JPS6131379B2 - - Google Patents
Info
- Publication number
- JPS6131379B2 JPS6131379B2 JP54083763A JP8376379A JPS6131379B2 JP S6131379 B2 JPS6131379 B2 JP S6131379B2 JP 54083763 A JP54083763 A JP 54083763A JP 8376379 A JP8376379 A JP 8376379A JP S6131379 B2 JPS6131379 B2 JP S6131379B2
- Authority
- JP
- Japan
- Prior art keywords
- room
- clean
- settling
- air
- air shower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 12
- 239000011859 microparticle Substances 0.000 claims description 12
- 239000000356 contaminant Substances 0.000 claims description 6
- 230000001914 calming effect Effects 0.000 claims description 5
- 239000010419 fine particle Substances 0.000 claims description 3
- 238000011109 contamination Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 description 8
- 239000000428 dust Substances 0.000 description 5
- 230000000630 rising effect Effects 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 2
- 230000005653 Brownian motion process Effects 0.000 description 1
- 208000001840 Dandruff Diseases 0.000 description 1
- 238000005537 brownian motion Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Description
【発明の詳細な説明】
本発明はクリーンルームにセツトリングルーム
を前置して微小粒子を鎮静させる方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for calming down microparticles by installing a settling room in front of a clean room.
従来電子工業、精密機械工業などの分野では特
別な無塵環境を必要とし、そのためのインダスト
リアルクリーンルームとそのシステム機器が開発
されており、これらのクリーンルームの気流方式
は層流方式（ラミナーフロー方式）と乱流方式
（コンベンシヨナル方式）とがあり、また層流方
式は垂直気流形（ダウンフロー形）と水平気流形
（サイドフロー形）とに区分され、これらのクリ
ーンルームの設置目的、即ち内部で行なわれる作
業の種類や要求される清浄度により選ばれる。 Conventionally, fields such as the electronics industry and precision machinery industry require a special dust-free environment, and industrial clean rooms and their system equipment have been developed for this purpose.The air flow methods for these clean rooms are the laminar flow method and There is a turbulent flow method (conventional flow method), and a laminar flow method is divided into a vertical air flow type (downflow type) and a horizontal airflow type (side flow type). They are selected depending on the type of work being done and the required cleanliness.
しかしながら、クリーンルーム内における清浄
度を高めるために、例えば米国規格（U.S.
Federal Standard209）によるクラス1000（粒子
径≧0.5μ、浮遊量≦1000個／立方フイート）以
下のクリーンルームにおいては、その出入口にエ
アーシヤワルームを前置して入室者に15m/s以上
の強力噴流を吹付け、人体や衣服に付着していた
微小粉塵を脱離させる方法が採用されている。こ
の方法は入室者に叩（はたき）を掛けるのに似て
おり、脱離した微小粉塵はエアーシヤワルーム内
に充満して飛散滞留しており、入室者への再付着
防止がなんら保証されないままクリーンルーム内
に持込まれるおそれが多分にある。少なくとも前
述の米国規格によるクラス100（粒子径≧0.5μ、
浮遊量≦100個／立方フイート）以下の高性能ク
リーンルーム内において発生もしくは飛散滞溜し
たブラウン運動状態の微小粒子も0.2〜0.3m/sの
天井全面からの層流ダウンフローによる自浄作用
によつてやがては床面へ沈降落下するが、近年高
性能の超LSIなどの電子部品工場では、これら微
小粒子個数が１立方フイート当り100個内外では
不良品の発生を防止することができず、この個数
を０に近付け、さらに皆無にすることが要請され
ている。即ち入室者の持込むフケ、おしろい粉ま
でが問題となりつつあるのである。 However, in order to improve the cleanliness in the clean room, for example,
In clean rooms of class 1000 (particle size ≧0.5μ, floating amount ≦1000 particles/cubic foot) or less according to Federal Standard 209), an air shower room is installed at the entrance and exit to provide a powerful jet stream of 15 m/s or more to those entering the room. The method used is spraying, which removes fine dust from the human body and clothing. This method is similar to dusting the person entering the room, and the detached fine dust fills the air shower room, scattering and staying there, and there is no guarantee that it will not re-adhere to the person entering the room. There is a high risk that it may be brought into the clean room. At least Class 100 (particle size ≧0.5μ,
Small particles in a Brownian motion state that are generated or scattered and accumulated in a high-performance clean room with a floating amount ≦100 particles/cubic foot) are also self-cleaned by the laminar downflow from the entire ceiling surface at a speed of 0.2 to 0.3 m/s. Eventually, they will settle and fall to the floor, but in recent years, in electronic component factories such as high-performance ultra-LSIs, it has become impossible to prevent the production of defective products when the number of these microparticles is around 100 per cubic foot. There is a need to bring this value closer to 0, and even eliminate it altogether. In other words, dandruff and powdered powder brought in by people entering the room are becoming a problem.
