JPH07127889A - Clean booth apparatus - Google Patents

Abstract

PURPOSE:To secure and maintain cleanness on the side of a clean room by providing an inlet port of a blowing device at a lower part of a clean booth apparatus and on its surface facing the external side of the clean booth. CONSTITUTION:When a circulating fan 3 is actuated, air in a clean room 10 is sucked through an air inlet port 7 and sent into an air conduct chamber 1 via an air conduct duct 11 (the arrow B). After passing through a filter 8, air sent into the air conduct chamber 1 is blown into a clean booth through air outlet ports 9 to descend through the inside of the booth (the arrow C) and discharged from the underside of the foot of a vinyl sheet 5 (the arrow D). In this case, since the air inlet port 7 is formed at the lower part of the outer side surface of the air conduct duct 11, discharged air is sucked through the inlet port 7 in the state of a horizontal air stream, and dust on the floor face 10A of the clean room is hardly dragged and sucked. By this method, cleanness on the side of the clean room 10 is secured and maintained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean booth device installed in a clean room.

[0002]

2. Description of the Related Art Conventionally, in order to form a space having a higher degree of cleanliness in a clean room, many clean booth devices are conventionally installed and used in the clean room.

FIG. 3 is a perspective view showing a conventional clean booth device, and FIG. 4 is a sectional view showing a clean room in which this clean booth device is installed (a sectional view taken along line IV-IV of FIG. 3 for the clean booth device). ).

As shown in the figure, in the conventional clean booth device, a circulating air introduction chamber 1 which constitutes the ceiling of the clean booth device, and four support columns 2 for supporting the introduction chamber 1 are provided.
A, 2B, 2C, 2D, a fan including a circulation fan 3 provided on one side surface of the outer surface of the introduction box 1 and a fan box 4 covering the circulation fan 3, and the four side edges of the introduction box 1 It is mainly composed of an enclosure made of an antistatic vinyl sheet 5 hanging downward.

Reference numeral 10 is a clean room, 10A is a floor surface of the clean room, and 10B is a ceiling surface of the clean room.

A filter 6 is stretched to form a suction port 7 on the suction port 7 on the lower surface of the fan box 4. In addition, a HEPA filter (HIGH EFFICIANCY PARTIC) is provided at the outlet 9 of the circulating air of the inlet 1.
ULATE AIR FILTER) 8 is stretched.

Further, the vinyl sheet 5 is provided in such a length that a gap is formed between it and the clean room floor surface 10A so that the air in the clean booth can be discharged from the bottom of the vinyl sheet.

The air in the clean room 10 is sucked into the inlet 1 by the circulation fan 3 from the air suction port 7 of the fan box 4 (arrows A and B). This air is H
After passing through the EPA filter 8, it is highly dust-removed and is introduced 1.
Is blown into the clean booth from the air outlet 9 (arrow C). The air in the clean booth is discharged from the bottom of the vinyl sheet 5 to the outside of the clean booth (arrow D).
₁ , D ₂ ).

[0009]

In the above-mentioned conventional clean booth device, since the air suction port 7 is formed on the lower surface of the fan box 4 provided at the upper part of the clean booth device, the vinyl sheet 5 can be removed from the bottom. Among the discharged air, the air discharged below the fan box 4 (the discharge air indicated by the arrow D ₂ ) is sucked by the circulation fan 3 and rises along the vinyl sheet 5 (arrow E).

In such a conventional apparatus, dust generated in the clean booth or dust rising from the clean room floor surface 10A along with the rising airflow E may be sucked into the air intake port 7 along with the rising airflow E. was there. In this way, the dust soared by the ascending airflow E may reduce the cleanliness of the clean room on the air intake port 7 side of the fan box 4.

An object of the present invention is to provide a clean booth device that solves the above-mentioned conventional problems and can secure and maintain cleanliness on the clean room side.

