JPH0197288U - - Google Patents

Info

Publication number
JPH0197288U
JPH0197288U JP5816088U JP5816088U JPH0197288U JP H0197288 U JPH0197288 U JP H0197288U JP 5816088 U JP5816088 U JP 5816088U JP 5816088 U JP5816088 U JP 5816088U JP H0197288 U JPH0197288 U JP H0197288U
Authority
JP
Japan
Prior art keywords
guide
slope
coarse movement
mounting table
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5816088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436476Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5816088U priority Critical patent/JPH0436476Y2/ja
Publication of JPH0197288U publication Critical patent/JPH0197288U/ja
Application granted granted Critical
Publication of JPH0436476Y2 publication Critical patent/JPH0436476Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP5816088U 1987-08-28 1988-04-28 Expired JPH0436476Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5816088U JPH0436476Y2 (en:Method) 1987-08-28 1988-04-28

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13109387 1987-08-28
JP5816088U JPH0436476Y2 (en:Method) 1987-08-28 1988-04-28

Publications (2)

Publication Number Publication Date
JPH0197288U true JPH0197288U (en:Method) 1989-06-28
JPH0436476Y2 JPH0436476Y2 (en:Method) 1992-08-27

Family

ID=31718189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5816088U Expired JPH0436476Y2 (en:Method) 1987-08-28 1988-04-28

Country Status (1)

Country Link
JP (1) JPH0436476Y2 (en:Method)

Also Published As

Publication number Publication date
JPH0436476Y2 (en:Method) 1992-08-27

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