JPH0275723U - - Google Patents
Info
- Publication number
- JPH0275723U JPH0275723U JP15455388U JP15455388U JPH0275723U JP H0275723 U JPH0275723 U JP H0275723U JP 15455388 U JP15455388 U JP 15455388U JP 15455388 U JP15455388 U JP 15455388U JP H0275723 U JPH0275723 U JP H0275723U
- Authority
- JP
- Japan
- Prior art keywords
- reduced pressure
- vapor phase
- phase growth
- growth apparatus
- pressure vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15455388U JPH0275723U (ko) | 1988-11-28 | 1988-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15455388U JPH0275723U (ko) | 1988-11-28 | 1988-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0275723U true JPH0275723U (ko) | 1990-06-11 |
Family
ID=31431386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15455388U Pending JPH0275723U (ko) | 1988-11-28 | 1988-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0275723U (ko) |
-
1988
- 1988-11-28 JP JP15455388U patent/JPH0275723U/ja active Pending