JPH0213494Y2 - - Google Patents
Info
- Publication number
- JPH0213494Y2 JPH0213494Y2 JP17266784U JP17266784U JPH0213494Y2 JP H0213494 Y2 JPH0213494 Y2 JP H0213494Y2 JP 17266784 U JP17266784 U JP 17266784U JP 17266784 U JP17266784 U JP 17266784U JP H0213494 Y2 JPH0213494 Y2 JP H0213494Y2
- Authority
- JP
- Japan
- Prior art keywords
- cap
- reaction tube
- gas
- reaction
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 20
- 239000012495 reaction gas Substances 0.000 claims description 11
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17266784U JPH0213494Y2 (US20030199744A1-20031023-C00003.png) | 1984-11-14 | 1984-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17266784U JPH0213494Y2 (US20030199744A1-20031023-C00003.png) | 1984-11-14 | 1984-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186472U JPS6186472U (US20030199744A1-20031023-C00003.png) | 1986-06-06 |
| JPH0213494Y2 true JPH0213494Y2 (US20030199744A1-20031023-C00003.png) | 1990-04-13 |
Family
ID=30730330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17266784U Expired JPH0213494Y2 (US20030199744A1-20031023-C00003.png) | 1984-11-14 | 1984-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213494Y2 (US20030199744A1-20031023-C00003.png) |
-
1984
- 1984-11-14 JP JP17266784U patent/JPH0213494Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6186472U (US20030199744A1-20031023-C00003.png) | 1986-06-06 |
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