JPS567926A - Method of settling particle by providing settling room in front of clean room - Google Patents
Method of settling particle by providing settling room in front of clean roomInfo
- Publication number
- JPS567926A JPS567926A JP8376379A JP8376379A JPS567926A JP S567926 A JPS567926 A JP S567926A JP 8376379 A JP8376379 A JP 8376379A JP 8376379 A JP8376379 A JP 8376379A JP S567926 A JPS567926 A JP S567926A
- Authority
- JP
- Japan
- Prior art keywords
- room
- settling
- air
- clean
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
PURPOSE:To make almost equal to zero the quantity of contaminative particles which adhere to a room incomer and are brought into a clean room, by providing between an air shower room and the clean room a settling room wherein clean air is caused to flow down in parallel. CONSTITUTION:An air shower room 2 with air jet nozzles 7 and a settling room 3 continuous to the shower room are provided in front of a clean room 1. Doors 4-6 are installed. A high-performance filter 10 and a laminar flow bushing open surface 10a are provided on the ceiling of the settling room 3. Air supplied from a fan 16 through a uniform blowoff unit 11 is caused to flow down in a parallel rectified state at 0.3-3m/s. The air is then sucked through a pull duct 12 under a floor and through a rough filter 15 by the fan 16.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8376379A JPS567926A (en) | 1979-07-02 | 1979-07-02 | Method of settling particle by providing settling room in front of clean room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8376379A JPS567926A (en) | 1979-07-02 | 1979-07-02 | Method of settling particle by providing settling room in front of clean room |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS567926A true JPS567926A (en) | 1981-01-27 |
JPS6131379B2 JPS6131379B2 (en) | 1986-07-19 |
Family
ID=13811609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8376379A Granted JPS567926A (en) | 1979-07-02 | 1979-07-02 | Method of settling particle by providing settling room in front of clean room |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS567926A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62206333A (en) * | 1986-03-04 | 1987-09-10 | Shinko Kogyo Kk | Air shower room |
JP2003106591A (en) * | 2001-09-28 | 2003-04-09 | Takasago Thermal Eng Co Ltd | Arrangement structure and operation method of air shower device and cleaning device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0535833Y2 (en) * | 1986-09-18 | 1993-09-10 |
-
1979
- 1979-07-02 JP JP8376379A patent/JPS567926A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62206333A (en) * | 1986-03-04 | 1987-09-10 | Shinko Kogyo Kk | Air shower room |
JP2003106591A (en) * | 2001-09-28 | 2003-04-09 | Takasago Thermal Eng Co Ltd | Arrangement structure and operation method of air shower device and cleaning device |
Also Published As
Publication number | Publication date |
---|---|
JPS6131379B2 (en) | 1986-07-19 |
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