JPH0227563Y2 - - Google Patents
Info
- Publication number
- JPH0227563Y2 JPH0227563Y2 JP1984015015U JP1501584U JPH0227563Y2 JP H0227563 Y2 JPH0227563 Y2 JP H0227563Y2 JP 1984015015 U JP1984015015 U JP 1984015015U JP 1501584 U JP1501584 U JP 1501584U JP H0227563 Y2 JPH0227563 Y2 JP H0227563Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- wafer
- wafers
- boat
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 64
- 239000010453 quartz Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000009826 distribution Methods 0.000 description 8
- 210000000078 claw Anatomy 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1501584U JPS60129133U (ja) | 1984-02-07 | 1984-02-07 | 酸化膜生成用石英ボ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1501584U JPS60129133U (ja) | 1984-02-07 | 1984-02-07 | 酸化膜生成用石英ボ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60129133U JPS60129133U (ja) | 1985-08-30 |
| JPH0227563Y2 true JPH0227563Y2 (US20100223739A1-20100909-C00005.png) | 1990-07-25 |
Family
ID=30500468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1501584U Granted JPS60129133U (ja) | 1984-02-07 | 1984-02-07 | 酸化膜生成用石英ボ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60129133U (US20100223739A1-20100909-C00005.png) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5355978A (en) * | 1976-10-29 | 1978-05-20 | Nec Corp | Vaccuum type vapor growth device |
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS5720143B2 (US20100223739A1-20100909-C00005.png) * | 1974-01-29 | 1982-04-27 | ||
| JPS5844834B2 (ja) * | 1979-07-31 | 1983-10-05 | 国産金属工業株式会社 | ダイヤル錠 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5720143U (US20100223739A1-20100909-C00005.png) * | 1980-07-08 | 1982-02-02 | ||
| JPS5844834U (ja) * | 1981-09-18 | 1983-03-25 | 日本電気ホームエレクトロニクス株式会社 | 半導体製造装置 |
-
1984
- 1984-02-07 JP JP1501584U patent/JPS60129133U/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5720143B2 (US20100223739A1-20100909-C00005.png) * | 1974-01-29 | 1982-04-27 | ||
| JPS5355978A (en) * | 1976-10-29 | 1978-05-20 | Nec Corp | Vaccuum type vapor growth device |
| JPS53148283A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Silicon wafer jig |
| JPS5844834B2 (ja) * | 1979-07-31 | 1983-10-05 | 国産金属工業株式会社 | ダイヤル錠 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60129133U (ja) | 1985-08-30 |
