JPH0281033U - - Google Patents
Info
- Publication number
- JPH0281033U JPH0281033U JP15998288U JP15998288U JPH0281033U JP H0281033 U JPH0281033 U JP H0281033U JP 15998288 U JP15998288 U JP 15998288U JP 15998288 U JP15998288 U JP 15998288U JP H0281033 U JPH0281033 U JP H0281033U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- thin film
- inert gas
- gas
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000012495 reaction gas Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 4
- 239000010409 thin film Substances 0.000 claims 4
- 239000000376 reactant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15998288U JPH0281033U (ko) | 1988-12-09 | 1988-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15998288U JPH0281033U (ko) | 1988-12-09 | 1988-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281033U true JPH0281033U (ko) | 1990-06-22 |
Family
ID=31441666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15998288U Pending JPH0281033U (ko) | 1988-12-09 | 1988-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281033U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010118462A (ja) * | 2008-11-12 | 2010-05-27 | Hitachi Kokusai Electric Inc | 基板処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193323A (ja) * | 1984-03-15 | 1985-10-01 | Nec Corp | 半導体気相成長装置 |
-
1988
- 1988-12-09 JP JP15998288U patent/JPH0281033U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193323A (ja) * | 1984-03-15 | 1985-10-01 | Nec Corp | 半導体気相成長装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010118462A (ja) * | 2008-11-12 | 2010-05-27 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| JP4634495B2 (ja) * | 2008-11-12 | 2011-02-16 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |