WO2005123284A1 - Static charge and dust removing device - Google Patents

Static charge and dust removing device Download PDF

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Publication number
WO2005123284A1
WO2005123284A1 PCT/JP2005/010924 JP2005010924W WO2005123284A1 WO 2005123284 A1 WO2005123284 A1 WO 2005123284A1 JP 2005010924 W JP2005010924 W JP 2005010924W WO 2005123284 A1 WO2005123284 A1 WO 2005123284A1
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WO
WIPO (PCT)
Prior art keywords
air
dust
ejection
processing space
processing
Prior art date
Application number
PCT/JP2005/010924
Other languages
French (fr)
Japanese (ja)
Inventor
Takahiro Ishijima
Jun Inomata
Shigeru Ohkawa
Original Assignee
Koganei Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corporation filed Critical Koganei Corporation
Priority to US11/630,561 priority Critical patent/US20090158537A1/en
Priority to EP05751544A priority patent/EP1759776A4/en
Publication of WO2005123284A1 publication Critical patent/WO2005123284A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • B08B15/023Fume cabinets or cupboards, e.g. for laboratories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00Cleaning by electrostatic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05FSTATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00Carrying-off electrostatic charges
    • H05F3/04Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2215/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B2215/003Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles

Definitions

  • the present invention is intended to remove dust adhering to an object to be processed by spraying ionized air onto a part or the like of an industrial product as an object to be processed, and to prevent contamination of a working environment.
  • the present invention relates to an electrostatic dust removing device.
  • Patent Documents 1 and 2 disclose a technique for removing dust adhering to an industrial product part or the like as a workpiece, that is, a workpiece, while neutralizing static electricity on the surface of the workpiece. It has been proposed to be.
  • Patent Document 1 JP-A-5-15862
  • Patent Document 2 JP-A-8-131982
  • Electrodes are disposed in a flow path through which air flows, and air is ionized by corona discharge between the electrodes.
  • ionized air is blown onto the workpiece by a nozzle.
  • the removed dust may adhere to the workpiece again, in which case the workpiece after removing the dust cannot be kept clean.
  • the removed dust scatters and floats around the working environment, polluting the working environment.
  • a main air flow that is blown to the object to be processed is generated in a box having an opening / closing door, and the main air flow is mixed with ionized air from a nozzle.
  • a static eliminator has been developed to remove dust adhering to the surface.However, if the ionized air from the nozzle is mixed with the main air, the ion concentration will decrease and the static elimination efficiency will decrease, resulting in a reduction in static elimination. It takes time to complete the dust removal process.
  • the opening / closing door when the workpiece is inserted into the box, the operator needs to frequently operate the opening / closing door when loading and unloading the workpiece. There is a problem that workability is not good.
  • An object of the present invention is to provide a static eliminator and a dust eliminator capable of efficiently performing a static elimination and dust removal operation of dust adhering to an object to be processed in a short time.
  • Another object of the present invention is to provide a static eliminator and dust removing apparatus in which dust removed from an object to be processed does not fly outside and contaminate a working environment.
  • the static eliminator and dust remover of the present invention is a static eliminator and dust remover for removing dust adhered to an object by spraying ionized air onto the object, and has an air inlet through which air flows.
  • an ion ejection nozzle for blowing ion-rich air onto the object to be processed.
  • a front opening is formed between a front end of the processing head and a front end of the base box, and the air curtain is formed along the front opening. The loading and unloading of the object to be processed into and out of the processing space is performed through the front opening.
  • the static eliminator and dust removing apparatus of the present invention has a front opening formed between a front end of the processing head and a front end of the base box, and has both sides of the processing head and the base box.
  • a side opening is formed between both sides, and the air curtain is formed along the front opening and each of the side openings to determine whether the front opening and each of the side openings are misaligned. Loading and unloading of the processing object into and from the processing space Is performed.
  • a removable cover is attached to each of the side openings, and by removing the cover, the object to be processed is loaded into the processing space through the side opening. And carrying out.
  • the static eliminator and dust removing apparatus of the present invention include a sensor for detecting an object to be processed carried into the processing space, and an air in the base box when the sensor detects the introduction of the object to be processed.
  • Control means for controlling the start of flow, the ejection of air from the air ejection member, and the ejection of ionized air from the ion ejection nozzle in this order at predetermined time intervals.
  • control means may stop the ejection of the ionized air and stop the ejection of the air from the air ejection member when the object to be processed is carried out of the processing space. And stopping the formation of the airflow in the base box in this order every time a predetermined time elapses.
  • control means may further comprise: stopping the ejection of the ionized air, stopping the ejection of the air from the air ejection member, and stopping the base box when a predetermined processing time has elapsed.
  • the process is controlled to stop the air flow formation in each time in this order every time a predetermined time elapses.
  • ion dust is ejected from the ion ejection nozzle to remove dust while neutralizing static electricity charged on the workpiece.
  • the processing space does not need to be covered with a cover or the like, and the processing object can be quickly brought into and out of the processing space. Can be quickly performed.
  • the processing termination control pattern can be set to a sensor stop type in which the unloading of the workpiece is detected by the sensor and a timer stop type in which the device is turned off by the timer. Depending on the type of the processing object, it is possible to select a shift control pattern.
  • FIG. 1 is a front view showing a static eliminator and dust remover of the present invention.
  • FIG. 2 is a side view of FIG. 1.
  • FIG. 3 is a partially cutaway plan view of FIG. 1.
  • FIG. 4 is a partially cutaway side view showing the internal structure of the dust eliminator of the present invention.
  • FIG. 5 is a perspective view showing a main part of FIG. 1.
  • FIG. 6 is an enlarged sectional view taken along line AA in FIG. 5.
  • FIG. 7 is a schematic diagram showing a control circuit for controlling the operation of the static elimination device.
  • FIG. 8 is a flowchart showing a control procedure of a type in which a device is turned on and off by a sensor.
  • FIG. 9 is a flowchart showing a control procedure of a type in which a device is turned off by a timer.
  • the base has a base box 11 formed by combining plate materials. Inside the base box 11, as shown in FIG. 4, a motor 12 and a fan 13 rotated by the motor 12 are provided. A blower 15 having a case 14 for accommodating air therein, that is, a blower 15 is incorporated therein, and a space for forming a flow of air, that is, an air flow path is formed inside. An air inlet 16 through which air flows vertically is formed at the front end side of the base box 11, and an expanded metal 17 having a large number of ventilation holes is attached to the air inlet 16. An object to be processed is prevented from entering the table box 11 from the air inlet 16.
  • a support column 21 formed by combining plate materials is provided, and a storage chamber 22 is formed inside the support column 21.
  • the support column 21 is provided with a transparent cover, which projects forward and is a transparent plate material, as a processing head 23, and is provided between the processing head 23 and the air inlet 16 as shown in FIG. Has a processing space 24 formed.
  • the side plates 25, 26 forming the support column 21 have protrusions 25a, 26a protruding forward along the processing head 23, and the transparent cover forming the processing head 23 includes both the protrusions 25a, Fixed to 26a. Notches are provided in the protruding portions 25a and 26a, and side opening portions 27 and 28 are formed between both side portions of the processing head 23 and both side portions of the base box 11, and the front end of the processing head 23 is formed. A front opening 29 is formed between the base and the tip of the base box 11, and the workpiece is loaded into the processing space 24 from the front opening 29 and the processed workpiece is unloaded. can do.
  • transparent covers 31, 32 made of a transparent plate material are attached to each side opening 27, 28 with a screw member 30, and the transparent covers 31, 32 are attached.
  • the inside of the processing space 24 can be visually observed from outside through the processing state.
  • the workpiece can be loaded and unloaded into the processing space 24 via the side openings 27 and 28. Therefore, processing empty Either the front opening 29 or one of the side openings can be used for loading and unloading of the object to be processed into the space 24. Either one may be carried out and the other may be carried out.
  • the front opening 29 may be covered with a transparent cover.
  • An air curtain is formed between the side opening portions 27 and 28 and the front opening portion 29 by air, as indicated by broken arrows, and the processing space 24 is shut off from the outside by the air curtain.
  • the air ejection pipe 33 as the air ejection member, a pipe having a circular cross section is used in the illustrated case, but a square pipe may be used.
  • the ejection port 35 may be formed by an ejection port on a force slit formed by a plurality of holes.
  • An ion ejection nozzle 36 is attached to the center of the processing head 23, and an ion discharge nozzle 36 is provided in the processing space 24 from the ejection port 36a of the ion ejection nozzle 36 into the processing space 24 as indicated by an arrow.
  • Iridani air is blown onto the object placed in the processing space 24 while being shielded from the outside by an air curtain.
  • the ionized air blown to the workpiece is sucked into the air inlet 16 by the blower 15 together with the air curtain air flowing into the air inlet 16 by the blower 15 and flows into the air inlet 16, and is discharged from the exhaust duct 18. It is discharged outside.
  • an air supply port 37 is mounted on the rear wall of the support column 21 as shown in Fig. 3, and the air supply port 37 is provided with an on-off valve 38 and an on-off valve 38.
  • the air supply pipe 41 is connected to the air supply nozzle 41 via a throttle valve 39, and the air supply pipe 41 is branched into two and connected to the respective pipes 33a and 33b. Therefore, compressed air from the air pressure source connected to the air supply port 37 passes through the throttle valve 39 when the on-off valve 38 is opened. It is supplied to the ejection pipe 33 and ejected from the ejection port 35 to form an air curtain.
  • the ion ejection nozzle 36 is connected to an ion generator 42 attached to the support column 21, and an air supply port 37 is provided on the rear wall of the support column 21 to supply air to the ion generator 42.
  • An air supply port (not shown) is attached to the lower side of the air supply port.
  • This air supply port is connected to a pressure regulating valve, that is, a regulator 44 and an on-off valve 43 by an air supply pipe 45 as shown in FIG.
  • the on-off valve 43 is connected to the ion generator 42 via an air supply pipe 45 as shown in FIG.
  • An ion transport tube 46 is connected between the ion generator 42 and the ion ejection nozzle 36, and ion-exhaust air is transported to the ion ejection nozzle 36 by the ion transport tube 46. Therefore, when the on-off valve 43 is opened, the compressed air from the air pressure supply source is supplied to the ion generator 42 via the on-off valve 43 after being regulated by the regulator 44.
  • the ion generator 42 has electrodes (not shown) arranged in pairs in the compressed air flow path, and by supplying power to the electrodes, the air is ionized by corona discharge between the electrodes.
  • the ionized air is supplied from the ion ejection nozzle 36 into the processing space 24.
  • the compressed air supplied from one air supply port 37 may be branched into air for the air curtain and air for the ion generator 42 and supplied to each of them.
  • an upper sensor 47 is attached to the processing head 23 as shown in FIG.
  • a side sensor 48 is provided, one sensor 47 having a light emitting element and the other sensor 48 having a light receiving element. Therefore, for example, the worker holds the work When the workpiece is loaded in the interval 24, the transport is automatically detected by the sensors 47 and 48.
  • FIG. 7 is a schematic diagram showing a control circuit for controlling the operation of the static eliminator and dust remover.
  • the control unit 50 arranged in the accommodation room 22 of the support column 21 sends a motor 12 of the blower 15 Control signals are sent to the on-off valves 38 and 43 and the ion generator 42, and a signal from a sensor 48 is supplied to the control unit 50. Further, the control unit 50 outputs a monitor signal indicating the operating state of the static eliminator and dust remover.
  • the object When the ionized air is blown onto the object to be processed by such a static elimination and dust removal apparatus to remove dust attached to the object to be processed, the object is carried into the processing space 24 by an operator. Is done.
  • the light emitted from the upper sensor 47 toward the lower sensor 48 is blocked, and the sensor 48 outputs a carry-in detection signal to the control unit 50.
  • the air curtain is formed in the front opening 29, and the air curtain is formed from the ion ejection nozzle 36 in a state where the air curtain is formed along the transparent covers 31, 32 in the side openings 27, 28.
  • the blown air is blown into the processing space 24, and the air in the processing space 24 is sucked into the base box 11 by the blower 15.
  • the processing end control method of the apparatus includes a method in which the processing is stopped when the sensor 48 detects that the object to be processed has been unloaded by the operator in the processing space 24, and a method in which the ion air is ejected for a predetermined time. After that, there is a method of stopping the processing, and the control method to be used is set by operating the switch provided on the input operation unit 51 connected to the control unit 50 according to the type of the workpiece. Is done.
  • the input operation unit 51 is provided on the back side of the support column 21 or the like.
  • FIG. 8 is a flowchart showing a control procedure of a type in which a device is turned on and off by a sensor.
  • FIG. 9 is a flowchart showing a control procedure of a type in which the device is turned off by a timer.
  • steps S2 to S4 are successively and sequentially executed after a predetermined time of 1 second or less has elapsed, and the ion processing air is reliably processed under the condition that the processing space 24 is externally shut off by the air curtain. Sprayed on. When sprayed for a predetermined time, dust adhered to the object by static electricity is neutralized by ionized air, removed by the flow of air in the processing space 24, and sucked into the base box 11. When the unloading of the object is detected by the sensor 48 (step S5), the operation of the ion generator 42, the operation of the air curtain, and the operation of the air blower 15 are stopped at predetermined time intervals. Are continuously executed.
  • the air curtain is activated when a predetermined time has elapsed after the operation of the blower 15 at the start of processing of the device. Then, after a predetermined time has elapsed, the ionizing air is blown out, so that the external force is reliably shut off by the air curtain and the ionizing air is discharged in a state where no dust exists in the processing space 24. Since the air is blown out to the workpiece, it is possible to prevent the dust from leaking out of the apparatus and to reliably remove the dust from the workpiece.
  • the air curtain is stopped when a predetermined time has elapsed after the ion generator 42 has stopped and the blower 15 Since the operation of is stopped to stop the formation of the airflow, it is possible to reliably prevent the removed dust from leaking to the outside.
  • the static eliminator and dust remover can cause damage to elements due to static electricity, such as various electric and electronic parts for industrial products, camera parts such as optical lenses, resin molded parts, and the like. It is possible to perform a static elimination and dust removal process using a component having a problem of dust adhesion as an object to be treated.
  • the processing head 23 may be provided with a plurality of ion ejection nozzles 36 provided with one ion ejection nozzle 36.
  • the processing head 23 may be formed of a force plate formed of a transparent plate material.
  • the processing head 23 may be formed of an opaque plate material instead of the transparent covers 31 and 32. You may do it.

