JP2003106591A - Arrangement structure and operation method of air shower device and cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air shower device capable of being passed easily. SOLUTION: The air shower device 1 is for removing foreign matters adhering to a person and so on by spraying clean air from nozzles 18 provided on both side faces 17 of a passage 15 formed between an inlet 13 and an outlet 14 for discharging clean air to inside for removing foreign matters adhering to a person and so on by blowing clean air from the nozzle 18 to the person passing the passage 15 from the inlet 13 to the outlet 14. The inlet 13 and the outlet 14 are opened and at least one of them is provided with an air curtain for preventing inner atmosphere leakage.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air shower device for removing foreign matter adhering to a person when entering a cleaning device and the like, and further to an arrangement structure and an operating method of the cleaning device using the air shower device. .

[0002]

2. Description of the Related Art For example, in a semiconductor manufacturing field for producing integrated circuits and the like, a field such as biotechnology, a cleaning device such as a clean room is used to maintain a clean atmosphere and a sterile condition. In this case, in addition to keeping the inside of the cleaning device clean, an air shower device is installed adjacent to the cleaning device, and people who enter the cleaning device are
It obliges the air shower device to pass in advance to prevent foreign matter from entering the cleaning device. In an air shower device, clean air filtered by a filter is ejected from a nozzle toward a human body or dustproof clothing, and foreign matter adhering to the human body or dustproof clothing is blown away to be removed.

[0003]

However, since an opening / closing door is generally provided at the entrance / exit of the air shower device, a person who attempts to enter the cleaning device can enter the air shower device both when entering and exiting the air shower device. It is troublesome to open and close the door. In particular, when bringing tools and the like into the cleaning device, they must be carried in and out of the air shower device, which is considerably troublesome.

An object of the present invention is to provide an easy-to-pass air shower device, and further to provide an arrangement structure and an operating method of a cleaning device using such an air shower device.

[0005]

In order to achieve this object, in the present invention, nozzles for discharging clean air to the inside are provided on both side surfaces of a passage formed between an inlet and an outlet, and An air shower device for removing foreign matter adhering to a person or the like by blowing clean air from a nozzle to a person or the like passing through a passage toward an outlet, the inlet and outlet of which are opened, and at least one of the inlet and outlet is An air curtain was formed to prevent leakage of the atmosphere. Further, this air shower device and a clean space in which a parallel flow of clean air is formed are arranged adjacent to each other, and an advanced clean space having a higher degree of cleanliness than the clean space is arranged adjacent to the clean space.

[0006] Those who are going to enter the highly clean space,
First, it enters the air shower device, and passes through the passage formed between the inlet and the outlet of the air shower device. While passing through the passage in the air shower device in this way, clean air is ejected toward a person or the like from nozzles provided on both sides of the passage, and foreign matter adhering to the person or the like is blown away and removed. It

In addition, when bringing in tools or the like to the advanced cleaning apparatus, a person or the like carries the tools or the like and passes through a passage in the air shower apparatus. In this case, the air gun provided in the air shower device can be used to blow compressed air to the tool or the like to remove foreign matters attached to the tool or the like in the air shower device.

In this way, after the foreign matter is removed by passing through the air shower device, a person or the like enters the next clean space. In this case, by forming an air curtain at the outlet of the air shower device, it is possible to prevent the internal atmosphere of the air shower device from leaking to the clean space.

In the clean space, a parallel flow of clean air is formed. In this case, the parallel flow of clean air formed in the clean space is, for example, a downward vertical laminar flow. Then, a person whose foreign matter has been removed by the air shower device can pass through the clean space while maintaining a clean state and enter the next highly clean space.

When a person or the like passes through the air shower device and the clean space as described above and enters a highly clean space, the time for which the air shower device passes is measured,
Whether to enter the clean space or the highly clean space is determined based on the measured value. That is, when the time passing through the air shower device has passed a predetermined time, it is determined that the foreign matter adhering to the person is sufficiently removed in the air shower device, and the clean space or the highly clean space is determined. Admission is permitted. On the other hand, if the time passing through the air shower device has not passed the predetermined time, it is determined that the foreign substances adhering to the person are not removed sufficiently in the air shower device, and it is judged that the clean space or advanced cleaning Deny entry to space. As a result, it is possible to effectively prevent foreign matter from being brought into the clean space or the highly clean space, and to maintain a highly clean atmosphere in the clean space or the highly clean space.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a cleaning device 2 including an air shower device 1 according to an embodiment of the present invention.
FIG. The cleaning device 2 has a configuration in which an air shower device 1, a cleaning space 3 and an advanced cleaning space 4 are arranged adjacent to each other.

The inside of the highly clean space 4 is kept in a clean atmosphere of class 1000 to 100,000, which is suitable for fields such as semiconductor manufacturing and biotechnology. In front of the highly clean space 4, there is provided an entrance / exit 10 through which a person or the like who goes in and out of the highly clean space 4 passes. The doorway 10 is adapted to be opened and closed by an opening / closing door 11. A clean space 3 is arranged adjacent to the doorway 10. A person who enters the highly clean space 4 removes dust by passing through the air shower device 1 from the inlet 13 toward the outlet 14 in advance, and passes through the clean space 3 while maintaining a clean state, and the entrance 10 After that, it enters the highly clean space 4.

In the illustrated example, the air shower device 1 is arranged at a position apart from the outer wall surface of the highly clean space 4, and the air shower device 1 and the entrance / exit 10 of the highly clean space 4 are arranged.
A clean space 3 is formed between and.

FIG. 2 is a perspective view of the air shower device 1. FIG. 3 is a cross-sectional view of the air shower device 1, showing a state of the inside of the air shower device 1 viewed from above. An inlet 13 and an outlet 14 are provided on both sides of the air shower device 1.
Is formed in an open state, so that a person or the like who has entered the air shower device 1 through the inlet 13 can pass through the passage 16 in the air shower device 1 in one way toward the outlet 14. . Doors, curtains, etc. are not attached to the inlet 13 and the outlet 14, and the inside of the air shower device 1 is open to the outside. Nozzles 18 for ejecting clean air toward the inside are arranged at a plurality of locations on both side surfaces 17 inside the air shower device 1.
Then, by ejecting clean air from these nozzles 15 to a person or the like passing through the passage 15 in the air shower apparatus 1 from the inlet 13 to the outlet 14, the foreign matter adhering to the human body or dustproof clothing is blown away and removed. It is supposed to do.

The nozzles 18 provided on the both side surfaces 17 inside the air shower device 1 are composed of, for example, a pan curlou bar or the like. When these nozzles 18 are provided on both side surfaces 17 inside the air shower device 1, for example, one side surface 1
7 and the other side surface 17 are arranged so that the nozzles 18 are staggered so that the nozzles 18 on both side surfaces 17 do not collide with each other. The nozzles 18 may be arranged so that the nozzles 18 on one side surface 17 and the other side surface 17 face each other.
Both side surfaces 17
The discharge airflows from the nozzles 18 may be prevented from colliding with each other. In any case, the discharge airflows from the nozzles 18 on both side surfaces 17 do not interfere with each other, and the discharge airflows from the nozzles 18 face each other on the opposite side surfaces (inner wall surfaces) 1
It is preferable to configure so that the vehicle can reach smoothly up to 7 while maintaining high speed. Then, the air flow discharged from each nozzle 18 attracts the surrounding air (the air inside the air shower device 1) and vigorously hits the opposing side surface 17.

The back portions of both side surfaces 17 inside the air shower device 1 are both configured as a clean air chamber 19. As shown in FIG. 4, a cover plate 20 is obliquely provided so as to partition the inside of the chamber 19 into upper and lower parts. As a means for partitioning the inside of the chamber 19, in addition to the lid plate 20, a HEPA filter 21 is fitted to a part of the lid plate 20 at an appropriate position. That is, the HEPA filters 21 are arranged symmetrically in the vicinity of the inlet 13 and the outlet 14 so as to partition the inside of the chamber 19, and these HEP filters 21 are arranged.
By closing the periphery of the A filter 21 with the cover plate 20, a partition surface is formed, and all the air passing through the inside of the chamber 19 from the bottom to the top is filtered through the HEPA filter 21. ing. HEPA filter 21
The discharge surface and the cover plate 20 are arranged flush with each other. Further, a fan 22 is arranged below the chamber 19 partitioned by the cover plate 20 and the HEPA filter 21 in this way.

