JPH0461629U - - Google Patents
Info
- Publication number
- JPH0461629U JPH0461629U JP10202990U JP10202990U JPH0461629U JP H0461629 U JPH0461629 U JP H0461629U JP 10202990 U JP10202990 U JP 10202990U JP 10202990 U JP10202990 U JP 10202990U JP H0461629 U JPH0461629 U JP H0461629U
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- gas line
- heater
- valve
- heating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10202990U JPH0461629U (ko) | 1990-09-28 | 1990-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10202990U JPH0461629U (ko) | 1990-09-28 | 1990-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0461629U true JPH0461629U (ko) | 1992-05-27 |
Family
ID=31845953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10202990U Pending JPH0461629U (ko) | 1990-09-28 | 1990-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0461629U (ko) |
-
1990
- 1990-09-28 JP JP10202990U patent/JPH0461629U/ja active Pending