Abstract

This static charge and dust removing device has a base box (11) provided with an air flow inlet port (16), and a processing head (23) attached to the base box (11) through a support column (21), with a processing space (24) defined between the air flow inlet port (16) and the processing head (23). A front opening (29) and right and left side openings (28) in the device are formed with air curtains for shutting the processing space (24) from outside by air from the spouts of an air spout pipe (33). Ionized air generated by an ion generator (42) is spouted into the processing space (24), so that the ionized air is blown against an article to be processed disposed in the processing space (24) so as to remove dust from the article to be processed. Thereby, the static charge and dust removing operation for the dust adhering to the article to be processed can be efficiently effected in a short time, and contamination of the working environment due to leakage of removed dust can be prevented.

Description

明 細 書  Specification
除電除塵装置  Static eliminator and dust remover
技術分野  Technical field
[0001] 本発明は、工業製品の部品などを被処理物としてこれにイオンィ匕した空気を吹き付 けて被処理物に付着した塵埃を除去するとともに作業環境を汚染しな 、ようにした除 電除塵装置に関する。  [0001] The present invention is intended to remove dust adhering to an object to be processed by spraying ionized air onto a part or the like of an industrial product as an object to be processed, and to prevent contamination of a working environment. The present invention relates to an electrostatic dust removing device.
背景技術  Background art
[0002] 電気製品などの工業製品の部品を製造したり、部品を組み立てて工業製品を製造 する際には、部品に付着したゴミゃ異物やちりなどの塵埃を除去する必要がある。部 品に付着する塵埃には、静電気によって付着するものがあるので、イオン化した空気 を部品に吹き付けて部品の表面の静電気を中和除去しながら塵埃を除去すれば、 塵埃を確実に除去することができる。このように工業製品の部品等をワークつまり被 処理物としてこれに付着した塵埃を被処理物の表面の静電気を中和しながら除去す るようにした技術が、例えば特許文献 1, 2に記載されるように提案されている。  [0002] When manufacturing components of industrial products such as electric products, or assembling components to manufacture industrial products, it is necessary to remove dust attached to the components, such as dust, foreign matter and dust. Since some dust adheres to components due to static electricity, spraying ionized air onto components to neutralize and remove static electricity on the surface of the components and remove the dust ensures that dust is removed. Can be. As described above, for example, Patent Documents 1 and 2 disclose a technique for removing dust adhering to an industrial product part or the like as a workpiece, that is, a workpiece, while neutralizing static electricity on the surface of the workpiece. It has been proposed to be.
特許文献 1:特開平 5— 15862号公報  Patent Document 1: JP-A-5-15862
特許文献 2:特開平 8 - 131982号公報  Patent Document 2: JP-A-8-131982
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0003] イオンィ匕した空気を発生させるには、空気を流すようにした流路内に電極を配置し 、電極間でコロナ放電により空気をイオンィ匕しており、部品などを被処理物としてこれ に付着した塵埃を除去するには、イオンィ匕空気をノズルにより被処理物に吹き付ける ようにしている。しかしながら、ノズルからイオンィ匕空気を吹き付けて塵埃を除去すると 、除去された塵埃が再度被処理物に付着することがあり、その場合には塵埃除去後 の被処理物を清浄に保持することができない。また、除去された塵埃は作業環境の 周囲に飛散、浮遊し、作業環境をも汚染してしまう。  [0003] In order to generate ionized air, electrodes are disposed in a flow path through which air flows, and air is ionized by corona discharge between the electrodes. In order to remove dust adhering to the workpiece, ionized air is blown onto the workpiece by a nozzle. However, when dust is removed by spraying ionized air from a nozzle, the removed dust may adhere to the workpiece again, in which case the workpiece after removing the dust cannot be kept clean. . Also, the removed dust scatters and floats around the working environment, polluting the working environment.
[0004] そこで、開閉ドアを有するボックス内に被処理物に吹き付けられるメイン空気流を生 成し、このメイン空気流にノズルからのイオンィ匕空気を混流させるようにし、被処理物 に付着した塵埃を除去するようにした除電除塵装置が開発されているが、ノズルから のイオンィ匕空気をメイン空気に混流させると、イオン濃度が低下してしまい、除電効 率が低下して除電除塵処理の完了までに時間が掛カることになる。一方、ボックス内 への被処理物の挿入時に開閉ドアを操作する場合には、作業者は被処理物の搬入 時と搬出時とに頻繁に開閉ドアの操作を行う必要があり、処理操作の作業性が良くな いという問題点がある。 [0004] Therefore, a main air flow that is blown to the object to be processed is generated in a box having an opening / closing door, and the main air flow is mixed with ionized air from a nozzle. A static eliminator has been developed to remove dust adhering to the surface.However, if the ionized air from the nozzle is mixed with the main air, the ion concentration will decrease and the static elimination efficiency will decrease, resulting in a reduction in static elimination. It takes time to complete the dust removal process. On the other hand, when operating the opening / closing door when the workpiece is inserted into the box, the operator needs to frequently operate the opening / closing door when loading and unloading the workpiece. There is a problem that workability is not good.
[0005] 本発明の目的は、被処理物に付着した塵埃の除電除塵操作を短時間で効率的に 行うことができる除電除塵装置を提供することにある。  An object of the present invention is to provide a static eliminator and a dust eliminator capable of efficiently performing a static elimination and dust removal operation of dust adhering to an object to be processed in a short time.
[0006] 本発明の他の目的は、被処理物から取り除かれた塵埃が外部へ飛び出して作業 環境を汚染することのない除電除塵装置を提供することにある。 [0006] Another object of the present invention is to provide a static eliminator and dust removing apparatus in which dust removed from an object to be processed does not fly outside and contaminate a working environment.
課題を解決するための手段  Means for solving the problem
[0007] 本発明の除電除塵装置は、被処理物にイオンィ匕空気を吹き付けて被処理物に付 着した塵埃を除去する除電除塵装置であって、空気が流入する空気流入口を有す る基台ボックスと、前記基台ボックスに設けられた支持コラムに前記空気流入口に対 向して取り付けられ、前記空気入流口との間で処理空間を形成する処理ヘッドと、前 記処理ヘッドに設けられ、前記空気流入口に向けて空気を噴出する噴出口が設けら れて前記処理空間を外部力 遮断するエアーカーテンを形成する空気噴出部材と、 前記処理ヘッドに設けられ、前記処理空間内の被処理物にイオンィヒ空気を吹き付け るイオン噴出ノズルとを有すること特徴とする。  [0007] The static eliminator and dust remover of the present invention is a static eliminator and dust remover for removing dust adhered to an object by spraying ionized air onto the object, and has an air inlet through which air flows. A base box, a processing head mounted on a support column provided in the base box, facing the air inlet, and forming a processing space between the air inlet and the processing head; An air ejection member provided with an ejection port for ejecting air toward the air inflow port to form an air curtain for interrupting an external force in the processing space; and an air ejection member provided in the processing head and provided in the processing space. And an ion ejection nozzle for blowing ion-rich air onto the object to be processed.
[0008] 本発明の除電除塵装置は、前記処理ヘッドの先端部と前記基台ボックスの先端部 との間に正面開口部を形成し、前記正面開口部に沿って前記エアーカーテンを形成 し、前記正面開口部を介して前記処理空間内に対する被処理物の搬入と搬出とを行 うことを特徴とする。  [0008] In the static elimination and dust removal apparatus of the present invention, a front opening is formed between a front end of the processing head and a front end of the base box, and the air curtain is formed along the front opening. The loading and unloading of the object to be processed into and out of the processing space is performed through the front opening.
