JPH0219957Y2 - - Google Patents
Info
- Publication number
- JPH0219957Y2 JPH0219957Y2 JP13126786U JP13126786U JPH0219957Y2 JP H0219957 Y2 JPH0219957 Y2 JP H0219957Y2 JP 13126786 U JP13126786 U JP 13126786U JP 13126786 U JP13126786 U JP 13126786U JP H0219957 Y2 JPH0219957 Y2 JP H0219957Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- frame
- support arm
- stopper
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Load-Engaging Elements For Cranes (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13126786U JPH0219957Y2 (US06818201-20041116-C00086.png) | 1986-08-29 | 1986-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13126786U JPH0219957Y2 (US06818201-20041116-C00086.png) | 1986-08-29 | 1986-08-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6338323U JPS6338323U (US06818201-20041116-C00086.png) | 1988-03-11 |
| JPH0219957Y2 true JPH0219957Y2 (US06818201-20041116-C00086.png) | 1990-05-31 |
Family
ID=31029560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13126786U Expired JPH0219957Y2 (US06818201-20041116-C00086.png) | 1986-08-29 | 1986-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0219957Y2 (US06818201-20041116-C00086.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002153801A (ja) * | 2000-11-17 | 2002-05-28 | Chugai Ro Co Ltd | テーブル式塗装設備 |
-
1986
- 1986-08-29 JP JP13126786U patent/JPH0219957Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6338323U (US06818201-20041116-C00086.png) | 1988-03-11 |
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