As described above, the plurality of nozzles 18 arranged on both side surfaces 17 inside the air shower device 1 are directed toward the passage 15 above the chamber 19 partitioned by the cover plate 20 and the HEPA filter 21 in this way. It is open. On the other hand, a suction port 23 is opened below both side surfaces 17 inside the air shower device 1. Suction port 2
3 is located below the partition surface formed by the cover plate 20 and the HEPA filter 21 described above. Then, by operating the fan 22 arranged in the lower part of the chamber 19, the air inside the air shower device 1 is sucked into the lower part of the chamber 19 through the suction port 23, and the air is sucked into the chamber 19.
By blowing out upward in the inside, the HEPA filter 21 is forcibly passed through the HEPA filter 21 to be filtered, and purified air is discharged from the nozzle 18 toward the passage 15 in the air shower device 1. In this way, the foreign matter adhering to a person or the like passing through the passage 15 in the air shower device 1 is blown away and removed, and then the air in the air shower device 1 is sucked into the lower portion of the chamber 19 again through the suction port 23. Has become. As a result, the foreign matter blown off by a person or the like in the air shower device 1 is removed by the HEPA filter 21.

As shown in FIG. 5, guide vanes (blades) curved at approximately 90 ° are provided at the four corners of the air shower device 1 (both inward of the inlet 13 and both inward of the outlet 14).
A plurality of 25 are arranged upright. A plurality of guide vanes 2 at each of the four corners of the air shower device 1.
5 are arranged in parallel, and the nozzle 18
After being discharged from the inner wall surface of the air shower apparatus 1 and colliding with the inner wall surface facing the inner wall surface of the air shower apparatus 1 as shown in FIG. By passing between 25, the direction is changed to a planar air flow 27. In this way, the airflow 26 that tends to flow toward the inlet 13 and the outlet 14 is supplied to the inlet 13 and the outlet 1 of the air shower device 1.
By changing the direction to the planar airflow 27 inward of 4, the planar airflow 2 from both inward sides of the inlet 13 and the outlet 14
So-called air curtains for supplying 7 are formed at the inlet 13 and the outlet 14, respectively. In this way, the atmosphere is prevented from leaking from the inside of the air shower device 1 to the outside.

Inside the air shower device 1, the passage 1 is provided.
An air gun 30 as shown in FIG. Inlet 13 and outlet 14 of the air shower device 1
A rail 31 extending between and is installed so as to be suspended from the ceiling of the air shower device 1. This rail 31
Is inclined so that the inlet 13 side is lower than the outlet 14 side. A plurality of pulleys 32 are mounted on the rail 31, and these pulleys 32 can roll smoothly on the rail 31. A hook 33 is attached to each pulley 32.
In addition, the compressed air supply hose 34 is suspended at a substantially constant interval with a sufficient margin. An air gun body 35 is attached to the tip of the supply hose 34. The air gun 30 configured as described above can blow compressed air to a desired portion inside the air shower device 1 by gripping and operating the air gun main body 35. Further, when an operator or the like releases the air gun main body 35 from his / her hand, the pulleys 32 travel on the rails 31 and gather on the inlet 13 side, and the supply hose 34 and the air gun main body 35 have the inlet 13 inside the air shower device 1. It will hang down to the side.

As shown in FIG. 1, a plurality of FFUs (fan filter units) 40 are installed above the clean space 3 formed between the outlet 14 of the air shower device 1 and the entrance 10 of the advanced clean space 4. I am doing it. Each FFU 40 supplies a parallel flow of clean air filtered by a filter (not shown) in a downward vertical laminar flow state by the operation of a built-in fan (not shown). As a result, the clean space 3 is always kept clean.

In the illustrated embodiment, the clean space 3 is open in the direction intersecting the flow line connecting the outlet 14 of the air shower device 1 and the entrance 10 of the highly clean space 4. People moving along the outer wall of 4
The clean space 3 can freely pass between the outlet 14 of the air shower device 1 and the entrance 10 of the highly clean space 4.