[0009] 本発明の除電除塵装置は、前記処理ヘッドの先端部と前記基台ボックスの先端部 との間に正面開口部を形成するとともに、前記処理ヘッドの両側部と前記基台ボック スの両側部との間に側面開口部を形成し、前記正面開口部とそれぞれの前記側面 開口部に沿って前記エアーカーテンを形成し、前記正面開口部とそれぞれの前記 側面開口部の 、ずれかを介して前記処理空間内に対する被処理物の搬入と搬出と を行うことを特徴とする。 [0009] The static eliminator and dust removing apparatus of the present invention has a front opening formed between a front end of the processing head and a front end of the base box, and has both sides of the processing head and the base box. A side opening is formed between both sides, and the air curtain is formed along the front opening and each of the side openings to determine whether the front opening and each of the side openings are misaligned. Loading and unloading of the processing object into and from the processing space Is performed.
[0010] 本発明の除電除塵装置は、それぞれの前記側面開口部に取り外し自在のカバー を装着し、前記カバーを取り外すことにより前記側面開口部を介して前記処理空間 内に対する被処理物の搬入と搬出とを行うことを特徴とする。  [0010] In the static elimination and dust removal apparatus of the present invention, a removable cover is attached to each of the side openings, and by removing the cover, the object to be processed is loaded into the processing space through the side opening. And carrying out.
[0011] 本発明の除電除塵装置は、前記処理空間内に搬入された被処理物を検出するセ ンサと、当該センサが被処理物の搬入を検出したときに、前記基台ボックス内の空気 流の形成と、前記空気噴出部材からの空気の噴出と、前記イオン噴出ノズルからのィ オンィ匕空気の噴出とをこの順で所定時間経過毎に処理開始制御する制御手段とを 有することを特徴とする。  [0011] The static eliminator and dust removing apparatus of the present invention include a sensor for detecting an object to be processed carried into the processing space, and an air in the base box when the sensor detects the introduction of the object to be processed. Control means for controlling the start of flow, the ejection of air from the air ejection member, and the ejection of ionized air from the ion ejection nozzle in this order at predetermined time intervals. And
[0012] 本発明の除電除塵装置は、前記制御手段は、前記処理空間内から被処理物が搬 出されたときに、前記イオン化空気の噴出停止と、前記空気噴出部材からの空気の 噴出停止と、前記基台ボックス内の空気流形成停止とをこの順で所定時間経過毎に 処理終了制御することを特徴とする。  [0012] In the static elimination and dust removal apparatus of the present invention, the control means may stop the ejection of the ionized air and stop the ejection of the air from the air ejection member when the object to be processed is carried out of the processing space. And stopping the formation of the airflow in the base box in this order every time a predetermined time elapses.
[0013] 本発明の除電除塵装置は、前記制御手段は、所定の処理時間が経過したときに、 前記イオン化空気の噴出停止と、前記空気噴出部材からの空気の噴出停止と、前記 基台ボックス内の空気流形成停止とをこの順で所定時間経過毎に処理終了制御す ることを特徴とする。  [0013] In the static eliminator and dust remover of the present invention, the control means may further comprise: stopping the ejection of the ionized air, stopping the ejection of the air from the air ejection member, and stopping the base box when a predetermined processing time has elapsed. The process is controlled to stop the air flow formation in each time in this order every time a predetermined time elapses.
発明の効果  The invention's effect
[0014] 本発明によれば、エアーカーテンにより処理空間を外部力 遮蔽した状態の下で、 イオン噴出ノズルからイオンィ匕空気を噴出させて被処理物に帯電した静電気を中和 しながら塵埃を除去するようにしたので、処理空間をカバーなどにより覆う必要がなく 、処理空間内への被処理物の搬入と処理空間内からの被処理物の搬出とを迅速に 行うことができ、被処理物の除電除塵処理を迅速に行うことができる。  According to the present invention, in a state where the processing space is shielded from external force by an air curtain, ion dust is ejected from the ion ejection nozzle to remove dust while neutralizing static electricity charged on the workpiece. The processing space does not need to be covered with a cover or the like, and the processing object can be quickly brought into and out of the processing space. Can be quickly performed.
[0015] 空気噴出部材力 噴出されてエアーカーテンを形成する圧縮空気は、空気流入口 力 基台ボックス内に吸引して基台ボックス内に空気の流れを形成し、イオン噴出ノ ズルカ 噴出するイオンィ匕空気もボックス内の空気流により吸引されて基台ボックス 内に流入するので、処理空間内でイオンィ匕空気がエアーカーテン用の空気と混合す ることなく、イオン化空気の希釈化を防止することができ、被処理物に確実にイオン化 空気が吹き付けられて被処理物に付着した塵埃を短時間で除去することができる。 [0015] The force of the air ejection member The compressed air that is ejected to form an air curtain is sucked into the base box, forms an air flow in the base box, and ejects ionized nozzles. Since the dani air is also sucked by the air flow in the box and flows into the base box, the ionization air is prevented from being diluted in the processing space without being mixed with the air curtain air. Can be reliably ionized on the workpiece Dust adhered to the processing object by blowing air can be removed in a short time.
[0016] 側面開口部に取り付けられるカバーを取り外し自在とすることにより、装置の設置場 所に応じて被処理物の処理空間に対する搬入と搬出の経路を種々選択することが できる。  [0016] By making the cover attached to the side opening detachable, it is possible to select various routes for loading and unloading the processing object into and from the processing space according to the installation location of the apparatus.
[0017] 処理開始時および処理終了時のボックス内における空気流の形成とエアーカーテ ンとイオン噴出ノズルとの作動順序を一定の順序とすることにより、被処理物に対して イオン化空気を吹き付けるときおよび処理終了後には処理空間内に塵埃が存在しな V、状態とすることができるので、被処理物の処理品質を高めることができる。  [0017] By forming the air flow in the box at the start and end of the process and setting the order of operation of the air curtain and the ion ejection nozzle to a fixed order, it is possible to blow ionized air onto the object to be processed and After the processing is completed, the processing space can be set to a state where no dust exists in the processing space, so that the processing quality of the processing target can be improved.
[0018] 処理空間内で取り除かれた塵埃の外部漏出を防ぐことができるので、作業環境の 塵埃による汚染を防止することができる。  [0018] External leakage of the dust removed in the processing space can be prevented, so that contamination of the work environment by dust can be prevented.
[0019] 処理終了制御のパターンをセンサにより被処理物の搬出を検出するようにしたセン サ停止タイプと、タイマーで装置をオフするようにしたタイマー停止タイプとに設定す ることができ、被処理物の種類に応じて 、ずれかの制御パターンを選択することがで きる。  [0019] The processing termination control pattern can be set to a sensor stop type in which the unloading of the workpiece is detected by the sensor and a timer stop type in which the device is turned off by the timer. Depending on the type of the processing object, it is possible to select a shift control pattern.
図面の簡単な説明  Brief Description of Drawings
[0020] [図 1]本発明の除電除塵装置を示す正面図である。 FIG. 1 is a front view showing a static eliminator and dust remover of the present invention.
[図 2]図 1の側面図である。  FIG. 2 is a side view of FIG. 1.
[図 3]図 1の一部切り欠き平面図である。  FIG. 3 is a partially cutaway plan view of FIG. 1.
[図 4]本発明の除塵除電装置の内部構造を示す一部切り欠き側面図である。  FIG. 4 is a partially cutaway side view showing the internal structure of the dust eliminator of the present invention.
[図 5]図 1の要部を示す斜視図である。  FIG. 5 is a perspective view showing a main part of FIG. 1.
[図 6]図 5における A— A線に沿う拡大断面図である。  FIG. 6 is an enlarged sectional view taken along line AA in FIG. 5.
[図 7]除電除塵装置の作動を制御する制御回路を示す概略図である。  FIG. 7 is a schematic diagram showing a control circuit for controlling the operation of the static elimination device.
[図 8]センサにより装置をオンオフするようにしたタイプの制御手順を示すフローチヤ ートである。  FIG. 8 is a flowchart showing a control procedure of a type in which a device is turned on and off by a sensor.
