JPH01163331U - - Google Patents
Info
- Publication number
- JPH01163331U JPH01163331U JP6078888U JP6078888U JPH01163331U JP H01163331 U JPH01163331 U JP H01163331U JP 6078888 U JP6078888 U JP 6078888U JP 6078888 U JP6078888 U JP 6078888U JP H01163331 U JPH01163331 U JP H01163331U
- Authority
- JP
- Japan
- Prior art keywords
- dummy wafer
- wafer
- susceptor
- sic
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988060788U JPH0614477Y2 (ja) | 1988-05-09 | 1988-05-09 | ダミーウェハ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988060788U JPH0614477Y2 (ja) | 1988-05-09 | 1988-05-09 | ダミーウェハ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01163331U true JPH01163331U (ru) | 1989-11-14 |
JPH0614477Y2 JPH0614477Y2 (ja) | 1994-04-13 |
Family
ID=31286485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988060788U Expired - Lifetime JPH0614477Y2 (ja) | 1988-05-09 | 1988-05-09 | ダミーウェハ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0614477Y2 (ru) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60117736A (ja) * | 1983-11-30 | 1985-06-25 | Nec Corp | ベ−パ−エッチング方法 |
-
1988
- 1988-05-09 JP JP1988060788U patent/JPH0614477Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60117736A (ja) * | 1983-11-30 | 1985-06-25 | Nec Corp | ベ−パ−エッチング方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0614477Y2 (ja) | 1994-04-13 |