JPS6250769B2 - - Google Patents
Info
- Publication number
- JPS6250769B2 JPS6250769B2 JP22731882A JP22731882A JPS6250769B2 JP S6250769 B2 JPS6250769 B2 JP S6250769B2 JP 22731882 A JP22731882 A JP 22731882A JP 22731882 A JP22731882 A JP 22731882A JP S6250769 B2 JPS6250769 B2 JP S6250769B2
- Authority
- JP
- Japan
- Prior art keywords
- analyzer
- light
- sample
- refractive index
- polarized light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000010287 polarization Effects 0.000 claims description 12
- 239000010408 film Substances 0.000 description 13
- 238000005259 measurement Methods 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000000572 ellipsometry Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22731882A JPS59120928A (ja) | 1982-12-28 | 1982-12-28 | 測光型偏光解析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22731882A JPS59120928A (ja) | 1982-12-28 | 1982-12-28 | 測光型偏光解析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59120928A JPS59120928A (ja) | 1984-07-12 |
| JPS6250769B2 true JPS6250769B2 (enrdf_load_stackoverflow) | 1987-10-27 |
Family
ID=16858919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22731882A Granted JPS59120928A (ja) | 1982-12-28 | 1982-12-28 | 測光型偏光解析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59120928A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63135844A (ja) * | 1986-11-27 | 1988-06-08 | Ricoh Co Ltd | 屈折率測定方法 |
| KR100957722B1 (ko) | 2005-12-27 | 2010-05-12 | 주식회사 에이디피엔지니어링 | 기판 결함 검출 방법 및 장치 |
-
1982
- 1982-12-28 JP JP22731882A patent/JPS59120928A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59120928A (ja) | 1984-07-12 |
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