JPH0215628B2 - - Google Patents
Info
- Publication number
- JPH0215628B2 JPH0215628B2 JP16751185A JP16751185A JPH0215628B2 JP H0215628 B2 JPH0215628 B2 JP H0215628B2 JP 16751185 A JP16751185 A JP 16751185A JP 16751185 A JP16751185 A JP 16751185A JP H0215628 B2 JPH0215628 B2 JP H0215628B2
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- evaporation source
- chamber
- vacuum
- storage chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 claims description 91
- 230000008020 evaporation Effects 0.000 claims description 91
- 238000007738 vacuum evaporation Methods 0.000 claims description 23
- 239000012159 carrier gas Substances 0.000 claims description 14
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 238000011109 contamination Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16751185A JPS6230875A (ja) | 1985-07-31 | 1985-07-31 | バツチ式真空蒸着装置用蒸発源収納装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16751185A JPS6230875A (ja) | 1985-07-31 | 1985-07-31 | バツチ式真空蒸着装置用蒸発源収納装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6230875A JPS6230875A (ja) | 1987-02-09 |
| JPH0215628B2 true JPH0215628B2 (enrdf_load_stackoverflow) | 1990-04-12 |
Family
ID=15851036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16751185A Granted JPS6230875A (ja) | 1985-07-31 | 1985-07-31 | バツチ式真空蒸着装置用蒸発源収納装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6230875A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04185807A (ja) * | 1990-11-21 | 1992-07-02 | Nikken Tokushu Kogyo Kk | 河川の河口附近に設ける表層水取水装置 |
| JP5619028B2 (ja) * | 2009-12-21 | 2014-11-05 | 株式会社アルバック | 真空蒸着装置及びそのメンテナンス方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02250958A (ja) * | 1989-03-23 | 1990-10-08 | Matsushita Electric Ind Co Ltd | 真空蒸着装置 |
-
1985
- 1985-07-31 JP JP16751185A patent/JPS6230875A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04185807A (ja) * | 1990-11-21 | 1992-07-02 | Nikken Tokushu Kogyo Kk | 河川の河口附近に設ける表層水取水装置 |
| JP5619028B2 (ja) * | 2009-12-21 | 2014-11-05 | 株式会社アルバック | 真空蒸着装置及びそのメンテナンス方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6230875A (ja) | 1987-02-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |