JPH02113333U - - Google Patents
Info
- Publication number
- JPH02113333U JPH02113333U JP2097889U JP2097889U JPH02113333U JP H02113333 U JPH02113333 U JP H02113333U JP 2097889 U JP2097889 U JP 2097889U JP 2097889 U JP2097889 U JP 2097889U JP H02113333 U JPH02113333 U JP H02113333U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- substrate
- cvd apparatus
- film
- plasma cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989020978U JPH0715132Y2 (ja) | 1989-02-23 | 1989-02-23 | プラズマcvd装置の電極構造 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989020978U JPH0715132Y2 (ja) | 1989-02-23 | 1989-02-23 | プラズマcvd装置の電極構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02113333U true JPH02113333U (ko) | 1990-09-11 |
JPH0715132Y2 JPH0715132Y2 (ja) | 1995-04-10 |
Family
ID=31237807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989020978U Expired - Lifetime JPH0715132Y2 (ja) | 1989-02-23 | 1989-02-23 | プラズマcvd装置の電極構造 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0715132Y2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020241703A1 (ja) * | 2019-05-30 | 2020-12-03 | 京セラ株式会社 | 流路部材 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60180114A (ja) * | 1984-02-27 | 1985-09-13 | Matsushita Electric Ind Co Ltd | 非晶質膜の堆積方法および堆積装置 |
-
1989
- 1989-02-23 JP JP1989020978U patent/JPH0715132Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60180114A (ja) * | 1984-02-27 | 1985-09-13 | Matsushita Electric Ind Co Ltd | 非晶質膜の堆積方法および堆積装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020241703A1 (ja) * | 2019-05-30 | 2020-12-03 | 京セラ株式会社 | 流路部材 |
JPWO2020241703A1 (ko) * | 2019-05-30 | 2020-12-03 |
Also Published As
Publication number | Publication date |
---|---|
JPH0715132Y2 (ja) | 1995-04-10 |