JPS567926A - Method of settling particle by providing settling room in front of clean room - Google Patents

Method of settling particle by providing settling room in front of clean room

Info

Publication number
JPS567926A
JPS567926A JP8376379A JP8376379A JPS567926A JP S567926 A JPS567926 A JP S567926A JP 8376379 A JP8376379 A JP 8376379A JP 8376379 A JP8376379 A JP 8376379A JP S567926 A JPS567926 A JP S567926A
Authority
JP
Japan
Prior art keywords
room
settling
air
clean
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8376379A
Other languages
Japanese (ja)
Other versions
JPS6131379B2 (en
Inventor
Aritsune Moriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SANKO AIR PLANT
SANKO KUKI SOCHI KK
Original Assignee
SANKO AIR PLANT
SANKO KUKI SOCHI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SANKO AIR PLANT, SANKO KUKI SOCHI KK filed Critical SANKO AIR PLANT
Priority to JP8376379A priority Critical patent/JPS567926A/en
Publication of JPS567926A publication Critical patent/JPS567926A/en
Publication of JPS6131379B2 publication Critical patent/JPS6131379B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To make almost equal to zero the quantity of contaminative particles which adhere to a room incomer and are brought into a clean room, by providing between an air shower room and the clean room a settling room wherein clean air is caused to flow down in parallel. CONSTITUTION:An air shower room 2 with air jet nozzles 7 and a settling room 3 continuous to the shower room are provided in front of a clean room 1. Doors 4-6 are installed. A high-performance filter 10 and a laminar flow bushing open surface 10a are provided on the ceiling of the settling room 3. Air supplied from a fan 16 through a uniform blowoff unit 11 is caused to flow down in a parallel rectified state at 0.3-3m/s. The air is then sucked through a pull duct 12 under a floor and through a rough filter 15 by the fan 16.
JP8376379A 1979-07-02 1979-07-02 Method of settling particle by providing settling room in front of clean room Granted JPS567926A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8376379A JPS567926A (en) 1979-07-02 1979-07-02 Method of settling particle by providing settling room in front of clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8376379A JPS567926A (en) 1979-07-02 1979-07-02 Method of settling particle by providing settling room in front of clean room

Publications (2)

Publication Number Publication Date
JPS567926A true JPS567926A (en) 1981-01-27
JPS6131379B2 JPS6131379B2 (en) 1986-07-19

Family

ID=13811609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8376379A Granted JPS567926A (en) 1979-07-02 1979-07-02 Method of settling particle by providing settling room in front of clean room

Country Status (1)

Country Link
JP (1) JPS567926A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62206333A (en) * 1986-03-04 1987-09-10 Shinko Kogyo Kk Air shower room
JP2003106591A (en) * 2001-09-28 2003-04-09 Takasago Thermal Eng Co Ltd Arrangement structure and operation method of air shower device and cleaning device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0535833Y2 (en) * 1986-09-18 1993-09-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62206333A (en) * 1986-03-04 1987-09-10 Shinko Kogyo Kk Air shower room
JP2003106591A (en) * 2001-09-28 2003-04-09 Takasago Thermal Eng Co Ltd Arrangement structure and operation method of air shower device and cleaning device

Also Published As

Publication number Publication date
JPS6131379B2 (en) 1986-07-19

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