[0012]

A clean booth device of the present invention is a clean booth device installed in a clean room, which is provided with a circulating air introduction chamber provided on a ceiling and a lower surface of the introducing chamber. An outlet for the circulating air that has been provided, an air blower that sucks the air in the clean room from the inlet and sends the air into the introduction chamber, and is suspended downward from the side edge portion of the introduction chamber. A clean booth device comprising a sheet surrounding a lower region, wherein the suction port of the blower device is provided on the lower surface of the clean booth device and on the surface facing the outside of the clean booth. To do.

[0013]

In the clean booth device of the present invention, since the air suction port of the blower device for sending air into the introduction space is provided on the lower surface of the clean booth device and on the surface facing the outside of the clean booth, The air discharged from the bottom of the clean booth to the outside of the clean booth flows toward the air intake port provided at the bottom of the clean booth device and is sucked. As a result, dust and ascending air currents rising from the floor surface 10A of the clean room are prevented.

[0014]

Embodiments of the present invention will now be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of the clean booth apparatus of the present invention, and FIG. 2 is a sectional view showing a clean room in which the clean booth apparatus shown in FIG. 1 is installed. It corresponds to a sectional view taken along line II-II.

The clean booth apparatus of this embodiment is provided with a hollow columnar air guide duct 11 on the lower surface of the fan box 4,
Surface 11a of the outside of the clean booth of this air duct 11.
The air suction port 7 is formed in the lower part of the. A filter 6 is stretched over the air suction port 7. Other configurations are the same as those in the conventional example, and the same parts are designated by the same reference numerals and the description thereof is omitted.

In the clean booth device thus constructed, when the circulation fan 3 is operated, the air in the clean room is sucked into the air guide duct 11 from the air intake port 7 (arrow F), and the air guide duct is introduced. 11 rises up (arrow G) and is fed into the wind guide box 1 through the fan box 4 (arrow B).

The air sent into the inlet 1 is HE
After passing through the PA filter 8, the air is blown from the air outlet 9 into the clean booth, descends inside the clean booth (arrow C), and is discharged from the bottom of the vinyl sheet 5 to the outside of the clean booth (arrow D ₁ , D ₂ ).

The discharged air D ₂ flows and is sucked in the suction direction of the air suction port 7. In this case, the exhaust air is
Unlike the conventional clean booth device, it is not sucked as an ascending airflow, but is sucked through the suction port 7 as a horizontal airflow, and therefore dust on the floor surface 10A of the clean room is hard to be entrapped.

Therefore, the (D ₂ ) air discharged to the outside of the clean booth is sucked from the air suction port 7, and the cleanliness of the clean room side can be secured and maintained.

The clean booth apparatus shown in FIGS. 1 and 2 is an embodiment of the present invention, and the present invention is not limited to the illustrated embodiment unless it exceeds the gist.

For example, one or three or more air guide ducts 11 may be provided. Further, the air guide duct 11 may have a cylindrical shape.

[0023]

As described above in detail, according to the clean booth device of the present invention, it is possible to prevent air entrained with dust and an ascending airflow, and to secure and maintain cleanliness on the clean room side. .

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a clean booth device of the present invention.

FIG. 2 is a cross-sectional view showing a clean room in which the clean booth device shown in FIG. 1 is installed.

FIG. 3 is a perspective view showing a conventional clean booth device.

FIG. 4 is a sectional view showing a clean room in which the clean booth device shown in FIG. 3 is installed.

[Explanation of symbols]

 1 Introduction 2C, 2D Support 3 Circulation fan 4 Fan box 5 Vinyl sheet 6 Filter 7 Air inlet 8 HEPA filter 9 Air outlet 10 Clean room 11 Air duct

Claims (1)

[Claims] 1. A clean booth device installed in a clean room, wherein a circulating air inlet provided on a ceiling, a circulating air outlet provided on a lower surface of the inlet, and the inside of the clean room. A blower for sucking the air from the suction port and sending the air into the introduction box, and a sheet hanging downward from a side edge portion of the introduction box and surrounding a lower region of the introduction box. In the clean booth device, the suction port of the blower device is provided on the surface of the lower part of the clean booth device facing the outside of the clean booth device.