JPH02180728A - 高純度石英母材製造用加熱炉 - Google Patents
高純度石英母材製造用加熱炉Info
- Publication number
- JPH02180728A JPH02180728A JP63332005A JP33200588A JPH02180728A JP H02180728 A JPH02180728 A JP H02180728A JP 63332005 A JP63332005 A JP 63332005A JP 33200588 A JP33200588 A JP 33200588A JP H02180728 A JPH02180728 A JP H02180728A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- core tube
- furnace core
- tube
- partition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 239000010453 quartz Substances 0.000 title claims abstract description 13
- 238000005192 partition Methods 0.000 claims abstract description 34
- 239000005373 porous glass Substances 0.000 claims abstract description 33
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 31
- 239000000463 material Substances 0.000 claims description 43
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 239000012298 atmosphere Substances 0.000 abstract description 26
- 239000011521 glass Substances 0.000 abstract description 26
- 238000010926 purge Methods 0.000 abstract description 9
- 239000012299 nitrogen atmosphere Substances 0.000 abstract description 2
- 239000011162 core material Substances 0.000 description 68
- 239000007789 gas Substances 0.000 description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 20
- 229910001873 dinitrogen Inorganic materials 0.000 description 16
- 239000013307 optical fiber Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 238000005245 sintering Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000004031 devitrification Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000004580 weight loss Effects 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63332005A JPH02180728A (ja) | 1988-12-29 | 1988-12-29 | 高純度石英母材製造用加熱炉 |
| AU46870/89A AU626362B2 (en) | 1988-12-29 | 1989-12-19 | Furnace for producing high purity quartz glass preform |
| GB8928691A GB2226628B (en) | 1988-12-29 | 1989-12-20 | Furnace |
| US07/459,299 US5032079A (en) | 1988-12-29 | 1989-12-29 | Furnace for producing high purity quartz glass preform |
| KR898920189A KR920001386B1 (en) | 1988-12-29 | 1989-12-29 | Heating furnace for producing high-purity quartz preform |
| EP90106551A EP0450124B1 (en) | 1988-12-29 | 1990-04-05 | Furnace for producing high purity quartz glass preform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63332005A JPH02180728A (ja) | 1988-12-29 | 1988-12-29 | 高純度石英母材製造用加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02180728A true JPH02180728A (ja) | 1990-07-13 |
| JPH0442339B2 JPH0442339B2 (enrdf_load_stackoverflow) | 1992-07-13 |
Family
ID=18250074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63332005A Granted JPH02180728A (ja) | 1988-12-29 | 1988-12-29 | 高純度石英母材製造用加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02180728A (enrdf_load_stackoverflow) |
-
1988
- 1988-12-29 JP JP63332005A patent/JPH02180728A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442339B2 (enrdf_load_stackoverflow) | 1992-07-13 |
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Legal Events
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| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
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