[図 9]タイマーで装置をオフするようにしたタイプの制御手順を示すフローチャートで ある。  FIG. 9 is a flowchart showing a control procedure of a type in which a device is turned off by a timer.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0021] 以下、本発明の実施の形態を図面に基づいて詳細に説明する。この除電除塵装 置は、板材を組み合わせることにより形成される基台ボックス 11を有し、この基台ボッ タス 11内には、図 4に示すように、モータ 12とこれにより回転駆動されるファン 13とこ れらを収容するケース 14とを有するブロワ一つまり送風機 15が組み込まれており、内 部には空気の流れを形成する空間つまり空気流路が形成されている。基台ボックス 1 1の前端部側にはこの中に垂直に空気が流入する空気流入口 16が形成され、空気 流入口 16には多数の通気孔を有するエキスパンドメタル 17が取り付けられており、 基台ボックス 11内に空気流入口 16から被処理物などが入り込むことを防止して 、る 。送風機 15を駆動すると、図 4において矢印で示すように空気流入口 16に設けられ たエキスパンドメタル 17の多数の通気孔力も基台ボックス 11内に空気が流入し、基 台ボックス 11内部に空気の流れ (空気流)が生成される。生成された空気流は、基台 ボックス 11の背面に取り付けられた排気ダクト 18から外部に空気が排出される。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. This static eliminator The base has a base box 11 formed by combining plate materials. Inside the base box 11, as shown in FIG. 4, a motor 12 and a fan 13 rotated by the motor 12 are provided. A blower 15 having a case 14 for accommodating air therein, that is, a blower 15 is incorporated therein, and a space for forming a flow of air, that is, an air flow path is formed inside. An air inlet 16 through which air flows vertically is formed at the front end side of the base box 11, and an expanded metal 17 having a large number of ventilation holes is attached to the air inlet 16. An object to be processed is prevented from entering the table box 11 from the air inlet 16. When the blower 15 is driven, the air flows into the base box 11 due to the large number of vent holes of the expanded metal 17 provided at the air inlet 16 as shown by arrows in FIG. A flow (air flow) is created. The generated airflow is discharged to the outside from an exhaust duct 18 attached to the back of the base box 11.
[0022] 基台ボックス 11の後端部には板材を組み合わせることにより形成される支持コラム 21が設けられており、この内部には収容室 22が形成されている。支持コラム 21には 、図 4に示すように、前方に向けて突出し透明な板材力 なる透明カバーが処理へッ ド 23として取り付けられており、この処理ヘッド 23と空気流入口 16との間には処理空 間 24が形成されている。  [0022] At the rear end of the base box 11, a support column 21 formed by combining plate materials is provided, and a storage chamber 22 is formed inside the support column 21. As shown in FIG. 4, the support column 21 is provided with a transparent cover, which projects forward and is a transparent plate material, as a processing head 23, and is provided between the processing head 23 and the air inlet 16 as shown in FIG. Has a processing space 24 formed.
[0023] 支持コラム 21を構成する側板 25, 26は処理ヘッド 23に沿って前方に向けて突出 する突出部 25a, 26aを有し、処理ヘッド 23を構成する透明カバーは両方の突出部 25a, 26aに固定されている。突出部 25a, 26aには切り欠き部が設けられ、処理へッ ド 23の両側部と基台ボックス 11の両側部との間には側面開口部 27, 28が形成され 、処理ヘッド 23の先端部と基台ボックス 11の先端部との間には正面開口部 29が形 成されており、正面開口部 29から処理空間 24内に被処理物を搬入するとともに処理 後の被処理物を搬出することができる。  The side plates 25, 26 forming the support column 21 have protrusions 25a, 26a protruding forward along the processing head 23, and the transparent cover forming the processing head 23 includes both the protrusions 25a, Fixed to 26a. Notches are provided in the protruding portions 25a and 26a, and side opening portions 27 and 28 are formed between both side portions of the processing head 23 and both side portions of the base box 11, and the front end of the processing head 23 is formed. A front opening 29 is formed between the base and the tip of the base box 11, and the workpiece is loaded into the processing space 24 from the front opening 29 and the processed workpiece is unloaded. can do.
[0024] それぞれの側面開口部 27, 28には、図 2および図 3に示すように、透明な板材から なる透明カバー 31, 32がねじ部材 30により取り付けられており、透明カバー 31, 32 を介して外部から処理空間 24内を目視して処理状況を観察することができる。それ ぞれの透明カバー 31, 32の少なくとも一方を取り外すと、側面開口部 27, 28を介し て処理空間 24内に被処理物の搬入と搬出とを行うことができる。したがって、処理空 間 24内への被処理物の搬入と搬出を正面開口部 29と一方の側面開口部とのいず れか一方としても良ぐ搬入を正面開口部 29と一方の側面開口部とのいずれか一方 とし、搬出をいずれか他方としても良い。正面開口部 29が被処理物の搬入と搬出に 使用されないときには、正面開口部 29を透明カバーにより覆うようにしても良い。 As shown in FIG. 2 and FIG. 3, transparent covers 31, 32 made of a transparent plate material are attached to each side opening 27, 28 with a screw member 30, and the transparent covers 31, 32 are attached. The inside of the processing space 24 can be visually observed from outside through the processing state. When at least one of the transparent covers 31 and 32 is removed, the workpiece can be loaded and unloaded into the processing space 24 via the side openings 27 and 28. Therefore, processing empty Either the front opening 29 or one of the side openings can be used for loading and unloading of the object to be processed into the space 24. Either one may be carried out and the other may be carried out. When the front opening 29 is not used for carrying in and carrying out the object to be processed, the front opening 29 may be covered with a transparent cover.
[0025] 支持コラム 21の前面壁にはそれぞれ突出部 25a, 26aの近傍に沿って側面側のパ ィプ 33a, 33bが固定され、それぞれのパイプ 33a, 33bの先端は正面側のパイプ 33 cにより継手 34を介して接続されており、これらのパイプ 33a〜33cにより平面コの字 形状に組み立てられた空気噴出パイプ 33が空気噴出部材として形成されて 、る。図 6に示すように、空気噴出パイプ 33には基台ボックス 11の空気流入口 16の外周部 に向けて空気を噴出する噴出口 35が形成されており、それぞれの噴出口 35から噴 出する空気によって側面開口部 27, 28と正面開口部 29とには、破線の矢印で示す ように、エアーカーテンが形成されて、処理空間 24はエアーカーテンにより外部から 遮断される。空気噴出部材としての空気噴出パイプ 33は、図示する場合には断面円 形のパイプが使用されているが、角パイプを使用するようにしても良い。また、噴出口 35としては図示する場合には複数の孔により形成されている力 スリット上の噴出口 により形成しても良い。 [0025] Side pipes 33a, 33b are fixed to the front wall of the support column 21 along the vicinity of the protruding parts 25a, 26a, respectively, and the tips of the pipes 33a, 33b are connected to the front pipe 33c. Are connected via a joint 34, and an air ejection pipe 33 assembled in a plane U-shape by these pipes 33a to 33c is formed as an air ejection member. As shown in FIG. 6, the air ejection pipe 33 is formed with ejection ports 35 for ejecting air toward the outer peripheral portion of the air inlet 16 of the base box 11, and the air is ejected from each of the ejection ports 35. An air curtain is formed between the side opening portions 27 and 28 and the front opening portion 29 by air, as indicated by broken arrows, and the processing space 24 is shut off from the outside by the air curtain. As the air ejection pipe 33 as the air ejection member, a pipe having a circular cross section is used in the illustrated case, but a square pipe may be used. In the case shown in the figure, the ejection port 35 may be formed by an ejection port on a force slit formed by a plurality of holes.
[0026] 処理ヘッド 23の中央部にはイオン噴出ノズル 36が取り付けられており、処理空間 2 4内にはイオン噴出ノズル 36の噴出口 36aから処理空間 24内に向けて矢印で示す ようにイオンィ匕空気が吹き付けられるようになっており、処理空間 24内に配置された 被処理物には、エアーカーテンにより外部と遮断された状態の下でイオンィ匕空気が 吹き付けられることになる。被処理物に吹き付けられたイオンィ匕空気は、送風機 15に より空気流入口 16内に流入するエアーカーテン用の空気ととも送風機 15に吸引され て空気流入口 16内に流入し、排気ダクト 18から外部に排出される。  [0026] An ion ejection nozzle 36 is attached to the center of the processing head 23, and an ion discharge nozzle 36 is provided in the processing space 24 from the ejection port 36a of the ion ejection nozzle 36 into the processing space 24 as indicated by an arrow. Iridani air is blown onto the object placed in the processing space 24 while being shielded from the outside by an air curtain. The ionized air blown to the workpiece is sucked into the air inlet 16 by the blower 15 together with the air curtain air flowing into the air inlet 16 by the blower 15 and flows into the air inlet 16, and is discharged from the exhaust duct 18. It is discharged outside.
