JPS5818146A - 測光型偏光解析装置 - Google Patents

測光型偏光解析装置

Info

Publication number
JPS5818146A
JPS5818146A JP11651281A JP11651281A JPS5818146A JP S5818146 A JPS5818146 A JP S5818146A JP 11651281 A JP11651281 A JP 11651281A JP 11651281 A JP11651281 A JP 11651281A JP S5818146 A JPS5818146 A JP S5818146A
Authority
JP
Japan
Prior art keywords
polarizer
polarization
sample
light
photometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11651281A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0211849B2 (enrdf_load_stackoverflow
Inventor
Yasuaki Hayashi
林　康明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP11651281A priority Critical patent/JPS5818146A/ja
Publication of JPS5818146A publication Critical patent/JPS5818146A/ja
Publication of JPH0211849B2 publication Critical patent/JPH0211849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP11651281A 1981-07-27 1981-07-27 測光型偏光解析装置 Granted JPS5818146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11651281A JPS5818146A (ja) 1981-07-27 1981-07-27 測光型偏光解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11651281A JPS5818146A (ja) 1981-07-27 1981-07-27 測光型偏光解析装置

Publications (2)

Publication Number Publication Date
JPS5818146A true JPS5818146A (ja) 1983-02-02
JPH0211849B2 JPH0211849B2 (enrdf_load_stackoverflow) 1990-03-16

Family

ID=14688976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11651281A Granted JPS5818146A (ja) 1981-07-27 1981-07-27 測光型偏光解析装置

Country Status (1)

Country Link
JP (1) JPS5818146A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7127280B2 (en) 2000-06-23 2006-10-24 L'oreal Apparatus and process for examining a surface

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5414952A (en) * 1977-07-04 1979-02-03 Kao Corp 1-halogenocarbonyltricyclo(4,3,1,12,5)undecane
JPS5619576A (en) * 1979-07-25 1981-02-24 Fujitsu Ltd Address matching detection system in multiple-space processing data processing system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5414952A (en) * 1977-07-04 1979-02-03 Kao Corp 1-halogenocarbonyltricyclo(4,3,1,12,5)undecane
JPS5619576A (en) * 1979-07-25 1981-02-24 Fujitsu Ltd Address matching detection system in multiple-space processing data processing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7127280B2 (en) 2000-06-23 2006-10-24 L'oreal Apparatus and process for examining a surface

Also Published As

Publication number Publication date
JPH0211849B2 (enrdf_load_stackoverflow) 1990-03-16

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