本発明の目的は、精密電子部品の加工作業場な
どの高性能クリーンルーム内において入室者に付
着して持込まれる汚染微小粒子を限りなく０に近
づけることである。 An object of the present invention is to reduce the number of contaminant microparticles that are attached to and brought into a high-performance clean room, such as a workshop for processing precision electronic parts, to as close to zero as possible.
その目的を達成するために、本発明によるクリ
ーンルームにセツトリングルームを前置して微小
粒子を鎮静させる方法は、クリーンルームに入室
するに先立つてクリーンルームに前置されたエア
ーシヤワルームにおいて入室者に付着していた汚
染微小粒子を脱離させたのち、入室者をエアーシ
ヤワルームとクリーンルームとの間に介在させた
セツトリングルームに入れ、セツトリングルーム
内において高性能フイルタを通つた清浄空気を天
井全面から0.3〜３m/sの整流された平行気流で
ダウンフローさせ、エアーシヤワルームから入室
者とともに持込まれた汚染微小粒子を沈降除去す
るもの、即ち飛散滞溜して去就に迷つている微小
粒子の鎮静化を図るものである。 In order to achieve this purpose, the method of the present invention for calming microparticles by placing a settling room in front of a clean room is such that, prior to entering the clean room, an air shower room installed in front of the clean room is used to settle particles that adhere to the person entering the clean room. After removing the contaminated microparticles, the occupants are placed in a settling room interposed between the air shower room and the clean room, and clean air that has passed through a high-performance filter is poured over the entire surface of the ceiling in the settling room. A device that uses a rectified parallel air current of 0.3 to 3 m/s to settle down and remove contaminant microparticles brought in from the air shower room with the occupants. This is to calm down the situation.
以下本発明によるクリーンルームにセツトリン
グルームを前置して微小粒子を鎮静させる方法の
実施例について図面を参照して説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the method of the present invention for calming down microparticles by installing a settling room in front of a clean room will be described below with reference to the drawings.
第１図において、１は高性能クリーンルームで
あり、そのクリーンルーム１にエアーシヤワルー
ム２およびセツトリングルーム３が前置されてお
り、入室者はそれぞれドア４，５，６によつて密
閉可能にされたエアーシヤワルーム２を通りつい
でセツトリングルーム３を通つたのちクリーンル
ーム１内に入室するように配置されている。エア
ーシヤワルーム２内には第２図および第３図に見
られるように天井面および両側面に多数のエアー
ジエツトノズル７が取付けられており、入室者は
ここで15m/s以上の噴流を吹付けられて人体や衣
服に付着していた粉塵が脱離されるようになつて
いる。 In Fig. 1, 1 is a high-performance clean room, and an air shower room 2 and a settling room 3 are installed in front of the clean room 1, and the rooms can be sealed by doors 4, 5, and 6, respectively. The cleaning room 1 is arranged so that it passes through an air shower room 2, a settling room 3, and then enters a clean room 1. Inside the air shower room 2, as shown in Figures 2 and 3, a large number of air jet nozzles 7 are installed on the ceiling and both sides, and those entering the room can receive a jet stream of 15 m/s or more. The dust that was sprayed onto the human body and clothing is now removed.
セツトリングルーム３は、第２図および第４図
に見られるように層流ブツシユ開口面１０ａを有
する高性能フイルタ１０が天井全面に取付けら
れ、その高性能フイルタ１０の上方に面の均一流
速分布を図るための均一吹出装置１１が設けられ
るとともに多数のプル開口を有する床面の下方に
プルダクト１２が設けられている。セツトリング
ルーム３の外側にはプル立上りダクト１４が隣接
して配置され、その縦方向中央部にはラフフイル
タ１５が取付けられ、プル立上りダクト１４の上
部は循環フアン１６を介してセツトリングルーム
３の均一吹出装置１１に、プル立上りダクト１４
の下部はセツトリングルーム３のプルダクト１２
に接続されている。そして循環フアン１６の駆動
により、空気はセツトリングルーム３の均一吹出
装置１１から天井全面に取付けられた高性能フイ
ルタ１０の層流プツシユ開口面１０ａを通つて、
0.3〜３m/sの整流された平行気流がダウンフロ
ーの状態で床面に向つて下向きに流下し、プルダ
クト１２およびプル立上りダクト１４を経て再び
セツトリングルーム３内に循環されるようになつ
ている。 As shown in FIGS. 2 and 4, in the settling room 3, a high-performance filter 10 having a laminar flow bushing opening surface 10a is installed on the entire ceiling, and the surface above the high-performance filter 10 has a uniform flow velocity distribution. A uniform blowing device 11 is provided for achieving this, and a pull duct 12 is provided below the floor surface having a large number of pull openings. A pull rising duct 14 is disposed adjacent to the outside of the settling room 3, and a rough filter 15 is attached to the longitudinal center of the pull rising duct 14. A pull rising duct 14 is installed in the uniform blowing device 11.
The lower part is the pull duct 12 of settling room 3.
It is connected to the. Then, by driving the circulation fan 16, the air is passed from the uniform blowing device 11 of the settling room 3 through the laminar flow push opening surface 10a of the high performance filter 10 attached to the entire surface of the ceiling.
The rectified parallel air current of 0.3 to 3 m/s flows downward toward the floor surface in a downflow state, and is circulated back into the settling room 3 via the pull duct 12 and the pull rising duct 14. There is.
入室者はまずエアーシヤワルーム２内において
15m/s以上の噴流を吹付けられて付着粉塵が脱離
されたのちセツトリングルーム３内に進むのであ
るが、エアーシヤワによつて脱離された微小粉塵
はエアーシヤワルーム２内に飛散滞溜しているた
め入室者とともにセツトリングルーム３内に持込
まれるのは避けられない。入室者によつてセツト
リングルーム３内に持込まれた汚染微小粒子は前
述の清浄空気の整流された平行気流のダウンフロ
ーによつて次第に沈降落下して鎮静除去される。
たとえば、セツトリングルーム３内にある0.3μ
の微小粒子１m/sのダウンフローにより少なくと
も0.4m/sの沈降速度で下降し、２ｍの高さを落
下するためには入室者は約５秒間セツトリングル
ーム３内で静止すればよく、またセツトリングル
ーム３の長さを５ｍとすれば微小粒子は入室者が
歩行している間に鎮静、清浄化されることにな
り、入室者によるクリーンルーム１内への汚染粒
子の持込みを０に近づけることが可能となる。 Those entering the room must first enter the air shower room 2.
After the adhering dust is removed by being blown with a jet flow of 15 m/s or more, it advances into the settling room 3, but the fine dust released by the air shower is scattered and accumulated in the air shower room 2. Therefore, it is inevitable that they will be brought into the settling room 3 along with the occupants. Contaminant microparticles brought into the settling room 3 by the occupants are gradually settled and removed by the downflow of the rectified parallel airflow of clean air.
For example, the 0.3μ in settling room 3
The minute particles descend at a settling speed of at least 0.4 m/s due to the downflow of 1 m/s, and in order to fall a height of 2 m, the occupant only needs to remain stationary in the settling room 3 for about 5 seconds, and If the length of the settling room 3 is 5 m, fine particles will be calmed and purified while the occupants are walking, and the number of contaminant particles brought into the clean room 1 by the occupants will be reduced to zero. becomes possible.