[0027] 空気噴出パイプ 33に圧縮空気を供給するために、支持コラム 21の背面壁には給 気ポート 37が図 3に示すように取り付けられており、この給気ポート 37は開閉弁 38お よび絞り弁 39を介して給気ノイブ 41に接続され、給気パイプ 41は 2つに分岐してそ れぞれのパイプ 33a, 33bに接続されている。したがって、給気ポート 37に接続され る空気圧供給源からの圧縮空気は、開閉弁 38が開かれると絞り弁 39を通って空気 噴出パイプ 33に供給されて噴出口 35から噴出してエアーカーテンを形成する。 [0027] In order to supply compressed air to the air ejection pipe 33, an air supply port 37 is mounted on the rear wall of the support column 21 as shown in Fig. 3, and the air supply port 37 is provided with an on-off valve 38 and an on-off valve 38. The air supply pipe 41 is connected to the air supply nozzle 41 via a throttle valve 39, and the air supply pipe 41 is branched into two and connected to the respective pipes 33a and 33b. Therefore, compressed air from the air pressure source connected to the air supply port 37 passes through the throttle valve 39 when the on-off valve 38 is opened. It is supplied to the ejection pipe 33 and ejected from the ejection port 35 to form an air curtain.
[0028] イオン噴出ノズル 36は支持コラム 21に取り付けられたイオン発生器 42に接続され ており、このイオン発生器 42に空気を供給するために、支持コラム 21の背面壁には 給気ポート 37の下方側に給気ポート(図示省略)が取り付けられており、この給気ポ 一トは図 3に示すように給気パイプ 45により圧力調整弁つまりレギユレータ 44および 開閉弁 43に接続され、この開閉弁 43は図 4に示すように給気パイプ 45を介してィォ ン発生器 42に接続されている。イオン発生器 42とイオン噴出ノズル 36との間にはィ オン搬送チューブ 46が接続されており、イオンィヒ空気はイオン噴出ノズル 36にィォ ン搬送チューブ 46により搬送される。したがって、開閉弁 43が開かれると空気圧供 給源からの圧縮空気は、レギユレータ 44により調圧された後に開閉弁 43を介してィ オン発生器 42に供給される。イオン発生器 42は圧縮空気の流路内に対となって配 置される電極(図示省略)を有しており、電極に対して電力を供給することにより電極 間のコロナ放電により空気がイオン化されてイオン噴出ノズル 36からはイオン化され た空気が処理空間 24内に供給される。なお、 1つの給気ポート 37から供給され圧縮 空気をエアーカーテン用の空気とイオン発生器 42用の空気とに分岐させてそれぞれ に供給するようにしても良い。 [0028] The ion ejection nozzle 36 is connected to an ion generator 42 attached to the support column 21, and an air supply port 37 is provided on the rear wall of the support column 21 to supply air to the ion generator 42. An air supply port (not shown) is attached to the lower side of the air supply port. This air supply port is connected to a pressure regulating valve, that is, a regulator 44 and an on-off valve 43 by an air supply pipe 45 as shown in FIG. The on-off valve 43 is connected to the ion generator 42 via an air supply pipe 45 as shown in FIG. An ion transport tube 46 is connected between the ion generator 42 and the ion ejection nozzle 36, and ion-exhaust air is transported to the ion ejection nozzle 36 by the ion transport tube 46. Therefore, when the on-off valve 43 is opened, the compressed air from the air pressure supply source is supplied to the ion generator 42 via the on-off valve 43 after being regulated by the regulator 44. The ion generator 42 has electrodes (not shown) arranged in pairs in the compressed air flow path, and by supplying power to the electrodes, the air is ionized by corona discharge between the electrodes. The ionized air is supplied from the ion ejection nozzle 36 into the processing space 24. The compressed air supplied from one air supply port 37 may be branched into air for the air curtain and air for the ion generator 42 and supplied to each of them.
[0029] このように、処理空間 24を取り囲んでこれを外部力 遮蔽するように圧縮空気により エアーカーテンが形成された状態の下で、イオン噴出ノズル 36からのイオンィ匕空気 が被処理物に吹き付けられるので、処理空間 24内でイオンィ匕空気がエアーカーテン 用の空気と混合することなぐイオンィ匕空気の希釈化が防止される。したがって、被処 理物に確実にイオン化空気が吹き付けられて被処理物に帯電した静電気がイオン化 空気により中和され、静電気により被処理物に付着した塵埃を短時間で除去すること ができる。付着した塵埃はイオンィ匕空気の流れにより除去されて空気流入口 16から 基台ボックス 11内に吸引される。 [0029] As described above, in a state where the air curtain is formed by compressed air so as to surround the processing space 24 and shield the processing space 24 from external force, the ionized air from the ion ejection nozzle 36 is sprayed on the object to be processed. As a result, dilution of the ionized air which is not mixed with the air for the air curtain in the processing space 24 is prevented. Therefore, ionized air is reliably blown on the object to be processed, and the static electricity charged on the object to be processed is neutralized by the ionized air, so that dust attached to the object to be processed due to the static electricity can be removed in a short time. The attached dust is removed by the flow of the ionized air, and is sucked into the base box 11 from the air inlet 16.
[0030] 被処理物が処理空間 24内に搬入されたときにこれを検出するために、図 4に示す ように処理ヘッド 23には上側センサ 47が取り付けられ、基台ボックス 11内には下側 センサ 48が設けられており、一方のセンサ 47は発光素子を有し、他方のセンサ 48は 受光素子を有している。したがって、例えば作業者が被処理物を手に持って処理空 間 24内に被処理物を搬入すると、搬入されたことが自動的にセンサ 47, 48により検 出される。 In order to detect when an object to be processed is loaded into the processing space 24, an upper sensor 47 is attached to the processing head 23 as shown in FIG. A side sensor 48 is provided, one sensor 47 having a light emitting element and the other sensor 48 having a light receiving element. Therefore, for example, the worker holds the work When the workpiece is loaded in the interval 24, the transport is automatically detected by the sensors 47 and 48.
[0031] 図 7は除電除塵装置の作動を制御する制御回路を示す概略図であり、支持コラム 2 1の収容室 22内に配置されたコントロールユニット 50からは、送風機 15のモータ 12 、それぞれの開閉弁 38, 43、イオン発生器 42に制御信号が送られるようになつてお り、コントロールユニット 50にはセンサ 48からの信号が供給されるようになっている。さ らに、コントロールユニット 50からは除電除塵装置の作動状態を示すモニター信号が 出力されるようになっている。  FIG. 7 is a schematic diagram showing a control circuit for controlling the operation of the static eliminator and dust remover. The control unit 50 arranged in the accommodation room 22 of the support column 21 sends a motor 12 of the blower 15 Control signals are sent to the on-off valves 38 and 43 and the ion generator 42, and a signal from a sensor 48 is supplied to the control unit 50. Further, the control unit 50 outputs a monitor signal indicating the operating state of the static eliminator and dust remover.
[0032] このような除電除塵装置による被処理物にイオン化された空気を吹き付けて、被処 理物に付着した塵埃を除去する際には、被処理物は作業者により処理空間 24内に 搬入される。被処理物が搬入されると、上側のセンサ 47から下側のセンサ 48に向け て照射された光が遮断され、センサ 48はコントロールユニット 50に搬入検出信号を 出力する。これにより、エアーカーテンが正面開口部 29に形成されるとともに、側面 開口部 27, 28に透明カバー 31, 32に沿ってエアーカーテンが形成された状態の下 で、イオン噴出ノズル 36からイオンィ匕された空気が処理空間 24内に噴出され、処理 空間 24内の空気は送風機 15により基台ボックス 11内に吸引される。排気ダクト 18に 図示しない連通ダクトを接続して集塵フィルタなどに集塵空気を案内することにより、 塵埃をフィルタに集めることができる。なお、基台ボックス 11の空気流路内に空気流 入口 16から流入する空気の流れが形成されるのであれば、基台ボックス 11内に送 風機 15を設けることなぐ排気ダクト 18から基台ボックス 11内の空気を外部に吸引し て排気するようにしても良い。  When the ionized air is blown onto the object to be processed by such a static elimination and dust removal apparatus to remove dust attached to the object to be processed, the object is carried into the processing space 24 by an operator. Is done. When the workpiece is carried in, the light emitted from the upper sensor 47 toward the lower sensor 48 is blocked, and the sensor 48 outputs a carry-in detection signal to the control unit 50. As a result, the air curtain is formed in the front opening 29, and the air curtain is formed from the ion ejection nozzle 36 in a state where the air curtain is formed along the transparent covers 31, 32 in the side openings 27, 28. The blown air is blown into the processing space 24, and the air in the processing space 24 is sucked into the base box 11 by the blower 15. By connecting a communication duct (not shown) to the exhaust duct 18 and guiding the collected air to a dust filter or the like, dust can be collected in the filter. If the air flowing from the air inlet 16 is formed in the air flow path of the base box 11, it is necessary to connect the base box 11 to the exhaust duct 18 without installing the blower 15. The air inside 11 may be sucked out and exhausted.
