JPS631324U - - Google Patents
Info
- Publication number
- JPS631324U JPS631324U JP9327286U JP9327286U JPS631324U JP S631324 U JPS631324 U JP S631324U JP 9327286 U JP9327286 U JP 9327286U JP 9327286 U JP9327286 U JP 9327286U JP S631324 U JPS631324 U JP S631324U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer boat
- diffusion furnace
- wafer
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000003082 abrasive agent Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000007788 roughening Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 10
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986093272U JPH0220831Y2 (ru) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986093272U JPH0220831Y2 (ru) | 1986-06-20 | 1986-06-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631324U true JPS631324U (ru) | 1988-01-07 |
| JPH0220831Y2 JPH0220831Y2 (ru) | 1990-06-06 |
Family
ID=30955717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986093272U Expired JPH0220831Y2 (ru) | 1986-06-20 | 1986-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220831Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52143760A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Quartz tube in heat treatment furnace |
-
1986
- 1986-06-20 JP JP1986093272U patent/JPH0220831Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52143760A (en) * | 1976-05-26 | 1977-11-30 | Hitachi Ltd | Quartz tube in heat treatment furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220831Y2 (ru) | 1990-06-06 |