JPH0220678Y2 - - Google Patents

Info

Publication number
JPH0220678Y2
JPH0220678Y2 JP1984130344U JP13034484U JPH0220678Y2 JP H0220678 Y2 JPH0220678 Y2 JP H0220678Y2 JP 1984130344 U JP1984130344 U JP 1984130344U JP 13034484 U JP13034484 U JP 13034484U JP H0220678 Y2 JPH0220678 Y2 JP H0220678Y2
Authority
JP
Japan
Prior art keywords
work coil
tip
frequency power
icp
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984130344U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144558U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13034484U priority Critical patent/JPS6144558U/ja
Publication of JPS6144558U publication Critical patent/JPS6144558U/ja
Application granted granted Critical
Publication of JPH0220678Y2 publication Critical patent/JPH0220678Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP13034484U 1984-08-28 1984-08-28 誘導結合プラズマ発生装置 Granted JPS6144558U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13034484U JPS6144558U (ja) 1984-08-28 1984-08-28 誘導結合プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13034484U JPS6144558U (ja) 1984-08-28 1984-08-28 誘導結合プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPS6144558U JPS6144558U (ja) 1986-03-24
JPH0220678Y2 true JPH0220678Y2 (enrdf_load_stackoverflow) 1990-06-05

Family

ID=30688956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13034484U Granted JPS6144558U (ja) 1984-08-28 1984-08-28 誘導結合プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPS6144558U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6144558U (ja) 1986-03-24

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