[0033] 装置の処理終了制御方式には、作業者により被処理物が処理空間 24力も搬出さ れたことがセンサ 48により検出されたら処理を停止させる方式と、イオン空気の噴出 が所定時間経過したら処理を停止させる方式とがあり、いずれの制御方式にするか は、被処理物の種類等に応じてコントロールユニット 50に接続された入力操作部 51 に設けられたスィッチを操作することにより設定される。この入力操作部 51は支持コラ ム 21の背面側などに設けられている。  [0033] The processing end control method of the apparatus includes a method in which the processing is stopped when the sensor 48 detects that the object to be processed has been unloaded by the operator in the processing space 24, and a method in which the ion air is ejected for a predetermined time. After that, there is a method of stopping the processing, and the control method to be used is set by operating the switch provided on the input operation unit 51 connected to the control unit 50 according to the type of the workpiece. Is done. The input operation unit 51 is provided on the back side of the support column 21 or the like.
[0034] 図 8はセンサにより装置をオンオフするようにしたタイプの制御手順を示すフローチ ヤートであり、図 9はタイマーで装置をオフするようにしたタイプの制御手順を示すフロ 一チャートである。 FIG. 8 is a flowchart showing a control procedure of a type in which a device is turned on and off by a sensor. FIG. 9 is a flowchart showing a control procedure of a type in which the device is turned off by a timer.
[0035] 図 8に示す制御方式では、ワークつまり被処理物が処理空間 24内に搬入されてセ ンサ 48により検出されると(S1)、まず、送風機 15のモータ 12が作動して基台ボック ス内に空気流が形成され、所定時間経過後に開閉弁 38が流路を開 、て空気噴出パ イブ 33に圧縮空気が供給されエアーカーテンが形成される。このようにして処理空間 24が外部力も遮断された状態の下で、開閉弁 43が流路を開いてイオン発生器 42に 空気が供給されるとともにイオン発生器 42内の電極に電力が供給されてイオン発生 器 42が作動する(S2〜S4)。ステップ S2〜S4の工程は 1秒以下の所定時間が経過 した後に、連続的に順次実行され、確実にエアーカーテンにより処理空間 24が外部 力 遮断された状態の下でイオンィ匕空気が被処理物に吹き付けられる。所定時間吹 き付けられると被処理物に静電気により付着した塵埃はイオンィ匕空気により静電気が 中和されて処理空間 24内の空気の流れにより除去されて基台ボックス 11内に吸引さ れる。被処理物の搬出がセンサ 48により検出されると (ステップ S5)、所定時間毎に、 イオン発生器 42の作動停止と、エアーカーテンの停止と、送風機 15の作動停止によ る空気流形成停止とが連続的に実行される。  In the control method shown in FIG. 8, when a work, that is, an object to be processed is carried into the processing space 24 and detected by the sensor 48 (S1), first, the motor 12 of the blower 15 is operated to activate the base. An air flow is formed in the box, and after a predetermined time elapses, the on-off valve 38 opens the flow path, and compressed air is supplied to the air ejection pipe 33 to form an air curtain. In this manner, with the processing space 24 in a state where external force is also cut off, the on-off valve 43 opens the flow path to supply air to the ion generator 42 and supply power to the electrodes in the ion generator 42. Then, the ion generator 42 operates (S2 to S4). The processes of steps S2 to S4 are successively and sequentially executed after a predetermined time of 1 second or less has elapsed, and the ion processing air is reliably processed under the condition that the processing space 24 is externally shut off by the air curtain. Sprayed on. When sprayed for a predetermined time, dust adhered to the object by static electricity is neutralized by ionized air, removed by the flow of air in the processing space 24, and sucked into the base box 11. When the unloading of the object is detected by the sensor 48 (step S5), the operation of the ion generator 42, the operation of the air curtain, and the operation of the air blower 15 are stopped at predetermined time intervals. Are continuously executed.
[0036] このように、除電除塵装置においては処理空間内に被処理物が搬入されたことを 検出すると、装置の処理開始時には、送風機 15の作動後所定時間が経過したときに エアーカーテンを作動させるようにし、その後所定時間経過後にイオンィ匕空気を噴出 するようにしたので、エアーカーテンにより処理空間 24が確実に外部力も遮断される とともに処理空間 24内に塵埃が存在しない状態の下でイオンィ匕空気が被処理物に 噴出されるので、塵埃が装置外部に漏出することが防止されるとともに確実に塵埃を 被処理物から取り除くことができる。これに対して、処理終了時には、処理開始時とは 逆にイオン発生器 42が停止してカゝら所定時間が経過したときにエアーカーテンを停 止し、それから所定時間が経過した後に送風機 15の作動を停止して空気流形成を 停止するようにしたので、除去された塵埃が外部に漏出することを確実に防止するこ とがでさる。  As described above, in the static eliminator and dust remover, when it is detected that an object to be treated has been carried into the processing space, the air curtain is activated when a predetermined time has elapsed after the operation of the blower 15 at the start of processing of the device. Then, after a predetermined time has elapsed, the ionizing air is blown out, so that the external force is reliably shut off by the air curtain and the ionizing air is discharged in a state where no dust exists in the processing space 24. Since the air is blown out to the workpiece, it is possible to prevent the dust from leaking out of the apparatus and to reliably remove the dust from the workpiece. On the other hand, at the end of the process, the air curtain is stopped when a predetermined time has elapsed after the ion generator 42 has stopped and the blower 15 Since the operation of is stopped to stop the formation of the airflow, it is possible to reliably prevent the removed dust from leaking to the outside.
[0037] 一方、図 9に示す制御方式では、除電除塵装置の処理開始制御は図 8に示す場合 と同様である力 装置の作動を停止させるときの処理終了制御は図 8と相違してタイ マーによりイオンィ匕空気の吹き付け時間が所定時間経過したときに装置の作動を停 止させるようにしている。イオンィ匕空気が被処理物に所定時間吹き付けられる自動的 に除電除塵処理が終了するので、作業者は装置の停止とともに被処理物を外部に 搬出する。このようにタイマー停止タイプの処理終了制御においても、図 8に示すセ ンサ停止タイプの処理終了制御方式と同様に塵埃を外部に漏出させることなぐ被処 理物からの塵埃の除去を行うことができる。 [0037] On the other hand, in the control method shown in FIG. The process termination control when stopping the operation of the power device is the same as that in FIG. 8, and the operation of the device is stopped when the time for blowing the ionized air by the timer elapses a predetermined time, unlike in FIG. . Since the ionization and dust removal processing is automatically completed when the ionized air is blown onto the object for a predetermined time, the operator stops the apparatus and carries out the object to the outside. As described above, even in the timer stop type processing end control, as in the sensor stop type processing end control method shown in FIG. it can.
[0038] この除電除塵装置は、工業製品用の各種電気部品や電子部品、光学レンズなどの カメラ部品、榭脂成型モールド部品などのように静電気が原因となって素子を破損し たり、ゴミなどの塵埃の付着が問題となる部品を被処理物として除電除塵の処理を行 うことができる。 [0038] The static eliminator and dust remover can cause damage to elements due to static electricity, such as various electric and electronic parts for industrial products, camera parts such as optical lenses, resin molded parts, and the like. It is possible to perform a static elimination and dust removal process using a component having a problem of dust adhesion as an object to be treated.
[0039] 本発明は前記実施の形態に限定されるものではなぐその要旨を逸脱しない範囲 で種々変更可能である。たとえば、図示する除電除塵装置においては、処理ヘッド 2 3には 1つのイオン噴出ノズル 36が設けられている力 複数のイオン噴出ノズル 36を 設けるようにしても良い。また、処理ヘッド 23は透明板材により形成されている力 不 透明な板材により処理ヘッド 23を形成するようにしても良ぐ同様に透明カバー 31, 32に代えて不透明の板材によりカバーを形成するようにしても良い。  [0039] The present invention is not limited to the above-described embodiment, and can be variously modified without departing from the gist thereof. For example, in the illustrated static elimination and dust removal apparatus, the processing head 23 may be provided with a plurality of ion ejection nozzles 36 provided with one ion ejection nozzle 36. Also, the processing head 23 may be formed of a force plate formed of a transparent plate material. The processing head 23 may be formed of an opaque plate material instead of the transparent covers 31 and 32. You may do it.

Claims

請求の範囲 The scope of the claims
[1] 被処理物にイオン化空気を吹き付けて被処理物に付着した塵埃を除去する除電除 塵装置であって、  [1] A static elimination and dust removal apparatus for removing dust adhered to an object by spraying ionized air onto the object,
空気が流入する空気流入口を有し、当該空気流入口から流入した空気の流れを案 内する空気流路を有する基台ボックスと、  A base box having an air inlet through which air flows in and having an air flow path through which the flow of the air flowing from the air inlet enters;
前記基台ボックスに設けられた支持コラムに前記空気流入口に対向して取り付けら れ、前記空気入流口との間で処理空間を形成する処理ヘッドと、  A processing head attached to a support column provided in the base box so as to face the air inlet, and forming a processing space with the air inlet;
前記処理ヘッドに設けられ、前記空気流入口に向けて空気を噴出する噴出口が設 けられて前記処理空間を外部力 遮断するエアーカーテンを形成する空気噴出部 材と、  An air ejection member provided in the processing head and having an ejection port for ejecting air toward the air inflow port to form an air curtain for shutting off the processing space with an external force;
前記処理ヘッドに設けられ、前記処理空間内の被処理物にイオン化空気を吹き付 けるイオン噴出ノズルとを有すること特徴とする除電除塵装置。  An ion ejection nozzle provided on the processing head, for spraying ionized air onto an object to be processed in the processing space.
[2] 請求項 1記載の除電除塵装置において、前記処理ヘッドの先端部と前記基台ボッ タスの先端部との間に正面開口部を形成し、前記正面開口部に沿って前記エアー力 一テンを形成し、前記正面開口部を介して前記処理空間内に対する被処理物の搬 入と搬出とを行うことを特徴とする除電除塵装置。  2. The static eliminator and dust remover according to claim 1, wherein a front opening is formed between a front end of the processing head and a front end of the base bottom, and the air force is formed along the front opening. A static eliminator and dust remover, wherein a ten is formed, and a workpiece is carried in and out of the processing space through the front opening.
[3] 請求項 1記載の除電除塵装置において、前記処理ヘッドの先端部と前記基台ボッ タスの先端部との間に正面開口部を形成するとともに、前記処理ヘッドの両側部と前 記基台ボックスの両側部との間に側面開口部を形成し、前記正面開口部とそれぞれ の前記側面開口部に沿って前記エアーカーテンを形成し、前記正面開口部とそれ ぞれの前記側面開口部の 、ずれかを介して前記処理空間内に対する被処理物の搬 入と搬出とを行うことを特徴とする除電除塵装置。  3. The static eliminator and dust remover according to claim 1, wherein a front opening is formed between a distal end of the processing head and a distal end of the base bot, and both sides of the processing head and the base. A side opening is formed between both sides of the base box, and the air curtain is formed along the front opening and the respective side openings, and the front opening and the respective side openings are formed. A static eliminator and a dust remover, wherein an object to be processed is carried in and out of the processing space via a gap.
[4] 請求項 3記載の除電除塵装置において、それぞれの前記側面開口部に取り外し自 在のカバーを装着し、前記カバーを取り外すことにより前記側面開口部を介して前記 処理空間内に対する被処理物の搬入と搬出とを行うことを特徴とする除電除塵装置  4. The static eliminator and dust removing apparatus according to claim 3, wherein a detachable cover is attached to each of the side openings, and the cover is removed. Static elimination device for carrying in and out
[5] 請求項 1記載の除電除塵装置において、前記処理空間内に搬入された被処理物 を検出するセンサと、当該センサが被処理物の搬入を検出したときに、前記基台ボッ タス内の空気流の形成と、前記空気噴出部材からの空気の噴出と、前記イオン噴出 ノズル力 のイオン化空気の噴出とをこの順で所定時間経過毎に処理開始制御する 制御手段とを有することを特徴とする除電除塵装置。 [5] In the static eliminator and dust remover according to claim 1, a sensor for detecting an object to be processed carried into the processing space, and the base bobbin when the sensor detects the introduction of the object to be processed. Control means for controlling the start of air flow in the task, the ejection of air from the air ejection member, and the ejection of ionized air with the ion ejection nozzle force in this order at predetermined time intervals. A static eliminator and dust remover, characterized in that:
[6] 請求項 5記載の除電除塵装置において、前記制御手段は、前記処理空間内から 被処理物が搬出されたときに、前記イオン化空気の噴出停止と、前記空気噴出部材 からの空気の噴出停止と、前記基台ボックス内の空気流形成停止とをこの順で所定 時間経過毎に処理終了制御することを特徴とする除電除塵装置。  6. The static eliminator and dust remover according to claim 5, wherein the control means stops the ejection of the ionized air and ejects the air from the air ejection member when the object to be processed is carried out of the processing space. A static eliminator and a dust eliminator, wherein a stop and a stop of air flow formation in the base box are controlled in this order at every predetermined time.
[7] 請求項 5の除電除塵装置において、前記制御手段は、所定の処理時間が経過した ときに、前記イオン化空気の噴出停止と、前記空気噴出部材からの空気の噴出停止 と、前記基台ボックス内の空気流形成停止とをこの順で所定時間経過毎に処理終了 制御することを特徴とする除電除塵装置。  7. The static eliminator and dust remover according to claim 5, wherein the control means stops the ejection of the ionized air and the ejection of the air from the air ejection member when a predetermined processing time has elapsed. A static eliminator and a dust eliminator, wherein the process of stopping the formation of the air flow in the box is controlled in this order every time a predetermined time has elapsed.
PCT/JP2005/010924 2004-06-22 2005-06-15 Static charge and dust removing device WO2005123284A1 (en)

