JPH02121727U - - Google Patents
Info
- Publication number
- JPH02121727U JPH02121727U JP3115889U JP3115889U JPH02121727U JP H02121727 U JPH02121727 U JP H02121727U JP 3115889 U JP3115889 U JP 3115889U JP 3115889 U JP3115889 U JP 3115889U JP H02121727 U JPH02121727 U JP H02121727U
- Authority
- JP
- Japan
- Prior art keywords
- film
- wiring
- insulating
- metal film
- functional element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Description
第１図は本考案を有するＬＣＤ内のＴＦＴの断
面図である。第２図のＬＣＤ内のＴＦＴの断面図
である。第３図、第４図、及び第５図は本考案を
有するＬＣＤ内のＴＦＴの平面図である。
１……絶縁基板、２……補助容量電極、３……
補助容量絶縁膜、４……ゲート、５……ゲート配
線、６……表示電極、７……コンタクト用電極、
８……ゲート絶縁膜、９……ソース、１０……ド
レイン、１１……ａ−Ｓｉ、１２……クラツク、
１３……クラツク対策膜、１４……ドレイン配線
。
FIG. 1 is a cross-sectional view of a TFT in an LCD having the present invention. FIG. 3 is a cross-sectional view of a TFT in the LCD of FIG. 2; 3, 4, and 5 are plan views of TFTs in an LCD having the present invention. 1...Insulating substrate, 2...Auxiliary capacitance electrode, 3...
Auxiliary capacitor insulating film, 4...gate, 5...gate wiring, 6...display electrode, 7...contact electrode,
8... Gate insulating film, 9... Source, 10... Drain, 11... a-Si, 12... Crack,
13...Crack prevention film, 14...Drain wiring.
Claims (1)
線用金属膜を備えた薄膜機能素子において絶縁膜
と配線用金属膜との間隙もしくは配線用金属膜の
周囲に透明導電膜を配置することを特徴とする薄
膜機能素子。 In a thin film functional element having two or more layers of insulating films on an insulating substrate and a metal film for wiring between the films, a transparent conductive film is arranged in the gap between the insulating film and the metal film for wiring or around the metal film for wiring. A thin film functional element characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3115889U JPH02121727U (en) | 1989-03-17 | 1989-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3115889U JPH02121727U (en) | 1989-03-17 | 1989-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02121727U true JPH02121727U (en) | 1990-10-03 |
Family
ID=31256809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3115889U Pending JPH02121727U (en) | 1989-03-17 | 1989-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02121727U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63271391A (en) * | 1987-04-30 | 1988-11-09 | 松下電器産業株式会社 | Thin film transistor array substrate and manufacture thereof |
| JPS63316084A (en) * | 1987-06-19 | 1988-12-23 | 株式会社日立製作所 | Manufacture of thin film active element array |
| JPS6444419A (en) * | 1987-08-11 | 1989-02-16 | Fujitsu Ltd | Liquid crystal display panel |
-
1989
- 1989-03-17 JP JP3115889U patent/JPH02121727U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63271391A (en) * | 1987-04-30 | 1988-11-09 | 松下電器産業株式会社 | Thin film transistor array substrate and manufacture thereof |
| JPS63316084A (en) * | 1987-06-19 | 1988-12-23 | 株式会社日立製作所 | Manufacture of thin film active element array |
| JPS6444419A (en) * | 1987-08-11 | 1989-02-16 | Fujitsu Ltd | Liquid crystal display panel |
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