JPH02113333U - - Google Patents

Info

Publication number
JPH02113333U
JPH02113333U JP2097889U JP2097889U JPH02113333U JP H02113333 U JPH02113333 U JP H02113333U JP 2097889 U JP2097889 U JP 2097889U JP 2097889 U JP2097889 U JP 2097889U JP H02113333 U JPH02113333 U JP H02113333U
Authority
JP
Japan
Prior art keywords
electrode
substrate
cvd apparatus
film
plasma cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2097889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0715132Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989020978U priority Critical patent/JPH0715132Y2/ja
Publication of JPH02113333U publication Critical patent/JPH02113333U/ja
Application granted granted Critical
Publication of JPH0715132Y2 publication Critical patent/JPH0715132Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989020978U 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造 Expired - Lifetime JPH0715132Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989020978U JPH0715132Y2 (ja) 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989020978U JPH0715132Y2 (ja) 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造

Publications (2)

Publication Number Publication Date
JPH02113333U true JPH02113333U (ko) 1990-09-11
JPH0715132Y2 JPH0715132Y2 (ja) 1995-04-10

Family

ID=31237807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989020978U Expired - Lifetime JPH0715132Y2 (ja) 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造

Country Status (1)

Country Link
JP (1) JPH0715132Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020241703A1 (ja) * 2019-05-30 2020-12-03 京セラ株式会社 流路部材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180114A (ja) * 1984-02-27 1985-09-13 Matsushita Electric Ind Co Ltd 非晶質膜の堆積方法および堆積装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180114A (ja) * 1984-02-27 1985-09-13 Matsushita Electric Ind Co Ltd 非晶質膜の堆積方法および堆積装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020241703A1 (ja) * 2019-05-30 2020-12-03 京セラ株式会社 流路部材
JPWO2020241703A1 (ko) * 2019-05-30 2020-12-03

Also Published As

Publication number Publication date
JPH0715132Y2 (ja) 1995-04-10

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