上述のように、本発明によるクリーンルームに
セツトリングルームを前置して微小粒子を鎮静さ
せる方法は、エアーシヤワルームとクリーンルー
ムとの間にセツトリングルームを介在させ、セツ
トリングルーム内において高性能フイルタを通つ
た清浄空気を天井全面から整流された平行気流で
下向きに流下させるようにしたので、セツトリン
グルーム内に持込まれて飛散滞溜している汚染微
小粒子を鎮静化し、入室者がクリーンルームに入
室する際に入室者とともに持込まれる微小粒子を
限りなく０に近づけることができる。 As described above, the method of the present invention for calming down microparticles by placing a settling room in front of a clean room involves interposing a settling room between the air shower room and the clean room, and installing a high-performance filter in the settling room. Since the clean air that has passed through the room is made to flow downward in parallel airflow rectified from the entire surface of the ceiling, the contaminant microparticles that have been brought into the settling room and are scattered and accumulate there are calmed down, making it easier for people entering the room to enter the clean room. The number of microparticles brought in with the person entering the room can be reduced to as close to zero as possible.
第１図はクリーンルームにエアーシヤワルーム
およびセツトリングルームが前置された状態を示
す平面図、第２図は第１図の−線による部分
縦断面正面図、第３図は第１図のエアーシヤワル
ームの縦断面側面図、第４図は第１図のセツトリ
ングルームの縦断面側面図である。
１……クリーンルーム、２……エアーシヤワル
ーム、３……セツトリングルーム、４，５，６…
…ドア、７……エアージエツトノズル、１０……
高性能フイルタ、１０ａ……層流プツシユ開口
面、１１……均一吹出装置、１２……プルダク
ト、１４……プル立上りダクト、１５……ラフフ
イルタ、１６……循環フアン。
Fig. 1 is a plan view showing a clean room with an air shower room and a settling room installed in front of it, Fig. 2 is a partial longitudinal sectional front view taken along the - line in Fig. FIG. 4 is a longitudinal sectional side view of the settling room of FIG. 1. 1...Clean room, 2...Air shower room, 3...Settling room, 4, 5, 6...
...Door, 7...Air jet nozzle, 10...
High performance filter, 10a... Laminar flow push opening surface, 11... Uniform blowing device, 12... Pull duct, 14... Pull rising duct, 15... Rough filter, 16... Circulation fan.
Claims (1)
リーンルームに前置されたエアーシヤワルームに
おいて入室者に付着していた汚染微小粒子を脱離
させたのち、入室者を前記エアーシヤワルームと
前記クリーンルームとの間に介在させたセツトリ
ングルームに入れ、前記セツトリングルーム内に
おいて高性能フイルタを通つた清浄空気を天井全
面から0.3〜３m/sの整流された平行気流で下向
きに流下させ、それによつて前記エアーシヤワル
ームから入室者とともに持込まれた汚染微小粒子
を鎮静させるようにしたことを特徴とするクリー
ンルームにセツトリングルームを前置して微小粒
子を鎮静させる方法。1. Before entering the clean room, the contaminant microparticles attached to the person entering the room are removed in an air shower room installed in front of the clean room, and then the person is placed between the air shower room and the clean room. Clean air that has passed through a high-performance filter in the settling room is made to flow downward from the entire surface of the ceiling in a rectified parallel airflow at a rate of 0.3 to 3 m/s, thereby creating the air shower. A method for calming fine particles by placing a settling room in front of a clean room, characterized in that fine particles of contamination brought in from the room with a person entering the room are calmed down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8376379A JPS567926A (en) | 1979-07-02 | 1979-07-02 | Method of settling particle by providing settling room in front of clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8376379A JPS567926A (en) | 1979-07-02 | 1979-07-02 | Method of settling particle by providing settling room in front of clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS567926A JPS567926A (en) | 1981-01-27 |
| JPS6131379B2 true JPS6131379B2 (en) | 1986-07-19 |
Family
ID=13811609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8376379A Granted JPS567926A (en) | 1979-07-02 | 1979-07-02 | Method of settling particle by providing settling room in front of clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS567926A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0535833Y2 (en) * | 1986-09-18 | 1993-09-10 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62206333A (en) * | 1986-03-04 | 1987-09-10 | Shinko Kogyo Kk | Air shower room |
| JP4824885B2 (en) * | 2001-09-28 | 2011-11-30 | 高砂熱学工業株式会社 | Arrangement structure and operation method of air shower device and cleaning device |
-
1979
- 1979-07-02 JP JP8376379A patent/JPS567926A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0535833Y2 (en) * | 1986-09-18 | 1993-09-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS567926A (en) | 1981-01-27 |
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