEPA filter 35. After flowing, it flows into the work chamber 30, and after passing through the second HEPA filter 36, is returned to the inside of the work booth 12 from the return air first air supply port 39 through the return air duct 38. (See FIG. 3). Therefore, a part of the clean air supplied from the fan filter unit 14 and the ionized air supplied from the static elimination air generator 54 returns from the safety cabinet 26 to the inside of the work booth 12 (clean booth 10F). Will be (returned).

Of the clean air supplied to the inside of the work booth 12 and the ionized air, the remaining air (clean air and ionized air) excluding the air flowing into the safety cabinet 26 is shown by the arrow L3 in FIGS. 19 and 20. After flowing into the buffer space 41 through the first doorway 13 and flowing through the buffer space 41, the outside of the clean booth 10F from the buffer space 41 through the second doorway 40 (inside the building 11 (work room)). ). The air flowing out to the inside of the building 11 (external air inside the building 11) is again supplied to the inside of the work booth 12 by the fan filter unit 14 and the static elimination air generation system 51.

At the clean booth 10F, a predetermined amount of air-conditioned air is supplied to the inside (indoor) of the building 11 from the air-conditioned air supply port 17 of the air-conditioning equipment, so that the airflow is turbulent (disturbance) inside the building 11. It may occur and the disturbance may act on the second doorway 40 that opens in the center of the second front wall 43. Further, the design air volume inside the work booth 12 (inside the clean booth 10F) is insufficient by the amount of air sucked in the safety cabinet 26, and the wind speed of the air passing through the first inlet / outlet 13 and the second inlet / outlet 40 decreases. do. When the wind speed of the air passing through the first entrance / exit 13 and the second entrance / exit 40 decreases and the turbulence (disturbance) of the airflow caused by the supply of air-conditioned air acts on the second entrance / exit 40, the inside of the building 11 ( A part of the outside air (inside the room) may flow into (backflow) from the second inlet / outlet 40 into the buffer space 41.

However, in the clean booth 10F, the air (clean air, ionized air) that has passed through the safety cabinet 26 (experimental equipment) is returned to the work booth 12 and the buffer space 41, so that the air in the work booth 12 and the buffer space 41 is returned. The lack of design air volume in the above is complemented, the decrease in wind speed at the first and second entrances 13 and 40 is prevented, and the turbulence of the air flow (disturbance inside the building 11) caused by the supply of air conditioning air is caused by the second entrance 40. The air layer of the buffer space 41 that extends in the front-rear direction (air outflow direction) and laterally (intersections with the air outflow direction) between the first inlet / outlet 13 and the second inlet / outlet 40 even if it acts on the air layer. (The air flow supplied from the fan filter unit 14) becomes the resistance of the backflowing air, and the influence of the disturbance is mitigated and extinguished by the air layer of the buffer space 41, and the work is shown by the arrow L3 in FIGS. 19 and 20. The flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the booth 12 is maintained.

In the clean booth 10F, the airflow turbulence caused by the supply of air-conditioned air and the opening and closing of the door 46 (disturbance inside the building 11) or the turbulence of the airflow caused only by the opening and closing of the door 46 (building 11). Even if the internal disturbance (internal disturbance) acts on the second entrance / exit 40 that opens in the center of the second front wall 43, the air layer of the buffer space 41 becomes a resistance of the backflowing air, and the air layer of the buffer space 41 causes the disturbance. The influence is mitigated and extinguished, and the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained (see FIG. 11).

In the clean booth 10F, the airflow inside the building 11 (working room) in which the facility is installed is supplied with air from the air-conditioned air supply port 17 of the air-conditioning equipment (and / or the opening / closing of the door 46) (predetermined factor). ), And even if the airflow turbulence (disturbance) caused by the air supply of the air conditioning air (and / or the opening and closing of the door 46) acts on the second entrance / exit 40, the buffer space 41 is the first entrance / exit 13 and the second. The buffer space 41 has a predetermined volume in the front-rear direction and the lateral direction by extending in the front-rear direction (air outflow direction) and in the lateral direction (direction intersecting the air outflow direction) with the entrance / exit 40. It is possible to create a flow (air flow) of air flowing out from the work booth 12 through the first entrance / exit 13 to the buffer space 41 and flowing out from the second entrance / exit 40 through the buffer space 41, and from the first entrance / exit 13. The air layer (air flowing out from the work booth 12) flowing through the buffer space 41 toward the second inlet / outlet 40 becomes resistance to the air flowing back from the second inlet / outlet 40 toward the buffer space 41, and the buffer space is formed from the second inlet / outlet 40. The air flowing back toward 41 is pushed back by the air layer flowing through the buffer space 41.