Air curtain supply nozzles 45 are provided on both sides of the entrance / exit 10 of the highly clean space 4. Inside the supply nozzles 45, a discharge port 47 that supplies a planar airflow 46 facing both sides of the inlet / outlet 10.
Are provided respectively. The supply nozzle 45 includes a fan 4
The clean air that has been sucked in 8 and filtered by the HEPA filter 49 is supplied, whereby a planar clean air flow is supplied from each discharge port 47 along the outside of the entrance / exit 10. You can do it. When the above-mentioned opening / closing door 11 is opened, the fan 48 is operated in advance, and the planar air currents 46 are supplied from both sides of the entrance / exit 10 by these supply nozzles 45 outside the highly clean space 4, so-called an air curtain. Is formed, and an external atmosphere is prevented from entering the interior of the highly clean space 4.

In the example shown in the figure, the air flow discharged in a plane form from each discharge port 47 of the supply nozzle 45 is set so as to face away from the entrance / exit 10 of the highly clean space 4 by an angle θ. As a result, the airflow that is about to flow into the highly clean space 4 from the outside (clean space 3) of the highly clean space 4 is pushed back toward the outside of the highly clean space 4. It should be noted that the angle θ ′ of the air flow discharged in a plane form from the discharge port 47 provided at the bottom of the supply nozzle 45.
Is set to be slightly larger (θ ′> θ) than the angle θ of the air flow discharged from the other discharge ports 47 in a planar manner. As a result, an external airflow that tries to enter the highly clean space 4 while flowing along the floor in the clean space 3 is prevented. The direction (angles θ and θ ′) of the air flow discharged from each discharge port 47 is adjusted by confirming the air flow direction using, for example, silk thread.

A sensor 50 is installed beside the inlet 13 of the air shower device 1. The sensor 50 detects a person or the like who enters the inside of the air shower device 1 through the inlet 13. The sensor 50 may be a gate sensor arranged so as to surround the inlet 13 of the air shower device 1 in a gate shape.

Similarly, a sensor 51 is installed beside the outlet 14 of the air shower device 1. This sensor 51
Thus, a person or the like who enters the clean space 3 from the inside of the air shower device 1 through the entrance 14 is detected. Similarly, the sensor 51 also has the outlet 14 of the air shower device 1.
May be configured by a gate sensor arranged so as to surround the gate.

Further, on the outside of the entrance / exit 10 of the highly clean space 4, the sensor 52 is provided at a position before the supply nozzle 45 (outside of the entrance / exit 10) constituting the above-mentioned air curtain.
Is installed. The sensor 52 detects that a person or the like has arrived in front of the entrance / exit 10 of the highly clean space 4. Similarly, the sensor 52 may be a gate sensor arranged so as to surround the entrance / exit 10 of the highly clean space 4 in a gate shape.

Now, in the cleaning apparatus 2 according to the embodiment of the present invention configured as described above, the highly clean space 4
First of all, people who are going to enter the room
Through the inlet 13 and passes through a passage 15 formed between the inlet 13 and the outlet 14 of the air shower device 1. It should be noted that the sensor 50 detects that a person or the like has entered the air shower device 1 through the inlet 13 as described above. And
While passing through the passage 15 in the air shower device 1, clean air is ejected toward a person or the like from nozzles 18 provided on both side surfaces 17 of the passage 15, and foreign matter adhering to the person or the like is blown away and removed. It Then, the blown foreign matter is sucked into the chamber 19 through the suction ports 23 opened at the lower portions of the both side surfaces 17 inside the air shower device 1, and is removed by the HEPA filter 21.

In addition, when bringing tools or the like into the highly clean space 4, a person or the like carries the tools or the like through the passage 15 in the air shower device 1. In this case, as shown in FIG. 7, by operating by grasping the air gun main body 35 of the air gun 30 provided in the air shower device 1, the person a blows compressed air to the tool b, and the air shower device 1 In the inside, the foreign matter attached to the tool etc. b can also be removed. In this case, the compressed air supplied to the air gun 30 can be obtained by branching it from a compressed air pipe for production installed in a general factory facility or the like. In addition, the surplus of compressed air supplied into the air shower device 1 by using the air gun 30 is provided with an exhaust port above the inlet 13 and the outlet 14 of the air shower device 1 in which an air curtain is formed, If necessary, use an exhaust duct to let it escape to the proper place. Then, after removing foreign matters attached to the tool b etc. by using the air gun 30 as described above, if the person a separates the air gun body 35, the supply hose 34 and the air gun body 35 are The inside of the air shower device 1 is gathered toward the entrance 13 side and hung down.

