JPH02110389A - 半導体装置の試験方法 - Google Patents

半導体装置の試験方法

Info

Publication number
JPH02110389A
JPH02110389A JP1182146A JP18214689A JPH02110389A JP H02110389 A JPH02110389 A JP H02110389A JP 1182146 A JP1182146 A JP 1182146A JP 18214689 A JP18214689 A JP 18214689A JP H02110389 A JPH02110389 A JP H02110389A
Authority
JP
Japan
Prior art keywords
substrate
circuit
transistor
semiconductor
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1182146A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440864B2 (enrdf_load_stackoverflow
Inventor
Norihisa Tsuge
柘植　典久
Tomio Nakano
中野　富男
Masao Nakano
正夫 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1182146A priority Critical patent/JPH02110389A/ja
Publication of JPH02110389A publication Critical patent/JPH02110389A/ja
Publication of JPH0440864B2 publication Critical patent/JPH0440864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Dram (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1182146A 1989-07-14 1989-07-14 半導体装置の試験方法 Granted JPH02110389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1182146A JPH02110389A (ja) 1989-07-14 1989-07-14 半導体装置の試験方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1182146A JPH02110389A (ja) 1989-07-14 1989-07-14 半導体装置の試験方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56071045A Division JPS57186351A (en) 1981-05-12 1981-05-12 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH02110389A true JPH02110389A (ja) 1990-04-23
JPH0440864B2 JPH0440864B2 (enrdf_load_stackoverflow) 1992-07-06

Family

ID=16113165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1182146A Granted JPH02110389A (ja) 1989-07-14 1989-07-14 半導体装置の試験方法

Country Status (1)

Country Link
JP (1) JPH02110389A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0440864B2 (enrdf_load_stackoverflow) 1992-07-06

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