JPH0220831Y2 - - Google Patents
Info
- Publication number
- JPH0220831Y2 JPH0220831Y2 JP1986093272U JP9327286U JPH0220831Y2 JP H0220831 Y2 JPH0220831 Y2 JP H0220831Y2 JP 1986093272 U JP1986093272 U JP 1986093272U JP 9327286 U JP9327286 U JP 9327286U JP H0220831 Y2 JPH0220831 Y2 JP H0220831Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer
- diffusion
- wafers
- wafer boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 23
- 235000012431 wafers Nutrition 0.000 description 45
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986093272U JPH0220831Y2 (ru) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986093272U JPH0220831Y2 (ru) | 1986-06-20 | 1986-06-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631324U JPS631324U (ru) | 1988-01-07 |
| JPH0220831Y2 true JPH0220831Y2 (ru) | 1990-06-06 |
Family
ID=30955717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986093272U Expired JPH0220831Y2 (ru) | 1986-06-20 | 1986-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220831Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52143760A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Quartz tube in heat treatment furnace |
-
1986
- 1986-06-20 JP JP1986093272U patent/JPH0220831Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52143760A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Quartz tube in heat treatment furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS631324U (ru) | 1988-01-07 |
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