The clean booth 10F can create a flow (air flow) of air flowing out from the first entrance / exit 13 to the buffer space 41 and flowing out from the second entrance / exit 40 through the buffer space 41, and is a safety cabinet 26 (experimental equipment). By returning the air that has passed through to the work booth 12 and the buffer space 41, it is possible to prevent the design air volume shortage in the work booth 12 and the buffer space 41 and the decrease in air velocity at the first and second entrances 13 and 40. At the same time, the airflow inside the building 11 in which the clean booth 10F is installed is disturbed by the conditioned air (and / or the opening and closing of the door 46) (predetermined cause) supplied from the conditioned air air supply port 17, and the building 11 Even if the turbulence (disturbance) of the airflow inside the work booth 40 acts on the second inlet / outlet 40, the influence of the turbulence is mitigated / extinguished by the air layer of the buffer space 41, and from the first inlet / outlet 13 of the air inside the work booth 12. The outflow can be maintained.

Since the clean booth 10F maintains the flow flowing out from the first inlet / outlet 13 of the air inside the work booth 12, the building 11 caused by the disturbance caused by the supply of air-conditioned air (and / or the opening / closing of the door 46). It is possible to prevent the backflow (inflow) of the air inside the work booth 12 into the inside of the work booth 12, and it is possible to prevent the inflow (backflow) of the air inside the building 11 into the work booth 12 of the building. The air inside the work booth 12 does not cause contamination mixed with the clean air inside the work booth 12, and the clean state inside the work booth 12 can be maintained.

In the clean booth 10F, the ionized air generated by the static eliminator air generator 54 (static eliminator air generation system 51) is supplied to the worker from the ceiling panel 18, so that the worker's clothes (dust-free clothes) are used. The charged charge can be eliminated (neutralized) by ionized air, the generation of static electricity in the worker can be prevented, and the adhesion of dust due to the static electricity to the clothes of the worker can be prevented. The clean booth 10E can prevent the clothes (dust-free clothes) and equipment from being charged by static electricity generated during work by supplying ionized air, and the workers' clothes and equipment are charged by the ionized air. Therefore, even if dust adheres to clothes or equipment, the dust can be easily removed.

In the clean booth 10F, the ionized air supply port 55 is a buffer space 41 in which the air flow of air flowing through the buffer space 41 in one direction (front-back direction) from the first inlet / outlet 13 to the second inlet / outlet 40 does not flow back. When installed on the ceiling panel 18, the airflow generated in the buffer space 41 in one direction is not disturbed or backflowed by the ionized air supplied from the static elimination air generator 54, and the airflow in the buffer space 41 is not disturbed or backflowed. It is possible to prevent the backflow of air from the first entrance / exit 13 to the inside of the work booth 41 caused by the turbulence of the work booth 12, and it is possible to maintain the clean state inside the work booth 12.

Other factors that cause disturbance inside the building 11 include the traffic of people and goods in the vicinity of the first entrance 13 of the clean booth 10A, and the traffic of people and goods in the vicinity of the second entrance 40 of the clean booths 10B to 10E. There are traffic of objects, operation of local air supply device and local exhaust device inside the building 11, and sudden temperature difference between the inside of the building 11 and the inside of the clean booths 10A to 10F. In the clean booth 10A, even if those disturbances occur, the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained, so that the inside of the building 11 caused by these disturbances is maintained. It is possible to prevent the inflow (backflow) of the (indoor) air into the work booth 12, and the air inside the building 11 does not cause contamination mixed with the clean air inside the work booth 12. The clean state inside the work booth 12 can be maintained. In the clean booths 10B to 10E, even if those disturbances occur, the flow (air flow) flowing out from the first inlet / outlet 13 of the air inside the work booth 12 is maintained, and the disturbances are caused by the presence of the buffer space 41. It is possible to prevent the air inside the building 11 (indoor) from flowing into the work booth 12 (backflow), and the air inside the building 11 is mixed with the clean air inside the work booth 12. It does not cause contamination and can maintain the clean state inside the work booth 12.

In the clean booths 10A, 10B, 10D to 10F, the air that has passed through the safety cabinet 26 is returned to the inside of the work booth 12, but like the clean booth 10C, the safety cabinet 26 inside the work booth 12 The draft chamber 58 is housed without the air, and the air that has passed through the draft chamber 58 is exhausted to the outside of the clean booths 10A, 10B, 10D to 10F (the work room of the building 11 or the outside (outdoor) of the building 11). It may be exhausted.

In the case of exhausting the air that has passed through the draft chamber 58, in the clean booth 10A, the internal air pressure of the work booth 12 corresponds to the volume of the work booth 12 and the amount of the exhaust air exhausted from the draft chamber 58 to the outside of the clean booth 10A. Can be maintained at a slight positive pressure, and an air flow flowing in one direction (front-back direction) from the external air air supply port 28 toward the first inlet / outlet 13 is generated inside the work booth 12 by the external air to be supplied. , The air supply air volume and the air supply direction of the fan filter unit 14 may be adjusted. Specifically, when adjusting the air supply air volume, the air supply air volume of the fan filter unit 14 = the exhaust air volume of the air exhausted from the clean booth 10A (first inlet / outlet 13) + the exhaust air exhausted from the draft chamber 58. Air volume).

In the case of exhausting the air that has passed through the draft chamber 58, in the clean booths 10B to 10D, the work booths correspond to the volume of the work booth 12 and the amount of the exhaust air exhausted from the draft chamber 58 to the outside of the clean booths 10B to 10D. The internal air pressure of 12 can be maintained at a slightly positive pressure, and the external air supplied from the external air supply port 28 toward the first inlet / outlet 13 and one direction (front and back) from the first inlet / outlet 13 toward the second inlet / outlet 40. The air supply air volume and air supply direction of the fan filter unit 14 are adjusted so that the airflow flowing in the direction) is generated inside the work booth 12. Specifically, the air supply air volume of the fan filter unit 14 = the exhaust air volume of the air exhausted from the clean booths 10B to 10D (second inlet / outlet 40) + the exhaust air volume of the air exhausted from the draft chamber 58.

In the case of exhausting a part of the air that has passed through the draft chamber 58, in the clean booth 10F, the volume of the work booth 12, the amount of ionized air supplied from the static elimination air generator 54, and the clean air from the draft chamber 58. While corresponding to the amount of exhaust air exhausted to the outside of the booth 10F, the internal air pressure of the work booth 12 can be maintained at a slightly positive pressure, and the external air supplied from the external air supply port 28 toward the first inlet / outlet 13. At the same time, the air supply air volume and air supply direction of the fan filter unit 14 are adjusted so that an air flow flowing in one direction (front-back direction) from the first entrance / exit 13 to the second entrance / exit 40 is generated inside the work booth 12. .. Specifically, the supply air volume of the fan filter unit 14 = (the exhaust air volume of the air exhausted from the clean booth 10F (second inlet / outlet 40) + the exhaust air volume of the air exhausted from the draft chamber 58) -the generation of air for static elimination. It is the amount of air supply of ionized air supplied from the device 54 to the work booth 12.

10A Clean booth 10B Clean booth 10C Clean booth 10D Clean booth 10E Clean booth 10F Clean booth 11 Building 12 Work booth 13 First doorway 14 Fan filter unit (air supply means)
15 Return means 16 Ceiling 17 Air-conditioned air supply port 18 Ceiling panel 18a Side panel 18b Top panel 19 Floor 20 First wall panel 21 Ceiling space 22 Air intake louver 23 First front wall 24 Back wall 25 First side wall 26 Safety cabinet (experimental equipment)
27 HEPA filter 28 External air air supply port 29 Air intake port 30 Work chamber 31 Stand 32 Air inflow opening 33 Air flow path 34 Blower 35 1st HEPA filter 36 2nd HEPA filter 37 Front opening 38 Return air duct 39 Return air 1st Air supply port 40 2nd doorway 41 Buffer space 42 2nd wall panel 43 2nd front wall 44 2nd side wall 45 Return air 2nd air supply port 46 Door 47 Exhaust means 48 Exhaust duct 49 Damper device 50 Exhaust port 51 For static elimination Air generation system 52 HEPE filter 53 Blower 54 Static elimination air generator 55 Ionized air air supply port 56 Ionized air air supply duct 57 Air intake gallery 58 Draft chamber

