JPH019166Y2 - - Google Patents
Info
- Publication number
- JPH019166Y2 JPH019166Y2 JP15857984U JP15857984U JPH019166Y2 JP H019166 Y2 JPH019166 Y2 JP H019166Y2 JP 15857984 U JP15857984 U JP 15857984U JP 15857984 U JP15857984 U JP 15857984U JP H019166 Y2 JPH019166 Y2 JP H019166Y2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- carrier
- wafer
- center
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 47
- 230000000694 effects Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15857984U JPH019166Y2 (enEXAMPLES) | 1984-10-19 | 1984-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15857984U JPH019166Y2 (enEXAMPLES) | 1984-10-19 | 1984-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6172852U JPS6172852U (enEXAMPLES) | 1986-05-17 |
| JPH019166Y2 true JPH019166Y2 (enEXAMPLES) | 1989-03-13 |
Family
ID=30716557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15857984U Expired JPH019166Y2 (enEXAMPLES) | 1984-10-19 | 1984-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH019166Y2 (enEXAMPLES) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5054988A (en) * | 1988-07-13 | 1991-10-08 | Tel Sagami Limited | Apparatus for transferring semiconductor wafers |
-
1984
- 1984-10-19 JP JP15857984U patent/JPH019166Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6172852U (enEXAMPLES) | 1986-05-17 |
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