JPH0220824Y2 - - Google Patents
Info
- Publication number
- JPH0220824Y2 JPH0220824Y2 JP13375886U JP13375886U JPH0220824Y2 JP H0220824 Y2 JPH0220824 Y2 JP H0220824Y2 JP 13375886 U JP13375886 U JP 13375886U JP 13375886 U JP13375886 U JP 13375886U JP H0220824 Y2 JPH0220824 Y2 JP H0220824Y2
- Authority
- JP
- Japan
- Prior art keywords
- lamp house
- light
- lamp
- wind tunnel
- transmitting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 230000000630 rising effect Effects 0.000 claims 1
- 238000011282 treatment Methods 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13375886U JPH0220824Y2 (enrdf_load_stackoverflow) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13375886U JPH0220824Y2 (enrdf_load_stackoverflow) | 1986-09-02 | 1986-09-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6339933U JPS6339933U (enrdf_load_stackoverflow) | 1988-03-15 |
| JPH0220824Y2 true JPH0220824Y2 (enrdf_load_stackoverflow) | 1990-06-06 |
Family
ID=31034364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13375886U Expired JPH0220824Y2 (enrdf_load_stackoverflow) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220824Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4983829B2 (ja) * | 2009-03-23 | 2012-07-25 | 株式会社Ｇｓユアサ | 紫外線照射装置 |
-
1986
- 1986-09-02 JP JP13375886U patent/JPH0220824Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6339933U (enrdf_load_stackoverflow) | 1988-03-15 |
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