JPH02258971A - 真空蒸着源 - Google Patents
真空蒸着源Info
- Publication number
- JPH02258971A JPH02258971A JP28751089A JP28751089A JPH02258971A JP H02258971 A JPH02258971 A JP H02258971A JP 28751089 A JP28751089 A JP 28751089A JP 28751089 A JP28751089 A JP 28751089A JP H02258971 A JPH02258971 A JP H02258971A
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- evaporation source
- evaporation
- film thickness
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 82
- 239000000463 material Substances 0.000 claims abstract description 19
- 230000008020 evaporation Effects 0.000 claims description 78
- 239000000758 substrate Substances 0.000 abstract description 27
- 238000009826 distribution Methods 0.000 abstract description 23
- 238000007740 vapor deposition Methods 0.000 abstract description 8
- 230000003993 interaction Effects 0.000 abstract description 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28751089A JPH02258971A (ja) | 1989-11-06 | 1989-11-06 | 真空蒸着源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28751089A JPH02258971A (ja) | 1989-11-06 | 1989-11-06 | 真空蒸着源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02258971A true JPH02258971A (ja) | 1990-10-19 |
| JPH0524229B2 JPH0524229B2 (enrdf_load_stackoverflow) | 1993-04-07 |
Family
ID=17718275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28751089A Granted JPH02258971A (ja) | 1989-11-06 | 1989-11-06 | 真空蒸着源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02258971A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020089288A (ko) * | 2002-11-07 | 2002-11-29 | 정세영 | 유기물 증착용 소스 |
| EP1342808A1 (en) * | 2002-03-08 | 2003-09-10 | Eastman Kodak Company | Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device |
| JP2007005249A (ja) * | 2005-06-27 | 2007-01-11 | Matsushita Electric Works Ltd | 有機ｅｌ素子の製造方法及び製造装置 |
-
1989
- 1989-11-06 JP JP28751089A patent/JPH02258971A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1342808A1 (en) * | 2002-03-08 | 2003-09-10 | Eastman Kodak Company | Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device |
| KR20020089288A (ko) * | 2002-11-07 | 2002-11-29 | 정세영 | 유기물 증착용 소스 |
| JP2007005249A (ja) * | 2005-06-27 | 2007-01-11 | Matsushita Electric Works Ltd | 有機ｅｌ素子の製造方法及び製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0524229B2 (enrdf_load_stackoverflow) | 1993-04-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |