JPH02125328U - - Google Patents
Info
- Publication number
- JPH02125328U JPH02125328U JP3337289U JP3337289U JPH02125328U JP H02125328 U JPH02125328 U JP H02125328U JP 3337289 U JP3337289 U JP 3337289U JP 3337289 U JP3337289 U JP 3337289U JP H02125328 U JPH02125328 U JP H02125328U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- control mechanism
- chemical vapor
- vapor phase
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 5
- 239000012808 vapor phase Substances 0.000 claims 5
- 239000010408 film Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3337289U JPH02125328U (ko) | 1989-03-23 | 1989-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3337289U JPH02125328U (ko) | 1989-03-23 | 1989-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125328U true JPH02125328U (ko) | 1990-10-16 |
Family
ID=31536975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3337289U Pending JPH02125328U (ko) | 1989-03-23 | 1989-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125328U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011003744A (ja) * | 2009-06-18 | 2011-01-06 | Denso Corp | 表面処理装置 |
-
1989
- 1989-03-23 JP JP3337289U patent/JPH02125328U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011003744A (ja) * | 2009-06-18 | 2011-01-06 | Denso Corp | 表面処理装置 |
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