In this way, after the foreign matter is removed by passing through the inside of the air shower device 1, a person or the like exits from the inside of the air shower device 1 through the outlet 14, and the next clean space 3
Will enter. It is to be noted that the sensor 51 detects that the person or the like exits from the air shower device 1 through the outlet 14 as described above.

Then, as described above with reference to FIG. 3 etc., the planar airflow 27 whose direction is changed by the guide vanes 25 is supplied to the inside of the inlet 13 and the outlet 14 of the air shower device 1. As a result, a so-called air curtain is formed. Therefore, even if no special shielding means (for example, a door or a curtain) is provided at the inlet 13 and the outlet 14 of the air shower device 1, the internal atmosphere of the air shower device 1 is prevented from leaking to the outside or the clean space 3. Can be prevented. Thus, if the entrance 13 and the exit 14 are opened by omitting the shielding means such as the door and the curtain, the person a
Can easily pass through the air shower device 1, so that it is easy to transport materials such as tools. The air flow of the air curtain formed inside the inlet 13 and the outlet 14 of the air shower device 1 is
At about the center of the air shower device 1 and is sucked into the chamber 19 through the suction ports 23 opened at the lower portions of the both side surfaces 17 inside the air shower device 1 and used for recirculation.

Further, in the clean space 3, since a downward laminar flow of clean air is formed, the air shower device 1
A person or the like whose foreign matter has been removed can pass through the clean space 3 while maintaining a clean state, and enter the next highly clean space 4 through the doorway 10. When a person or the like tries to enter the highly clean space 4 through the doorway 10 in this manner, the sensor 52 detects in advance that a person or the like has come in front of the doorway 10 of the highly clean space 4. .

In this way, when a person or the like enters the highly clean space 4, before the opening / closing door 11 is opened, the planar airflow 31 is supplied by the supply nozzles 45 from both sides of the entrance 10 of the highly clean space 4. A so-called air curtain is formed. As a result, it is possible to prevent the outside atmosphere from entering the interior of the highly clean space 4.

Here, as described above, the air shower device 1
When a person or the like passes through the clean space 3 and enters the highly clean space 4, whether or not to enter the highly clean space 4 is determined based on the time of passing through the air shower device 1.
That is, first, as shown in FIG. 8, when a person or the like enters the air shower device 1 through the entrance 13 (S1), the sensor 50 detects the entrance, the operation of the fan 22 is started, and the clean air of the nozzle 18 is started. Is started (S2).

Next, it is determined whether the air gun 30 is used in the air shower device 1 (S3).
This judgment is made, for example, based on whether or not the switch of the air gun 30 is operated. Then, when the air gun 30 is not used, after the clean air is discharged for a predetermined time from the start of the operation of the fan 22, the operation of the fan 22 is stopped (S4), and the discharge of the clean air in the air shower device 1 is completed. To do. On the other hand, when the air gun 30 is used in the air shower device 1, after the clean air is further discharged for a predetermined time after the use of the air gun 30, the operation of the fan 22 is stopped (S5), and the air shower device 1
The discharge of clean air inside is completed.

Then, a person who has passed through the air shower device 1 exits from the air shower device 1 through the outlet 14 (S6). In this case, the sensor 51 detects that a person or the like has left the air shower device 1.

Next, when a person or the like who has removed the foreign matter by the air shower device 1 passes through the clean space 3 and comes in front of the entrance 10 in order to enter the next highly clean space 4, the sensor 52 Is detected. Then, first, as shown in FIG.
As shown in, it is determined whether or not a person or the like trying to enter the highly clean space 4 has passed through the air shower device 1 for a predetermined time. That is, in this embodiment, the exit timing from the air shower device 1 detected by the sensor 51 is before the end of a predetermined time when the clean air is discharged in the air shower device 1 (clean air discharge of the predetermined time). If it is before the end), it is judged that the foreign matter adhering to a person or the like has not been sufficiently removed in the air shower device 1, and the entry into the highly clean space 4 is denied. in this case,
Send an alarm to inform people that refusal of admission (S1
1), the opening / closing door 11 of the highly clean space 4 is not opened.

