JPS63187326U - - Google Patents
Info
- Publication number
- JPS63187326U JPS63187326U JP7894787U JP7894787U JPS63187326U JP S63187326 U JPS63187326 U JP S63187326U JP 7894787 U JP7894787 U JP 7894787U JP 7894787 U JP7894787 U JP 7894787U JP S63187326 U JPS63187326 U JP S63187326U
- Authority
- JP
- Japan
- Prior art keywords
- side electrode
- curved surface
- substrate side
- electrode
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000000376 reactant Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7894787U JPS63187326U (ko) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7894787U JPS63187326U (ko) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63187326U true JPS63187326U (ko) | 1988-11-30 |
Family
ID=30928356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7894787U Pending JPS63187326U (ko) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187326U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101402233B1 (ko) * | 2008-01-23 | 2014-05-30 | (주)소슬 | 플라즈마 식각 장치 |
-
1987
- 1987-05-26 JP JP7894787U patent/JPS63187326U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101402233B1 (ko) * | 2008-01-23 | 2014-05-30 | (주)소슬 | 플라즈마 식각 장치 |