JPH01106564U - - Google Patents
Info
- Publication number
- JPH01106564U JPH01106564U JP49188U JP49188U JPH01106564U JP H01106564 U JPH01106564 U JP H01106564U JP 49188 U JP49188 U JP 49188U JP 49188 U JP49188 U JP 49188U JP H01106564 U JPH01106564 U JP H01106564U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas
- electrode
- ejected
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49188U JPH01106564U (ko) | 1988-01-06 | 1988-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49188U JPH01106564U (ko) | 1988-01-06 | 1988-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01106564U true JPH01106564U (ko) | 1989-07-18 |
Family
ID=31199565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49188U Pending JPH01106564U (ko) | 1988-01-06 | 1988-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01106564U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014078468A (ja) * | 2012-10-12 | 2014-05-01 | Toyota Motor Corp | 燃料電池用セパレータの製造装置 |
-
1988
- 1988-01-06 JP JP49188U patent/JPH01106564U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014078468A (ja) * | 2012-10-12 | 2014-05-01 | Toyota Motor Corp | 燃料電池用セパレータの製造装置 |