JPH0211849B2 - - Google Patents

Info

Publication number
JPH0211849B2
JPH0211849B2 JP56116512A JP11651281A JPH0211849B2 JP H0211849 B2 JPH0211849 B2 JP H0211849B2 JP 56116512 A JP56116512 A JP 56116512A JP 11651281 A JP11651281 A JP 11651281A JP H0211849 B2 JPH0211849 B2 JP H0211849B2
Authority
JP
Japan
Prior art keywords
analyzer
polarizer
light
polarization
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56116512A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5818146A (ja
Inventor
Yasuaki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP11651281A priority Critical patent/JPS5818146A/ja
Publication of JPS5818146A publication Critical patent/JPS5818146A/ja
Publication of JPH0211849B2 publication Critical patent/JPH0211849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP11651281A 1981-07-27 1981-07-27 測光型偏光解析装置 Granted JPS5818146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11651281A JPS5818146A (ja) 1981-07-27 1981-07-27 測光型偏光解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11651281A JPS5818146A (ja) 1981-07-27 1981-07-27 測光型偏光解析装置

Publications (2)

Publication Number Publication Date
JPS5818146A JPS5818146A (ja) 1983-02-02
JPH0211849B2 true JPH0211849B2 (enrdf_load_stackoverflow) 1990-03-16

Family

ID=14688976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11651281A Granted JPS5818146A (ja) 1981-07-27 1981-07-27 測光型偏光解析装置

Country Status (1)

Country Link
JP (1) JPS5818146A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2810737B1 (fr) 2000-06-23 2003-04-18 Oreal Appareil et procede d'examen d'une surface

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5414952A (en) * 1977-07-04 1979-02-03 Kao Corp 1-halogenocarbonyltricyclo(4,3,1,12,5)undecane
JPS5619576A (en) * 1979-07-25 1981-02-24 Fujitsu Ltd Address matching detection system in multiple-space processing data processing system

Also Published As

Publication number Publication date
JPS5818146A (ja) 1983-02-02

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