JPH0211084B2 - - Google Patents
Info
- Publication number
- JPH0211084B2 JPH0211084B2 JP21275683A JP21275683A JPH0211084B2 JP H0211084 B2 JPH0211084 B2 JP H0211084B2 JP 21275683 A JP21275683 A JP 21275683A JP 21275683 A JP21275683 A JP 21275683A JP H0211084 B2 JPH0211084 B2 JP H0211084B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- objective lens
- optical
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 25
- 230000003287 optical effect Effects 0.000 claims description 23
- 230000035559 beat frequency Effects 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000005469 synchrotron radiation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2416—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of gears
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21275683A JPS60104206A (ja) | 1983-11-11 | 1983-11-11 | 光学測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21275683A JPS60104206A (ja) | 1983-11-11 | 1983-11-11 | 光学測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60104206A JPS60104206A (ja) | 1985-06-08 |
JPH0211084B2 true JPH0211084B2 (zh) | 1990-03-12 |
Family
ID=16627889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21275683A Granted JPS60104206A (ja) | 1983-11-11 | 1983-11-11 | 光学測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60104206A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0669190U (ja) * | 1993-03-08 | 1994-09-27 | 益弘 光山 | 展示具 |
JPH0680690U (ja) * | 1993-04-26 | 1994-11-15 | 益弘 光山 | 展示具 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63252207A (ja) * | 1987-04-08 | 1988-10-19 | Olympus Optical Co Ltd | ステ−ジ |
JP6413596B2 (ja) * | 2014-10-10 | 2018-10-31 | 横河電機株式会社 | 共振周波数測定システム、共振周波数測定方法 |
JP7036375B2 (ja) * | 2018-03-12 | 2022-03-15 | 日本植生株式会社 | ろ過方法及び該ろ過方法に用いるろ過布 |
-
1983
- 1983-11-11 JP JP21275683A patent/JPS60104206A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0669190U (ja) * | 1993-03-08 | 1994-09-27 | 益弘 光山 | 展示具 |
JPH0680690U (ja) * | 1993-04-26 | 1994-11-15 | 益弘 光山 | 展示具 |
Also Published As
Publication number | Publication date |
---|---|
JPS60104206A (ja) | 1985-06-08 |
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