On the other hand, the exit timing from the air shower device 1 detected by the sensor 51 is after a predetermined time when the clean air is discharged in the air shower device 1 (after completion of the clean air discharge for the predetermined time). If it is), it is determined that the foreign matter adhering to a person or the like in the air shower device 1 is sufficiently removed. In this case, next, it is determined whether or not a predetermined time has elapsed from the time of leaving the air shower device 1 to the time of entering the highly clean space 4 (S12).

That is, in this embodiment, the time from the exit timing of the air shower device 1 detected by the sensor 51 to the arrival time before the entrance 10 of the highly clean space 4 detected by the sensor 52. However, if it is after the lapse of a predetermined time, it is judged to be abnormal and the entrance to the highly clean space 4 is denied. In this case, an alarm or the like is issued to inform people or the like of refusal of entry (S13), and the opening / closing door 11 of the highly clean space 4 is not opened.

On the other hand, the time from the exit from the air shower device 1 detected by the sensor 51 to the time before the entrance 10 of the highly clean space 4 detected by the sensor 52 is a predetermined time. If the time has not passed, it is judged to be normal, and the person or the like is permitted to enter the highly clean space 4 for the first time.

When the entrance to the highly clean space 4 is permitted as described above, the fan 48 first starts to operate, and the supply nozzle 45 makes a planar shape from both sides of the entrance 10 of the highly clean space 4. The air flow 31 is supplied and a so-called air curtain is formed (S14).

After that, the opening / closing door 11 is opened (S1).
5). When a person enters the highly clean space 4 (S
16) Then, the opening / closing door 11 is closed again (S17). After that, the operation of the fan 48 is stopped (S18), and the air curtain formed outside the entrance 10 of the highly clean space 4 is released.

In this cleaning device 2, however, since the inlet 13 and the outlet 14 of the air shower device 1 are formed in an open state, it is possible to carry out an advanced cleaning by carrying articles such as tools, drawings and materials. Even when entering the space 4, it is possible to easily pass through the air shower device 1. Further, the clean space 3 formed between the air shower device 1 and the entrance / exit 10 of the highly clean space 4 can be passed by a person moving along the outside of the highly clean space 4 as it is.

Further, a person or the like who exits from inside the highly clean space 4 may just pass through the clean space 3 from the entrance / exit 10 and go out as it is, and it is not necessary to go through the air shower device 1 when leaving. In addition, even when a person or the like exits from inside the highly clean space 4, if the air curtain is formed outside the entrance 10 of the highly clean space 4 before the opening / closing door 11 is opened, the inside of the highly clean space 4 can be formed. It is possible to prevent the external atmosphere from entering the.

Further, according to this cleaning device 2, in addition to keeping a person in a clean state when passing through the air shower device 1, the cleaning device 2 is automatically activated by a person who enters an advanced cleaning space 4. It has the effect of refraining from dusting behavior. In other words, it is required for people who enter the highly clean space 4 to minimize dust generation due to their own movements and movements, and rules and work standards therefor have been established in each factory. The air shower device 1 is also a preparation space for entering the highly clean space 4 and a preliminary confirmation space. According to this cleaning device 2, as described above with reference to FIGS. 8 and 9, the person who enters the highly clean space 4 is required to pass through the air shower device 1 for a predetermined time. Therefore, it also complies with such rules and work standards. Further, since the air shower device 1 does not have a door, it is not troublesome to reenter the room, and the visibility is good, so that the person inside the room can easily understand the internal state. Therefore, the compliance status of the cleaning rules can be confirmed from the outside.

Although the preferred embodiment of the present invention has been illustrated above, the present invention is not limited to the embodiment described here. For example, as shown in FIG. 10, the air shower device 1 and the clean space 3 may be arranged along the outside of the highly clean space 4. Further, the highly clean space 4 may be a so-called industrial clean room used for manufacturing electronic parts or the like, or a facility for controlling bacteria such as an animal breeding room, a food factory, an operating room.

