JPS6283128U - - Google Patents

Info

Publication number
JPS6283128U
JPS6283128U JP17603585U JP17603585U JPS6283128U JP S6283128 U JPS6283128 U JP S6283128U JP 17603585 U JP17603585 U JP 17603585U JP 17603585 U JP17603585 U JP 17603585U JP S6283128 U JPS6283128 U JP S6283128U
Authority
JP
Japan
Prior art keywords
air
turntable
shower
suction port
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17603585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228351Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985176035U priority Critical patent/JPH0228351Y2/ja
Publication of JPS6283128U publication Critical patent/JPS6283128U/ja
Application granted granted Critical
Publication of JPH0228351Y2 publication Critical patent/JPH0228351Y2/ja
Expired legal-status Critical Current

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  • Ventilation (AREA)
JP1985176035U 1985-11-15 1985-11-15 Expired JPH0228351Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985176035U JPH0228351Y2 (enrdf_load_stackoverflow) 1985-11-15 1985-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985176035U JPH0228351Y2 (enrdf_load_stackoverflow) 1985-11-15 1985-11-15

Publications (2)

Publication Number Publication Date
JPS6283128U true JPS6283128U (enrdf_load_stackoverflow) 1987-05-27
JPH0228351Y2 JPH0228351Y2 (enrdf_load_stackoverflow) 1990-07-30

Family

ID=31115905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985176035U Expired JPH0228351Y2 (enrdf_load_stackoverflow) 1985-11-15 1985-11-15

Country Status (1)

Country Link
JP (1) JPH0228351Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008281328A (ja) * 2007-04-13 2008-11-20 Semiconductor Energy Lab Co Ltd エアシャワー装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187587U (enrdf_load_stackoverflow) * 1984-11-16 1986-06-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187587U (enrdf_load_stackoverflow) * 1984-11-16 1986-06-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008281328A (ja) * 2007-04-13 2008-11-20 Semiconductor Energy Lab Co Ltd エアシャワー装置

Also Published As

Publication number Publication date
JPH0228351Y2 (enrdf_load_stackoverflow) 1990-07-30

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