JPS63128719U - - Google Patents
Info
- Publication number
- JPS63128719U JPS63128719U JP2047287U JP2047287U JPS63128719U JP S63128719 U JPS63128719 U JP S63128719U JP 2047287 U JP2047287 U JP 2047287U JP 2047287 U JP2047287 U JP 2047287U JP S63128719 U JPS63128719 U JP S63128719U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- inner pipe
- exhaust
- outer pipe
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2047287U JPS63128719U (ko) | 1987-02-13 | 1987-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2047287U JPS63128719U (ko) | 1987-02-13 | 1987-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63128719U true JPS63128719U (ko) | 1988-08-23 |
Family
ID=30816015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2047287U Pending JPS63128719U (ko) | 1987-02-13 | 1987-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63128719U (ko) |
-
1987
- 1987-02-13 JP JP2047287U patent/JPS63128719U/ja active Pending