JPH0226048Y2 - - Google Patents

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Publication number
JPH0226048Y2
JPH0226048Y2 JP6456884U JP6456884U JPH0226048Y2 JP H0226048 Y2 JPH0226048 Y2 JP H0226048Y2 JP 6456884 U JP6456884 U JP 6456884U JP 6456884 U JP6456884 U JP 6456884U JP H0226048 Y2 JPH0226048 Y2 JP H0226048Y2
Authority
JP
Japan
Prior art keywords
chamber
cleaning
exhaust system
line
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6456884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60176156U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6456884U priority Critical patent/JPS60176156U/ja
Publication of JPS60176156U publication Critical patent/JPS60176156U/ja
Application granted granted Critical
Publication of JPH0226048Y2 publication Critical patent/JPH0226048Y2/ja
Granted legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)
JP6456884U 1984-04-30 1984-04-30 リ−クテスト装置 Granted JPS60176156U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6456884U JPS60176156U (ja) 1984-04-30 1984-04-30 リ−クテスト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6456884U JPS60176156U (ja) 1984-04-30 1984-04-30 リ−クテスト装置

Publications (2)

Publication Number Publication Date
JPS60176156U JPS60176156U (ja) 1985-11-21
JPH0226048Y2 true JPH0226048Y2 (enrdf_load_stackoverflow) 1990-07-17

Family

ID=30595776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6456884U Granted JPS60176156U (ja) 1984-04-30 1984-04-30 リ−クテスト装置

Country Status (1)

Country Link
JP (1) JPS60176156U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003518256A (ja) * 1999-12-22 2003-06-03 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング シート型漏洩探査器を運転する方法並びに該方法を実施するために適したシート型探査器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62147337A (ja) * 1985-12-17 1987-07-01 ウエブ、テクノロジ−、インコ−ポレ−テツド 電子部品パッケージの密閉度試験方法
JP2012242316A (ja) * 2011-05-23 2012-12-10 Fukuda:Kk リークテスト用掃除装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003518256A (ja) * 1999-12-22 2003-06-03 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング シート型漏洩探査器を運転する方法並びに該方法を実施するために適したシート型探査器

Also Published As

Publication number Publication date
JPS60176156U (ja) 1985-11-21

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