JPS62157970U - - Google Patents

Info

Publication number
JPS62157970U
JPS62157970U JP4669886U JP4669886U JPS62157970U JP S62157970 U JPS62157970 U JP S62157970U JP 4669886 U JP4669886 U JP 4669886U JP 4669886 U JP4669886 U JP 4669886U JP S62157970 U JPS62157970 U JP S62157970U
Authority
JP
Japan
Prior art keywords
substrate holder
frame
hole
cvd apparatus
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4669886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527494Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986046698U priority Critical patent/JPH0527494Y2/ja
Publication of JPS62157970U publication Critical patent/JPS62157970U/ja
Application granted granted Critical
Publication of JPH0527494Y2 publication Critical patent/JPH0527494Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986046698U 1986-03-28 1986-03-28 Expired - Lifetime JPH0527494Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986046698U JPH0527494Y2 (ko) 1986-03-28 1986-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986046698U JPH0527494Y2 (ko) 1986-03-28 1986-03-28

Publications (2)

Publication Number Publication Date
JPS62157970U true JPS62157970U (ko) 1987-10-07
JPH0527494Y2 JPH0527494Y2 (ko) 1993-07-13

Family

ID=30866601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986046698U Expired - Lifetime JPH0527494Y2 (ko) 1986-03-28 1986-03-28

Country Status (1)

Country Link
JP (1) JPH0527494Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998005803A1 (fr) * 1996-08-05 1998-02-12 Komatsu Ltd. Appareil de traitement de surface, procede de traitement de surface utilisant cet appareil, et buse de traitement de surface s'utilisant avec cet appareil pour ce procede

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置
JPS5948138A (ja) * 1982-07-29 1984-03-19 エクセロ・コ−ポレ−シヨン ポリウレタン反応射出成形系
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマｃｖｄ薄膜製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置
JPS5948138A (ja) * 1982-07-29 1984-03-19 エクセロ・コ−ポレ−シヨン ポリウレタン反応射出成形系
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマｃｖｄ薄膜製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998005803A1 (fr) * 1996-08-05 1998-02-12 Komatsu Ltd. Appareil de traitement de surface, procede de traitement de surface utilisant cet appareil, et buse de traitement de surface s'utilisant avec cet appareil pour ce procede

Also Published As

Publication number Publication date
JPH0527494Y2 (ko) 1993-07-13

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