JPH0221690B2 - - Google Patents
Info
- Publication number
- JPH0221690B2 JPH0221690B2 JP4600683A JP4600683A JPH0221690B2 JP H0221690 B2 JPH0221690 B2 JP H0221690B2 JP 4600683 A JP4600683 A JP 4600683A JP 4600683 A JP4600683 A JP 4600683A JP H0221690 B2 JPH0221690 B2 JP H0221690B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrodes
- electrode
- vibration
- interdigital
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005452 bending Methods 0.000 claims description 31
- 230000005284 excitation Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 230000010287 polarization Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 15
- 238000006073 displacement reaction Methods 0.000 description 8
- 230000008602 contraction Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4600683A JPS59172825A (ja) | 1983-03-22 | 1983-03-22 | 圧電単体屈曲振動子および圧電フィルタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4600683A JPS59172825A (ja) | 1983-03-22 | 1983-03-22 | 圧電単体屈曲振動子および圧電フィルタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59172825A JPS59172825A (ja) | 1984-09-29 |
JPH0221690B2 true JPH0221690B2 (nl) | 1990-05-15 |
Family
ID=12734979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4600683A Granted JPS59172825A (ja) | 1983-03-22 | 1983-03-22 | 圧電単体屈曲振動子および圧電フィルタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59172825A (nl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4927273A (en) * | 1988-07-21 | 1990-05-22 | Nippon Thompson Co., Ltd. | Linear motion rolling contact bearing assembly having a feed-in port |
JP4772866B2 (ja) * | 2005-05-27 | 2011-09-14 | エヌエックスピー ビー ヴィ | バルク音波共振器装置 |
US8513863B2 (en) * | 2009-06-11 | 2013-08-20 | Qualcomm Mems Technologies, Inc. | Piezoelectric resonator with two layers |
-
1983
- 1983-03-22 JP JP4600683A patent/JPS59172825A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59172825A (ja) | 1984-09-29 |
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