Claims (16)

At the clean booth installed in the designated place of the building
A work booth of a predetermined volume having a predetermined work space capable of accommodating experimental equipment in which the clean booth can accommodate at least one of a safety cabinet, a clean bench, a glove box, an isolator, and a fume hood, and the building. A top panel that is detachably installed inside the building, a first wall panel that is detachably installed between the floor of the building and the top panel and surrounds the work booth, and the work booth. It has a first entrance / exit that is installed for entering and exiting and outflows air inside the work booth, and an external air air supply port that is installed on the top panel to supply external air to the work booth. A fan filter unit installed on the top panel to generate an air flow flowing in one direction from the external air supply port toward the first inlet / outlet, and a first return air supply installed at a predetermined location in the work booth. At least the return means of the return means having an air vent and returning the air passing through the experimental facility to the work booth and the exhaust means for exhausting the air passing through the experimental facility to the outside. And with
In the clean booth, the airflow flowing in one direction from the external air supply port toward the first inlet / outlet by the external air supplied to the work booth from the external air supply port of the fan filter unit is the work booth. A clean booth characterized in that air generated inside the work booth does not flow back from the first entrance / exit to the inside of the work booth, and the air inside the work booth flows out from the first entrance / exit. The return air first air supply port is an air flow that flows in one direction from the external air air supply port generated inside the work booth by the air supplied from the external air air supply port toward the first inlet / outlet. The clean booth according to claim 1, which is installed at a predetermined location of the work booth that does not cause backflow. The return air first air supply port is an air flow that flows in one direction from the external air air supply port generated inside the work booth by the air supplied from the external air air supply port toward the first inlet / outlet. From the predetermined location on the top panel that does not cause backflow and the external air supply port generated inside the work booth by the air supplied from the external air supply port toward the first inlet / outlet. The clean booth according to claim 2, which is installed at at least one of the predetermined locations of the first wall panel that does not cause the airflow flowing in one direction to flow backward. The clean booth is connected to the first entrance and exit, and a predetermined volume of buffer space into which the air flowing out from the work booth flows in, and a facility for entering and exiting the buffer space, and the air inside the buffer space flows out. In the clean booth, the airflow flowing in one direction from the external air supply port to the first inlet / outlet by the external air supplied to the work booth from the external air supply port includes the second inlet / outlet. Along with being generated inside the work booth, an air flow flowing in one direction from the first inlet / outlet toward the second inlet / outlet is generated in the buffer space, and air flowing through the buffer space is generated from the first inlet / outlet. The clean booth according to any one of claims 1 to 3, wherein the air inside the work booth flows out from the first entrance / exit to the buffer space without flowing back into the work booth. The return air second air supply port of the air returned to the buffer space by the return means airflow of air flowing in one direction through the buffer space from the first inlet / outlet to the second inlet / outlet. The clean booth according to claim 4, which is installed at a predetermined location in the buffer space that does not allow backflow. The clean booth is detachably installed between the floor of the building and the top panel, includes a second wall panel connected to the first wall panel and surrounding the buffer space, and the return air. The second air supply port of the first wall panel facing the buffer space, which does not reverse the air flow of air passing through the buffer space in one direction from the first inlet / outlet to the second inlet / outlet. A predetermined location, a predetermined location on the top panel of the buffer space that does not cause a backflow of air flowing through the buffer space in one direction from the first inlet / outlet to the second inlet / outlet, and the above. It is installed at least one of the predetermined locations of the second wall panel that does not cause the air flow that flows in one direction through the buffer space from the first entrance / exit to the second entrance / exit. The clean booth according to claim 5. The buffer space extends from the first inlet / outlet in the direction of air outflow between the first inlet / outlet and the second inlet / outlet, and extends in a direction intersecting the outflow direction of the air, so that the return air second. A predetermined location of the first wall panel facing the buffer space where the air supply port extends in a direction intersecting the air outflow direction, and a top surface of the buffer space extending in a direction intersecting the air outflow direction. The sixth aspect of claim 6 is provided at least one of a predetermined portion of the panel and a predetermined portion of the second wall panel surrounding the buffer space extending