Further, for example, as shown in FIG. 11, a cleaning device 2 which passes through a changing room 5, an air shower device 1, and a cleaning space 3 in this order can be proposed. In this case, the clean space 3 itself may be the final local clean space where production, testing, experiments, etc. are performed. When the changing room 5 for dust-free clothes, the air shower device 1, and the clean space 3 are adjacent to each other in this manner, a space for production and the like can be integrated.

In addition, in the air gun 30 described with reference to FIG. 6, as shown in FIG. 12, the wires 60 are attached to the pulleys 32 rolling on the rails 31, respectively. The air gun main body 35 can be configured to be moved with a small force by being wound around the multi-stage pulley 62 to which is added. That is, in the example shown in FIG. 12, the rail 31 is inclined from the horizontal so that the outlet 14 side is lower than the inlet 13 side. The pulley 32 farther from the entrance 13 side is wound around the multi-stage pulley 62 at a position having a larger radius of rotation. This FIG.
According to the configuration shown in FIG.
Since the force to move the upper part toward the outlet 14 side along the inclination and the pulling force by the wire 60 are applied, each pulley 32 is stopped at an arbitrary position on the rail 31 by canceling both forces. Will be able to.

[0048]

According to the present invention, it is possible to provide an air shower device that can easily pass through, and particularly when carrying an article such as a tool, it is possible to easily enter a clean space or a highly clean space. . Further, the cleaning device of the present invention has the effect of not only keeping a person clean when passing through the air shower device, but also suppressing the action of causing a person to dust themselves.

[Brief description of drawings]

FIG. 1 is a perspective view of a cleaning device including an air shower device according to an embodiment of the present invention.

FIG. 2 is a perspective view of the air shower device according to the embodiment of the present invention.

FIG. 3 is a cross-sectional view of the air shower device, showing a state of the inside of the air shower device as viewed from above.

FIG. 4 is a vertical cross-sectional view of the chamber.

FIG. 5 is a perspective view of a guide vane.

FIG. 6 is a perspective view of an air gun.

FIG. 7 is an explanatory diagram showing a state where foreign matter attached to a tool or the like is removed using an air gun.

FIG. 8 is a flowchart showing a control process when passing through the air shower device.

FIG. 9 is a flowchart showing a control process when determining whether to admit to the highly clean space.

FIG. 10 is a plan view of a cleaning device in which an air shower device and a cleaning space are arranged along the outside of the advanced cleaning space.

FIG. 11 is a plan view of a cleaning device configured to pass through a changing room, an air shower device, and a cleaning space in this order.

FIG. 12 is a perspective view of an air gun having a different form from FIG.

[Explanation of symbols]

a person 1 Air shower device 2 cleaning equipment 3 clean space 4 Highly clean space 13 entrance 14 exit 15 passages 17 both sides 18 nozzles 25 guide vanes 30 air gun 40 FFU 50,51,52 sensor

Claims (6)

[Claims] 1. A nozzle that discharges clean air therein is provided on both side surfaces of a passage formed between an inlet and an outlet, and the clean air is blown from the nozzle to a person passing through the passage from the inlet to the outlet. This is an air shower device that removes foreign matter adhering to people, etc.
An air shower device characterized in that an air curtain for preventing leakage of an internal atmosphere is formed on at least one of the entrances and exits. 2. A guide vane is provided, which guides an air flow flowing along both side surfaces inside the air shower device and supplies the air in a planar manner to at least one of the entrance and exit. Air shower device according to. 3. The air shower device according to claim 1, further comprising an air gun inside the air shower device. 4. An arrangement of a cleaning device, characterized in that the air shower device according to any one of claims 1, 2 and 3 and a clean space in which a parallel flow of clean air is formed are arranged adjacent to each other. Construction. 5. The arrangement structure for a cleaning device according to claim 4, wherein an advanced clean space having a higher degree of cleanliness than the clean space is arranged adjacent to the clean space. 6. The method for operating the cleaning device according to claim 4, wherein the time for passing through the air shower device is measured, and the cleaning space or the highly-clean space is measured based on the measured value. Characterized by determining admission
How to operate the cleaning device.