JPH0226386B2 - - Google Patents

Info

Publication number
JPH0226386B2
JPH0226386B2 JP58198594A JP19859483A JPH0226386B2 JP H0226386 B2 JPH0226386 B2 JP H0226386B2 JP 58198594 A JP58198594 A JP 58198594A JP 19859483 A JP19859483 A JP 19859483A JP H0226386 B2 JPH0226386 B2 JP H0226386B2
Authority
JP
Japan
Prior art keywords
wiring
photoresist layer
electrode
forming
thick film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58198594A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6089944A (ja
Inventor
Yoichi Aono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP19859483A priority Critical patent/JPS6089944A/ja
Publication of JPS6089944A publication Critical patent/JPS6089944A/ja
Publication of JPH0226386B2 publication Critical patent/JPH0226386B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP19859483A 1983-10-24 1983-10-24 立体配線の形成方法 Granted JPS6089944A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19859483A JPS6089944A (ja) 1983-10-24 1983-10-24 立体配線の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19859483A JPS6089944A (ja) 1983-10-24 1983-10-24 立体配線の形成方法

Publications (2)

Publication Number Publication Date
JPS6089944A JPS6089944A (ja) 1985-05-20
JPH0226386B2 true JPH0226386B2 (OSRAM) 1990-06-08

Family

ID=16393780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19859483A Granted JPS6089944A (ja) 1983-10-24 1983-10-24 立体配線の形成方法

Country Status (1)

Country Link
JP (1) JPS6089944A (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54115065A (en) * 1978-02-28 1979-09-07 Mitsubishi Electric Corp Semiconductor device

Also Published As

Publication number Publication date
JPS6089944A (ja) 1985-05-20

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