in a direction intersecting the outflow direction of the air. Clean booth. The second entrance / exit faces the first entrance / exit and is installed in a line with respect to the first entrance / exit with the buffer space in between, and the return air second air supply port is provided in the buffer space. A predetermined location on the facing first wall panel, a predetermined location on the remaining top panel excluding the top panel located directly above the first and second entrances, and a second wall surrounding the buffer space. The clean booth according to claim 6 or 7, which is installed in at least one of the predetermined places on the panel. The second entrance / exit does not face the first entrance / exit, but is installed at a position inclined at a predetermined angle with respect to the first entrance / exit with the buffer space in between, and the return air second air supply port serves as the buffer. A predetermined portion of the first wall panel facing the space, a predetermined portion of the remaining top panel excluding the top panel located directly above the first and second entrances and exits, and a first portion surrounding the buffer space. 2. The clean booth according to claim 6 or 7, which is installed in at least one of a predetermined place on the wall panel. The second entrance / exit does not face the first entrance / exit, and is installed at a position substantially orthogonal to the first entrance / exit under the intervention of the buffer space, and the return air second air supply port is the buffer space. A second portion surrounding the buffer space, a predetermined portion of the first wall panel facing the surface, a predetermined portion of the remaining top panel excluding the top panel located directly above the first and second entrances and exits, and a second portion surrounding the buffer space. The clean booth according to claim 6 or 7, which is installed in at least one of a predetermined place on the wall panel. In the clean booth, when the turbulence (turbulence) of the airflow inside the building outside the clean booth acts on the second entrance / exit, the influence of the turbulence of the airflow acting on the second entrance / exit is caused by the buffer space. The clean booth according to any one of claims 4 to 10, wherein the air inside the work booth is relaxed and flows out from the first entrance / exit to the buffer space. The building is provided with an air-conditioned air air supply port that is installed outside the clean booth and supplies air-conditioned air generated by the air-conditioning equipment to the inside of the building. In the clean booth, the air-conditioned air supply air is supplied. When the turbulence (disturbance) of the air-conditioning air supplied from the mouth acts on the second inlet / outlet, the influence of the turbulence of the air flow acting on the second inlet / outlet is mitigated by the buffer space, and the inside of the work booth. The clean booth according to claim 11, wherein the air of the above flows out from the first entrance / exit to the buffer space. In the clean booth, the airflow flowing in one direction from the external air supply port toward the first inlet / outlet by the external air supplied to the work booth from the external air supply port of the fan filter unit is the work booth. The clean booth according to any one of claims 4 to 12, wherein an air flow generated inside the buffer space and flowing in one direction from the first entrance / exit to the second entrance / exit is generated in the buffer space. In the clean booth, an air flow flowing in one direction from the external air air supply port toward the first inlet / outlet is generated in the work booth by the external air supplied from the external air air supply port to the work booth. At the same time, the safety cabinet, the clean bench, the glove box, the isolator, and the fume hood that have been operated so that an air flow flowing in one direction from the first entrance / exit to the second entrance / exit is generated in the buffer space. The clean booth according to claim 13, wherein the supply air volume of the fan filter unit is adjusted according to at least one of the return air volume and the exhaust air volume. The clean booth includes a static elimination air generator that supplies ionized air generated while generating ionized air to at least one of the work booth and the buffer space, and is supplied by the static elimination air generator. The ionized air air supply port of the ionized air is the top panel located directly above the safety cabinet, the clean bench, the glove box, the isolator, and the worker working in the draft chamber, and the first entrance / exit. 14. According to claim 14, which is installed on at least one of the top panel of the buffer space, which does not cause the air flow of air flowing through the buffer space in one direction to flow back toward the second inlet / outlet. Clean booth. In the clean booth, an air flow flowing in one direction from the external air air supply port toward the first inlet / outlet is generated inside the work booth by the external air supplied from the external air air supply port to the work booth. At least one of the return air volume by the return air means and the exhaust air volume by the exhaust means so that the airflow flowing in one direction from the first inlet / outlet to the second inlet / outlet is generated in the buffer space. The clean booth according to claim 15, wherein the supply air volume of the fan filter unit is adjusted according to the return air volume and the supply air volume of the ionized air supplied from the static elimination air generator.

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