JPH0211084B2 - - Google Patents

Info

Publication number
JPH0211084B2
JPH0211084B2 JP21275683A JP21275683A JPH0211084B2 JP H0211084 B2 JPH0211084 B2 JP H0211084B2 JP 21275683 A JP21275683 A JP 21275683A JP 21275683 A JP21275683 A JP 21275683A JP H0211084 B2 JPH0211084 B2 JP H0211084B2
Authority
JP
Japan
Prior art keywords
light
measured
objective lens
optical
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21275683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60104206A (ja
Inventor
Keiichi Yoshizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21275683A priority Critical patent/JPS60104206A/ja
Publication of JPS60104206A publication Critical patent/JPS60104206A/ja
Publication of JPH0211084B2 publication Critical patent/JPH0211084B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2416Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of gears

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP21275683A 1983-11-11 1983-11-11 光学測定装置 Granted JPS60104206A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21275683A JPS60104206A (ja) 1983-11-11 1983-11-11 光学測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21275683A JPS60104206A (ja) 1983-11-11 1983-11-11 光学測定装置

Publications (2)

Publication Number Publication Date
JPS60104206A JPS60104206A (ja) 1985-06-08
JPH0211084B2 true JPH0211084B2 (zh) 1990-03-12

Family

ID=16627889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21275683A Granted JPS60104206A (ja) 1983-11-11 1983-11-11 光学測定装置

Country Status (1)

Country Link
JP (1) JPS60104206A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0669190U (ja) * 1993-03-08 1994-09-27 益弘 光山 展示具
JPH0680690U (ja) * 1993-04-26 1994-11-15 益弘 光山 展示具

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63252207A (ja) * 1987-04-08 1988-10-19 Olympus Optical Co Ltd ステ−ジ
JP6413596B2 (ja) * 2014-10-10 2018-10-31 横河電機株式会社 共振周波数測定システム、共振周波数測定方法
JP7036375B2 (ja) * 2018-03-12 2022-03-15 日本植生株式会社 ろ過方法及び該ろ過方法に用いるろ過布

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0669190U (ja) * 1993-03-08 1994-09-27 益弘 光山 展示具
JPH0680690U (ja) * 1993-04-26 1994-11-15 益弘 光山 展示具

Also Published As

Publication number Publication date
JPS60104206A (ja) 1985-06-08

Similar Documents

Publication Publication Date Title
JP2913984B2 (ja) 傾斜角測定装置
US4897536A (en) Optical axis displacement sensor with cylindrical lens means
US4886362A (en) Appratus for measuring the profile of an aspherical surface
JPH0455243B2 (zh)
US4611916A (en) Optical measuring apparatus
JPH0256604B2 (zh)
TWI502170B (zh) 光學量測系統及以此系統量測線性位移、轉動角度、滾動角度之方法
JPH0211084B2 (zh)
JP2003329408A (ja) レーザー測長器
JP2966950B2 (ja) 試料変位測定装置
JPS59211810A (ja) 光ヘテロダイン干渉法による微小角度測定方法
JP3748479B2 (ja) 偏心測定装置、偏心測定方法、及び加工装置
JPH0255722B2 (zh)
JP2000018915A (ja) 光学部品の偏心測定方法および偏心測定装置
JPH0326765B2 (zh)
JPS63196807A (ja) 光学式変位計測方法
JPH0510602B2 (zh)
JPH05180643A (ja) 表面形状測定装置
JPS6217607A (ja) 光学式傾き検出装置
JPH05340726A (ja) 3次元形状測定装置の非接触式プローブ
JPH05240610A (ja) 非接触光学測定装置
Ophey A Scanning-Spot Interferometer For Measuring Steep Aspherical Surfaces
JPH07332971A (ja) 測距儀
JPS6332310A (ja) 面形状測定装置
JP2001249010A (ja) 板状のワークの表面形状と板厚の測定方法および測定装置