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Application Number Priority Date Filing Date Title
US11/630,561 US20090158537A1 (en) 2004-06-22 2005-06-15 Static electricity and dust removing apparatus
EP05751544A EP1759776A4 (en) 2004-06-22 2005-06-15 Static charge and dust removing device

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JP2004184158A JP2006007012A (en) 2004-06-22 2004-06-22 Charge removal/dedusting apparatus
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104172991A (en) * 2013-05-28 2014-12-03 联润科技股份有限公司 Self-propelled cleaning equipment dirt detection method and device
CN105327897A (en) * 2015-11-30 2016-02-17 重庆市贵荣塑胶制品有限公司 Manual electrostatic dust collection method for computer keyboard

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919794B2 (en) * 2006-12-20 2012-04-18 株式会社キーエンス Static eliminator
WO2009018679A1 (en) * 2007-08-06 2009-02-12 Acxing Industrial Co., Ltd. Air curtain generating device
US8147616B2 (en) * 2007-10-22 2012-04-03 Stokely-Van Camp, Inc. Container rinsing system and method
US9168569B2 (en) 2007-10-22 2015-10-27 Stokely-Van Camp, Inc. Container rinsing system and method
JP2009285627A (en) * 2008-05-30 2009-12-10 Sunx Ltd Apparatus for removing static electricity and dust
JP2010000486A (en) * 2008-06-23 2010-01-07 Sunx Ltd Static eliminating/dust removing device
JP2010005600A (en) * 2008-06-30 2010-01-14 Sunx Ltd Dust removing apparatus
US8141190B2 (en) * 2008-07-28 2012-03-27 Gentex Optics, Inc. Walk-up workstation employing ionizing air nozzles and insulating panels
CN101683649A (en) * 2008-09-26 2010-03-31 无锡海达安全玻璃有限公司 Improved dust removing device of printing glass
JP2010095267A (en) * 2008-10-15 2010-04-30 Trinc:Kk Dust remover for container
JP5336949B2 (en) * 2009-06-30 2013-11-06 サントリーホールディングス株式会社 Resin container charge removal method, resin container sterilization filling method, resin container filling capping method, resin container charge removal device and resin container sterilization filling system
JP5541564B2 (en) * 2009-09-03 2014-07-09 株式会社テクノ菱和 Ionizer system
TW201136674A (en) * 2010-04-21 2011-11-01 Hon Hai Prec Ind Co Ltd Dust elimination device
US8370989B2 (en) * 2010-07-31 2013-02-12 Cheng Uei Precision Industry Co., Ltd. Static eliminator with dust removal feature
US8508907B2 (en) 2010-11-01 2013-08-13 eFluxor LLC Method and device for collecting electrostatic charge from the atmosphere
DE202011101114U1 (en) * 2010-11-13 2012-08-28 Waldner Laboreinrichtungen Gmbh & Co. Kg off device
CN102284450A (en) * 2011-06-15 2011-12-21 震宇(芜湖)实业有限公司 Electrostatic dust removing device of plastic part
DK2535034T3 (en) 2011-06-17 2014-07-28 Kiro Robotics Sl MACHINE AND METHOD OF AUTOMATICALLY PREPARING INTRAVENOUS MEDICATION
AU2012270009B2 (en) 2011-06-17 2016-08-11 Kiro Grifols, S.L. Machine and method for the automatic preparation of intravenous medication
CN102652945A (en) * 2011-12-31 2012-09-05 东莞华贝电子科技有限公司 Automatic dust removal device of circuit board
CN102601075A (en) * 2012-03-12 2012-07-25 四川科伦药业股份有限公司 Suspension ring washing and counting device
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CN102814301A (en) * 2012-09-07 2012-12-12 高精科技(苏州)有限公司 Static dust removing device
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JP2022102831A (en) * 2020-12-25 2022-07-07 トヨタ自動車株式会社 Dust collector, vehicle, and dust removal method
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0515862A (en) * 1991-07-11 1993-01-26 Himu Electro Kk Dust removing device
JP2002213786A (en) * 2001-11-01 2002-07-31 Hitachi Ltd Air shower device
JP2002346491A (en) * 2001-05-22 2002-12-03 Discovery:Kk Hair brush cleaner

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4194232A (en) * 1978-03-31 1980-03-18 Cumming James M Ion treatment of photographic film
JPH02154423A (en) * 1988-12-06 1990-06-13 Nec Corp Manufacture of semiconductor device
GB2227086B (en) * 1989-01-17 1992-05-20 Delco Electronic Overseas Corp Destaticising and cleaning apparatus
US5008594A (en) * 1989-02-16 1991-04-16 Chapman Corporation Self-balancing circuit for convection air ionizers
JP3041541B2 (en) * 1991-02-27 2000-05-15 セイコーインスツルメンツ株式会社 Dust remover and dust removal method
US5506744A (en) * 1994-04-28 1996-04-09 Fortrend Engineering Ionized airflow manifold for static reduction
EP1297384B1 (en) * 2000-06-27 2006-11-02 Brooks-PRI Automation (Switzerland) GmbH Device and method for cleaning articles used in the production of semiconductor components
US6543078B1 (en) * 2000-07-24 2003-04-08 Eastman Kodak Company Apparatus and method for cleaning object having generally irregular surface features
US6490746B1 (en) * 2000-07-24 2002-12-10 Eastman Kodak Company Apparatus and method for cleaning objects having generally irregular, undulating surface features
US6565669B1 (en) * 2000-10-31 2003-05-20 Intel Corporation Vibrating wafer particle cleaner

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0515862A (en) * 1991-07-11 1993-01-26 Himu Electro Kk Dust removing device
JP2002346491A (en) * 2001-05-22 2002-12-03 Discovery:Kk Hair brush cleaner
JP2002213786A (en) * 2001-11-01 2002-07-31 Hitachi Ltd Air shower device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1759776A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104172991A (en) * 2013-05-28 2014-12-03 联润科技股份有限公司 Self-propelled cleaning equipment dirt detection method and device
CN105327897A (en) * 2015-11-30 2016-02-17 重庆市贵荣塑胶制品有限公司 Manual electrostatic dust collection method for computer keyboard

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US20090158537A1 (en) 2009-06-25
CN1972763A (en) 2007-05-30
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JP2006007012A (en) 2006-01-12
TW200600200A (en) 2006-01-01
EP1759776A4 (en) 2008-05-21

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