JPH0220824Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an optical processing apparatus having a configuration that allows easy maintenance and cleaning of the area around a contaminated processing chamber.

[Prior Art] As a specific example of a photoprocessing device, a resist processing device using ultraviolet irradiation will be described below.

A photoresist film (hereinafter referred to as "resist") is provided on the surface of silicon and other semiconductor wafers (in some cases, undesired resist is also attached to the back surface of the wafer), and various treatments are applied to the wafer. However, there is an apparatus that processes the resist coated on the surface of the resist film.

FIG. 2 is a schematic diagram showing an example of a conventional resist processing apparatus using ultraviolet irradiation (hereinafter referred to as ultraviolet irradiation apparatus), in which 1 is a processing chamber, 2 is a processing table, 3 is an entrance for transporting wafers, and 20 is a resist processing apparatus for ultraviolet irradiation. 21 is a lamp as a light source; 22 is a mirror placed behind the lamp 21 to focus the light from the lamp 21 onto the processing table; 23 is the bottom of the light irradiator 20; 24 is a lamp. 25 is a light transmitting plate made of ultraviolet transmitting glass fixed to the light irradiator 20; 26 is a wind tunnel for sucking air by the blower 24; 27 is the light irradiator 20 and the processing chamber 1; This is packing that intervenes between the two.

Now, the wafer carried into the processing chamber 1 from the entrance/exit 3 along the transfer line is placed on the processing table 2 and subjected to ultraviolet irradiation processing. By processing the resist using this ultraviolet irradiation, the surfaces of the processing table 2 and the light transmitting plate 25 are contaminated by adhesion of evaporated matter generated from the resist film. This contaminant is on the light transmitting plate 25.
If it is left attached to the surface, the light transmittance will decrease and the processing function by light irradiation will be degraded. Furthermore, if the processing table 2 remains dirty, there is a risk of contaminating the wafers being processed.

Therefore, it becomes necessary to disassemble the entire ultraviolet treatment device to wipe the treatment table and light transmitting plate. This wiping must be done at least once a day.

[Problems to be solved by the invention] In conventional ultraviolet treatment equipment, the light transmitting plate is the irradiator 20.
However, when cleaning the light transmission plate or processing table, or performing maintenance and inspection inside the processing chamber, the light irradiator containing the blower and the processing chamber must be removed each time. The device had to be disassembled by moving it or removing screws and other attachment parts, which was a laborious and time-consuming task.

In view of such conventional circumstances, the object of this invention is to provide a light processing device that can be cleaned and maintained in a short time with simple work without removing screws or other fittings.

[Means for Solving the Problems] In order to achieve the above object, the present invention has a lamp house with at least one lamp behind which a mirror is arranged, and a lamp provided on the top of the lamp house. The wind tunnel is divided by a tangential surface having an appropriate inclination angle, and the lower part of the lamp house is connected to a support stand raised from the bottom of the processing chamber by a connecting member, and this connecting member is It has a structure in which the divided wind tunnel in the upper part of the lamp house is rotatably joined in the dividing direction.

[Function] With the above configuration, the heavy light irradiator housing the blower can be used to clean the processing table and light transmitting plate for contamination or to perform maintenance and inspection inside the processing chamber and the light irradiator. The light transmitting plate and the processing table can be exposed in a state where they can be easily cleaned by rotating only the lamp house relatively lightly without moving it.

[Example] Fig. 1 is a sectional view showing the main part of an ultraviolet treatment apparatus as an embodiment of this invention, in which Fig. 1A is a front view and Fig. 1B is a side view. In Figure 1, 2
Reference numeral 6 denotes a wind tunnel connected to the blower 24, which has a tangential surface 28 having an inclination angle of 45 degrees with respect to the vertical direction, as shown by the dotted line in FIG. Reference numeral 30 denotes a lamp house in which two lamps 21 each having a mirror 22 arranged behind it are housed. It is supported by an upright support stand 10. On the rear bottom surface of the lamp house 30, in contact with the top surface of the support base 10,
They are rotatably joined by a screw thread 29 as a joining member. Furthermore, the light transmitting plate 25 is attached to the lower part of the lamp house 30 by known attachment means.

Further, the same reference numerals as in FIG. 2 indicate the same or corresponding parts.

In the above configuration, when cleaning a contaminated part or performing maintenance, first the side plate 2 of the light irradiator 20 is
Remove 0'. Thereafter, when the lamp house 30 is rotated about the axis of the screw 29 to the state shown by the dotted line in FIG. be done. At the same time, since the processing table 2 is exposed on the surface, the light transmitting plate 25 and the processing table 2 can be easily cleaned or maintained and inspected in this exposed state.
Once cleaning or maintenance is complete, lamp house 3
0 rotates around the axis of hinge 29 and returns to the original support base 1
Return to the state where it is supported on the top surface of 0. When the lamp house 30 returns to its normal position, the side plate 20' of the light irradiator 20 is reattached and sealed.

Although the above embodiment described an ultraviolet treatment device as a specific example of a light treatment device, this invention is applicable not only to ultraviolet treatment devices but also to all light irradiation devices that process by light irradiation. Of course.

[Effects of the invention] As explained above, in this invention, the wind tunnel is divided by a tangential plane having an appropriate inclination angle, and the lower part of the lamp house is connected by a connecting member to a support stand raised from the bottom of the processing chamber. This joining member has a structure in which it is joined so that it can rotate freely around its axis in the direction of dividing the divided wind tunnel in the upper part of the lamp house. By rotating the light lamp and the light transmitting plate, there is an effect that the processing table and the light transmitting plate can be easily exposed to the outside.

Another advantage is that the effort and time required to disassemble the device by removing screws and other screws can be saved.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing the main structure of an ultraviolet treatment device which is an embodiment of this invention, and FIG. 2 is a cross-sectional view of a conventional device. In the figure, 1: processing chamber, 2: processing table, 3: entrance/exit,
10: Support stand, 20: Light irradiator, 21: Lamp,
22: Mirror, 25: Light transmission plate, 26, 26':
Wind tunnel, 28: Contact surface, 29: Spiral, 30: Lamp house.

Claims (1)

[Scope of Claim for Utility Model Registration] (1) A built-in lamp house with at least one lamp with a mirror placed behind it, a light transmitting plate provided at the bottom of the lamp house, and connected to a cooling blower at the top. A light irradiator equipped with a wind tunnel and a processing chamber that includes a built-in processing table that can be placed directly below the light transmitting plate of the light irradiator and have a slit-shaped entrance and exit for wafer transfer are assembled in close contact with each other. In the optical processing device, the upper wind tunnel of the lamp house is divided by a tangential surface having an appropriate inclination angle, and the lower part of the lamp house is connected to a support stand rising from the bottom of the processing chamber by a connecting member, The light processing device is characterized in that the joining member has a structure in which it is joined so as to be rotatable about its axis in a direction that divides the divided wind tunnel in the upper part of the lamp house. (2) The optical processing device according to claim (1) of the utility model registration, characterized in that a screw thread is used for the joining member.